DE60018525D1 - Wärmeabziehbare druckempfindliche Klebefolie - Google Patents

Wärmeabziehbare druckempfindliche Klebefolie

Info

Publication number
DE60018525D1
DE60018525D1 DE60018525T DE60018525T DE60018525D1 DE 60018525 D1 DE60018525 D1 DE 60018525D1 DE 60018525 T DE60018525 T DE 60018525T DE 60018525 T DE60018525 T DE 60018525T DE 60018525 D1 DE60018525 D1 DE 60018525D1
Authority
DE
Germany
Prior art keywords
heat
sensitive adhesive
adhesive sheet
peelable pressure
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60018525T
Other languages
English (en)
Other versions
DE60018525T2 (de
Inventor
Akihisa Murata
Toshiyuki Oshima
Yuko Arimitsu
Kazuyuki Kiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Application granted granted Critical
Publication of DE60018525D1 publication Critical patent/DE60018525D1/de
Publication of DE60018525T2 publication Critical patent/DE60018525T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/29—Laminated material
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
    • C09J7/385—Acrylic polymers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/20—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself
    • C09J2301/208—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive itself the adhesive layer being constituted by at least two or more adjacent or superposed adhesive layers, e.g. multilayer adhesive
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
    • C09J2301/412—Additional features of adhesives in the form of films or foils characterized by the presence of essential components presence of microspheres
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00—Presence of (meth)acrylic polymer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1082—Partial cutting bonded sandwich [e.g., grooving or incising]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1142—Changing dimension during delaminating [e.g., crushing, expanding, warping, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2839—Web or sheet containing structurally defined element or component and having an adhesive outermost layer with release or antistick coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2848—Three or more layers
DE60018525T 1999-11-08 2000-11-07 Wärmeabziehbare druckempfindliche Klebefolie Expired - Lifetime DE60018525T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31682099 1999-11-08
JP31682099A JP3594853B2 (ja) 1999-11-08 1999-11-08 加熱剥離型粘着シート

Publications (2)

Publication Number Publication Date
DE60018525D1 true DE60018525D1 (de) 2005-04-14
DE60018525T2 DE60018525T2 (de) 2005-07-28

Family

ID=18081289

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60018525T Expired - Lifetime DE60018525T2 (de) 1999-11-08 2000-11-07 Wärmeabziehbare druckempfindliche Klebefolie

Country Status (10)

Country Link
US (1) US7163597B2 (de)
EP (1) EP1097977B1 (de)
JP (1) JP3594853B2 (de)
KR (2) KR100537255B1 (de)
CN (1) CN1227313C (de)
AT (1) ATE290578T1 (de)
DE (1) DE60018525T2 (de)
MY (1) MY123708A (de)
SG (1) SG93903A1 (de)
TW (1) TWI222991B (de)

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GB9912694D0 (en) * 1999-06-02 1999-08-04 Bain Peter S Adhesive
JP3641217B2 (ja) * 2000-03-31 2005-04-20 Ｔｄｋ株式会社 チップ状電子部品における端部電極形成方法及び装置
JP4651805B2 (ja) * 2000-11-08 2011-03-16 日東電工株式会社 加熱剥離型粘着シート
JP3668439B2 (ja) * 2001-06-14 2005-07-06 ソニーケミカル株式会社 接着フィルム
KR100669636B1 (ko) 2002-07-24 2007-01-16 티디케이가부시기가이샤 기능성층을 갖는 전사용 기능성 필름, 그 기능성층이부여된 물체 및 그 제조방법
JP4005001B2 (ja) * 2002-07-24 2007-11-07 Ｔｄｋ株式会社 機能性層を有する転写用機能性フィルム、その機能性層が付与された物体及びその製造方法
JP2004083633A (ja) * 2002-08-23 2004-03-18 Nihon Micro Coating Co Ltd 研磨パッド及び研磨テープ用接着テープ
ES2438529T3 (es) * 2002-12-02 2014-01-17 Avery Dennison Corporation Procedimiento para etiquetar tejidos y etiqueta de transferencia por calor muy adecuada para su utilización en dicho procedimiento
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JP2005194371A (ja) * 2004-01-07 2005-07-21 Denki Kagaku Kogyo Kk 自己粘着性シート
KR20090077860A (ko) * 2004-05-18 2009-07-15 히다치 가세고교 가부시끼가이샤 점접착 시트
JP2006030294A (ja) * 2004-07-12 2006-02-02 Nitto Denko Corp フレキシブル光導波路の製法
JP2006160954A (ja) * 2004-12-09 2006-06-22 Sekisui Chem Co Ltd 粘着シート
JP4671815B2 (ja) * 2005-09-05 2011-04-20 日東電工株式会社 加熱剥離型粘着シート用セパレータ及びセパレータ付き加熱剥離型粘着シート
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JP5036270B2 (ja) * 2005-12-02 2012-09-26 日東電工株式会社 加熱剥離型粘着シートおよびこの加熱剥離型粘着シートを用いた半導体チップの製造方法
JP5063016B2 (ja) * 2006-03-23 2012-10-31 リンテック株式会社 粘着シート及び剥離シート
JP4891659B2 (ja) * 2006-06-02 2012-03-07 日東電工株式会社 ダイシング用粘着シート
JP4849993B2 (ja) * 2006-08-14 2012-01-11 日東電工株式会社 粘着シート、その製造方法および積層セラミックシートの切断方法
JP5283838B2 (ja) * 2006-11-04 2013-09-04 日東電工株式会社 熱剥離性粘着シート及び被着体回収方法
JP2008144116A (ja) * 2006-12-13 2008-06-26 Nitto Denko Corp 両面粘着シートおよび液晶表示装置
JP5068578B2 (ja) * 2007-05-02 2012-11-07 日東電工株式会社 両面粘着シートおよび液晶表示装置
JP5190222B2 (ja) * 2007-06-01 2013-04-24 日東電工株式会社 両面発泡粘着シートおよび液晶表示装置
JP5047724B2 (ja) * 2007-07-31 2012-10-10 日東電工株式会社 熱剥離型粘着シートを使用する被着体の加工方法。
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WO2013114956A1 (ja) * 2012-01-30 2013-08-08 日東電工株式会社 伸長性加熱剥離型粘着シート
JP2013177549A (ja) * 2012-01-30 2013-09-09 Nitto Denko Corp 加熱剥離型摺動用保護テープ
JP5921927B2 (ja) * 2012-03-27 2016-05-24 日東電工株式会社 加熱剥離型粘着シート
JP6000595B2 (ja) * 2012-03-27 2016-09-28 日東電工株式会社 電子部品切断用加熱剥離型粘着シート及び電子部品加工方法
CN102703018B (zh) * 2012-05-30 2014-06-25 朱立超 一种粘合剂及其制备方法
JP2014040595A (ja) * 2013-09-26 2014-03-06 Nitto Denko Corp 熱剥離性感圧接着テープ又はシート
JP6407536B2 (ja) * 2014-02-28 2018-10-17 ソマール株式会社 粘着シート及び被着体積層物の製造方法
JP6407535B2 (ja) * 2014-02-28 2018-10-17 ソマール株式会社 粘着シート及び被着体積層物の製造方法
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JP6792700B2 (ja) * 2017-08-09 2020-11-25 リンテック株式会社 加工検査対象物の加熱剥離方法
JP7405618B2 (ja) 2017-12-07 2023-12-26 リンテック株式会社 粘着性積層体、粘着性積層体の使用方法、及び半導体装置の製造方法
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JP7240376B2 (ja) 2018-03-30 2023-03-15 リンテック株式会社 硬化封止体の反り防止用積層体、及び、硬化封止体の製造方法
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CN108900960A (zh) * 2018-06-15 2018-11-27 歌尔股份有限公司 丙烯酸类压敏胶及其制备方法、复合膜结构、振膜、及发声装置
CN113613893B (zh) * 2019-03-15 2023-11-21 琳得科株式会社 粘合片及半导体装置的制造方法
CN113631379A (zh) 2019-03-28 2021-11-09 琳得科株式会社 粘合片、粘合片的制造方法及半导体装置的制造方法
WO2020196756A1 (ja) 2019-03-28 2020-10-01 リンテック株式会社 粘着シートの製造方法、半導体装置の製造方法及び粘着シート
WO2020196757A1 (ja) 2019-03-28 2020-10-01 リンテック株式会社 粘着シート、粘着シートの製造方法及び半導体装置の製造方法
CN110446143B (zh) * 2019-07-05 2021-03-09 歌尔股份有限公司 发声装置的振膜以及发声装置
EP4011614A4 (de) 2019-08-06 2023-08-30 Nitto Denko Corporation Klebeband
CN114174453A (zh) 2019-08-06 2022-03-11 日东电工株式会社 粘合带
KR20220117873A (ko) 2019-12-20 2022-08-24 닛토덴코 가부시키가이샤 점착 시트
JPWO2021124854A1 (de) 2019-12-20 2021-06-24
CN114846098A (zh) 2019-12-20 2022-08-02 日东电工株式会社 粘合片
KR20220121810A (ko) 2019-12-27 2022-09-01 닛토덴코 가부시키가이샤 점착 시트
KR20220120572A (ko) 2019-12-27 2022-08-30 닛토덴코 가부시키가이샤 점착 시트
WO2021153361A1 (ja) 2020-01-27 2021-08-05 リンテック株式会社 保護膜付き半導体チップの剥離方法
CN114981928A (zh) 2020-01-27 2022-08-30 琳得科株式会社 被粘附物的剥离方法
CN111748313B (zh) * 2020-07-29 2022-04-01 上海仁速新材料有限公司 一种紫外光固化胶黏剂及其制备方法和应用
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JP2022155610A (ja) 2021-03-31 2022-10-14 日東電工株式会社 粘着シート

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JP3308672B2 (ja) 1993-02-26 2002-07-29 日東電工株式会社 接着シート
JPH10168401A (ja) * 1996-12-13 1998-06-23 Nitto Denko Corp 印刷用シート
JP3810911B2 (ja) * 1997-12-01 2006-08-16 日東電工株式会社 加熱剥離型粘着シート
JP4010643B2 (ja) 1998-04-23 2007-11-21 日東電工株式会社 加熱剥離型粘着シート
US7214424B2 (en) 1999-03-01 2007-05-08 Nitto Denko Corporation Heat-peelable pressure-sensitive adhesive sheet

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CN1295103A (zh) 2001-05-16
DE60018525T2 (de) 2005-07-28
JP2001131507A (ja) 2001-05-15
JP3594853B2 (ja) 2004-12-02
EP1097977B1 (de) 2005-03-09
EP1097977A3 (de) 2001-08-08
MY123708A (en) 2006-05-31
KR20010051480A (ko) 2001-06-25
US20030203193A1 (en) 2003-10-30
ATE290578T1 (de) 2005-03-15
KR100537255B1 (ko) 2005-12-19
TWI222991B (en) 2004-11-01
CN1227313C (zh) 2005-11-16
KR100602298B1 (ko) 2006-07-19
EP1097977A2 (de) 2001-05-09
US7163597B2 (en) 2007-01-16
SG93903A1 (en) 2003-01-21
KR20050097908A (ko) 2005-10-10

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