DE60024905D1 - Druckkopf mit einer Passivierungsschicht mit variabler Dicke - Google Patents

Druckkopf mit einer Passivierungsschicht mit variabler Dicke

Info

Publication number
DE60024905D1
DE60024905D1 DE60024905T DE60024905T DE60024905D1 DE 60024905 D1 DE60024905 D1 DE 60024905D1 DE 60024905 T DE60024905 T DE 60024905T DE 60024905 T DE60024905 T DE 60024905T DE 60024905 D1 DE60024905 D1 DE 60024905D1
Authority
DE
Germany
Prior art keywords
printhead
passivation layer
variable thickness
variable
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60024905T
Other languages
English (en)
Other versions
DE60024905T2 (de
Inventor
Marzio Leban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE60024905D1 publication Critical patent/DE60024905D1/de
Publication of DE60024905T2 publication Critical patent/DE60024905T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
DE60024905T 1999-03-12 2000-02-29 Druckkopf mit einer Passivierungsschicht mit variabler Dicke Expired - Lifetime DE60024905T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/267,216 US6331049B1 (en) 1999-03-12 1999-03-12 Printhead having varied thickness passivation layer and method of making same
US267216 1999-03-12

Publications (2)

Publication Number Publication Date
DE60024905D1 true DE60024905D1 (de) 2006-01-26
DE60024905T2 DE60024905T2 (de) 2006-08-10

Family

ID=23017818

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60024905T Expired - Lifetime DE60024905T2 (de) 1999-03-12 2000-02-29 Druckkopf mit einer Passivierungsschicht mit variabler Dicke

Country Status (4)

Country Link
US (1) US6331049B1 (de)
EP (1) EP1034932B1 (de)
JP (1) JP3326152B2 (de)
DE (1) DE60024905T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1219426B1 (de) * 2000-12-29 2006-03-01 Eastman Kodak Company Cmos/mems integrierter Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
US6676246B1 (en) 2002-11-20 2004-01-13 Lexmark International, Inc. Heater construction for minimum pulse time
US6786575B2 (en) * 2002-12-17 2004-09-07 Lexmark International, Inc. Ink jet heater chip and method therefor
US7195343B2 (en) * 2004-08-27 2007-03-27 Lexmark International, Inc. Low ejection energy micro-fluid ejection heads
US7178904B2 (en) * 2004-11-11 2007-02-20 Lexmark International, Inc. Ultra-low energy micro-fluid ejection device
US7837886B2 (en) * 2007-07-26 2010-11-23 Hewlett-Packard Development Company, L.P. Heating element
US7862156B2 (en) * 2007-07-26 2011-01-04 Hewlett-Packard Development Company, L.P. Heating element
US8350661B2 (en) * 2009-05-26 2013-01-08 Ovonyx, Inc. Breakdown layer via lateral diffusion
KR101684727B1 (ko) * 2010-07-23 2016-12-08 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 열 저항기 유체 토출 어셈블리
WO2014116207A1 (en) 2013-01-23 2014-07-31 Hewlett-Packard Development Company, L.P. Printhead die with multiple termination rings
CN109414929B (zh) * 2016-09-19 2020-04-14 惠普发展公司，有限责任合伙企业 具有带间隙的金属层的终止环
WO2019147217A1 (en) 2018-01-23 2019-08-01 Hewlett-Packard Development Company, L.P. Fluidic dies with beveled edges underneath electrical leads

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Publication number Priority date Publication date Assignee Title
US4354309A (en) 1978-12-29 1982-10-19 International Business Machines Corp. Method of manufacturing a metal-insulator-semiconductor device utilizing a graded deposition of polycrystalline silicon
JPS5931943B2 (ja) 1979-04-02 1984-08-06 キヤノン株式会社 液体噴射記録法
US4616408A (en) 1982-11-24 1986-10-14 Hewlett-Packard Company Inversely processed resistance heater
US4513298A (en) 1983-05-25 1985-04-23 Hewlett-Packard Company Thermal ink jet printhead
US4535343A (en) 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
JPS60116451A (ja) * 1983-11-30 1985-06-22 Canon Inc 液体噴射記録ヘツド
US4792818A (en) * 1987-06-12 1988-12-20 International Business Machines Corporation Thermal drop-on-demand ink jet print head
US4931813A (en) 1987-09-21 1990-06-05 Hewlett-Packard Company Ink jet head incorporating a thick unpassivated TaAl resistor
US4872028A (en) 1988-03-21 1989-10-03 Hewlett-Packard Company Thermal-ink-jet print system with drop detector for drive pulse optimization
US4990939A (en) * 1988-09-01 1991-02-05 Ricoh Company, Ltd. Bubble jet printer head with improved operational speed
US4982199A (en) 1988-12-16 1991-01-01 Hewlett-Packard Company Method and apparatus for gray scale printing with a thermal ink jet pen
DE69010381T2 (de) * 1989-04-18 1994-11-17 Canon Kk Trägermaterial für einen Tintenstrahlkopf, ein aus diesem Material geformter Tintenstrahlkopf und Tintenstrahlgerät, das mit diesem Kopf ausgerüstet ist.
US4951063A (en) 1989-05-22 1990-08-21 Xerox Corporation Heating elements for thermal ink jet devices
US5227812A (en) 1990-02-26 1993-07-13 Canon Kabushiki Kaisha Liquid jet recording head with bump connector wiring
US5187500A (en) 1990-09-05 1993-02-16 Hewlett-Packard Company Control of energy to thermal inkjet heating elements
US5083137A (en) 1991-02-08 1992-01-21 Hewlett-Packard Company Energy control circuit for a thermal ink-jet printhead
US5168284A (en) 1991-05-01 1992-12-01 Hewlett-Packard Company Printhead temperature controller that uses nonprinting pulses
US5194877A (en) 1991-05-24 1993-03-16 Hewlett-Packard Company Process for manufacturing thermal ink jet printheads having metal substrates and printheads manufactured thereby
US5257042A (en) 1991-07-09 1993-10-26 Xerox Corporation Thermal ink jet transducer protection
WO1993022140A1 (en) 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
JP3408292B2 (ja) 1992-09-09 2003-05-19 ヒューレット・パッカード・カンパニー プリントヘッド
US5357081A (en) 1993-01-21 1994-10-18 Hewlett-Packard Company Power supply for individual control of power delivered to integrated drive thermal inkjet printhead heater resistors
US6070969A (en) 1994-03-23 2000-06-06 Hewlett-Packard Company Thermal inkjet printhead having a preferred nucleation site
US5660739A (en) * 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
JPH08197732A (ja) * 1995-01-24 1996-08-06 Canon Inc 記録ヘッド及び該記録ヘッドを用いた記録装置
EP0729834B1 (de) 1995-03-03 2002-06-12 Canon Kabushiki Kaisha Tintenstrahlkopf, Substrat für einen Tintenstrahlkopf und Tintenstrahlgerät
US5636441A (en) 1995-03-16 1997-06-10 Hewlett-Packard Company Method of forming a heating element for a printhead
US6382775B1 (en) 1995-06-28 2002-05-07 Canon Kabushiki Kaisha Liquid ejecting printing head, production method thereof and production method for base body employed for liquid ejecting printing head
JP3513270B2 (ja) * 1995-06-30 2004-03-31 キヤノン株式会社 インクジェット記録ヘッド及びインクジェット記録装置
US5883650A (en) 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
EP0794057B1 (de) 1996-03-04 2002-07-03 Hewlett-Packard Company, A Delaware Corporation Tintenstrahlschreiber versehen mit einem Heizelement mit profilierter Oberfläche
EP0816089B1 (de) 1996-06-26 2003-09-17 Canon Kabushiki Kaisha Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
US6527813B1 (en) 1996-08-22 2003-03-04 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
DE69708067T2 (de) 1997-06-27 2002-07-11 St Microelectronics Srl Integrierter Tintenstrahldruckkopf und sein Herstellungsverfahren
US6007188A (en) 1997-07-31 1999-12-28 Hewlett-Packard Company Particle tolerant printhead

Also Published As

Publication number Publication date
DE60024905T2 (de) 2006-08-10
EP1034932A3 (de) 2001-01-03
EP1034932A2 (de) 2000-09-13
US6331049B1 (en) 2001-12-18
EP1034932B1 (de) 2005-12-21
JP3326152B2 (ja) 2002-09-17
JP2000272130A (ja) 2000-10-03

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE

8364 No opposition during term of opposition