DE60029438D1 - Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopf - Google Patents

Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopf

Info

Publication number
DE60029438D1
DE60029438D1 DE60029438T DE60029438T DE60029438D1 DE 60029438 D1 DE60029438 D1 DE 60029438D1 DE 60029438 T DE60029438 T DE 60029438T DE 60029438 T DE60029438 T DE 60029438T DE 60029438 D1 DE60029438 D1 DE 60029438D1
Authority
DE
Germany
Prior art keywords
substrate
thin film
film magnetic
magnetic heads
ceramic substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60029438T
Other languages
English (en)
Other versions
DE60029438T2 (de
Inventor
Junghi Ahn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Greenleaf Technology Corp
Original Assignee
Greenleaf Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Greenleaf Technology Corp filed Critical Greenleaf Technology Corp
Application granted granted Critical
Publication of DE60029438D1 publication Critical patent/DE60029438D1/de
Publication of DE60029438T2 publication Critical patent/DE60029438T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/0027Ion-implantation, ion-irradiation or ion-injection
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/40Protective measures on heads, e.g. against excessive temperature 
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/90Electrical properties
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10Structure or manufacture of housings or shields for heads
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10Structure or manufacture of housings or shields for heads
    • G11B5/102Manufacture of housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49021Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032Fabricating head structure or component thereof
DE60029438T 1999-05-11 2000-05-01 Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopf Expired - Lifetime DE60029438T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US309829 1989-02-10
US09/309,829 US6252741B1 (en) 1999-05-11 1999-05-11 Thin film magnetic recording head with treated ceramic substrate
PCT/US2000/011945 WO2000068167A1 (en) 1999-05-11 2000-05-01 Ceramic substrate treatment method and improved thin film magnetic recording head

Publications (2)

Publication Number Publication Date
DE60029438D1 true DE60029438D1 (de) 2006-08-31
DE60029438T2 DE60029438T2 (de) 2006-11-23

Family

ID=23199842

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60029438T Expired - Lifetime DE60029438T2 (de) 1999-05-11 2000-05-01 Verfahren zur behandlung keramischer substrate und dünnfilm-magnetkopf

Country Status (8)

Country Link
US (1) US6252741B1 (de)
EP (1) EP1181261B1 (de)
JP (1) JP4947838B2 (de)
AT (1) ATE333443T1 (de)
AU (1) AU4815300A (de)
DE (1) DE60029438T2 (de)
DK (1) DK1181261T3 (de)
WO (1) WO2000068167A1 (de)

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JP2001011622A (ja) * 1999-06-23 2001-01-16 Sony Corp 絶縁物の表面処理方法、プリンタヘッド及び記録媒体用基材
CN1158403C (zh) * 1999-12-23 2004-07-21 西南交通大学 一种人工器官表面改性方法
US6747841B1 (en) 2000-09-06 2004-06-08 Seagate Technology Llc Optimization of temperature dependent variations in shield and pole recession/protrusion through use of a composite overcoat layer
US7123448B1 (en) * 2000-10-13 2006-10-17 Seagate Technology, Llc Extended alumina basecoat advanced air bearing slider
JP2002237008A (ja) * 2001-02-08 2002-08-23 Hitachi Ltd 薄膜磁気ヘッド
FR2821512B1 (fr) * 2001-02-28 2003-05-30 Thomson Multimedia Sa Dispositifs de commande de fichiers audio et/ou video et dispositifs, procedes et produits d'emission correspondants
US6813118B2 (en) 2002-01-04 2004-11-02 Seagate Technology Llc Transducing head having improved studs and bond pads to reduce thermal deformation
US6732421B2 (en) 2002-03-22 2004-05-11 Seagate Technology Llc Method for producing magnetoresistive heads ion bombardment etch to stripe height
US6876526B2 (en) * 2002-06-12 2005-04-05 Seagate Technology Llc Bilayer shared pole extension for reduced thermal pole tip protrusion
US7082016B2 (en) 2002-07-22 2006-07-25 Seagate Technology Llc Multilayer magnetic shields with compensated thermal protrusion
US20040045671A1 (en) * 2002-09-10 2004-03-11 Ed Rejda Selective etching device
US6836389B2 (en) * 2002-09-27 2004-12-28 Seagate Technology Llc Slider basecoat for thermal PTR reduction
US7123447B2 (en) 2003-06-16 2006-10-17 Seagate Technology Llc Patterned multi-material basecoat to reduce thermal protrusion
US7741003B2 (en) * 2004-03-30 2010-06-22 Hitachi Global Storage Technologies Netherlands B.V. Photoresist transfer pads
US7403356B1 (en) * 2004-04-29 2008-07-22 Seagate Technology Llc Disk drive including slider mover having low thermal coefficient of resistivity
US7411264B2 (en) * 2004-11-18 2008-08-12 Seagate Technology Llc Etch-stop layers for patterning block structures for reducing thermal protrusion
US7684148B2 (en) * 2006-06-16 2010-03-23 International Business Machines Corporation Magnetic head with a conductive underlayer above substrate
JP2008065903A (ja) * 2006-09-07 2008-03-21 Hitachi Global Storage Technologies Netherlands Bv ヘッドスライダ
US8004795B2 (en) * 2007-12-26 2011-08-23 Hitachi Global Storage Technologies Netherlands B.V. Magnetic head design having reduced susceptibility to electrostatic discharge from media surfaces
US20090199768A1 (en) * 2008-02-12 2009-08-13 Steven Verhaverbeke Magnetic domain patterning using plasma ion implantation
US20090201722A1 (en) * 2008-02-12 2009-08-13 Kamesh Giridhar Method including magnetic domain patterning using plasma ion implantation for mram fabrication
US8551578B2 (en) * 2008-02-12 2013-10-08 Applied Materials, Inc. Patterning of magnetic thin film using energized ions and thermal excitation
US8535766B2 (en) * 2008-10-22 2013-09-17 Applied Materials, Inc. Patterning of magnetic thin film using energized ions
US10699741B1 (en) 2019-01-08 2020-06-30 International Business Machines Corporation Multi-channel magnetic recording head having compliantly encapsulated transducers
WO2021044924A1 (ja) * 2019-09-03 2021-03-11 興亜硝子株式会社 無機組成物及び無機組成物の製造方法

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US5039836A (en) 1957-06-27 1991-08-13 Lemelson Jerome H Radiation manufacturing apparatus and method
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US5308241A (en) 1957-06-27 1994-05-03 Lemelson Jerome H Surface shaping and finshing apparatus and method
US5231259A (en) 1957-06-27 1993-07-27 Lemelson Jerome H Radiation manufacturing apparatus
US5170032A (en) 1957-06-27 1992-12-08 Lemelson Jerome H Radiation manufacturing apparatus and amendment
US5064989B1 (en) 1957-06-27 1996-10-29 Jerome H Lemelson Surface shaping and finishing apparatus and method
FR2479560A1 (fr) 1980-03-31 1981-10-02 Sciaky Intertechnique Machine pour le travail de metaux par faisceau d'electrons
US4575923A (en) 1983-04-06 1986-03-18 North American Philips Corporation Method of manufacturing a high resistance layer having a low temperature coefficient of resistance and semiconductor device having such high resistance layer
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JPH07129943A (ja) * 1993-11-05 1995-05-19 Hitachi Ltd 磁気ヘッドスライダ及びその製造方法
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Also Published As

Publication number Publication date
EP1181261B1 (de) 2006-07-19
DK1181261T3 (da) 2006-11-13
AU4815300A (en) 2000-11-21
JP4947838B2 (ja) 2012-06-06
ATE333443T1 (de) 2006-08-15
US6252741B1 (en) 2001-06-26
DE60029438T2 (de) 2006-11-23
WO2000068167A1 (en) 2000-11-16
EP1181261A1 (de) 2002-02-27
JP2002544108A (ja) 2002-12-24

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