DE60035618D1 - Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger - Google Patents

Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger

Info

Publication number
DE60035618D1
DE60035618D1 DE60035618T DE60035618T DE60035618D1 DE 60035618 D1 DE60035618 D1 DE 60035618D1 DE 60035618 T DE60035618 T DE 60035618T DE 60035618 T DE60035618 T DE 60035618T DE 60035618 D1 DE60035618 D1 DE 60035618D1
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
pressure head
jet pressure
external actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60035618T
Other languages
English (en)
Other versions
DE60035618T2 (de
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Application granted granted Critical
Publication of DE60035618D1 publication Critical patent/DE60035618D1/de
Publication of DE60035618T2 publication Critical patent/DE60035618T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1648Production of print heads with thermal bend detached actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435Moving nozzle made of thermal bend detached actuator
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14443Nozzle guard
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet
DE60035618T 2000-05-24 2000-05-24 Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger Expired - Lifetime DE60035618T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2000/000579 WO2001089840A1 (en) 2000-05-24 2000-05-24 Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator

Publications (2)

Publication Number Publication Date
DE60035618D1 true DE60035618D1 (de) 2007-08-30
DE60035618T2 DE60035618T2 (de) 2008-07-03

Family

ID=3700807

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60035618T Expired - Lifetime DE60035618T2 (de) 2000-05-24 2000-05-24 Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger

Country Status (10)

Country Link
US (5) US7169316B1 (de)
EP (1) EP1301345B1 (de)
JP (1) JP4380962B2 (de)
CN (2) CN1198726C (de)
AT (1) ATE367266T1 (de)
AU (2) AU2000247314C1 (de)
DE (1) DE60035618T2 (de)
IL (1) IL166921A (de)
WO (1) WO2001089840A1 (de)
ZA (1) ZA200209795B (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPP398798A0 (en) 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US6513908B2 (en) 1997-07-15 2003-02-04 Silverbrook Research Pty Ltd Pusher actuation in a printhead chip for an inkjet printhead
US6792754B2 (en) 1999-02-15 2004-09-21 Silverbrook Research Pty Ltd Integrated circuit device for fluid ejection
US6526658B1 (en) 2000-05-23 2003-03-04 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
CN1198726C (zh) * 2000-05-24 2005-04-27 西尔弗布鲁克研究有限公司 具有外装控制器的移动喷嘴的喷墨打印头的制造方法
US7674671B2 (en) 2004-12-13 2010-03-09 Optomec Design Company Aerodynamic jetting of aerosolized fluids for fabrication of passive structures
US7938341B2 (en) 2004-12-13 2011-05-10 Optomec Design Company Miniature aerosol jet and aerosol jet array
US7605009B2 (en) * 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
TWI482662B (zh) 2007-08-30 2015-05-01 Optomec Inc 機械上一體式及緊密式耦合之列印頭以及噴霧源
EP2738531B1 (de) * 2012-12-03 2015-09-16 AViTA Corporation Multimodale Temperaturmessvorrichtung
US20170348903A1 (en) * 2015-02-10 2017-12-07 Optomec, Inc. Fabrication of Three-Dimensional Materials Gradient Structures by In-Flight Curing of Aerosols
US10994473B2 (en) 2015-02-10 2021-05-04 Optomec, Inc. Fabrication of three dimensional structures by in-flight curing of aerosols
CN106903996B (zh) * 2017-03-09 2020-05-29 京东方科技集团股份有限公司 打印设备
EP3723909B1 (de) 2017-11-13 2023-10-25 Optomec, Inc. Verschalung von aerosolströmen

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US4718340A (en) 1982-08-09 1988-01-12 Milliken Research Corporation Printing method
DE3445720A1 (de) 1984-12-14 1986-06-19 Siemens AG, 1000 Berlin und 8000 München Anordnung zum ausstoss von einzeltroepfchen aus austrittsoeffnungen eines tintenschreibkopfes
JPS61215059A (ja) 1985-03-22 1986-09-24 Toshiba Corp インクジエツト記録装置
DE3688797T2 (de) 1985-08-13 1993-11-04 Matsushita Electric Ind Co Ltd Tintenstrahldrucker.
EP0306341B1 (de) 1987-09-03 1993-01-07 Matsushita Electric Industrial Co., Ltd. Tintenstrahlaufzeichnungsgerät
EP0398031A1 (de) * 1989-04-19 1990-11-22 Seiko Epson Corporation Tintenstrahlkopf
US5255016A (en) * 1989-09-05 1993-10-19 Seiko Epson Corporation Ink jet printer recording head
US5051761A (en) 1990-05-09 1991-09-24 Xerox Corporation Ink jet printer having a paper handling and maintenance station assembly
US5136310A (en) 1990-09-28 1992-08-04 Xerox Corporation Thermal ink jet nozzle treatment
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
US5374792A (en) 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system
JPH0867005A (ja) * 1994-08-31 1996-03-12 Fujitsu Ltd インクジェットヘッド
US5665249A (en) 1994-10-17 1997-09-09 Xerox Corporation Micro-electromechanical die module with planarized thick film layer
US5570959A (en) 1994-10-28 1996-11-05 Fujitsu Limited Method and system for printing gap adjustment
EP0974466B1 (de) 1995-04-19 2003-03-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
US6234607B1 (en) * 1995-04-20 2001-05-22 Seiko Epson Corporation Ink jet head and control method for reduced residual vibration
US5828394A (en) 1995-09-20 1998-10-27 The Board Of Trustees Of The Leland Stanford Junior University Fluid drop ejector and method
US5919548A (en) 1996-10-11 1999-07-06 Sandia Corporation Chemical-mechanical polishing of recessed microelectromechanical devices
JP2000506800A (ja) 1996-10-30 2000-06-06 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ インクジェット式印刷ヘッドおよびインクジェットプリンタ
US6228668B1 (en) 1997-07-15 2001-05-08 Silverbrook Research Pty Ltd Method of manufacture of a thermally actuated ink jet printer having a series of thermal actuator units
US6557977B1 (en) 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
US6254793B1 (en) 1997-07-15 2001-07-03 Silverbrook Research Pty Ltd Method of manufacture of high Young's modulus thermoelastic inkjet printer
WO1999003681A1 (en) * 1997-07-15 1999-01-28 Silverbrook Research Pty. Limited A thermally actuated ink jet
US6180427B1 (en) 1997-07-15 2001-01-30 Silverbrook Research Pty. Ltd. Method of manufacture of a thermally actuated ink jet including a tapered heater element
EP1508444B1 (de) 1997-07-15 2007-11-21 Silverbrook Research Pty. Limited Tintenstrahldrucker mit elektrostatisch betätigten Platten
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
AUPO794697A0 (en) * 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A device (MEMS10)
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US6428133B1 (en) 2000-05-23 2002-08-06 Silverbrook Research Pty Ltd. Ink jet printhead having a moving nozzle with an externally arranged actuator
US6652078B2 (en) 2000-05-23 2003-11-25 Silverbrook Research Pty Ltd Ink supply arrangement for a printer
US6526658B1 (en) 2000-05-23 2003-03-04 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
CN1198726C (zh) * 2000-05-24 2005-04-27 西尔弗布鲁克研究有限公司 具有外装控制器的移动喷嘴的喷墨打印头的制造方法
US7448734B2 (en) 2004-01-21 2008-11-11 Silverbrook Research Pty Ltd Inkjet printer cartridge with pagewidth printhead

Also Published As

Publication number Publication date
ZA200209795B (en) 2003-07-30
CN1452554A (zh) 2003-10-29
US20120069096A1 (en) 2012-03-22
US7169316B1 (en) 2007-01-30
JP2003534168A (ja) 2003-11-18
US20110090285A1 (en) 2011-04-21
CN1198726C (zh) 2005-04-27
EP1301345A4 (de) 2004-11-17
CN1651244A (zh) 2005-08-10
US20070080980A1 (en) 2007-04-12
DE60035618T2 (de) 2008-07-03
US20090237449A1 (en) 2009-09-24
EP1301345A1 (de) 2003-04-16
AU2000247314C1 (en) 2005-10-06
US7547095B2 (en) 2009-06-16
AU2000247314B2 (en) 2004-10-21
IL166921A (en) 2010-05-31
US8070260B2 (en) 2011-12-06
WO2001089840A1 (en) 2001-11-29
JP4380962B2 (ja) 2009-12-09
ATE367266T1 (de) 2007-08-15
US7887161B2 (en) 2011-02-15
CN100398321C (zh) 2008-07-02
AU4731400A (en) 2001-12-03
US8382251B2 (en) 2013-02-26
EP1301345B1 (de) 2007-07-18

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Legal Events

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