DE60108217D1 - Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems) - Google Patents

Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems)

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Publication number
DE60108217D1
DE60108217D1 DE60108217T DE60108217T DE60108217D1 DE 60108217 D1 DE60108217 D1 DE 60108217D1 DE 60108217 T DE60108217 T DE 60108217T DE 60108217 T DE60108217 T DE 60108217T DE 60108217 D1 DE60108217 D1 DE 60108217D1
Authority
DE
Germany
Prior art keywords
mems
production
electrical connection
growth method
microelectromechanical systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60108217T
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English (en)
Other versions
DE60108217T2 (de
Inventor
G Romo
E Rud
A Lutz
C Sittler
C Toy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE60108217D1 publication Critical patent/DE60108217D1/de
Publication of DE60108217T2 publication Critical patent/DE60108217T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0006—Interconnects
DE60108217T 2000-01-06 2001-01-05 Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems) Expired - Lifetime DE60108217T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17479800P 2000-01-06 2000-01-06
US174798P 2000-01-06
PCT/US2001/000304 WO2001050106A1 (en) 2000-01-06 2001-01-05 Grain growth of electrical interconnection for microelectromechanical systems (mems)

Publications (2)

Publication Number Publication Date
DE60108217D1 true DE60108217D1 (de) 2005-02-10
DE60108217T2 DE60108217T2 (de) 2005-12-29

Family

ID=22637570

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60108217T Expired - Lifetime DE60108217T2 (de) 2000-01-06 2001-01-05 Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems)

Country Status (7)

Country Link
US (1) US6516671B2 (de)
EP (1) EP1244900B1 (de)
JP (1) JP3620795B2 (de)
CN (1) CN1151367C (de)
AU (1) AU2629901A (de)
DE (1) DE60108217T2 (de)
WO (1) WO2001050106A1 (de)

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US10216259B2 (en) * 2000-02-14 2019-02-26 Pierre Bonnat Method and system for processing signals that control a device using human breath
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CN1151367C (zh) 2004-05-26
EP1244900B1 (de) 2005-01-05
JP3620795B2 (ja) 2005-02-16
JP2003519378A (ja) 2003-06-17
AU2629901A (en) 2001-07-16
WO2001050106A1 (en) 2001-07-12
US6516671B2 (en) 2003-02-11
US20030010131A1 (en) 2003-01-16
CN1394276A (zh) 2003-01-29
EP1244900A1 (de) 2002-10-02

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