DE60114411D1 - Microbearbeitete fluidische vorrichtung und herstellungsverfahren - Google Patents

Microbearbeitete fluidische vorrichtung und herstellungsverfahren

Info

Publication number
DE60114411D1
DE60114411D1 DE60114411T DE60114411T DE60114411D1 DE 60114411 D1 DE60114411 D1 DE 60114411D1 DE 60114411 T DE60114411 T DE 60114411T DE 60114411 T DE60114411 T DE 60114411T DE 60114411 D1 DE60114411 D1 DE 60114411D1
Authority
DE
Germany
Prior art keywords
wafer
silicon layer
cavity
moving member
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60114411T
Other languages
English (en)
Other versions
DE60114411T2 (de
Inventor
Lintel T Van
Didier Maillefer
Stephan Gamper
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Debiotech SA
Original Assignee
Debiotech SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Debiotech SA filed Critical Debiotech SA
Application granted granted Critical
Publication of DE60114411D1 publication Critical patent/DE60114411D1/de
Publication of DE60114411T2 publication Critical patent/DE60114411T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14244—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
  • Check Valves (AREA)
  • External Artificial Organs (AREA)
  • Micromachines (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
DE60114411T 2000-05-25 2001-05-25 Microbearbeitete fluidische vorrichtung und herstellungsverfahren Expired - Lifetime DE60114411T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0006669 2000-05-25
FR0006669 2000-05-25
PCT/EP2001/007032 WO2001090577A1 (fr) 2000-05-25 2001-05-25 Dispositif fluidique micro-usine et son procede de fabrication

Publications (2)

Publication Number Publication Date
DE60114411D1 true DE60114411D1 (de) 2005-12-01
DE60114411T2 DE60114411T2 (de) 2006-07-20

Family

ID=8850593

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60114411T Expired - Lifetime DE60114411T2 (de) 2000-05-25 2001-05-25 Microbearbeitete fluidische vorrichtung und herstellungsverfahren

Country Status (9)

Country Link
US (2) US7005078B2 (de)
EP (1) EP1283957B1 (de)
JP (1) JP4776139B2 (de)
CN (1) CN1324238C (de)
AT (1) ATE307976T1 (de)
AU (2) AU7250001A (de)
CA (1) CA2410306C (de)
DE (1) DE60114411T2 (de)
WO (1) WO2001090577A1 (de)

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Also Published As

Publication number Publication date
AU7250001A (en) 2001-12-03
CA2410306A1 (en) 2002-11-22
CN1324238C (zh) 2007-07-04
US7005078B2 (en) 2006-02-28
US20060027523A1 (en) 2006-02-09
DE60114411T2 (de) 2006-07-20
EP1283957A1 (de) 2003-02-19
CN1430703A (zh) 2003-07-16
JP4776139B2 (ja) 2011-09-21
US7311503B2 (en) 2007-12-25
EP1283957B1 (de) 2005-10-26
AU2001272500B2 (en) 2005-06-23
WO2001090577A1 (fr) 2001-11-29
JP2004505212A (ja) 2004-02-19
US20040052657A1 (en) 2004-03-18
CA2410306C (en) 2009-12-15
ATE307976T1 (de) 2005-11-15

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