DE60128134D1 - Gallium nitrid materialen und verfahren zur herstellung von schichten dieser materialen - Google Patents

Gallium nitrid materialen und verfahren zur herstellung von schichten dieser materialen

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Publication number
DE60128134D1
DE60128134D1 DE60128134T DE60128134T DE60128134D1 DE 60128134 D1 DE60128134 D1 DE 60128134D1 DE 60128134 T DE60128134 T DE 60128134T DE 60128134 T DE60128134 T DE 60128134T DE 60128134 D1 DE60128134 D1 DE 60128134D1
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Germany
Prior art keywords
gallium nitride
nitride material
semiconductor materials
material layer
nitride materials
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Expired - Lifetime
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DE60128134T
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English (en)
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DE60128134T2 (de
Inventor
T Warren Weeks
Edwin L Piner
Thomas Gehrke
Kevin J Linthicum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies Americas Corp
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Nitronex Corp
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