DE60133365D1 - Photodetektor mit senkrechtem Metall-Halbleiter, Mikroresonator und Herstellungsverfahren - Google Patents

Photodetektor mit senkrechtem Metall-Halbleiter, Mikroresonator und Herstellungsverfahren

Info

Publication number
DE60133365D1
DE60133365D1 DE60133365T DE60133365T DE60133365D1 DE 60133365 D1 DE60133365 D1 DE 60133365D1 DE 60133365 T DE60133365 T DE 60133365T DE 60133365 T DE60133365 T DE 60133365T DE 60133365 D1 DE60133365 D1 DE 60133365D1
Authority
DE
Germany
Prior art keywords
light
electrodes
microresonator
vertical metal
incident light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60133365T
Other languages
English (en)
Other versions
DE60133365T2 (de
Inventor
Fabrice Pardo
Stephane Collin
Roland Teissier
Jean-Luc Pelouard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE60133365D1 publication Critical patent/DE60133365D1/de
Application granted granted Critical
Publication of DE60133365T2 publication Critical patent/DE60133365T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
    • H01L31/108—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the Schottky type
    • H01L31/1085—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the Schottky type the devices being of the Metal-Semiconductor-Metal [MSM] Schottky barrier type
DE60133365T 2000-01-14 2001-01-12 Photodetektor mit senkrechtem Metall-Halbleiter, Mikroresonator und Herstellungsverfahren Expired - Lifetime DE60133365T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0000468A FR2803950B1 (fr) 2000-01-14 2000-01-14 Dispositif de photodetection a microresonateur metal- semiconducteur vertical et procede de fabrication de ce dispositif
FR0000468 2000-01-14
PCT/FR2001/000103 WO2001052329A1 (fr) 2000-01-14 2001-01-12 Dispositif de photodetection a microresonateur metal-semiconducteur vertical et procede de fabrication de ce dispositif

Publications (2)

Publication Number Publication Date
DE60133365D1 true DE60133365D1 (de) 2008-05-08
DE60133365T2 DE60133365T2 (de) 2009-04-16

Family

ID=8845925

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60133365T Expired - Lifetime DE60133365T2 (de) 2000-01-14 2001-01-12 Photodetektor mit senkrechtem Metall-Halbleiter, Mikroresonator und Herstellungsverfahren

Country Status (9)

Country Link
US (1) US6713832B2 (de)
EP (1) EP1247301B1 (de)
JP (1) JP4694753B2 (de)
AT (1) ATE390717T1 (de)
AU (1) AU2001231887A1 (de)
CA (1) CA2396951C (de)
DE (1) DE60133365T2 (de)
FR (1) FR2803950B1 (de)
WO (1) WO2001052329A1 (de)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2842945B1 (fr) * 2002-07-25 2005-11-11 Centre Nat Rech Scient Dispositif de photodetection de type msm et a cavite resonnante comprenant un miroir a reseau d'electrodes metalliques
US7423254B2 (en) * 2004-03-22 2008-09-09 Research Foundation Of The City University Of New York High responsivity high bandwidth metal-semiconductor-metal optoelectronic device
US7054528B2 (en) 2004-04-14 2006-05-30 Lucent Technologies Inc. Plasmon-enhanced tapered optical fibers
US7012687B2 (en) 2004-05-04 2006-03-14 Lucent Technologies Inc. Spectral analysis with evanescent field excitation
US7586097B2 (en) * 2006-01-05 2009-09-08 Virgin Islands Microsystems, Inc. Switching micro-resonant structures using at least one director
US7791290B2 (en) 2005-09-30 2010-09-07 Virgin Islands Microsystems, Inc. Ultra-small resonating charged particle beam modulator
US7626179B2 (en) * 2005-09-30 2009-12-01 Virgin Island Microsystems, Inc. Electron beam induced resonance
US7579609B2 (en) * 2005-12-14 2009-08-25 Virgin Islands Microsystems, Inc. Coupling light of light emitting resonator to waveguide
US7619373B2 (en) * 2006-01-05 2009-11-17 Virgin Islands Microsystems, Inc. Selectable frequency light emitter
US20070190794A1 (en) * 2006-02-10 2007-08-16 Virgin Islands Microsystems, Inc. Conductive polymers for the electroplating
US7605835B2 (en) * 2006-02-28 2009-10-20 Virgin Islands Microsystems, Inc. Electro-photographic devices incorporating ultra-small resonant structures
US20070200063A1 (en) * 2006-02-28 2007-08-30 Virgin Islands Microsystems, Inc. Wafer-level testing of light-emitting resonant structures
US7443358B2 (en) * 2006-02-28 2008-10-28 Virgin Island Microsystems, Inc. Integrated filter in antenna-based detector
WO2007105593A1 (ja) * 2006-03-13 2007-09-20 Nec Corporation フォトダイオード、およびその製造方法、ならびに光通信デバイスおよび光インタコネクションモジュール
JP4835837B2 (ja) * 2006-03-31 2011-12-14 日本電気株式会社 フォトダイオードとその製造方法
US7558490B2 (en) * 2006-04-10 2009-07-07 Virgin Islands Microsystems, Inc. Resonant detector for optical signals
US7646991B2 (en) * 2006-04-26 2010-01-12 Virgin Island Microsystems, Inc. Selectable frequency EMR emitter
US7876793B2 (en) * 2006-04-26 2011-01-25 Virgin Islands Microsystems, Inc. Micro free electron laser (FEL)
US20070252089A1 (en) * 2006-04-26 2007-11-01 Virgin Islands Microsystems, Inc. Charged particle acceleration apparatus and method
US20070264023A1 (en) * 2006-04-26 2007-11-15 Virgin Islands Microsystems, Inc. Free space interchip communications
US7569836B2 (en) * 2006-05-05 2009-08-04 Virgin Islands Microsystems, Inc. Transmission of data between microchips using a particle beam
US7554083B2 (en) * 2006-05-05 2009-06-30 Virgin Islands Microsystems, Inc. Integration of electromagnetic detector on integrated chip
US8188431B2 (en) 2006-05-05 2012-05-29 Jonathan Gorrell Integration of vacuum microelectronic device with integrated circuit
US7586167B2 (en) * 2006-05-05 2009-09-08 Virgin Islands Microsystems, Inc. Detecting plasmons using a metallurgical junction
US7718977B2 (en) 2006-05-05 2010-05-18 Virgin Island Microsystems, Inc. Stray charged particle removal device
US7986113B2 (en) * 2006-05-05 2011-07-26 Virgin Islands Microsystems, Inc. Selectable frequency light emitter
US7746532B2 (en) * 2006-05-05 2010-06-29 Virgin Island Microsystems, Inc. Electro-optical switching system and method
US20070272931A1 (en) * 2006-05-05 2007-11-29 Virgin Islands Microsystems, Inc. Methods, devices and systems producing illumination and effects
US7741934B2 (en) * 2006-05-05 2010-06-22 Virgin Islands Microsystems, Inc. Coupling a signal through a window
US7728397B2 (en) 2006-05-05 2010-06-01 Virgin Islands Microsystems, Inc. Coupled nano-resonating energy emitting structures
US7732786B2 (en) * 2006-05-05 2010-06-08 Virgin Islands Microsystems, Inc. Coupling energy in a plasmon wave to an electron beam
US7723698B2 (en) 2006-05-05 2010-05-25 Virgin Islands Microsystems, Inc. Top metal layer shield for ultra-small resonant structures
US7656094B2 (en) 2006-05-05 2010-02-02 Virgin Islands Microsystems, Inc. Electron accelerator for ultra-small resonant structures
US7557647B2 (en) * 2006-05-05 2009-07-07 Virgin Islands Microsystems, Inc. Heterodyne receiver using resonant structures
US7728702B2 (en) * 2006-05-05 2010-06-01 Virgin Islands Microsystems, Inc. Shielding of integrated circuit package with high-permeability magnetic material
US7710040B2 (en) * 2006-05-05 2010-05-04 Virgin Islands Microsystems, Inc. Single layer construction for ultra small devices
JP4772585B2 (ja) * 2006-05-10 2011-09-14 浜松ホトニクス株式会社 光検出器
US7573045B2 (en) * 2006-05-15 2009-08-11 Virgin Islands Microsystems, Inc. Plasmon wave propagation devices and methods
US7679067B2 (en) * 2006-05-26 2010-03-16 Virgin Island Microsystems, Inc. Receiver array using shared electron beam
US7655934B2 (en) 2006-06-28 2010-02-02 Virgin Island Microsystems, Inc. Data on light bulb
US7560716B2 (en) * 2006-09-22 2009-07-14 Virgin Islands Microsystems, Inc. Free electron oscillator
US7659513B2 (en) * 2006-12-20 2010-02-09 Virgin Islands Microsystems, Inc. Low terahertz source and detector
DE102007012475B4 (de) * 2007-03-15 2009-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schneller Photoleiter und Verfahren zur Herstellung und Antenne mit Photoleiter
US8467637B2 (en) 2007-05-01 2013-06-18 Nec Corporation Waveguide path coupling-type photodiode
JP5069497B2 (ja) * 2007-05-24 2012-11-07 富士フイルム株式会社 質量分析用デバイス及びそれを用いた質量分析装置
US7990336B2 (en) 2007-06-19 2011-08-02 Virgin Islands Microsystems, Inc. Microwave coupled excitation of solid state resonant arrays
US7960753B2 (en) * 2007-09-11 2011-06-14 The Aerospace Corporation Surface plasmon polariton actuated transistors
US7791053B2 (en) 2007-10-10 2010-09-07 Virgin Islands Microsystems, Inc. Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
EP2109147A1 (de) * 2008-04-08 2009-10-14 FOM Institute for Atomic and Molueculair Physics Photoelement mit Oberflächenplasmonresonanz-erzeugenden Nanostrukturen
FR2940522B1 (fr) * 2008-12-24 2011-03-18 Commissariat Energie Atomique Photodetecteur comprenant une region semiconductrice tres mince
US20100252514A1 (en) * 2009-04-03 2010-10-07 Min-Ju Chung Foldable baseball equipment rack
US8748862B2 (en) * 2009-07-06 2014-06-10 University Of Seoul Industry Cooperation Foundation Compound semiconductors
WO2011004990A1 (en) * 2009-07-06 2011-01-13 University Of Seoul Industry Cooperation Foundation Photodetector capable of detecting long wavelength radiation
US8809834B2 (en) * 2009-07-06 2014-08-19 University Of Seoul Industry Cooperation Foundation Photodetector capable of detecting long wavelength radiation
US8227793B2 (en) 2009-07-06 2012-07-24 University Of Seoul Industry Cooperation Foundation Photodetector capable of detecting the visible light spectrum
US8368990B2 (en) 2009-08-21 2013-02-05 University Of Seoul Industry Cooperation Foundation Polariton mode optical switch with composite structure
FR2954853B1 (fr) * 2009-12-24 2011-12-09 Commissariat Energie Atomique Photodetecteur a structure plasmon
FR2959021B1 (fr) * 2010-04-15 2012-07-27 Commissariat Energie Atomique Filtre optique mono ou multi-frequentiel et detecteur comportant un tel filtre
FR2971594B1 (fr) * 2011-02-14 2017-03-10 Centre Nat Rech Scient Modulateur terahertz
FR2992470B1 (fr) * 2012-06-26 2014-08-08 Commissariat Energie Atomique Element photodetecteur pour une radiation lumineuse infrarouge et photodetecteur comprenant un tel element photodetecteur
US9520510B2 (en) 2013-12-03 2016-12-13 Samsung Display Co., Ltd. Embedded optical sensors using transverse Fabry-Perot resonator as detectors
TWI512963B (zh) 2014-01-13 2015-12-11 Univ Nat Taiwan 光偵測器
US9929291B2 (en) 2014-02-06 2018-03-27 Raytheon Company Photo-detector having plasmonic resonance and photon crystal thermal noise suppression
DE102014007936A1 (de) 2014-05-27 2015-12-03 Karlsruher Institut für Technologie Plasmonisches Bauteil und plasmonischer Photodetektor sowie deren Herstellungsverfahren
CN112420398B (zh) * 2020-11-13 2021-12-10 中国科学技术大学 基于等离子体激元增强的光电化学光探测器及其制备方法
WO2024038897A1 (ja) * 2022-08-18 2024-02-22 国立大学法人東京大学 素子、素子の製造方法、及びフォトニックスピンレジスタ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2100511B (en) * 1981-05-15 1985-02-27 Rockwell International Corp Detector for responding to light at a predetermined wavelength and method of making the detector
US4555622A (en) * 1982-11-30 1985-11-26 At&T Bell Laboratories Photodetector having semi-insulating material and a contoured, substantially periodic surface
US5227648A (en) * 1991-12-03 1993-07-13 Woo Jong Chun Resonance cavity photodiode array resolving wavelength and spectrum
GB9322246D0 (en) * 1993-10-28 1993-12-15 Hitachi Europ Ltd Improved metal-semiconductor-metal photodetector
US5625729A (en) * 1994-08-12 1997-04-29 Brown; Thomas G. Optoelectronic device for coupling between an external optical wave and a local optical wave for optical modulators and detectors
US5631490A (en) * 1995-01-11 1997-05-20 Lucent Technologies Inc. Metal semiconductor metal photodetectors
EP0723302B1 (de) * 1995-01-23 2001-08-22 AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY MINISTRY OF INTERNATIONAL TRADE & INDUSTRY Lichtempfängliche Vorrichtung

Also Published As

Publication number Publication date
ATE390717T1 (de) 2008-04-15
US20030010979A1 (en) 2003-01-16
US6713832B2 (en) 2004-03-30
EP1247301B1 (de) 2008-03-26
CA2396951C (fr) 2008-05-06
JP2003520438A (ja) 2003-07-02
FR2803950B1 (fr) 2002-03-01
CA2396951A1 (fr) 2001-07-19
EP1247301A1 (de) 2002-10-09
AU2001231887A1 (en) 2001-07-24
WO2001052329A1 (fr) 2001-07-19
JP4694753B2 (ja) 2011-06-08
FR2803950A1 (fr) 2001-07-20
DE60133365T2 (de) 2009-04-16

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