DE60134106D1 - Elektrostatischgesteuerte Vorrichtungen - Google Patents

Elektrostatischgesteuerte Vorrichtungen

Info

Publication number
DE60134106D1
DE60134106D1 DE60134106T DE60134106T DE60134106D1 DE 60134106 D1 DE60134106 D1 DE 60134106D1 DE 60134106 T DE60134106 T DE 60134106T DE 60134106 T DE60134106 T DE 60134106T DE 60134106 D1 DE60134106 D1 DE 60134106D1
Authority
DE
Germany
Prior art keywords
controlled devices
electrostatically controlled
electrostatically
devices
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60134106T
Other languages
English (en)
Inventor
Joel A Kubby
Elliott A Eklund
Peter M Gulvin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE60134106D1 publication Critical patent/DE60134106D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/036—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/052—Ink-jet print cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
DE60134106T 2000-10-16 2001-10-03 Elektrostatischgesteuerte Vorrichtungen Expired - Lifetime DE60134106D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/687,096 US6467879B1 (en) 2000-10-16 2000-10-16 Method and apparatus for preventing degradation of electrostatically actuated devices

Publications (1)

Publication Number Publication Date
DE60134106D1 true DE60134106D1 (de) 2008-07-03

Family

ID=24759011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60134106T Expired - Lifetime DE60134106D1 (de) 2000-10-16 2001-10-03 Elektrostatischgesteuerte Vorrichtungen

Country Status (4)

Country Link
US (1) US6467879B1 (de)
EP (1) EP1199174B1 (de)
JP (1) JP4684501B2 (de)
DE (1) DE60134106D1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6572218B2 (en) * 2001-01-24 2003-06-03 Xerox Corporation Electrostatically-actuated device having a corrugated multi-layer membrane structure
US7416281B2 (en) 2002-08-06 2008-08-26 Ricoh Company, Ltd. Electrostatic actuator formed by a semiconductor manufacturing process
US7072093B2 (en) 2003-04-30 2006-07-04 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
WO2005104717A2 (en) * 2004-04-23 2005-11-10 Research Triangle Institute Flexible electrostatic actuator
JP4617765B2 (ja) * 2004-08-17 2011-01-26 ソニー株式会社 機能素子およびその製造方法、流体吐出装置、並びに印刷装置
US8247945B2 (en) 2005-05-18 2012-08-21 Kolo Technologies, Inc. Micro-electro-mechanical transducers
CN101589543B (zh) 2005-05-18 2012-10-31 科隆科技公司 微机电换能器
GB0510470D0 (en) * 2005-05-23 2005-06-29 Qinetiq Ltd Coded aperture imaging system
CA2608164A1 (en) * 2005-06-17 2006-12-21 Kolo Technologies, Inc. Micro-electro-mechanical transducer having an insulation extension
US7571992B2 (en) * 2005-07-01 2009-08-11 Xerox Corporation Pressure compensation structure for microelectromechanical systems
JP4724501B2 (ja) * 2005-09-06 2011-07-13 株式会社日立製作所 超音波トランスデューサおよびその製造方法
JP4724505B2 (ja) * 2005-09-09 2011-07-13 株式会社日立製作所 超音波探触子およびその製造方法
GB0602380D0 (en) * 2006-02-06 2006-03-15 Qinetiq Ltd Imaging system
GB2434934A (en) * 2006-02-06 2007-08-08 Qinetiq Ltd Processing coded aperture image data by applying weightings to aperture functions and data frames
GB2434936A (en) 2006-02-06 2007-08-08 Qinetiq Ltd Imaging system having plural distinct coded aperture arrays at different mask locations
GB2434937A (en) 2006-02-06 2007-08-08 Qinetiq Ltd Coded aperture imaging apparatus performing image enhancement
GB2434935A (en) * 2006-02-06 2007-08-08 Qinetiq Ltd Coded aperture imager using reference object to form decoding pattern
GB2434877A (en) * 2006-02-06 2007-08-08 Qinetiq Ltd MOEMS optical modulator
US7420321B2 (en) 2006-03-03 2008-09-02 Piezomotor Uppsala Ab Heat efficient micromotor
US7942501B2 (en) 2006-05-19 2011-05-17 Koninklijke Philips Electronics N.V. Electrostatic actuator for ink jet heads
GB0615040D0 (en) * 2006-07-28 2006-09-06 Qinetiq Ltd Processing method for coded apperture sensor
US8450902B2 (en) * 2006-08-28 2013-05-28 Xerox Corporation Electrostatic actuator device having multiple gap heights
US8083323B2 (en) 2008-09-29 2011-12-27 Xerox Corporation On-chip heater and thermistors for inkjet
GB0822281D0 (en) * 2008-12-06 2009-01-14 Qinetiq Ltd Optically diverse coded aperture imaging
CN102440005B (zh) 2009-05-25 2014-09-24 株式会社日立医疗器械 超声波换能器及利用该超声波换能器的超声波诊断装置
JP5486689B2 (ja) * 2010-10-15 2014-05-07 株式会社日立メディコ 超音波トランスデューサおよびそれを用いた超音波診断装置
KR101435502B1 (ko) 2012-11-29 2014-09-02 전자부품연구원 액체를 이용한 플렉서블 에너지 전환 장치
US20140292894A1 (en) * 2013-03-29 2014-10-02 Xerox Corporation Insulating substrate electrostatic ink jet print head
US11802040B2 (en) * 2021-01-18 2023-10-31 AAC Technologies Pte. Ltd. System for protecting mems product under ESD event

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69415683T2 (de) 1993-10-04 1999-09-09 Res International Mikromaschinen-fluss-schalter
JPH07322649A (ja) * 1994-05-24 1995-12-08 Matsushita Electric Ind Co Ltd マイクロアクチュエータ装置及びその製造方法
US6234607B1 (en) * 1995-04-20 2001-05-22 Seiko Epson Corporation Ink jet head and control method for reduced residual vibration
JP3395463B2 (ja) * 1995-07-27 2003-04-14 セイコーエプソン株式会社 インクジェットヘッドおよびその駆動方法
US5771321A (en) 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
EP0912883B1 (de) 1996-01-22 2003-04-16 Xros, Inc. Aus Silizium mittels Mikromaterialbearbeitung hergestellter, flügelzellenartiger Mikrodurchflussmesser
US5883532A (en) 1997-03-25 1999-03-16 Analog Devices, Inc. Power-on reset circuit based upon FET threshold level
US5867302A (en) 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6127198A (en) 1998-10-15 2000-10-03 Xerox Corporation Method of fabricating a fluid drop ejector

Also Published As

Publication number Publication date
JP4684501B2 (ja) 2011-05-18
EP1199174A1 (de) 2002-04-24
EP1199174B1 (de) 2008-05-21
US6467879B1 (en) 2002-10-22
JP2002191180A (ja) 2002-07-05

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Legal Events

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