DE60139983D1 - Biegewellensensor - Google Patents

Biegewellensensor

Info

Publication number
DE60139983D1
DE60139983D1 DE60139983T DE60139983T DE60139983D1 DE 60139983 D1 DE60139983 D1 DE 60139983D1 DE 60139983 T DE60139983 T DE 60139983T DE 60139983 T DE60139983 T DE 60139983T DE 60139983 D1 DE60139983 D1 DE 60139983D1
Authority
DE
Germany
Prior art keywords
layer
wave sensor
depositing
cavity
bending wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60139983T
Other languages
English (en)
Inventor
Brian T Cunningham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Application granted granted Critical
Publication of DE60139983D1 publication Critical patent/DE60139983D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer
DE60139983T 2000-03-20 2001-03-20 Biegewellensensor Expired - Lifetime DE60139983D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US53197000A 2000-03-20 2000-03-20
PCT/US2001/008913 WO2001071336A1 (en) 2000-03-20 2001-03-20 Flexural plate wave sensor and array

Publications (1)

Publication Number Publication Date
DE60139983D1 true DE60139983D1 (de) 2009-11-05

Family

ID=24119842

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60139983T Expired - Lifetime DE60139983D1 (de) 2000-03-20 2001-03-20 Biegewellensensor

Country Status (7)

Country Link
US (5) US6688158B2 (de)
EP (1) EP1266214B1 (de)
AT (1) ATE443863T1 (de)
AU (1) AU2001247612A1 (de)
CA (1) CA2404137C (de)
DE (1) DE60139983D1 (de)
WO (1) WO2001071336A1 (de)

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Publication number Publication date
US20030066348A1 (en) 2003-04-10
US6688158B2 (en) 2004-02-10
US7000453B2 (en) 2006-02-21
US20030200823A1 (en) 2003-10-30
EP1266214A4 (de) 2003-08-06
AU2001247612A1 (en) 2001-10-03
CA2404137A1 (en) 2001-09-27
US6851297B2 (en) 2005-02-08
CA2404137C (en) 2006-07-11
US20040055401A1 (en) 2004-03-25
EP1266214B1 (de) 2009-09-23
US6837097B2 (en) 2005-01-04
ATE443863T1 (de) 2009-10-15
US20050160821A1 (en) 2005-07-28
US20060260386A1 (en) 2006-11-23
US7266990B2 (en) 2007-09-11
WO2001071336A1 (en) 2001-09-27
EP1266214A1 (de) 2002-12-18

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