DE602004020200D1 - Belichtungsgerät und verfahren zur herstellung einer vorrichtung - Google Patents

Belichtungsgerät und verfahren zur herstellung einer vorrichtung

Info

Publication number
DE602004020200D1
DE602004020200D1 DE602004020200T DE602004020200T DE602004020200D1 DE 602004020200 D1 DE602004020200 D1 DE 602004020200D1 DE 602004020200 T DE602004020200 T DE 602004020200T DE 602004020200 T DE602004020200 T DE 602004020200T DE 602004020200 D1 DE602004020200 D1 DE 602004020200D1
Authority
DE
Germany
Prior art keywords
substrate
liquid
optical system
projection optical
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602004020200T
Other languages
English (en)
Inventor
Hideaki Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=33156817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE602004020200(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Publication of DE602004020200D1 publication Critical patent/DE602004020200D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/42—Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of the same original
DE602004020200T 2003-04-07 2004-04-06 Belichtungsgerät und verfahren zur herstellung einer vorrichtung Expired - Fee Related DE602004020200D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003103145 2003-04-07
PCT/JP2004/004969 WO2004090956A1 (ja) 2003-04-07 2004-04-06 露光装置及びデバイス製造方法

Publications (1)

Publication Number Publication Date
DE602004020200D1 true DE602004020200D1 (de) 2009-05-07

Family

ID=33156817

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004020200T Expired - Fee Related DE602004020200D1 (de) 2003-04-07 2004-04-06 Belichtungsgerät und verfahren zur herstellung einer vorrichtung

Country Status (8)

Country Link
US (4) US7480029B2 (de)
EP (1) EP1612850B1 (de)
JP (2) JP4902201B2 (de)
KR (1) KR101176817B1 (de)
AT (1) ATE426914T1 (de)
DE (1) DE602004020200D1 (de)
TW (1) TWI385706B (de)
WO (1) WO2004090956A1 (de)

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US20080291410A1 (en) 2008-11-27
JP4902201B2 (ja) 2012-03-21
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KR20050118721A (ko) 2005-12-19
US8111375B2 (en) 2012-02-07
WO2004090956A1 (ja) 2004-10-21
TW200503071A (en) 2005-01-16
US20060033901A1 (en) 2006-02-16
TWI385706B (zh) 2013-02-11
EP1612850B1 (de) 2009-03-25
US20060023188A1 (en) 2006-02-02
US20070064209A1 (en) 2007-03-22
JPWO2004090956A1 (ja) 2006-07-06
JP2010183109A (ja) 2010-08-19
US8537331B2 (en) 2013-09-17
KR101176817B1 (ko) 2012-08-24
ATE426914T1 (de) 2009-04-15
US7480029B2 (en) 2009-01-20
EP1612850A4 (de) 2008-01-09

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