DE602004021637D1 - Oberflächenprüfung unter verwendung einer nicht vibrierenden kontaktpotenzialsonde - Google Patents

Oberflächenprüfung unter verwendung einer nicht vibrierenden kontaktpotenzialsonde

Info

Publication number
DE602004021637D1
DE602004021637D1 DE602004021637T DE602004021637T DE602004021637D1 DE 602004021637 D1 DE602004021637 D1 DE 602004021637D1 DE 602004021637 T DE602004021637 T DE 602004021637T DE 602004021637 T DE602004021637 T DE 602004021637T DE 602004021637 D1 DE602004021637 D1 DE 602004021637D1
Authority
DE
Germany
Prior art keywords
contact potential
vibrant
surface testing
potential probe
contamination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004021637T
Other languages
English (en)
Inventor
Brandon M Steele
Jeffrey Alan Hawthorne
Chunho Kim
David C Sowell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qcept Technologies Inc
Original Assignee
Qcept Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qcept Technologies Inc filed Critical Qcept Technologies Inc
Publication of DE602004021637D1 publication Critical patent/DE602004021637D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N2033/0095—Semiconductive materials
DE602004021637T 2004-02-03 2004-08-05 Oberflächenprüfung unter verwendung einer nicht vibrierenden kontaktpotenzialsonde Active DE602004021637D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/771,628 US7308367B2 (en) 2003-02-03 2004-02-03 Wafer inspection system
PCT/US2004/025249 WO2005083407A1 (en) 2004-02-03 2004-08-05 Surface inspection using a non-vibrating contact potential probe

Publications (1)

Publication Number Publication Date
DE602004021637D1 true DE602004021637D1 (de) 2009-07-30

Family

ID=34911306

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004021637T Active DE602004021637D1 (de) 2004-02-03 2004-08-05 Oberflächenprüfung unter verwendung einer nicht vibrierenden kontaktpotenzialsonde

Country Status (7)

Country Link
US (1) US7308367B2 (de)
EP (1) EP1711801B1 (de)
JP (1) JP2007520721A (de)
AT (1) ATE434178T1 (de)
DE (1) DE602004021637D1 (de)
TW (1) TWI350914B (de)
WO (1) WO2005083407A1 (de)

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EP3542153A1 (de) 2016-11-16 2019-09-25 3M Innovative Properties Company Temperaturunabhängige überprüfung von struktureller integrität von materialien mit elektrischen eigenschaften
WO2018093906A1 (en) * 2016-11-16 2018-05-24 3M Innovative Properties Company Verifying structural integrity of materials using multiple current injection points and one or more current extraction points
WO2018140148A2 (en) 2016-12-16 2018-08-02 3M Innovative Properties Company Verifying structural integrity of materials
US10816495B2 (en) 2016-12-16 2020-10-27 3M Innovative Properties Company Verifying structural integrity of materials
WO2018112311A1 (en) 2016-12-16 2018-06-21 3M Innovative Properties Company Verifying structural integrity of materials using reference impedance
CN109405734B (zh) * 2018-12-14 2023-11-21 中核新科（天津）精密机械制造有限公司 快速高精度平面平行度测量装置及测量方法
JP7453853B2 (ja) * 2020-05-27 2024-03-21 株式会社日立製作所 処理条件決定システムおよび処理条件探索方法
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Also Published As

Publication number Publication date
ATE434178T1 (de) 2009-07-15
TWI350914B (en) 2011-10-21
JP2007520721A (ja) 2007-07-26
WO2005083407A1 (en) 2005-09-09
US7308367B2 (en) 2007-12-11
TW200526949A (en) 2005-08-16
US20040241890A1 (en) 2004-12-02
EP1711801B1 (de) 2009-06-17
EP1711801A1 (de) 2006-10-18

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