DE602004026442D1 - Optisches system zur detektion von anomalien und/oder charakteristika von oberflächen - Google Patents

Optisches system zur detektion von anomalien und/oder charakteristika von oberflächen

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Publication number
DE602004026442D1
DE602004026442D1 DE602004026442T DE602004026442T DE602004026442D1 DE 602004026442 D1 DE602004026442 D1 DE 602004026442D1 DE 602004026442 T DE602004026442 T DE 602004026442T DE 602004026442 T DE602004026442 T DE 602004026442T DE 602004026442 D1 DE602004026442 D1 DE 602004026442D1
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DE
Germany
Prior art keywords
channels
detector arrays
employed
inspected
lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004026442T
Other languages
English (en)
Inventor
Isabella Lewis
Mehdi Vaez-Iravani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Tencor Technologies Corp
Original Assignee
KLA Tencor Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Technologies Corp filed Critical KLA Tencor Technologies Corp
Publication of DE602004026442D1 publication Critical patent/DE602004026442D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
DE602004026442T 2003-06-24 2004-06-24 Optisches system zur detektion von anomalien und/oder charakteristika von oberflächen Active DE602004026442D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US48253903P 2003-06-24 2003-06-24
US10/874,861 US7365834B2 (en) 2003-06-24 2004-06-22 Optical system for detecting anomalies and/or features of surfaces
PCT/US2004/020483 WO2005003746A1 (en) 2003-06-24 2004-06-24 Optical system for detecting anomalies and/or features of surfaces

Publications (1)

Publication Number Publication Date
DE602004026442D1 true DE602004026442D1 (de) 2010-05-20

Family

ID=33567651

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004026442T Active DE602004026442D1 (de) 2003-06-24 2004-06-24 Optisches system zur detektion von anomalien und/oder charakteristika von oberflächen

Country Status (7)

Country Link
US (2) US7365834B2 (de)
EP (1) EP1636573B1 (de)
JP (2) JP4838122B2 (de)
KR (1) KR101128717B1 (de)
AT (1) ATE463736T1 (de)
DE (1) DE602004026442D1 (de)
WO (1) WO2005003746A1 (de)

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WO2023152848A1 (ja) * 2022-02-09 2023-08-17 株式会社日立ハイテク 欠陥検査装置及び欠陥検査方法
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Also Published As

Publication number Publication date
US7365834B2 (en) 2008-04-29
KR20060052712A (ko) 2006-05-19
JP2012021994A (ja) 2012-02-02
US7679735B2 (en) 2010-03-16
KR101128717B1 (ko) 2012-03-23
JP2007524832A (ja) 2007-08-30
EP1636573B1 (de) 2010-04-07
JP4838122B2 (ja) 2011-12-14
US20080165343A1 (en) 2008-07-10
EP1636573A1 (de) 2006-03-22
US20050052644A1 (en) 2005-03-10
ATE463736T1 (de) 2010-04-15
WO2005003746A1 (en) 2005-01-13

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