DE602005017724D1 - Matrixanzeige mit interferometrischen Modulatoren und integrierten MEMS Schaltern - Google Patents

Matrixanzeige mit interferometrischen Modulatoren und integrierten MEMS Schaltern

Info

Publication number
DE602005017724D1
DE602005017724D1 DE602005017724T DE602005017724T DE602005017724D1 DE 602005017724 D1 DE602005017724 D1 DE 602005017724D1 DE 602005017724 T DE602005017724 T DE 602005017724T DE 602005017724 T DE602005017724 T DE 602005017724T DE 602005017724 D1 DE602005017724 D1 DE 602005017724D1
Authority
DE
Germany
Prior art keywords
matrix display
interferometric modulators
mems switches
integrated mems
switches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005017724T
Other languages
English (en)
Inventor
Clarence Chui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualcomm MEMS Technologies Inc
Original Assignee
IDC LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IDC LLC filed Critical IDC LLC
Publication of DE602005017724D1 publication Critical patent/DE602005017724D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/04—Structural and physical details of display devices
    • G09G2300/0469—Details of the physics of pixel operation
    • G09G2300/0473—Use of light emitting or modulating elements having two or more stable states when no power is applied
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/06—Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0264—Details of driving circuits
    • G09G2310/0267—Details of drivers for scan electrodes, other than drivers for liquid crystal, plasma or OLED displays
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
    • G09G2310/0264—Details of driving circuits
    • G09G2310/0275—Details of drivers for data electrodes, other than drivers for liquid crystal, plasma or OLED displays, not related to handling digital grey scale data or to communication of data to the pixels by means of a current
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2330/00—Aspects of power supply; Aspects of display protection and defect management
    • G09G2330/02—Details of power systems and of start or stop of display operation
    • G09G2330/021—Power management, e.g. power saving
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Micromachines (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
DE602005017724T 2004-09-27 2005-09-14 Matrixanzeige mit interferometrischen Modulatoren und integrierten MEMS Schaltern Active DE602005017724D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61350104P 2004-09-27 2004-09-27
US11/150,407 US7345805B2 (en) 2004-09-27 2005-06-10 Interferometric modulator array with integrated MEMS electrical switches

Publications (1)

Publication Number Publication Date
DE602005017724D1 true DE602005017724D1 (de) 2009-12-31

Family

ID=35448366

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005017724T Active DE602005017724D1 (de) 2004-09-27 2005-09-14 Matrixanzeige mit interferometrischen Modulatoren und integrierten MEMS Schaltern

Country Status (14)

Country Link
US (4) US7345805B2 (de)
EP (1) EP1640960B1 (de)
JP (2) JP4652927B2 (de)
KR (4) KR101198081B1 (de)
AT (1) ATE449398T1 (de)
AU (1) AU2005203378A1 (de)
BR (1) BRPI0503935A (de)
CA (1) CA2517038A1 (de)
DE (1) DE602005017724D1 (de)
MX (1) MXPA05009403A (de)
MY (1) MY142573A (de)
RU (1) RU2005129913A (de)
SG (2) SG121059A1 (de)
TW (1) TW200634704A (de)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6774426B2 (en) * 2000-12-19 2004-08-10 Micron Technology, Inc. Flash cell with trench source-line connection
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7499208B2 (en) * 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7345805B2 (en) * 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US8310441B2 (en) * 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7310179B2 (en) * 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7920136B2 (en) * 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
KR20080027236A (ko) * 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US20070126673A1 (en) * 2005-12-07 2007-06-07 Kostadin Djordjev Method and system for writing data to MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7427201B2 (en) 2006-01-12 2008-09-23 Green Cloak Llc Resonant frequency filtered arrays for discrete addressing of a matrix
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7777715B2 (en) * 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
EP2366945A1 (de) 2006-10-06 2011-09-21 Qualcomm Mems Technologies, Inc. Beleuchtungseinrichtung einer Anzeigevorrichtung mit darin integrierter Struktur zur Erzeugung optischer Verluste
US8872085B2 (en) 2006-10-06 2014-10-28 Qualcomm Mems Technologies, Inc. Display device having front illuminator with turning features
US7684106B2 (en) * 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
US7724417B2 (en) * 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7556981B2 (en) 2006-12-29 2009-07-07 Qualcomm Mems Technologies, Inc. Switches for shorting during MEMS etch release
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US9697763B2 (en) 2007-02-07 2017-07-04 Meisner Consulting Inc. Displays including addressible trace structures
US20080192029A1 (en) * 2007-02-08 2008-08-14 Michael Hugh Anderson Passive circuits for de-multiplexing display inputs
US8022896B2 (en) * 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels
US8068710B2 (en) * 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7977931B2 (en) * 2008-03-18 2011-07-12 Qualcomm Mems Technologies, Inc. Family of current/power-efficient high voltage linear regulator circuit architectures
US7782522B2 (en) * 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
JP5310529B2 (ja) * 2009-12-22 2013-10-09 株式会社豊田中央研究所 板状部材の揺動装置
CN103038567A (zh) 2010-04-16 2013-04-10 弗莱克斯照明第二有限责任公司 包括膜基光导的照明装置
BR112012026329A2 (pt) 2010-04-16 2019-09-24 Flex Lighting Ii Llc sinal compreendendo um guia de luz baseado em película
US20120153970A1 (en) * 2010-12-21 2012-06-21 Qualcomm Mems Technologies, Inc. Capacitive touch sensing devices and methods of manufacturing thereof
US9235047B2 (en) 2011-06-01 2016-01-12 Pixtronix, Inc. MEMS display pixel control circuits and methods
US8836681B2 (en) * 2011-10-21 2014-09-16 Qualcomm Mems Technologies, Inc. Method and device for reducing effect of polarity inversion in driving display
US9127992B2 (en) * 2013-03-06 2015-09-08 Ricoh Company, Ltd. Wide-area pressure sensor with reduced power consumption
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9135867B2 (en) 2013-04-01 2015-09-15 Pixtronix, Inc. Display element pixel circuit with voltage equalization
JPWO2018051946A1 (ja) * 2016-09-16 2019-07-04 日本電気株式会社 集積回路

Family Cites Families (190)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3982239A (en) 1973-02-07 1976-09-21 North Hills Electronics, Inc. Saturation drive arrangements for optically bistable displays
NL8001281A (nl) 1980-03-04 1981-10-01 Philips Nv Weergeefinrichting.
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
NL8103377A (nl) 1981-07-16 1983-02-16 Philips Nv Weergeefinrichting.
US4571603A (en) * 1981-11-03 1986-02-18 Texas Instruments Incorporated Deformable mirror electrostatic printer
NL8200354A (nl) 1982-02-01 1983-09-01 Philips Nv Passieve weergeefinrichting.
US4500171A (en) * 1982-06-02 1985-02-19 Texas Instruments Incorporated Process for plastic LCD fill hole sealing
US4482213A (en) 1982-11-23 1984-11-13 Texas Instruments Incorporated Perimeter seal reinforcement holes for plastic LCDs
GB8309275D0 (en) * 1983-04-06 1983-05-11 Allied Colloids Ltd Dissolution of water soluble polymers in water
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4566935A (en) * 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4709995A (en) 1984-08-18 1987-12-01 Canon Kabushiki Kaisha Ferroelectric display panel and driving method therefor to achieve gray scale
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
GB2186708B (en) 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
FR2605444A1 (fr) 1986-10-17 1988-04-22 Thomson Csf Procede de commande d'un ecran matriciel electrooptique et circuit de commande mettant en oeuvre ce procede
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US4856863A (en) 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US4982184A (en) * 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
KR100202246B1 (ko) * 1989-02-27 1999-06-15 윌리엄 비. 켐플러 디지탈화 비디오 시스템을 위한 장치 및 방법
US5214419A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Planarized true three dimensional display
US5206629A (en) * 1989-02-27 1993-04-27 Texas Instruments Incorporated Spatial light modulator and memory for digitized video display
US5162787A (en) 1989-02-27 1992-11-10 Texas Instruments Incorporated Apparatus and method for digitized video system utilizing a moving display surface
US5192946A (en) * 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
US5446479A (en) * 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US5272473A (en) 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
US5079544A (en) * 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5214420A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Spatial light modulator projection system with random polarity light
US5170156A (en) 1989-02-27 1992-12-08 Texas Instruments Incorporated Multi-frequency two dimensional display system
US5287096A (en) * 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5124834A (en) 1989-11-16 1992-06-23 General Electric Company Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
US5227900A (en) 1990-03-20 1993-07-13 Canon Kabushiki Kaisha Method of driving ferroelectric liquid crystal element
CH682523A5 (fr) * 1990-04-20 1993-09-30 Suisse Electronique Microtech Dispositif de modulation de lumière à adressage matriciel.
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5216537A (en) 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5018256A (en) 1990-06-29 1991-05-28 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
EP0467048B1 (de) * 1990-06-29 1995-09-20 Texas Instruments Incorporated Deformierbare Spiegelvorrichtung mit aktualisiertem Raster
US5192395A (en) * 1990-10-12 1993-03-09 Texas Instruments Incorporated Method of making a digital flexure beam accelerometer
US5526688A (en) 1990-10-12 1996-06-18 Texas Instruments Incorporated Digital flexure beam accelerometer and method
US5602671A (en) * 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
US5331454A (en) 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
US5233459A (en) * 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
CA2063744C (en) * 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
US5179274A (en) * 1991-07-12 1993-01-12 Texas Instruments Incorporated Method for controlling operation of optical systems and devices
US5287215A (en) 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5254980A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated DMD display system controller
US5563398A (en) 1991-10-31 1996-10-08 Texas Instruments Incorporated Spatial light modulator scanning system
JP3171891B2 (ja) * 1991-11-08 2001-06-04 キヤノン株式会社 表示制御装置
US5367878A (en) * 1991-11-08 1994-11-29 University Of Southern California Transient energy release microdevices and methods
CA2081753C (en) 1991-11-22 2002-08-06 Jeffrey B. Sampsell Dmd scanner
US5231388A (en) * 1991-12-17 1993-07-27 Texas Instruments Incorporated Color display system using spatial light modulators
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
US5233456A (en) 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5296950A (en) * 1992-01-31 1994-03-22 Texas Instruments Incorporated Optical signal free-space conversion board
US5231532A (en) 1992-02-05 1993-07-27 Texas Instruments Incorporated Switchable resonant filter for optical radiation
US5212582A (en) 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
EP0562424B1 (de) 1992-03-25 1997-05-28 Texas Instruments Incorporated Eingebautes optisches Eichsystem
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
DE69309780T2 (de) 1992-05-19 1997-10-23 Canon Kk Verfahren und Einrichtung zur Steuerung einer Anzeige
US5613103A (en) * 1992-05-19 1997-03-18 Canon Kabushiki Kaisha Display control system and method for controlling data based on supply of data
JPH0651250A (ja) * 1992-05-20 1994-02-25 Texas Instr Inc <Ti> モノリシックな空間的光変調器およびメモリのパッケージ
JPH06214169A (ja) * 1992-06-08 1994-08-05 Texas Instr Inc <Ti> 制御可能な光学的周期的表面フィルタ
US5818095A (en) * 1992-08-11 1998-10-06 Texas Instruments Incorporated High-yield spatial light modulator with light blocking layer
US5327286A (en) 1992-08-31 1994-07-05 Texas Instruments Incorporated Real time optical correlation system
US5325116A (en) 1992-09-18 1994-06-28 Texas Instruments Incorporated Device for writing to and reading from optical storage media
US5488505A (en) * 1992-10-01 1996-01-30 Engle; Craig D. Enhanced electrostatic shutter mosaic modulator
EP0610665B1 (de) 1993-01-11 1997-09-10 Texas Instruments Incorporated Pixelkontrollschaltung für räumlichen Lichtmodulator
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5461411A (en) 1993-03-29 1995-10-24 Texas Instruments Incorporated Process and architecture for digital micromirror printer
US5489952A (en) 1993-07-14 1996-02-06 Texas Instruments Incorporated Method and device for multi-format television
US5365283A (en) 1993-07-19 1994-11-15 Texas Instruments Incorporated Color phase control for projection display using spatial light modulator
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5526172A (en) 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
US5581272A (en) 1993-08-25 1996-12-03 Texas Instruments Incorporated Signal generator for controlling a spatial light modulator
US5552925A (en) 1993-09-07 1996-09-03 John M. Baker Electro-micro-mechanical shutters on transparent substrates
US5483260A (en) * 1993-09-10 1996-01-09 Dell Usa, L.P. Method and apparatus for simplified video monitor control
US5457493A (en) 1993-09-15 1995-10-10 Texas Instruments Incorporated Digital micro-mirror based image simulation system
US5526051A (en) 1993-10-27 1996-06-11 Texas Instruments Incorporated Digital television system
US5497197A (en) * 1993-11-04 1996-03-05 Texas Instruments Incorporated System and method for packaging data into video processor
US5459602A (en) 1993-10-29 1995-10-17 Texas Instruments Micro-mechanical optical shutter
US5452024A (en) 1993-11-01 1995-09-19 Texas Instruments Incorporated DMD display system
US5517347A (en) 1993-12-01 1996-05-14 Texas Instruments Incorporated Direct view deformable mirror device
US5583688A (en) 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US5598565A (en) * 1993-12-29 1997-01-28 Intel Corporation Method and apparatus for screen power saving
US5448314A (en) 1994-01-07 1995-09-05 Texas Instruments Method and apparatus for sequential color imaging
US5444566A (en) 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6710908B2 (en) * 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US20010003487A1 (en) * 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US5497172A (en) * 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
US5454906A (en) 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5499062A (en) * 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory
JPH0822024A (ja) * 1994-07-05 1996-01-23 Mitsubishi Electric Corp アクティブマトリクス基板およびその製法
US5552924A (en) 1994-11-14 1996-09-03 Texas Instruments Incorporated Micromechanical device having an improved beam
US5610624A (en) * 1994-11-30 1997-03-11 Texas Instruments Incorporated Spatial light modulator with reduced possibility of an on state defect
US5612713A (en) * 1995-01-06 1997-03-18 Texas Instruments Incorporated Digital micro-mirror device with block data loading
US5567334A (en) 1995-02-27 1996-10-22 Texas Instruments Incorporated Method for creating a digital micromirror device using an aluminum hard mask
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5535047A (en) 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US5578976A (en) 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
JP3799092B2 (ja) * 1995-12-29 2006-07-19 アジレント・テクノロジーズ・インク 光変調装置及びディスプレイ装置
US7471444B2 (en) * 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
EP0877272B1 (de) * 1997-05-08 2002-07-31 Texas Instruments Incorporated Verbesserungen für räumliche Lichtmodulatoren
US6750876B1 (en) * 1997-11-16 2004-06-15 Ess Technology, Inc. Programmable display controller
US6028690A (en) * 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
US6180428B1 (en) * 1997-12-12 2001-01-30 Xerox Corporation Monolithic scanning light emitting devices using micromachining
KR100253378B1 (ko) * 1997-12-15 2000-04-15 김영환 주문형반도체의외부표시장치
US6037719A (en) * 1998-04-09 2000-03-14 Hughes Electronics Corporation Matrix-addressed display having micromachined electromechanical switches
US6323982B1 (en) * 1998-05-22 2001-11-27 Texas Instruments Incorporated Yield superstructure for digital micromirror device
JP4074714B2 (ja) * 1998-09-25 2008-04-09 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
US6323834B1 (en) * 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
JP3919954B2 (ja) * 1998-10-16 2007-05-30 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
JP2000214804A (ja) 1999-01-20 2000-08-04 Fuji Photo Film Co Ltd 光変調素子及び露光装置並びに平面表示装置
NL1015202C2 (nl) * 1999-05-20 2002-03-26 Nec Corp Actieve matrixvormige vloeiend-kristal displayinrichting.
TW523727B (en) * 1999-05-27 2003-03-11 Koninkl Philips Electronics Nv Display device
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
US6862029B1 (en) * 1999-07-27 2005-03-01 Hewlett-Packard Development Company, L.P. Color display system
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6549338B1 (en) * 1999-11-12 2003-04-15 Texas Instruments Incorporated Bandpass filter to reduce thermal impact of dichroic light shift
US6552840B2 (en) * 1999-12-03 2003-04-22 Texas Instruments Incorporated Electrostatic efficiency of micromechanical devices
US6548908B2 (en) * 1999-12-27 2003-04-15 Xerox Corporation Structure and method for planar lateral oxidation in passive devices
US6674090B1 (en) * 1999-12-27 2004-01-06 Xerox Corporation Structure and method for planar lateral oxidation in active
US6545335B1 (en) * 1999-12-27 2003-04-08 Xerox Corporation Structure and method for electrical isolation of optoelectronic integrated circuits
JP2001249287A (ja) * 1999-12-30 2001-09-14 Texas Instr Inc <Ti> 双安定マイクロミラー・アレイを動作させる方法
US20030004272A1 (en) * 2000-03-01 2003-01-02 Power Mark P J Data transfer method and apparatus
JP4357071B2 (ja) * 2000-03-09 2009-11-04 株式会社東芝 半導体装置及び半導体記憶装置
JP3538109B2 (ja) * 2000-03-16 2004-06-14 日本電気株式会社 マイクロマシンスイッチ
JP4669619B2 (ja) 2000-03-27 2011-04-13 富士フイルム株式会社 積層ポリエステルフィルム
US6356085B1 (en) * 2000-05-09 2002-03-12 Pacesetter, Inc. Method and apparatus for converting capacitance to voltage
JP3843703B2 (ja) * 2000-06-13 2006-11-08 富士ゼロックス株式会社 光書き込み型記録表示装置
US6853129B1 (en) * 2000-07-28 2005-02-08 Candescent Technologies Corporation Protected substrate structure for a field emission display device
US6859218B1 (en) * 2000-11-07 2005-02-22 Hewlett-Packard Development Company, L.P. Electronic display devices and methods
US6433917B1 (en) * 2000-11-22 2002-08-13 Ball Semiconductor, Inc. Light modulation device and system
JP2002221935A (ja) * 2000-11-24 2002-08-09 Mitsubishi Electric Corp 表示装置
JP2002175053A (ja) 2000-12-07 2002-06-21 Sony Corp アクティブマトリクス型表示装置およびこれを用いた携帯端末
WO2002061781A1 (fr) * 2001-01-30 2002-08-08 Advantest Corporation Commutateur et dispositif de circuit integre
US6657832B2 (en) * 2001-04-26 2003-12-02 Texas Instruments Incorporated Mechanically assisted restoring force support for micromachined membranes
US6862022B2 (en) * 2001-07-20 2005-03-01 Hewlett-Packard Development Company, L.P. Method and system for automatically selecting a vertical refresh rate for a video display monitor
US6870581B2 (en) * 2001-10-30 2005-03-22 Sharp Laboratories Of America, Inc. Single panel color video projection display using reflective banded color falling-raster illumination
US6574033B1 (en) * 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US7283112B2 (en) * 2002-03-01 2007-10-16 Microsoft Corporation Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system
TW544787B (en) * 2002-09-18 2003-08-01 Promos Technologies Inc Method of forming self-aligned contact structure with locally etched gate conductive layer
US6813060B1 (en) * 2002-12-09 2004-11-02 Sandia Corporation Electrical latching of microelectromechanical devices
GB0229692D0 (en) * 2002-12-19 2003-01-29 Koninkl Philips Electronics Nv Active matrix display device
JP2004205973A (ja) * 2002-12-26 2004-07-22 Fuji Photo Film Co Ltd 平面表示素子及びその駆動方法
JP2004004553A (ja) 2003-02-10 2004-01-08 Seiko Epson Corp 液晶表示パネル及びドライブ回路
US6829132B2 (en) * 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US7190380B2 (en) * 2003-09-26 2007-03-13 Hewlett-Packard Development Company, L.P. Generating and displaying spatially offset sub-frames
US7173314B2 (en) * 2003-08-13 2007-02-06 Hewlett-Packard Development Company, L.P. Storage device having a probe and a storage cell with moveable parts
US20050057442A1 (en) * 2003-08-28 2005-03-17 Olan Way Adjacent display of sequential sub-images
US20050068583A1 (en) * 2003-09-30 2005-03-31 Gutkowski Lawrence J. Organizing a digital image
US6861277B1 (en) * 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7532194B2 (en) * 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7329931B2 (en) * 2004-06-18 2008-02-12 Nantero, Inc. Receiver circuit using nanotube-based switches and transistors
US7560299B2 (en) * 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7499208B2 (en) * 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7515147B2 (en) * 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7889163B2 (en) * 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US8310441B2 (en) * 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US8878825B2 (en) * 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7532195B2 (en) * 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
AU2005289445A1 (en) * 2004-09-27 2006-04-06 Idc, Llc Method and device for multistate interferometric light modulation
US7843410B2 (en) * 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7724993B2 (en) * 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7136213B2 (en) * 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7446927B2 (en) * 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US20060066594A1 (en) * 2004-09-27 2006-03-30 Karen Tyger Systems and methods for driving a bi-stable display element
US7345805B2 (en) * 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7545550B2 (en) * 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators

Also Published As

Publication number Publication date
JP5054040B2 (ja) 2012-10-24
CA2517038A1 (en) 2006-03-27
US8437071B2 (en) 2013-05-07
KR101290628B1 (ko) 2013-07-29
AU2005203378A1 (en) 2006-04-13
EP1640960B1 (de) 2009-11-18
US20080158647A1 (en) 2008-07-03
RU2005129913A (ru) 2007-04-10
KR101284822B1 (ko) 2013-07-10
SG121059A1 (en) 2006-04-26
BRPI0503935A (pt) 2006-05-09
JP2006099064A (ja) 2006-04-13
KR20060051479A (ko) 2006-05-19
JP2009163248A (ja) 2009-07-23
US20060103613A1 (en) 2006-05-18
ATE449398T1 (de) 2009-12-15
EP1640960A2 (de) 2006-03-29
KR20120123235A (ko) 2012-11-08
MY142573A (en) 2010-12-15
EP1640960A3 (de) 2006-07-26
US20120256819A1 (en) 2012-10-11
JP4652927B2 (ja) 2011-03-16
SG155963A1 (en) 2009-10-29
US7345805B2 (en) 2008-03-18
US8223424B2 (en) 2012-07-17
US7859739B2 (en) 2010-12-28
KR20130020816A (ko) 2013-02-28
TW200634704A (en) 2006-10-01
US20110095973A1 (en) 2011-04-28
MXPA05009403A (es) 2006-03-29
KR20120099351A (ko) 2012-09-10
KR101198081B1 (ko) 2012-11-05

Similar Documents

Publication Publication Date Title
ATE449398T1 (de) Matrixanzeige mit interferometrischen modulatoren und integrierten mems schaltern
DE60218762D1 (de) Treiberschaltung für eine Anzeigevorrichtung mit aktiver Matrix mit Kompensation der Abweichung der Schwellspannung
SG120270A1 (en) System and method of sensing actuation and releasevoltages of an interferometric modulator
DE60105479D1 (de) Mikroelektromechanische Antriebe mit gesteuerten Bogentraversen
TW200712551A (en) Capacitance gap calibration
DE60140914D1 (de) Elektrolumineszenzanzeige mit aktiver Matrix
GB2427483A (en) Microelectromechanical device with reset electrode
SG118110A1 (en) Organic light emitting element and display device using the element
ATE453873T1 (de) Analoge interferometrische modulatoreinrichtung
DK1820244T3 (da) Enkelt-bølgetype fotoniske-krystal vcsel&#39;s
GB0014961D0 (en) Light-emitting matrix array display devices with light sensing elements
FR2820241B1 (fr) Substrat transparent muni d&#39;une electrode
ATE445860T1 (de) Optisches element mit einem flüssigkristall mit optischer isotropie
DE602005001093D1 (de) Dreidimensionaler photonischer Kristall und optisches Element
BRPI0503851A (pt) método e dispositivo para manipular cor em um display
DE602004000155D1 (de) Absoluter optischer Positionkodierer mit faseroptischem Sensorkopf und mindestens zwei Skalen
CA118896S (en) Molded plastic arch unit for a culvert or bridge
DE602005002021D1 (de) Mosaik-projektionsanzeige mit räumlichen lichtmodulatoren
DE60109338D1 (de) Elektrolumineszenzanzeige mit aktiver Matrix
USD515961S1 (en) Clock display
DE60114740D1 (de) Injektor mit Kraftsensor auf dem Kolben
DE60039801D1 (de) Elektrolumineszensanzeige mit aktiver Matrix und Graustufensteuerung
DE60313410D1 (de) Herstellung von MEMS-Bauelementen mit Spin-on-Glass
DK1093546T3 (da) Visningsindretning
ITTO20020184A0 (it) Visualizzazione a cristalli liquidi per veicolo.

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: QUALCOMM MEMS TECHNOLOGIES, INC., SAN DIEGO, C, US

8364 No opposition during term of opposition