DE602006009637D1 - Inspektionssystem und -vorrichtung - Google Patents

Inspektionssystem und -vorrichtung

Info

Publication number
DE602006009637D1
DE602006009637D1 DE602006009637T DE602006009637T DE602006009637D1 DE 602006009637 D1 DE602006009637 D1 DE 602006009637D1 DE 602006009637 T DE602006009637 T DE 602006009637T DE 602006009637 T DE602006009637 T DE 602006009637T DE 602006009637 D1 DE602006009637 D1 DE 602006009637D1
Authority
DE
Germany
Prior art keywords
sample
work function
vibrating
nvcpd
vcpd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006009637T
Other languages
English (en)
Inventor
Jeffrey Alan Hawthorne
M Brandon Steele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qcept Technologies Inc
Original Assignee
Qcept Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qcept Technologies Inc filed Critical Qcept Technologies Inc
Publication of DE602006009637D1 publication Critical patent/DE602006009637D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/312—Contactless testing by capacitive methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N2033/0095—Semiconductive materials
DE602006009637T 2005-03-11 2006-03-06 Inspektionssystem und -vorrichtung Active DE602006009637D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/078,255 US7107158B2 (en) 2003-02-03 2005-03-11 Inspection system and apparatus
PCT/US2006/007872 WO2006098925A1 (en) 2005-03-11 2006-03-06 Inspection system and apparatus

Publications (1)

Publication Number Publication Date
DE602006009637D1 true DE602006009637D1 (de) 2009-11-19

Family

ID=36488556

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006009637T Active DE602006009637D1 (de) 2005-03-11 2006-03-06 Inspektionssystem und -vorrichtung

Country Status (9)

Country Link
US (3) US7107158B2 (de)
EP (1) EP1869436B1 (de)
JP (1) JP4459289B2 (de)
KR (1) KR100950641B1 (de)
CN (1) CN101069092B (de)
AT (1) ATE445154T1 (de)
DE (1) DE602006009637D1 (de)
TW (1) TWI317809B (de)
WO (1) WO2006098925A1 (de)

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JP6021909B2 (ja) 2011-07-21 2016-11-09 ブルックス オートメーション インコーポレイテッド 低温試料グループホルダーにおける寸法変化の補正のための方法と装置
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CN104103540B (zh) * 2014-07-24 2017-02-15 上海华力微电子有限公司 监控图形晶片栅极氧化层表面的方法
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CN107073614B (zh) * 2015-10-30 2019-01-04 三菱电机株式会社 线放电加工机、线放电加工机的控制装置的控制方法及定位方法
US10497092B2 (en) * 2015-11-19 2019-12-03 Camtek Ltd Continuous light inspection
CN106199372A (zh) * 2016-07-04 2016-12-07 中国科学院新疆理化技术研究所 用于晶片级器件辐射效应试验的x射线辐照测试设备
US10388445B2 (en) * 2016-12-21 2019-08-20 Eaton Intelligent Power Limited Current sensing circuit and current sensing assembly including the same
JP2019045231A (ja) * 2017-08-31 2019-03-22 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
DE102017121338A1 (de) 2017-09-14 2019-03-14 Dürr Dental SE Verfahren zur Ermittlung der Qualität einer Speicherfolie sowie Speicherfolienscanner hierfür
KR20200121908A (ko) 2018-03-13 2020-10-26 어플라이드 머티어리얼스, 인코포레이티드 화학적 기계적 연마 동안 진동들의 모니터링
CN111336792B (zh) * 2018-12-19 2022-03-11 江苏鲁汶仪器有限公司 一种干燥微水珠的腔体
CN110082655A (zh) * 2019-05-13 2019-08-02 国网北京市电力公司 可视化设备检测方法及仪器及其在智能电网中的应用
TWI756836B (zh) * 2019-09-30 2022-03-01 台灣積體電路製造股份有限公司 量測方法和半導體結構的形成方法
US20220230927A1 (en) * 2021-04-15 2022-07-21 Jnk Tech Glass and wafer inspection system and a method of use thereof
US11508590B2 (en) * 2021-04-15 2022-11-22 Jnk Tech Substrate inspection system and method of use thereof

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Also Published As

Publication number Publication date
US20070010954A1 (en) 2007-01-11
JP4459289B2 (ja) 2010-04-28
US20080162066A1 (en) 2008-07-03
EP1869436A1 (de) 2007-12-26
WO2006098925A1 (en) 2006-09-21
JP2008536104A (ja) 2008-09-04
US7337076B2 (en) 2008-02-26
ATE445154T1 (de) 2009-10-15
EP1869436B1 (de) 2009-10-07
TW200710386A (en) 2007-03-16
KR100950641B1 (ko) 2010-04-01
KR20070112156A (ko) 2007-11-22
CN101069092B (zh) 2011-04-27
CN101069092A (zh) 2007-11-07
US7634365B2 (en) 2009-12-15
TWI317809B (en) 2009-12-01
US20050162178A1 (en) 2005-07-28
US7107158B2 (en) 2006-09-12

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