DE60201159D1 - Elektrostatischer Betätiger - Google Patents
Elektrostatischer BetätigerInfo
- Publication number
- DE60201159D1 DE60201159D1 DE60201159T DE60201159T DE60201159D1 DE 60201159 D1 DE60201159 D1 DE 60201159D1 DE 60201159 T DE60201159 T DE 60201159T DE 60201159 T DE60201159 T DE 60201159T DE 60201159 D1 DE60201159 D1 DE 60201159D1
- Authority
- DE
- Germany
- Prior art keywords
- electrostatic actuator
- electrostatic
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001326102A JP3775276B2 (ja) | 2001-10-24 | 2001-10-24 | 静電アクチュエータ |
JP2001326102 | 2001-10-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60201159D1 true DE60201159D1 (de) | 2004-10-14 |
DE60201159T2 DE60201159T2 (de) | 2005-10-13 |
Family
ID=19142547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60201159T Expired - Lifetime DE60201159T2 (de) | 2001-10-24 | 2002-10-24 | Elektrostatischer Betätiger |
Country Status (5)
Country | Link |
---|---|
US (1) | US6734512B2 (de) |
EP (1) | EP1306869B1 (de) |
JP (1) | JP3775276B2 (de) |
CN (1) | CN1193926C (de) |
DE (1) | DE60201159T2 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10016869A1 (de) * | 2000-04-05 | 2001-10-18 | Deutsch Zentr Luft & Raumfahrt | Mikrofunktionseinheit |
WO2003010545A1 (de) * | 2001-07-26 | 2003-02-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Mikromechanisches bauelement |
JP4137872B2 (ja) | 2004-03-31 | 2008-08-20 | シャープ株式会社 | 静電アクチュエーター,マイクロスイッチ,マイクロ光スイッチ,マイクロ光スイッチシステム,通信装置および静電アクチュエーターの製造方法 |
CN100451737C (zh) * | 2004-04-23 | 2009-01-14 | 研究三角协会 | 柔性静电激励器 |
WO2006013741A1 (ja) * | 2004-08-05 | 2006-02-09 | Matsushita Electric Industrial Co., Ltd. | 捩り共振器およびこれを用いたフィルタ |
US7298017B1 (en) * | 2004-08-28 | 2007-11-20 | Hrl Laboratories, Llc | Actuation using lithium/metal alloys and actuator device |
CN1295138C (zh) * | 2004-12-17 | 2007-01-17 | 华中科技大学 | 一种薄膜微桥结构的制作方法 |
WO2006075717A1 (ja) * | 2005-01-13 | 2006-07-20 | Matsushita Electric Industrial Co., Ltd. | 捩り共振器およびこれを用いたフィルタ |
US7655996B1 (en) * | 2005-02-03 | 2010-02-02 | The United States Of America As Represented By The Secretary Of The Army | MEMS structure support and release mechanism |
CN1314576C (zh) * | 2005-05-25 | 2007-05-09 | 西北工业大学 | 一种微型平板静电驱动器及其制作方法 |
JP4641217B2 (ja) | 2005-06-08 | 2011-03-02 | 株式会社豊田中央研究所 | マイクロホンとその製造方法 |
CN100422070C (zh) * | 2005-08-12 | 2008-10-01 | 中国科学院上海微系统与信息技术研究所 | 一种由硅和二氧化硅共同支撑的可移动微结构及制作方法 |
JP4724505B2 (ja) * | 2005-09-09 | 2011-07-13 | 株式会社日立製作所 | 超音波探触子およびその製造方法 |
US7482664B2 (en) * | 2006-01-09 | 2009-01-27 | Microsoft Corporation | Out-of-plane electrostatic actuator |
JP4762766B2 (ja) * | 2006-03-17 | 2011-08-31 | 株式会社リコー | 無線通信装置及び無線通信システム |
US20070284680A1 (en) * | 2006-04-20 | 2007-12-13 | Matsushita Electric Industrial Co., Ltd. | Method for manufacturing semiconductor device and semiconductor device using the same |
JP4994096B2 (ja) * | 2006-04-20 | 2012-08-08 | パナソニック株式会社 | 半導体装置の製造方法およびこれを用いた半導体装置 |
KR100790878B1 (ko) * | 2006-06-13 | 2008-01-03 | 삼성전자주식회사 | 상하 구조가 디커플된 콤전극의 자기정렬 식각 방법 |
TWI312530B (en) | 2006-07-24 | 2009-07-21 | Touch Micro System Tech | Method of fabricating a hinge |
CN101121498B (zh) * | 2006-08-07 | 2011-01-26 | 探微科技股份有限公司 | 制作微扭转轴的方法 |
WO2008069176A1 (ja) * | 2006-12-05 | 2008-06-12 | Panasonic Corporation | アクチュエータ |
TWI474964B (zh) * | 2008-03-03 | 2015-03-01 | Hk Applied Science & Tech Res | 微機電致動裝置 |
US8067810B2 (en) * | 2008-03-28 | 2011-11-29 | Imec | Self-actuating RF MEMS device by RF power actuation |
US7830227B1 (en) * | 2008-09-18 | 2010-11-09 | Hrl Laboratories, Llc | Device having integrated MEMS switches and filters |
CN101738723A (zh) * | 2008-11-07 | 2010-06-16 | 鸿富锦精密工业(深圳)有限公司 | 数字显示装置 |
EP2458610B1 (de) | 2010-11-30 | 2013-06-05 | Nxp B.V. | MEMS-Schalter |
US8237521B1 (en) * | 2010-12-09 | 2012-08-07 | The United States Of America As Represented By The Secretary Of The Army | Triaxial MEMS acceleration switch |
DE102012208117B4 (de) | 2012-05-15 | 2023-10-05 | Robert Bosch Gmbh | Mikromechanisches Bauteil |
US9828244B2 (en) * | 2014-09-30 | 2017-11-28 | Apple Inc. | Compliant electrostatic transfer head with defined cavity |
FR3028257A1 (fr) * | 2014-11-10 | 2016-05-13 | Tronic's Microsystems | Procede de fabrication d'un dispositif electromecanique et dispositif correspondant |
CN105712290B (zh) * | 2014-12-04 | 2017-09-29 | 无锡华润上华半导体有限公司 | Mems静电驱动器的制作方法 |
JP2016186598A (ja) * | 2015-03-27 | 2016-10-27 | 新電元工業株式会社 | 制御装置および制御方法 |
IT201900004797A1 (it) * | 2019-03-29 | 2020-09-29 | St Microelectronics Srl | Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio |
CN110240116B (zh) * | 2019-06-12 | 2020-06-16 | 上海芯物科技有限公司 | 一种旋转结构及其制备方法 |
CN111217322B (zh) * | 2020-01-17 | 2021-02-09 | 上海芯物科技有限公司 | 一种旋转结构的制备方法以及旋转结构 |
CN111217321B (zh) * | 2020-01-17 | 2021-01-12 | 上海芯物科技有限公司 | 一种旋转结构的制备方法以及旋转结构 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8002635A (nl) | 1980-05-08 | 1981-12-01 | Philips Nv | Programmeerbare halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. |
US5214727A (en) * | 1992-01-16 | 1993-05-25 | The Trustees Of Princeton University | Electrostatic microactuator |
DE4224599C2 (de) | 1992-07-23 | 2000-09-21 | Contec Ges Fuer Ind Elektronik | Elektrostatische Ablenkeinheit |
US5619061A (en) | 1993-07-27 | 1997-04-08 | Texas Instruments Incorporated | Micromechanical microwave switching |
AU7579296A (en) * | 1995-11-14 | 1997-06-05 | Smiths Industries Public Limited Company | Switches and switching systems |
JPH09180616A (ja) | 1995-12-28 | 1997-07-11 | Omron Corp | 静電継電器および静電継電器の製造方法 |
JPH11176307A (ja) | 1997-12-08 | 1999-07-02 | Omron Corp | 静電マイクロリレー |
US20020071169A1 (en) * | 2000-02-01 | 2002-06-13 | Bowers John Edward | Micro-electro-mechanical-system (MEMS) mirror device |
IL150969A0 (en) * | 2000-02-02 | 2003-02-12 | Raytheon Co | Microelectromechanical micro-relay with liquid metal contacts |
US6537437B1 (en) * | 2000-11-13 | 2003-03-25 | Sandia Corporation | Surface-micromachined microfluidic devices |
JP4483129B2 (ja) * | 2001-05-22 | 2010-06-16 | 住友電気工業株式会社 | 光スイッチ |
-
2001
- 2001-10-24 JP JP2001326102A patent/JP3775276B2/ja not_active Expired - Fee Related
-
2002
- 2002-10-23 US US10/279,192 patent/US6734512B2/en not_active Expired - Fee Related
- 2002-10-24 CN CNB021515859A patent/CN1193926C/zh not_active Expired - Fee Related
- 2002-10-24 EP EP02090362A patent/EP1306869B1/de not_active Expired - Fee Related
- 2002-10-24 DE DE60201159T patent/DE60201159T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1193926C (zh) | 2005-03-23 |
CN1448333A (zh) | 2003-10-15 |
US6734512B2 (en) | 2004-05-11 |
DE60201159T2 (de) | 2005-10-13 |
JP3775276B2 (ja) | 2006-05-17 |
EP1306869A1 (de) | 2003-05-02 |
US20030076006A1 (en) | 2003-04-24 |
JP2003127100A (ja) | 2003-05-08 |
EP1306869B1 (de) | 2004-09-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60201159D1 (de) | Elektrostatischer Betätiger | |
DE60228379D1 (de) | Elektrohydraulischer Stellantrieb | |
DE50105767D1 (de) | Elektroabscheider | |
DE50103647D1 (de) | Piezoaktor | |
DE50203420D1 (de) | Aktorsystem | |
NO20025340L (no) | Aktuatoranordning | |
DE60327734D1 (de) | Aktuator | |
NO20025341D0 (no) | Aktuatoranordning | |
DE60111004D1 (de) | Stellantrieb | |
DE50207981D1 (de) | Elektromagnetischer Stellantrieb | |
ATA7972001A (de) | Elektrostatisches mikrofon | |
DE10085450T1 (de) | Dynamisch-symmetrischer Betätiger | |
FR2819624B1 (fr) | Actionneur electromagnetique | |
DE60129179D1 (de) | Betätigungseinrichtung | |
FR2812704B1 (fr) | Actionneur | |
DE60130174D1 (de) | Betätigungsvorrichtung | |
DE60225369D1 (de) | Linearantrieb | |
DE50213315D1 (de) | Aktuator | |
FR2829215B1 (fr) | Actionneurs de vitesses | |
DE60117932D1 (de) | Stellantrieb | |
DE50202752D1 (de) | Mikroskop | |
ITMI20020900A0 (it) | Soffietto | |
FI20011048A (fi) | Tilajärjestely | |
DE50303096D1 (de) | Aktuatorvorrichtung | |
DE60218569D1 (de) | Elektromagnetischer Betätiger |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: DENSO CORP., KARIYA, AICHI, JP |
|
8364 | No opposition during term of opposition |