DE60213051D1 - Schaltvorrichtung, insbesondere für optische Anwendungen - Google Patents

Schaltvorrichtung, insbesondere für optische Anwendungen

Info

Publication number
DE60213051D1
DE60213051D1 DE60213051T DE60213051T DE60213051D1 DE 60213051 D1 DE60213051 D1 DE 60213051D1 DE 60213051 T DE60213051 T DE 60213051T DE 60213051 T DE60213051 T DE 60213051T DE 60213051 D1 DE60213051 D1 DE 60213051D1
Authority
DE
Germany
Prior art keywords
mobile element
actuating electrode
switching position
elastic member
switching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60213051T
Other languages
English (en)
Other versions
DE60213051T2 (de
Inventor
Claude Bourgeois
Carsten Underbjerg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Colibrys SA
Original Assignee
Colibrys SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibrys SA filed Critical Colibrys SA
Application granted granted Critical
Publication of DE60213051D1 publication Critical patent/DE60213051D1/de
Publication of DE60213051T2 publication Critical patent/DE60213051T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
DE60213051T 2001-10-04 2002-10-03 Schaltvorrichtung, insbesondere für optische Anwendungen Expired - Lifetime DE60213051T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP01203752 2001-10-04
EP01203749 2001-10-04
EP01203752 2001-10-04
EP01203749 2001-10-04

Publications (2)

Publication Number Publication Date
DE60213051D1 true DE60213051D1 (de) 2006-08-24
DE60213051T2 DE60213051T2 (de) 2007-07-05

Family

ID=26077009

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60213051T Expired - Lifetime DE60213051T2 (de) 2001-10-04 2002-10-03 Schaltvorrichtung, insbesondere für optische Anwendungen

Country Status (10)

Country Link
US (1) US6701039B2 (de)
EP (1) EP1300714B1 (de)
JP (1) JP4238132B2 (de)
KR (1) KR100944203B1 (de)
AT (1) ATE333105T1 (de)
AU (1) AU2002362541B2 (de)
CA (1) CA2462812C (de)
DE (1) DE60213051T2 (de)
DK (1) DK1300714T3 (de)
WO (1) WO2003029874A2 (de)

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US7742016B2 (en) * 2005-02-23 2010-06-22 Pixtronix, Incorporated Display methods and apparatus
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US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US20080158635A1 (en) * 2005-02-23 2008-07-03 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
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US7502159B2 (en) * 2005-02-23 2009-03-10 Pixtronix, Inc. Methods and apparatus for actuating displays
US7405852B2 (en) * 2005-02-23 2008-07-29 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
DE602006003737D1 (de) * 2005-02-23 2009-01-02 Pixtronix Inc Licht-modulator und verfahren zu seiner herstellung
US7999994B2 (en) * 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7675665B2 (en) 2005-02-23 2010-03-09 Pixtronix, Incorporated Methods and apparatus for actuating displays
US9082353B2 (en) * 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US7755582B2 (en) * 2005-02-23 2010-07-13 Pixtronix, Incorporated Display methods and apparatus
US7468572B2 (en) * 2005-03-28 2008-12-23 Maurice Thomas Versatile digitally controlled micro-mechanical actuator
US7656568B2 (en) * 2005-05-18 2010-02-02 The Regents Of The University Of California Optical switch using frequency-based addressing in a microelectromechanical systems array
JP2007074826A (ja) * 2005-09-07 2007-03-22 Fujifilm Corp 微小電気機械素子及び微小電気機械素子アレイ
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7876489B2 (en) * 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
WO2008051362A1 (en) * 2006-10-20 2008-05-02 Pixtronix, Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
US20100188443A1 (en) * 2007-01-19 2010-07-29 Pixtronix, Inc Sensor-based feedback for display apparatus
US9176318B2 (en) * 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US7832948B1 (en) * 2007-09-13 2010-11-16 Tessera MEMS Technologies, Inc. Impulse actuated MEMS devices
TWI418850B (zh) * 2007-11-09 2013-12-11 尼康股份有限公司 微致動器、光學設備、顯示裝置、曝光裝置及設備製造方法
WO2009102471A1 (en) * 2008-02-12 2009-08-20 Pixtronix, Inc. Mechanical light modulators with stressed beams
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
US7920317B2 (en) * 2008-08-04 2011-04-05 Pixtronix, Inc. Display with controlled formation of bubbles
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
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KR20120132680A (ko) 2010-02-02 2012-12-07 픽스트로닉스 인코포레이티드 저온 실 유체 충전된 디스플레이 장치의 제조 방법
BR112012022900A2 (pt) 2010-03-11 2018-06-05 Pixtronix Inc modos de operação transflexivos e refletivos para um dispositivo de exibição
KR20130130779A (ko) 2010-12-20 2013-12-02 픽스트로닉스 인코포레이티드 감소된 음향 방출을 갖는 mems 광 변조기 어레이들을 위한 시스템들 및 방법들
US8749538B2 (en) 2011-10-21 2014-06-10 Qualcomm Mems Technologies, Inc. Device and method of controlling brightness of a display based on ambient lighting conditions
US9385634B2 (en) * 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
JP5714517B2 (ja) * 2012-01-30 2015-05-07 シャープ株式会社 バックライト、および該バックライトを備えた液晶表示装置、ならびにバックライト点灯方法
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JP6953118B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン ディスプレイのためのｍｅｍｓ光変調器
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DE102018207783B4 (de) 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement
CN110725773B (zh) * 2019-11-06 2020-09-04 北京纳米能源与系统研究所 水下能量收集装置及水下作业设备

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Also Published As

Publication number Publication date
ATE333105T1 (de) 2006-08-15
US20030068118A1 (en) 2003-04-10
DE60213051T2 (de) 2007-07-05
EP1300714B1 (de) 2006-07-12
WO2003029874A3 (en) 2004-03-25
AU2002362541B2 (en) 2007-07-05
CA2462812C (en) 2010-12-14
US6701039B2 (en) 2004-03-02
DK1300714T3 (da) 2006-11-13
WO2003029874A2 (en) 2003-04-10
EP1300714A1 (de) 2003-04-09
KR100944203B1 (ko) 2010-02-26
JP4238132B2 (ja) 2009-03-11
CA2462812A1 (en) 2003-04-10
JP2005504355A (ja) 2005-02-10
KR20040051598A (ko) 2004-06-18

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8364 No opposition during term of opposition