DE60225548D1 - Dungsionisierter luft - Google Patents

Dungsionisierter luft

Info

Publication number
DE60225548D1
DE60225548D1 DE60225548T DE60225548T DE60225548D1 DE 60225548 D1 DE60225548 D1 DE 60225548D1 DE 60225548 T DE60225548 T DE 60225548T DE 60225548 T DE60225548 T DE 60225548T DE 60225548 D1 DE60225548 D1 DE 60225548D1
Authority
DE
Germany
Prior art keywords
ductioned
air
ductioned air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60225548T
Other languages
English (en)
Other versions
DE60225548T2 (de
Inventor
Akira Mizuno
Akio Sugita
Masanori Suzuki
Tomokatsu Sato
Toshihiko Hino
Haruyuki Togari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Techno Ryowa Ltd
Harada Corp
Original Assignee
Hamamatsu Photonics KK
Techno Ryowa Ltd
Harada Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK, Techno Ryowa Ltd, Harada Corp filed Critical Hamamatsu Photonics KK
Publication of DE60225548D1 publication Critical patent/DE60225548D1/de
Application granted granted Critical
Publication of DE60225548T2 publication Critical patent/DE60225548T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
DE60225548T 2001-05-29 2002-05-28 Staubfreier ionisierer des typs mit strömungsentladungsionisierter luft Expired - Lifetime DE60225548T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001161060 2001-05-29
JP2001161060A JP4738636B2 (ja) 2001-05-29 2001-05-29 防爆型無発塵イオナイザー
PCT/JP2002/005136 WO2002098188A1 (en) 2001-05-29 2002-05-28 Ionized air flow discharge type non-dusting ionizer

Publications (2)

Publication Number Publication Date
DE60225548D1 true DE60225548D1 (de) 2008-04-24
DE60225548T2 DE60225548T2 (de) 2009-04-23

Family

ID=19004394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60225548T Expired - Lifetime DE60225548T2 (de) 2001-05-29 2002-05-28 Staubfreier ionisierer des typs mit strömungsentladungsionisierter luft

Country Status (8)

Country Link
US (2) US7126807B2 (de)
EP (2) EP1397030B1 (de)
JP (1) JP4738636B2 (de)
KR (1) KR100912981B1 (de)
CN (1) CN1301633C (de)
DE (1) DE60225548T2 (de)
TW (1) TWI242394B (de)
WO (1) WO2002098188A1 (de)

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JP4446755B2 (ja) * 2004-01-29 2010-04-07 トヨタ自動車株式会社 除電除塵器
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JP4594111B2 (ja) * 2005-01-17 2010-12-08 株式会社コガネイ 除電装置および放電モジュール
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CN102136681B (zh) * 2010-01-26 2013-01-02 罗莎国际有限公司 自冷式离子化空气产生装置
JP5485056B2 (ja) * 2010-07-21 2014-05-07 東京エレクトロン株式会社 イオン供給装置及びこれを備えた被処理体の処理システム
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JP5937918B2 (ja) * 2012-08-08 2016-06-22 シャープ株式会社 イオン発生装置およびこれを備えた除電装置
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CN103353142A (zh) * 2013-05-30 2013-10-16 苏州华达仪器设备有限公司 一种空气静电中和装置
US9826610B2 (en) 2014-07-23 2017-11-21 Moxtek, Inc. Electrostatic-dissipation device
US9779847B2 (en) 2014-07-23 2017-10-03 Moxtek, Inc. Spark gap X-ray source
US9839106B2 (en) 2014-07-23 2017-12-05 Moxtek, Inc. Flat-panel-display, bottom-side, electrostatic-dissipation
US9839107B2 (en) * 2014-07-23 2017-12-05 Moxtek, Inc. Flowing-fluid X-ray induced ionic electrostatic dissipation
US9084334B1 (en) 2014-11-10 2015-07-14 Illinois Tool Works Inc. Balanced barrier discharge neutralization in variable pressure environments
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US10524341B2 (en) 2015-05-08 2019-12-31 Moxtek, Inc. Flowing-fluid X-ray induced ionic electrostatic dissipation
JP6655418B2 (ja) 2016-02-17 2020-02-26 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
WO2018035571A1 (en) * 2016-08-26 2018-03-01 Saeid Vossoughi Khazaei A gas purifying apparatus
KR102020911B1 (ko) * 2018-02-26 2019-09-11 (주)선재하이테크 가스 스트림에 적용되는 인-라인형 정전기 제거장치
KR102552934B1 (ko) * 2023-02-06 2023-07-07 주식회사 저스템 배플 구조를 갖춘 진공 제전 장치

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Also Published As

Publication number Publication date
CN1301633C (zh) 2007-02-21
US20040218315A1 (en) 2004-11-04
JP4738636B2 (ja) 2011-08-03
EP1947915A2 (de) 2008-07-23
JP2002352997A (ja) 2002-12-06
DE60225548T2 (de) 2009-04-23
WO2002098188A9 (fr) 2003-04-10
US7126807B2 (en) 2006-10-24
US20060279897A1 (en) 2006-12-14
KR20040004662A (ko) 2004-01-13
EP1397030A1 (de) 2004-03-10
TWI242394B (en) 2005-10-21
CN1513284A (zh) 2004-07-14
KR100912981B1 (ko) 2009-08-20
EP1397030A4 (de) 2004-09-01
US7397647B2 (en) 2008-07-08
EP1397030B1 (de) 2008-03-12
WO2002098188A1 (en) 2002-12-05

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Legal Events

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