DE60232091D1 - Vorrichtung zum kompensieren einer thermisch induzierten bewegung einer prüfkarte - Google Patents

Vorrichtung zum kompensieren einer thermisch induzierten bewegung einer prüfkarte

Info

Publication number
DE60232091D1
DE60232091D1 DE60232091T DE60232091T DE60232091D1 DE 60232091 D1 DE60232091 D1 DE 60232091D1 DE 60232091 T DE60232091 T DE 60232091T DE 60232091 T DE60232091 T DE 60232091T DE 60232091 D1 DE60232091 D1 DE 60232091D1
Authority
DE
Germany
Prior art keywords
compensating
test card
thermally induced
induced movement
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60232091T
Other languages
English (en)
Inventor
Benjamin N Eldridge
Gary W Grube
Ken S Matsubayashi
Richard A Larder
Makarand S Shinde
Gaetan L Mathieu
Rod Martens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/159,560 external-priority patent/US6972578B2/en
Application filed by FormFactor Inc filed Critical FormFactor Inc
Application granted granted Critical
Publication of DE60232091D1 publication Critical patent/DE60232091D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/44—Modifications of instruments for temperature compensation
DE60232091T 2001-11-02 2002-11-01 Vorrichtung zum kompensieren einer thermisch induzierten bewegung einer prüfkarte Expired - Lifetime DE60232091D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/003,012 US7071714B2 (en) 2001-11-02 2001-11-02 Method and system for compensating for thermally induced motion of probe cards
US10/034,412 US7002363B2 (en) 2001-11-02 2001-12-27 Method and system for compensating thermally induced motion of probe cards
US10/159,560 US6972578B2 (en) 2001-11-02 2002-05-31 Method and system for compensating thermally induced motion of probe cards
PCT/US2002/035022 WO2003040734A2 (en) 2001-11-02 2002-11-01 Method and system for compensating thermally induced motion of probe cards

Publications (1)

Publication Number Publication Date
DE60232091D1 true DE60232091D1 (de) 2009-06-04

Family

ID=21703657

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60232091T Expired - Lifetime DE60232091D1 (de) 2001-11-02 2002-11-01 Vorrichtung zum kompensieren einer thermisch induzierten bewegung einer prüfkarte

Country Status (5)

Country Link
US (4) US7071714B2 (de)
JP (1) JP2008224688A (de)
KR (2) KR101015484B1 (de)
DE (1) DE60232091D1 (de)
TW (1) TWI292197B (de)

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US7312618B2 (en) 2007-12-25
JP2008224688A (ja) 2008-09-25
US20060238211A1 (en) 2006-10-26
US7642794B2 (en) 2010-01-05
US20030085724A1 (en) 2003-05-08
KR101015484B1 (ko) 2011-02-22
US7002363B2 (en) 2006-02-21
US20080094088A1 (en) 2008-04-24
TW200300278A (en) 2003-05-16
TWI292197B (en) 2008-01-01
US20030085721A1 (en) 2003-05-08
KR20100003740A (ko) 2010-01-11
KR100986105B1 (ko) 2010-10-08

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