DE60239359D1 - HERSTELLUNGSVERFAHREN EINES GUT WÄRMELEITENDES Si-HALTENDES MATERIAL - Google Patents

HERSTELLUNGSVERFAHREN EINES GUT WÄRMELEITENDES Si-HALTENDES MATERIAL

Info

Publication number
DE60239359D1
DE60239359D1 DE60239359T DE60239359T DE60239359D1 DE 60239359 D1 DE60239359 D1 DE 60239359D1 DE 60239359 T DE60239359 T DE 60239359T DE 60239359 T DE60239359 T DE 60239359T DE 60239359 D1 DE60239359 D1 DE 60239359D1
Authority
DE
Germany
Prior art keywords
retaining
manufacturing
well
holding material
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239359T
Other languages
English (en)
Inventor
Kenji Morimoto
Shinji Kawasaki
Hiroaki Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60239359D1 publication Critical patent/DE60239359D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/428—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C04B2235/728—Silicon content
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/76—Crystal structural characteristics, e.g. symmetry
    • C04B2235/761—Unit-cell parameters, e.g. lattice constants
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • C04B2235/9623—Ceramic setters properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
DE60239359T 2001-12-21 2002-12-19 HERSTELLUNGSVERFAHREN EINES GUT WÄRMELEITENDES Si-HALTENDES MATERIAL Expired - Lifetime DE60239359D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001389459 2001-12-21
JP2002017373A JP4136380B2 (ja) 2001-12-21 2002-01-25 高熱伝導性含Ｓｉ材料及びその製造方法
PCT/JP2002/013273 WO2003053880A1 (fr) 2001-12-21 2002-12-19 Materiau a base de si a coefficient de conduction thermique eleve et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE60239359D1 true DE60239359D1 (de) 2011-04-14

Family

ID=26625209

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239359T Expired - Lifetime DE60239359D1 (de) 2001-12-21 2002-12-19 HERSTELLUNGSVERFAHREN EINES GUT WÄRMELEITENDES Si-HALTENDES MATERIAL

Country Status (7)

Country Link
US (2) US20050124483A1 (de)
EP (1) EP1466879B1 (de)
JP (1) JP4136380B2 (de)
KR (1) KR100607477B1 (de)
AU (1) AU2002354232A1 (de)
DE (1) DE60239359D1 (de)
WO (1) WO2003053880A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3927038B2 (ja) * 2001-12-21 2007-06-06 日本碍子株式会社 Ｓｉ含有ハニカム構造体及びその製造方法
JP5048266B2 (ja) * 2006-04-27 2012-10-17 株式会社アライドマテリアル 放熱基板とその製造方法
EP2514713B1 (de) 2011-04-20 2013-10-02 Tronics Microsystems S.A. Mikroelektromechanische Systemvorrichtung (MEMS-Vorrichtung)
JP6633014B2 (ja) 2017-03-17 2020-01-22 日本碍子株式会社 炭化珪素質ハニカム構造体の製造方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838387B2 (ja) * 1979-02-13 1983-08-23 旭硝子株式会社 窒化珪素または炭化珪素の焼結体の製造方法
US4299631A (en) 1979-04-24 1981-11-10 United Kingdom Atomic Energy Authority Silicon carbide bodies and their production
JPS60131862A (ja) * 1983-12-16 1985-07-13 三菱マテリアル株式会社 高強度炭化けい素基焼結体
JPS60221380A (ja) * 1984-04-13 1985-11-06 株式会社日立製作所 炭化けい素焼結体のメタライズ法
US4970057A (en) * 1989-04-28 1990-11-13 Norton Company Silicon nitride vacuum furnace process
US5432253A (en) * 1989-12-18 1995-07-11 General Electric Company Composite containing fibrous material
DE69131247T2 (de) * 1990-11-20 1999-09-23 Asahi Glass Co Ltd Wärmebehandlungsapparate für Halbleiter und hochreine Siliciumcarbidteile für die Apparate und Verfahren zu ihrer Herstellung
DE69215766D1 (de) 1991-06-17 1997-01-23 Gen Electric Siliziumcarbid-Verbundwerkstoff verstärkt mit Metallnitrid beschichteten Fasern
JPH0813706B2 (ja) 1991-07-02 1996-02-14 工業技術院長 炭化珪素／金属珪素複合体及びその製造方法
US5589116A (en) * 1991-07-18 1996-12-31 Sumitomo Metal Industries, Ltd. Process for preparing a silicon carbide sintered body for use in semiconductor equipment
JPH06345412A (ja) 1993-06-07 1994-12-20 Mitsubishi Gas Chem Co Inc 高純度窒化ケイ素−炭化ケイ素複合微粉末およびその製造方法
JPH09100179A (ja) * 1995-07-26 1997-04-15 Sumitomo Electric Ind Ltd 窒化ケイ素質多孔体およびその製造方法
JPH10291857A (ja) * 1997-04-22 1998-11-04 Hitachi Chem Co Ltd 高電気比抵抗ＳｉＣ焼結体
JP3497355B2 (ja) * 1997-10-06 2004-02-16 信越フィルム株式会社 シリコンの精製方法
JP3686247B2 (ja) 1998-01-20 2005-08-24 富士通株式会社 半導体装置及びその製造方法
WO2000007959A1 (fr) * 1998-08-07 2000-02-17 Bridgestone Corporation Fritte de carbure de silicium et son procede de production
US6387834B1 (en) * 1999-06-02 2002-05-14 Bridgestone Corporation Sintered silicon carbide body and method for producing the same
EP1114807B1 (de) * 1999-06-14 2005-07-27 Sumitomo Electric Industries, Ltd. Einen verbundwerkstoff verwendendes halbleiterbauteil oder wärmeableitendes substrat dafür
JP2001019552A (ja) * 1999-07-09 2001-01-23 Bridgestone Corp 炭化ケイ素焼結体及びその製造方法
CA2380288A1 (en) 1999-07-23 2001-02-01 M Cubed Technologies, Inc. Improved silicon carbide composites and methods for making same
WO2001060764A1 (fr) * 2000-02-15 2001-08-23 Toshiba Ceramics Co., Ltd. PROCEDE DE FABRICATION D'ELEMENT Si-SiC POUR TRAITEMENT THERMIQUE DE SEMI-CONDUCTEURS
JP4136319B2 (ja) 2000-04-14 2008-08-20 日本碍子株式会社 ハニカム構造体及びその製造方法
US20030151152A1 (en) * 2002-02-08 2003-08-14 Coorstek, Inc. Body armor and methods for its production

Also Published As

Publication number Publication date
US20050124483A1 (en) 2005-06-09
AU2002354232A1 (en) 2003-07-09
KR100607477B1 (ko) 2006-08-02
KR20040071746A (ko) 2004-08-12
JP4136380B2 (ja) 2008-08-20
US7442662B2 (en) 2008-10-28
EP1466879A1 (de) 2004-10-13
EP1466879B1 (de) 2011-03-02
WO2003053880A1 (fr) 2003-07-03
US20060194689A1 (en) 2006-08-31
EP1466879A4 (de) 2007-07-25
JP2003246674A (ja) 2003-09-02

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