DE60310640D1 - Mehrlagig thermischer Aktuator mit optimierter Heizelementlänge und dazugehöriges Betriebsverfahren - Google Patents

Mehrlagig thermischer Aktuator mit optimierter Heizelementlänge und dazugehöriges Betriebsverfahren

Info

Publication number
DE60310640D1
DE60310640D1 DE60310640T DE60310640T DE60310640D1 DE 60310640 D1 DE60310640 D1 DE 60310640D1 DE 60310640 T DE60310640 T DE 60310640T DE 60310640 T DE60310640 T DE 60310640T DE 60310640 D1 DE60310640 D1 DE 60310640D1
Authority
DE
Germany
Prior art keywords
heating element
operating method
thermal actuator
element length
associated operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60310640T
Other languages
English (en)
Other versions
DE60310640T2 (de
Inventor
Antonio Cabal
Edward P Furlani
John A Lebens
David P Trauernicht
David S Ross
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE60310640D1 publication Critical patent/DE60310640D1/de
Publication of DE60310640T2 publication Critical patent/DE60310640T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1648Production of print heads with thermal bend detached actuators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
DE60310640T 2002-05-23 2003-05-12 Mehrschichtige thermische Betätigungsvorrichtung mit optimierter Heizelementlänge sowie Verfahren zu deren Betrieb Expired - Lifetime DE60310640T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/154,634 US6598960B1 (en) 2002-05-23 2002-05-23 Multi-layer thermal actuator with optimized heater length and method of operating same
US154634 2002-05-23

Publications (2)

Publication Number Publication Date
DE60310640D1 true DE60310640D1 (de) 2007-02-08
DE60310640T2 DE60310640T2 (de) 2007-11-15

Family

ID=27612694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60310640T Expired - Lifetime DE60310640T2 (de) 2002-05-23 2003-05-12 Mehrschichtige thermische Betätigungsvorrichtung mit optimierter Heizelementlänge sowie Verfahren zu deren Betrieb

Country Status (4)

Country Link
US (1) US6598960B1 (de)
EP (1) EP1364792B1 (de)
JP (1) JP2004001517A (de)
DE (1) DE60310640T2 (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US6540331B2 (en) * 1997-07-15 2003-04-01 Silverbrook Research Pty Ltd Actuating mechanism which includes a thermal bend actuator
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US6557977B1 (en) * 1997-07-15 2003-05-06 Silverbrook Research Pty Ltd Shape memory alloy ink jet printing mechanism
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US7527357B2 (en) 1997-07-15 2009-05-05 Silverbrook Research Pty Ltd Inkjet nozzle array with individual feed channel for each nozzle
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US6188415B1 (en) 1997-07-15 2001-02-13 Silverbrook Research Pty Ltd Ink jet printer having a thermal actuator comprising an external coil spring
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US6682176B2 (en) * 1997-07-15 2004-01-27 Silverbrook Research Pty Ltd Ink jet printhead chip with nozzle arrangements incorporating spaced actuating arms
US6742873B1 (en) * 2001-04-16 2004-06-01 Silverbrook Research Pty Ltd Inkjet printhead construction
EP1121249B1 (de) 1998-10-16 2007-07-25 Silverbrook Research Pty. Limited Verfahren zur herstellung einer düse für einen tintenstrahldruckkopf
US20050175127A1 (en) * 2002-10-04 2005-08-11 Rohde & Schwarz Gmbh & Co. Kg Method for determining the phase-and/or amplitude-noise spectrum of a digitally modulated signal
US6820967B2 (en) 2002-11-23 2004-11-23 Silverbrook Research Pty Ltd Thermal ink jet printhead with heaters formed from low atomic number elements
US7334876B2 (en) * 2002-11-23 2008-02-26 Silverbrook Research Pty Ltd Printhead heaters with small surface area
US7073890B2 (en) * 2003-08-28 2006-07-11 Eastman Kodak Company Thermally conductive thermal actuator and liquid drop emitter using same
US7011394B2 (en) * 2003-08-28 2006-03-14 Eastman Kodak Company Liquid drop emitter with reduced surface temperature actuator
US7331650B2 (en) * 2004-04-08 2008-02-19 Eastman Kodak Company Printhead having a removable nozzle plate
US7374274B2 (en) * 2004-08-20 2008-05-20 Lexmark International, Inc. Method of operating a microelectromechanical inkjet ejector to achieve a predetermined mechanical deflection
US7175258B2 (en) * 2004-11-22 2007-02-13 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US7283030B2 (en) * 2004-11-22 2007-10-16 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US7188931B2 (en) * 2004-11-22 2007-03-13 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US20060221114A1 (en) * 2005-04-04 2006-10-05 Silverbrook Research Pty Ltd MEMS fluid sensor
US7448729B2 (en) 2005-04-04 2008-11-11 Silverbrook Research Pty Ltd Inkjet printhead heater elements with thin or non-existent coatings
EP1871605A4 (de) * 2005-04-04 2013-02-20 Silverbrook Res Pty Ltd Mems-fluidsensor
US7431431B2 (en) * 2005-04-04 2008-10-07 Silverbrook Research Pty Ltd Self passivating transition metal nitride printhead heaters
US7377623B2 (en) * 2005-04-04 2008-05-27 Silverbrook Research Pty Ltd Printhead heaters with a nanocrystalline composite structure
US7654645B2 (en) * 2005-04-04 2010-02-02 Silverbrook Research Pty Ltd MEMS bubble generator
US7246876B2 (en) * 2005-04-04 2007-07-24 Silverbrook Research Pty Ltd Inkjet printhead for printing with low density keep-wet dots
US7419249B2 (en) * 2005-04-04 2008-09-02 Silverbrook Research Pty Ltd Inkjet printhead with low thermal product layer
JP2008000960A (ja) * 2006-06-21 2008-01-10 Canon Inc 記録ヘッド
JP2008055643A (ja) * 2006-08-29 2008-03-13 Canon Inc 記録ヘッド
US7794056B2 (en) * 2006-12-04 2010-09-14 Silverbrook Research Pty Ltd Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof
US7735970B2 (en) * 2006-12-04 2010-06-15 Silverbrook Research Pty Ltd Thermal bend actuator comprising passive element having negative thermal expansion
US7901046B2 (en) * 2006-12-04 2011-03-08 Silverbrook Research Pty Ltd Thermal bend actuator comprising conduction pads
US20090030095A1 (en) * 2007-07-24 2009-01-29 Laverdure Kenneth S Polystyrene compositions and methods of making and using same
SG187483A1 (en) * 2008-11-10 2013-02-28 Silverbrook Res Pty Ltd Printhead with increasing drive pulse to counter heater oxide growth
EP2632726B1 (de) 2010-10-26 2015-07-01 Eastman Kodak Company Flüssigkeitsspender mit ausflussöffnung mit schräger wand
US8573743B2 (en) 2010-10-26 2013-11-05 Eastman Kodak Company Liquid dispenser including curved vent
WO2012058020A1 (en) 2010-10-26 2012-05-03 Eastman Kodak Company Liquid dispenser including multiple liquid return passages
US20120098888A1 (en) 2010-10-26 2012-04-26 Yonglin Xie Liquid dispenser including curved outlet opening wall
WO2012058019A1 (en) 2010-10-26 2012-05-03 Eastman Kodak Company Liquid dispenser including filter in return port
US8322825B2 (en) 2010-10-26 2012-12-04 Eastman Kodak Company Dispenser including overlapping outlet and return port
EP2632727B1 (de) 2010-10-26 2015-08-05 Eastman Kodak Company Spender mit einer anordnung aus flüssigkeitsausgabeelementen
WO2012058035A1 (en) 2010-10-26 2012-05-03 Eastman Kodak Company Liquid dispenser including secondary liquid manifold
US8864287B2 (en) * 2011-04-19 2014-10-21 Eastman Kodak Company Fluid ejection using MEMS composite transducer
US8783804B2 (en) 2012-03-28 2014-07-22 Eastman Kodak Company Functional liquid deposition using continuous liquid dispenser
US8770722B2 (en) 2012-03-28 2014-07-08 Eastman Kodak Company Functional liquid deposition using continuous liquid
TWI626168B (zh) 2013-07-25 2018-06-11 滿捷特科技公司 噴墨列印及保持噴嘴水合作用的方法
JP6524971B2 (ja) * 2016-06-14 2019-06-05 株式会社デンソー 荷重変動検出装置
US10943850B2 (en) 2018-08-10 2021-03-09 Frore Systems Inc. Piezoelectric MEMS-based active cooling for heat dissipation in compute devices
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
CN114586479A (zh) 2019-10-30 2022-06-03 福珞尔系统公司 基于mems的气流系统
US11510341B2 (en) * 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
US11765863B2 (en) 2020-10-02 2023-09-19 Frore Systems Inc. Active heat sink

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB792145A (en) * 1953-05-20 1958-03-19 Technograph Printed Circuits L Improvements in and relating to devices for obtaining a mechanical movement from theaction of an electric current
US3946398A (en) 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
SE349676B (de) 1971-01-11 1972-10-02 N Stemme
US4296421A (en) 1978-10-26 1981-10-20 Canon Kabushiki Kaisha Ink jet recording device using thermal propulsion and mechanical pressure changes
JP2728886B2 (ja) 1988-07-20 1998-03-18 キヤノン株式会社 画像処理装置
JPH07285221A (ja) 1994-04-19 1995-10-31 Sharp Corp インクジェットヘッド
US5599695A (en) 1995-02-27 1997-02-04 Affymetrix, Inc. Printing molecular library arrays using deprotection agents solely in the vapor phase
JP3257340B2 (ja) 1995-05-24 2002-02-18 松下電器産業株式会社 液体塗布方法、液体塗布装置およびスリットノズル
SE9503141D0 (sv) 1995-09-12 1995-09-12 Siemens Elema Ab Narkosapparat
US5812159A (en) * 1996-07-22 1998-09-22 Eastman Kodak Company Ink printing apparatus with improved heater
US5781331A (en) * 1997-01-24 1998-07-14 Roxburgh Ltd. Optical microshutter array
US6239821B1 (en) 1997-07-15 2001-05-29 Silverbrook Research Pty Ltd Direct firing thermal bend actuator ink jet printing mechanism
US6254793B1 (en) 1997-07-15 2001-07-03 Silverbrook Research Pty Ltd Method of manufacture of high Young's modulus thermoelastic inkjet printer
AUPP702298A0 (en) * 1998-11-09 1998-12-03 Silverbrook Research Pty Ltd Micromechanical device and method (IJ46I)
AUPO794797A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A device (MEMS07)
US6258284B1 (en) 1997-07-15 2001-07-10 Silverbrook Research Pty Ltd Method of manufacture of a dual nozzle single horizontal actuator ink jet printer
US6087638A (en) 1997-07-15 2000-07-11 Silverbrook Research Pty Ltd Corrugated MEMS heater structure
AUPO807497A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A method of manufacture of an image creation apparatus (IJM23)
AUPP089397A0 (en) 1997-12-12 1998-01-08 Silverbrook Research Pty Ltd Image creation method and apparatus (IJ37)
US6447099B2 (en) * 1997-07-15 2002-09-10 Silverbrook Research Pty Ltd Ink jet mechanism with thermoelastic bend actuator having conductive and resistive beams
US6234609B1 (en) 1997-07-15 2001-05-22 Silverbrook Research Pty Ltd High Young's modulus thermoelastic ink jet printing mechanism
AUPP259398A0 (en) 1998-03-25 1998-04-23 Silverbrook Research Pty Ltd Image creation method and apparatus (IJ41)
AUPP087397A0 (en) 1997-12-12 1998-01-08 Silverbrook Research Pty Ltd Image creation method and apparatus (IJ36)
US6180427B1 (en) 1997-07-15 2001-01-30 Silverbrook Research Pty. Ltd. Method of manufacture of a thermally actuated ink jet including a tapered heater element
US6211598B1 (en) * 1999-09-13 2001-04-03 Jds Uniphase Inc. In-plane MEMS thermal actuator and associated fabrication methods

Also Published As

Publication number Publication date
EP1364792A3 (de) 2004-05-19
DE60310640T2 (de) 2007-11-15
JP2004001517A (ja) 2004-01-08
EP1364792B1 (de) 2006-12-27
US6598960B1 (en) 2003-07-29
EP1364792A2 (de) 2003-11-26

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: CABAL, ANTONIO, ROCHESTER, N.Y., US

Inventor name: FURLANI, EDWARD P., ROCHESTER, N.Y., US

Inventor name: LEBENS, JOHN A., ROCHESTER, N.Y., US

Inventor name: TRAUERNICHT, DAVID P., ROCHESTER, N.Y., US

Inventor name: ROSS, DAVID S., ROCHESTER, N.Y., US

8364 No opposition during term of opposition