DE60334175D1 - Mikroelektromechanisches Betätigungssystem - Google Patents

Mikroelektromechanisches Betätigungssystem

Info

Publication number
DE60334175D1
DE60334175D1 DE60334175T DE60334175T DE60334175D1 DE 60334175 D1 DE60334175 D1 DE 60334175D1 DE 60334175 T DE60334175 T DE 60334175T DE 60334175 T DE60334175 T DE 60334175T DE 60334175 D1 DE60334175 D1 DE 60334175D1
Authority
DE
Germany
Prior art keywords
actuation system
microelectromechanical actuation
microelectromechanical
actuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60334175T
Other languages
English (en)
Inventor
John L Dunec
Armin R Volkel
Eric Peeters
Michel A Rosa
Dirk Debruyker
Thomas Hantschel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE60334175D1 publication Critical patent/DE60334175D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE60334175T 2002-04-30 2003-04-17 Mikroelektromechanisches Betätigungssystem Expired - Lifetime DE60334175D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/136,683 US6891240B2 (en) 2002-04-30 2002-04-30 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure

Publications (1)

Publication Number Publication Date
DE60334175D1 true DE60334175D1 (de) 2010-10-28

Family

ID=29215677

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60334175T Expired - Lifetime DE60334175D1 (de) 2002-04-30 2003-04-17 Mikroelektromechanisches Betätigungssystem

Country Status (4)

Country Link
US (2) US6891240B2 (de)
EP (1) EP1359118B1 (de)
JP (1) JP2004001209A (de)
DE (1) DE60334175D1 (de)

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US6891240B2 (en) 2002-04-30 2005-05-10 Xerox Corporation Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
FR2840102B1 (fr) * 2002-05-23 2004-07-16 Commissariat Energie Atomique Dispositif d'actionnement electrostatique miniature et installation comprenant de tels dispositifs
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US7325903B2 (en) * 2004-12-14 2008-02-05 Palo Alto Research Center Incorporated Quill-jet printer
US7286149B2 (en) * 2004-12-14 2007-10-23 Palo Alto Research Center Incorporated Direct xerography system
US20070145523A1 (en) * 2005-12-28 2007-06-28 Palo Alto Research Center Incorporated Integrateable capacitors and microcoils and methods of making thereof
US7517769B2 (en) * 2005-12-28 2009-04-14 Palo Alto Research Center Incorporated Integrateable capacitors and microcoils and methods of making thereof
US7525205B2 (en) * 2006-07-28 2009-04-28 Sanyo Electric Co., Ltd. Electric power generator
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TW200929196A (en) * 2007-12-28 2009-07-01 Univ Nat Chiao Tung Micro-optical pickup
CN101510486B (zh) * 2009-03-24 2011-01-05 中北大学 微致动开关
CN102201412B (zh) * 2010-03-25 2013-04-03 上海丽恒光微电子科技有限公司 单栅非易失性快闪存储单元、存储器件及其制造方法
KR20120088467A (ko) 2011-01-31 2012-08-08 삼성전자주식회사 2차원 영상 표시 영역 내에 부분 3차원 영상을 디스플레이 하는 방법 및 장치
US8643140B2 (en) * 2011-07-11 2014-02-04 United Microelectronics Corp. Suspended beam for use in MEMS device
JP6537707B2 (ja) * 2016-03-29 2019-07-03 富士フイルム株式会社 フォーカシング機構および撮像モジュール
US20210199494A1 (en) * 2018-05-24 2021-07-01 The Research Foundation For The State University Of New York Capacitive sensor
WO2023146962A2 (en) * 2022-01-26 2023-08-03 Cornell University Artificial cilium and arrays thereof

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Also Published As

Publication number Publication date
US7354787B2 (en) 2008-04-08
US20030202735A1 (en) 2003-10-30
EP1359118A3 (de) 2004-09-29
JP2004001209A (ja) 2004-01-08
US6891240B2 (en) 2005-05-10
US20050167769A1 (en) 2005-08-04
EP1359118B1 (de) 2010-09-15
EP1359118A2 (de) 2003-11-05

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