DE60336203D1 - Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung - Google Patents

Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung

Info

Publication number
DE60336203D1
DE60336203D1 DE60336203T DE60336203T DE60336203D1 DE 60336203 D1 DE60336203 D1 DE 60336203D1 DE 60336203 T DE60336203 T DE 60336203T DE 60336203 T DE60336203 T DE 60336203T DE 60336203 D1 DE60336203 D1 DE 60336203D1
Authority
DE
Germany
Prior art keywords
production
ink jet
recording head
jet recording
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60336203T
Other languages
English (en)
Inventor
Kazuhiro Hayakawa
Makoto Terui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002379638A external-priority patent/JP4261904B2/ja
Priority claimed from JP2002379594A external-priority patent/JP2004209708A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60336203D1 publication Critical patent/DE60336203D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
DE60336203T 2002-12-27 2003-12-29 Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung Expired - Lifetime DE60336203D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002379638A JP4261904B2 (ja) 2002-12-27 2002-12-27 インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法
JP2002379594A JP2004209708A (ja) 2002-12-27 2002-12-27 インクジェット記録ヘッド、その製造方法、およびその製造に用いるインクジェット記録ヘッド用基体

Publications (1)

Publication Number Publication Date
DE60336203D1 true DE60336203D1 (de) 2011-04-14

Family

ID=32473752

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60336203T Expired - Lifetime DE60336203D1 (de) 2002-12-27 2003-12-29 Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung

Country Status (5)

Country Link
US (2) US7063799B2 (de)
EP (1) EP1433609B1 (de)
KR (1) KR20040060816A (de)
CN (1) CN100355573C (de)
DE (1) DE60336203D1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522086B2 (ja) * 2003-12-15 2010-08-11 キヤノン株式会社 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法
JP2005205889A (ja) * 2003-12-26 2005-08-04 Canon Inc インクジェット記録ヘッドの製造方法及び該製造方法により製造されるインクジェット記録ヘッド
GB2410464A (en) * 2004-01-29 2005-08-03 Hewlett Packard Development Co A method of making an inkjet printhead
US7429335B2 (en) * 2004-04-29 2008-09-30 Shen Buswell Substrate passage formation
JP2006130868A (ja) * 2004-11-09 2006-05-25 Canon Inc インクジェット記録ヘッド及びその製造方法
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
JP4641440B2 (ja) * 2005-03-23 2011-03-02 キヤノン株式会社 インクジェット記録ヘッドおよび該インクジェット記録ヘッドの製造方法
JP4766658B2 (ja) * 2005-05-10 2011-09-07 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
JP4854336B2 (ja) * 2006-03-07 2012-01-18 キヤノン株式会社 インクジェットヘッド用基板の製造方法
US7566949B2 (en) * 2006-04-28 2009-07-28 International Business Machines Corporation High performance 3D FET structures, and methods for forming the same using preferential crystallographic etching
US8562845B2 (en) * 2006-10-12 2013-10-22 Canon Kabushiki Kaisha Ink jet print head and method of manufacturing ink jet print head
KR20080060003A (ko) 2006-12-26 2008-07-01 삼성전자주식회사 잉크젯 프린트 헤드의 제조방법
KR20080086306A (ko) * 2007-03-22 2008-09-25 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
US7855151B2 (en) 2007-08-21 2010-12-21 Hewlett-Packard Development Company, L.P. Formation of a slot in a silicon substrate
US7881594B2 (en) * 2007-12-27 2011-02-01 Stmicroeletronics, Inc. Heating system and method for microfluidic and micromechanical applications
JP5361231B2 (ja) * 2008-03-26 2013-12-04 キヤノン株式会社 インクジェット記録ヘッド及び電子デバイス
JP5335396B2 (ja) * 2008-12-16 2013-11-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US8012773B2 (en) * 2009-06-11 2011-09-06 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
JP4659898B2 (ja) 2009-09-02 2011-03-30 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
CN102079503B (zh) * 2009-11-26 2012-08-29 中芯国际集成电路制造(上海)有限公司 构成mems器件的硅衬底的刻蚀方法
CN102348155B (zh) * 2010-07-30 2014-02-05 上海丽恒光微电子科技有限公司 微机电麦克风及其制造方法
US8435805B2 (en) * 2010-09-06 2013-05-07 Canon Kabushiki Kaisha Method of manufacturing a substrate for liquid ejection head
CN102693909A (zh) * 2011-03-23 2012-09-26 中芯国际集成电路制造(上海)有限公司 硅片上的三维薄膜的成型方法
US9263586B2 (en) 2014-06-06 2016-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure
CN109179314A (zh) * 2018-10-24 2019-01-11 西南交通大学 基于氢氟酸/硝酸混合溶液的摩擦诱导纳米加工方法
JP7317521B2 (ja) * 2019-02-28 2023-07-31 キヤノン株式会社 ウルトラファインバブル生成装置およびウルトラファインバブル生成方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4216477A (en) * 1978-05-10 1980-08-05 Hitachi, Ltd. Nozzle head of an ink-jet printing apparatus with built-in fluid diodes
JP2783647B2 (ja) 1990-04-27 1998-08-06 キヤノン株式会社 液体噴射方法および該方法を用いた記録装置
JPH0412859A (ja) * 1990-04-28 1992-01-17 Canon Inc 液体噴射方法、該方法を用いた記録ヘッド及び該方法を用いた記録装置
US5317346A (en) * 1992-03-04 1994-05-31 Hewlett-Packard Company Compound ink feed slot
US5387314A (en) 1993-01-25 1995-02-07 Hewlett-Packard Company Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US5729261A (en) * 1996-03-28 1998-03-17 Xerox Corporation Thermal ink jet printhead with improved ink resistance
JP3652022B2 (ja) 1996-07-23 2005-05-25 キヤノン株式会社 インクジェット記録ヘッド及びインクジェット記録ヘッドの製造方法
JPH1095119A (ja) * 1996-09-25 1998-04-14 Canon Inc 液体吐出ヘッドおよびその製造方法
DE69730667T2 (de) * 1996-11-11 2005-09-22 Canon K.K. Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes
JPH10230611A (ja) * 1997-02-19 1998-09-02 Canon Inc 液体噴射記録ヘッドおよびその製造方法
JP3647365B2 (ja) * 1999-08-24 2005-05-11 キヤノン株式会社 液体吐出ヘッド用基板ユニットおよびその製造方法ならびに液体吐出ヘッド，カートリッジおよび画像形成装置
JP4632386B2 (ja) * 2000-12-21 2011-02-16 キヤノン株式会社 液体吐出記録ヘッド
US6517735B2 (en) * 2001-03-15 2003-02-11 Hewlett-Packard Company Ink feed trench etch technique for a fully integrated thermal inkjet printhead
US6715859B2 (en) 2001-06-06 2004-04-06 Hewlett -Packard Development Company, L.P. Thermal ink jet resistor passivation
US6698868B2 (en) * 2001-10-31 2004-03-02 Hewlett-Packard Development Company, L.P. Thermal drop generator for ultra-small droplets
US6627467B2 (en) * 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Fluid ejection device fabrication

Also Published As

Publication number Publication date
KR20040060816A (ko) 2004-07-06
CN100355573C (zh) 2007-12-19
US20040174407A1 (en) 2004-09-09
EP1433609B1 (de) 2011-03-02
US20060191862A1 (en) 2006-08-31
CN1515413A (zh) 2004-07-28
EP1433609A1 (de) 2004-06-30
US7063799B2 (en) 2006-06-20
US7753495B2 (en) 2010-07-13

Similar Documents

Publication Publication Date Title
DE60336203D1 (de) Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung
DE60221819D1 (de) Wasserabweisender film und verfahren zu seiner herstellung sowie damit ausgerüsteter tintenstrahlkopf und entsprechendes tintenstrahldruckverfahren
DE60313233D1 (de) Tintenstrahlkopf, Verfahren für dessen Herstellung, und Tintenstrahldrucker
DE60107623D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE60140411D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE602005025276D1 (de) Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfsubstrats und Herstellungsverfahren eines Aufzeichnungskopfes mit nach diesem Verfahren hergestelltem Substrat
DE60310409D1 (de) Tintenstrahlaufzeichnungsverfahren
DE60303227D1 (de) Verfahren zur Herstellung eines Tintenstrahlkopfes
DE60335931D1 (de) Verfahren zur Herstellung einer Mikrostruktur, und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes
DE60317278D1 (de) Tintenset, Tintenpatrone, Tintenstrahlaufzeichnungsgerät und Aufzeichnungsverfahren
EP1816001A4 (de) Artikel, tintenaufzeichnungsmedium, aufzeichnungsmedium für tintenstrahl und herstellungsverfahren dafür
DE60315566D1 (de) Substrat für Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungskopf und Gerät zur Verwendung desselben
AU2003243977A1 (en) Ink and ink-jet recording method using said ink
DE60317970D1 (de) Verfahren zur Herstellung eines Tintenstrahlkopfes
DE60003620D1 (de) Substrat für Tintenstrahlkopf, Tintenstrahlkopf, und Tintenstrahlapparat
DE60045022D1 (de) Piezoelektrische dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf
DE602004020043D1 (de) Substrat für einen Flüssigkeitsausstosskopf, Flüssigkeitsausstosskopf und dazugehöriges Herstellungsverfahren
GB2384462B (en) Inkjet printing system employing multiple inket printheads and method of performing a printing operation
DE60333068D1 (de) Tintenstrahl-Aufzeichnungsblatt sowie Verfahren zu seiner Herstellung
GB0400780D0 (en) Ink jet recording method
DE60329255D1 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE60208250D1 (de) Verfahren zur Bildung eines Tintenstrahldruckkopfsubstrats und Tintenstrahldruckkopfsubstrat, und Tintenstrahldruckkopfherstellungsverfahren und Tintenstrahldruckkopf
DE60310499D1 (de) Verfahren zur Herstellung von Tintenstrahlaufzeichnungsmaterialien
DE60325818D1 (de) Piezoelektrisches Bauelement, Tintenstrahlkopf, sowie Verfahren zur Herstellung des piezoelektrischen Bauelementes
DE60020308D1 (de) Verfahren zur herstellung eines tintenstrahldruckkopfes