DE68909145T2 - Durch Mikro-Materialbearbeitung hergestellte zusammengesetzte Düse aus Silicium. - Google Patents

Durch Mikro-Materialbearbeitung hergestellte zusammengesetzte Düse aus Silicium.

Info

Publication number
DE68909145T2
DE68909145T2 DE89306938T DE68909145T DE68909145T2 DE 68909145 T2 DE68909145 T2 DE 68909145T2 DE 89306938 T DE89306938 T DE 89306938T DE 68909145 T DE68909145 T DE 68909145T DE 68909145 T2 DE68909145 T2 DE 68909145T2
Authority
DE
Germany
Prior art keywords
micro
material processing
nozzle made
composite silicon
silicon nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89306938T
Other languages
English (en)
Other versions
DE68909145D1 (de
Inventor
Mark Devin Rhoades
Marvin Duane Wells
Robert Clifford Gardner
William Frederick Horn
Steve John Yockey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Original Assignee
Ford Werke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH
Application granted granted Critical
Publication of DE68909145D1 publication Critical patent/DE68909145D1/de
Publication of DE68909145T2 publication Critical patent/DE68909145T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/34Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to influence the nature of flow of the liquid or other fluent material, e.g. to produce swirl
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F02M61/1853Orifice plates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49428Gas and water specific plumbing component making
    • Y10T29/49432Nozzle making
DE89306938T 1988-08-12 1989-07-07 Durch Mikro-Materialbearbeitung hergestellte zusammengesetzte Düse aus Silicium. Expired - Fee Related DE68909145T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/231,365 US4828184A (en) 1988-08-12 1988-08-12 Silicon micromachined compound nozzle

Publications (2)

Publication Number Publication Date
DE68909145D1 DE68909145D1 (de) 1993-10-21
DE68909145T2 true DE68909145T2 (de) 1994-01-13

Family

ID=22868924

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89306938T Expired - Fee Related DE68909145T2 (de) 1988-08-12 1989-07-07 Durch Mikro-Materialbearbeitung hergestellte zusammengesetzte Düse aus Silicium.

Country Status (5)

Country Link
US (1) US4828184A (de)
EP (1) EP0354660B1 (de)
JP (1) JP2788064B2 (de)
CA (1) CA1313216C (de)
DE (1) DE68909145T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004005526B4 (de) 2003-02-05 2022-03-31 Denso Corporation Kraftstoffeinspritzvorrichtung einer Brennkraftmaschine mit innerer Verbrennung

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG45171A1 (en) * 1990-03-21 1998-01-16 Boehringer Ingelheim Int Atomising devices and methods
US5208501A (en) * 1990-08-06 1993-05-04 Texas Instruments Incorporated Rim driven stepper motor and method of operation RIM driven
US5072145A (en) * 1990-09-05 1991-12-10 Sundstrand Corporation Composite center module housing using specifically shaped segments to form fluid channels
IL100224A (en) * 1990-12-04 1994-10-21 Dmw Tech Ltd Spray nozzle
DE4104019C1 (de) * 1991-02-09 1992-04-23 Robert Bosch Gmbh, 7000 Stuttgart, De
IL107120A (en) * 1992-09-29 1997-09-30 Boehringer Ingelheim Int Atomising nozzle and filter and spray generating device
US6007676A (en) * 1992-09-29 1999-12-28 Boehringer Ingelheim International Gmbh Atomizing nozzle and filter and spray generating device
US5492277A (en) * 1993-02-17 1996-02-20 Nippondenso Co., Ltd. Fluid injection nozzle
US5545073A (en) * 1993-04-05 1996-08-13 Ford Motor Company Silicon micromachined CO2 cleaning nozzle and method
WO1995004881A1 (en) * 1993-08-06 1995-02-16 Ford Motor Company A fuel injector
US5383597A (en) * 1993-08-06 1995-01-24 Ford Motor Company Apparatus and method for controlling the cone angle of an atomized spray from a low pressure fuel injector
DE4331851A1 (de) * 1993-09-20 1995-03-23 Bosch Gmbh Robert Lochkörper und Ventil mit Lochkörper
US5405283A (en) * 1993-11-08 1995-04-11 Ford Motor Company CO2 cleaning system and method
US5514024A (en) * 1993-11-08 1996-05-07 Ford Motor Company Nozzle for enhanced mixing in CO2 cleaning system
US5390450A (en) * 1993-11-08 1995-02-21 Ford Motor Company Supersonic exhaust nozzle having reduced noise levels for CO2 cleaning system
AUPM333394A0 (en) * 1994-01-13 1994-02-03 Meyer, David Jeffrey Improved flow conditioners for fire fighting nozzles
DE4404021A1 (de) * 1994-02-09 1995-08-10 Bosch Gmbh Robert Düsenplatte, insbesondere für Einspritzventile und Verfahren zur Herstellung einer Düsenplatte
JPH07289953A (ja) * 1994-03-03 1995-11-07 Nippondenso Co Ltd 流体噴射ノズル
JP3560174B2 (ja) * 1994-05-17 2004-09-02 株式会社デンソー 流体噴射ノズル及びそれを用いた燃料噴射弁
US5685491A (en) * 1995-01-11 1997-11-11 Amtx, Inc. Electroformed multilayer spray director and a process for the preparation thereof
JP3579426B2 (ja) * 1995-03-29 2004-10-20 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 孔付き円板を製造するための方法
WO1996030643A1 (de) * 1995-03-29 1996-10-03 Robert Bosch Gmbh Lochscheibe, insbesondere für einspritzventile
EP0787255B1 (de) * 1995-03-29 2002-07-31 Robert Bosch Gmbh Lochscheibe, inbesondere für einspritzventile
DE19607277A1 (de) 1995-03-29 1996-10-02 Bosch Gmbh Robert Lochscheibe, insbesondere für Einspritzventile
US5679062A (en) * 1995-05-05 1997-10-21 Ford Motor Company CO2 cleaning nozzle and method with enhanced mixing zones
DE19530193A1 (de) * 1995-08-17 1997-02-20 Bosch Gmbh Robert Düsenplatte, insbesondere für Kraftstoffeinspritzventile, und Verfahren zur Herstellung einer Düsenplatte
US5616067A (en) * 1996-01-16 1997-04-01 Ford Motor Company CO2 nozzle and method for cleaning pressure-sensitive surfaces
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
DE19622350A1 (de) * 1996-06-04 1997-12-11 Bosch Gmbh Robert Verfahren zur Herstellung einer Düsenplatte
JP2001522296A (ja) * 1996-07-08 2001-11-13 コーニング インコーポレイテッド レイリー分裂噴霧装置及びレイリー分裂噴霧装置の作成方法
US6352209B1 (en) 1996-07-08 2002-03-05 Corning Incorporated Gas assisted atomizing devices and methods of making gas-assisted atomizing devices
CA2259625A1 (en) 1996-07-08 1998-01-15 Spraychip Systems Corp. Gas-assisted atomizing device
DE19639506A1 (de) * 1996-09-26 1998-04-02 Bosch Gmbh Robert Lochscheibe und Ventil mit einer Lochscheibe
US6375858B1 (en) * 1997-05-14 2002-04-23 Seiko Epson Corporation Method of forming nozzle for injection device and method of manufacturing inkjet head
WO1999014487A1 (de) 1997-09-16 1999-03-25 Robert Bosch Gmbh Lochscheibe bzw. zerstäuberscheibe und einspritzventil mit einer lochscheibe bzw. zerstäuberscheibe
DE19742439C1 (de) * 1997-09-26 1998-10-22 Boehringer Ingelheim Int Mikrostrukturiertes Filter
MXPA00006041A (es) * 1997-12-19 2003-09-10 Corning Inc Quemador y metodo para producir hollin de oxido metalico.
JP3814815B2 (ja) * 1998-03-25 2006-08-30 株式会社デンソー 噴孔プレートおよびその製造方法
DE19829177A1 (de) * 1998-06-30 2000-01-05 Asea Brown Boveri Düse mit einer Einrichtung zum Zurückhalten von Festteilchen in einem Strömungsmedium
US7011378B2 (en) * 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
CN1322282A (zh) 1998-09-03 2001-11-14 卢卡斯新星传感器公司 正比微机械装置
JP2000104647A (ja) * 1998-09-25 2000-04-11 Denso Corp 燃料噴射ノズル
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
JP3327246B2 (ja) * 1999-03-25 2002-09-24 富士ゼロックス株式会社 インクジェット記録ヘッド及びその製造方法
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6845962B1 (en) 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
NL1016030C1 (nl) 2000-08-28 2002-03-01 Aquamarijn Holding B V Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat.
DE10056006A1 (de) * 2000-11-11 2002-05-16 Bosch Gmbh Robert Brennstoffeinspritzventil
US6513724B1 (en) 2001-06-13 2003-02-04 Siemens Automotive Corporation Method and apparatus for defining a spray pattern from a fuel injector
US6439136B1 (en) * 2001-07-03 2002-08-27 Alstom (Switzerland) Ltd Pulverized solid fuel nozzle tip with ceramic component
US6920749B2 (en) 2002-03-15 2005-07-26 Parker-Hannifin Corporation Multi-function simplex/prefilmer nozzle
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
WO2005052420A1 (en) * 2003-11-24 2005-06-09 Alumina Micro Llc Microvalve device suitable for controlling a variable displacement compressor
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
CN100501212C (zh) * 2004-02-27 2009-06-17 铝微有限公司 微阀装置
WO2005091820A2 (en) * 2004-03-05 2005-10-06 Alumina Micro Llc Selective bonding for forming a microvalve
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
JP2008527244A (ja) * 2005-01-14 2008-07-24 アルーマナ、マイクロウ、エルエルシー 可変容量型コンプレッサを制御するシステムおよび方法
US20070075158A1 (en) * 2005-09-22 2007-04-05 Pelletier Robert R Nozzle assembly
US7703479B2 (en) * 2005-10-17 2010-04-27 The University Of Kentucky Research Foundation Plasma actuator
WO2007149076A1 (en) * 2006-06-19 2007-12-27 Norgren, Inc. A fluid control device with a non-circular flow area
WO2008076388A1 (en) 2006-12-15 2008-06-26 Microstaq, Inc. Microvalve device
WO2008121369A1 (en) 2007-03-30 2008-10-09 Microstaq, Inc. Pilot operated micro spool valve
CN101668973B (zh) 2007-03-31 2013-03-13 盾安美斯泰克公司(美国) 先导式滑阀
US8662468B2 (en) * 2008-08-09 2014-03-04 Dunan Microstaq, Inc. Microvalve device
US8113482B2 (en) * 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
US8540207B2 (en) 2008-12-06 2013-09-24 Dunan Microstaq, Inc. Fluid flow control assembly
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
CN102575782B (zh) 2009-08-17 2014-04-09 盾安美斯泰克股份有限公司 微型机械装置和控制方法
US9006844B2 (en) 2010-01-28 2015-04-14 Dunan Microstaq, Inc. Process and structure for high temperature selective fusion bonding
US8956884B2 (en) 2010-01-28 2015-02-17 Dunan Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
CN102410121A (zh) * 2011-09-08 2012-04-11 何林霏 S型雾化喷嘴
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
DE202013002282U1 (de) * 2013-03-11 2014-06-12 Neoperl Gmbh Strahlregler mit Prallfläche und Ringwandung
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
CN107989731B (zh) * 2017-11-24 2018-11-16 广西卡迪亚科技有限公司 一种单孔雾化喷油器及其前置雾化结构

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2229306A5 (de) * 1973-01-17 1974-12-06 Ishikawajima Harima Heavy Ind
DE2407856C3 (de) * 1974-02-19 1978-09-14 Ulrich Dipl.-Ing. 5160 Dueren Rohs Einspritzdüse für flüssige Medien, insbesondere Kraftstoff
US4007464A (en) * 1975-01-23 1977-02-08 International Business Machines Corporation Ink jet nozzle
US4628576A (en) * 1985-02-21 1986-12-16 Ford Motor Company Method for fabricating a silicon valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4647013A (en) * 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004005526B4 (de) 2003-02-05 2022-03-31 Denso Corporation Kraftstoffeinspritzvorrichtung einer Brennkraftmaschine mit innerer Verbrennung

Also Published As

Publication number Publication date
EP0354660B1 (de) 1993-09-15
US4828184A (en) 1989-05-09
CA1313216C (en) 1993-01-26
JPH0283051A (ja) 1990-03-23
JP2788064B2 (ja) 1998-08-20
EP0354660A1 (de) 1990-02-14
DE68909145D1 (de) 1993-10-21

Similar Documents

Publication Publication Date Title
DE68909145T2 (de) Durch Mikro-Materialbearbeitung hergestellte zusammengesetzte Düse aus Silicium.
DE69006812D1 (de) Membranen hergestellt aus ungesättigten Polyimiden.
DE68922011T3 (de) Postgebühren-Buchungssystem.
DE58900939D1 (de) Ventilanordnung aus mikrostrukturierten komponenten.
DE3789424D1 (de) Vorrichtung um dünne Schichten herzustellen.
ES297052Y (es) Articulo laminar compuesto termoconfortable.
DE3578273D1 (de) Verdrahtungslagen in halbleiterbauelementen.
DE68902595T2 (de) Komposit-membranen.
DE68904597T2 (de) Komposit-membranen.
DE58904576D1 (de) Thermogenerator.
DE3782515T2 (de) Maleimid-harze und verbundgegenstaenden hergestellt aus diesen harzen.
DE68900410D1 (de) Zusammengesetztes sorbensmittel.
DE3779591D1 (de) Turbo-verbund-maschine.
DE242235T1 (de) Verbundstoff-teilchen aus akrylharz.
DE69108400D1 (de) Verbunddrahtaufbau.
DE69022535D1 (de) Mehrschichtiger piezoelektrischer Verbund.
DE69000239T2 (de) Fahrzeugrad aus verbundwerkstoff.
DE3851058D1 (de) Broschüre mit zentralem, abreissbarem geschäftsrückumschlag und wahlweiser bantwortungsanordnung, hergestellt aus einer einzigen bahn sowie herstellungsverfahren.
DE68925310T2 (de) Komplexe Cermets aus Boriden
DE69105445T2 (de) Turbinenrad aus Verbundwerkstoff.
DE59000866D1 (de) Integriertes turbo-staustrahltriebwerk.
DE3762960D1 (de) Rollstein und aus rollsteinen zusammengesetzte rollbahn.
DE3779851T2 (de) Materialabscheidung durch flotation.
DE3880759D1 (de) Schnalle aus kunststoff.
FR2656826B1 (fr) Dispositif pour la fabrication de lames de ressort composites.

Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee