DE68911294D1 - Mikrobearbeiteter beschleunigungsmesser. - Google Patents

Mikrobearbeiteter beschleunigungsmesser.

Info

Publication number
DE68911294D1
DE68911294D1 DE89909087T DE68911294T DE68911294D1 DE 68911294 D1 DE68911294 D1 DE 68911294D1 DE 89909087 T DE89909087 T DE 89909087T DE 68911294 T DE68911294 T DE 68911294T DE 68911294 D1 DE68911294 D1 DE 68911294D1
Authority
DE
Germany
Prior art keywords
accelerator
worked
micro
worked accelerator
micro worked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE89909087T
Other languages
English (en)
Other versions
DE68911294T2 (de
Inventor
W S Henrion
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
I O SENSORS Inc
Original Assignee
I O SENSORS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by I O SENSORS Inc filed Critical I O SENSORS Inc
Publication of DE68911294D1 publication Critical patent/DE68911294D1/de
Application granted granted Critical
Publication of DE68911294T2 publication Critical patent/DE68911294T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
DE68911294T 1988-06-20 1989-06-19 Mikrobearbeiteter beschleunigungsmesser. Expired - Lifetime DE68911294T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/209,415 US4922756A (en) 1988-06-20 1988-06-20 Micro-machined accelerometer
PCT/US1989/002680 WO1989012830A2 (en) 1988-06-20 1989-06-19 Micro-machined accelerometer

Publications (2)

Publication Number Publication Date
DE68911294D1 true DE68911294D1 (de) 1994-01-20
DE68911294T2 DE68911294T2 (de) 1994-07-07

Family

ID=22778667

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68911294T Expired - Lifetime DE68911294T2 (de) 1988-06-20 1989-06-19 Mikrobearbeiteter beschleunigungsmesser.

Country Status (7)

Country Link
US (1) US4922756A (de)
EP (1) EP0407479B1 (de)
JP (1) JP2834245B2 (de)
CA (1) CA1334798C (de)
DE (1) DE68911294T2 (de)
HK (1) HK1004901A1 (de)
WO (1) WO1989012830A2 (de)

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* Cited by examiner, † Cited by third party
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Also Published As

Publication number Publication date
US4922756A (en) 1990-05-08
WO1989012830A2 (en) 1989-12-28
CA1334798C (en) 1995-03-21
EP0407479B1 (de) 1993-12-08
JPH03501887A (ja) 1991-04-25
DE68911294T2 (de) 1994-07-07
JP2834245B2 (ja) 1998-12-09
WO1989012830A3 (en) 1990-02-08
HK1004901A1 (en) 1998-12-11
EP0407479A1 (de) 1991-01-16

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