DE68916813T2 - Multimodulus-drucksensor. - Google Patents

Multimodulus-drucksensor.

Info

Publication number
DE68916813T2
DE68916813T2 DE68916813T DE68916813T DE68916813T2 DE 68916813 T2 DE68916813 T2 DE 68916813T2 DE 68916813 T DE68916813 T DE 68916813T DE 68916813 T DE68916813 T DE 68916813T DE 68916813 T2 DE68916813 T2 DE 68916813T2
Authority
DE
Germany
Prior art keywords
multimodulus
pressure sensor
sensor
pressure
multimodulus pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68916813T
Other languages
English (en)
Other versions
DE68916813D1 (de
Inventor
Roger Frick
Stanley Rud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE68916813D1 publication Critical patent/DE68916813D1/de
Publication of DE68916813T2 publication Critical patent/DE68916813T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
DE68916813T 1988-12-23 1989-12-12 Multimodulus-drucksensor. Expired - Fee Related DE68916813T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/289,207 US4944187A (en) 1988-12-23 1988-12-23 Multimodulus pressure sensor
PCT/US1989/005610 WO1990007701A1 (en) 1988-12-23 1989-12-12 Multimodulus pressure sensor

Publications (2)

Publication Number Publication Date
DE68916813D1 DE68916813D1 (de) 1994-08-18
DE68916813T2 true DE68916813T2 (de) 1995-03-09

Family

ID=23110508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68916813T Expired - Fee Related DE68916813T2 (de) 1988-12-23 1989-12-12 Multimodulus-drucksensor.

Country Status (6)

Country Link
US (1) US4944187A (de)
EP (1) EP0451193B1 (de)
JP (1) JP2880798B2 (de)
CA (1) CA2005801A1 (de)
DE (1) DE68916813T2 (de)
WO (1) WO1990007701A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010051049A1 (de) * 2010-09-03 2012-03-08 Epcos Ag Piezoresistives Druckmesselement und Verwendung des Druckmesselements

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US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6122972A (en) * 1998-03-04 2000-09-26 Veris Industries Capacitive pressure sensor with moving or shape-changing dielectric
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CN1153054C (zh) 1998-12-04 2004-06-09 塞德拉公司 布拉格光栅压力传感器
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US6267009B1 (en) 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
US6374680B1 (en) * 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US6439055B1 (en) 1999-11-15 2002-08-27 Weatherford/Lamb, Inc. Pressure sensor assembly structure to insulate a pressure sensing device from harsh environments
US6257068B1 (en) * 1999-11-15 2001-07-10 Setra Systems, Inc. Capacitive pressure sensor having petal electrodes
US6626043B1 (en) * 2000-01-31 2003-09-30 Weatherford/Lamb, Inc. Fluid diffusion resistant glass-encased fiber optic sensor
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US6570485B1 (en) * 2000-11-17 2003-05-27 Honeywell International Inc. Transducer packaging assembly for use in sensing unit subjected to high G forces
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US7100432B2 (en) * 2002-06-06 2006-09-05 Mineral Lassen Llc Capacitive pressure sensor
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US8330726B2 (en) * 2003-05-19 2012-12-11 Xiroku, Inc. Position detection apparatus using area image sensor
JP3999729B2 (ja) * 2003-11-28 2007-10-31 株式会社シロク 電磁結合を用いる圧力検出装置
US7478559B2 (en) * 2003-12-04 2009-01-20 National University Of Singapore Capacitive pressure sensor with a cantilever member
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7082024B2 (en) * 2004-11-29 2006-07-25 Stmicroelectronics S.A. Component comprising a variable capacitor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
WO2007032032A1 (en) * 2005-09-16 2007-03-22 Stmicroelectronics S.R.L. Pressure sensor having a high full-scale value with package thereof
KR101098200B1 (ko) * 2006-06-19 2011-12-23 뉴콤 테크노 가부시키가이샤 전자 유도에 의해 물체를 검출하는 물체 검출 장치
US8563880B2 (en) * 2006-10-24 2013-10-22 Newcom, Inc. Operating tool with conductor pieces
DE102006058927A1 (de) * 2006-12-12 2008-06-19 Endress + Hauser Gmbh + Co. Kg Differenzdruckwandler
CA2609611A1 (en) 2007-09-10 2009-03-10 Veris Industries, Llc Split core status indicator
CA2609619A1 (en) 2007-09-10 2009-03-10 Veris Industries, Llc Status indicator
CA2609629A1 (en) 2007-09-10 2009-03-10 Veris Industries, Llc Current switch with automatic calibration
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
US8212548B2 (en) 2008-06-02 2012-07-03 Veris Industries, Llc Branch meter with configurable sensor strip arrangement
US8421443B2 (en) 2008-11-21 2013-04-16 Veris Industries, Llc Branch current monitor with calibration
US8421639B2 (en) 2008-11-21 2013-04-16 Veris Industries, Llc Branch current monitor with an alarm
US9335352B2 (en) 2009-03-13 2016-05-10 Veris Industries, Llc Branch circuit monitor power measurement
US11169010B2 (en) * 2009-07-27 2021-11-09 Integra Lifesciences Switzerland Sàrl Method for the calibration of an implantable sensor
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
JP5434719B2 (ja) * 2010-03-19 2014-03-05 セイコーエプソン株式会社 光フィルターおよび分析機器
US8096186B2 (en) * 2010-03-24 2012-01-17 Carefusion 303, Inc. Systems and methods for measuring fluid pressure within a disposable IV set connected to a fluid supply pump
EP2418503B1 (de) * 2010-07-14 2013-07-03 Sensirion AG Nadelkopf
US9146264B2 (en) 2011-02-25 2015-09-29 Veris Industries, Llc Current meter with on board memory
US10006948B2 (en) 2011-02-25 2018-06-26 Veris Industries, Llc Current meter with voltage awareness
US9329996B2 (en) 2011-04-27 2016-05-03 Veris Industries, Llc Branch circuit monitor with paging register
US9250308B2 (en) 2011-06-03 2016-02-02 Veris Industries, Llc Simplified energy meter configuration
US9410552B2 (en) 2011-10-05 2016-08-09 Veris Industries, Llc Current switch with automatic calibration
DE102012106236A1 (de) * 2012-07-11 2014-01-16 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
US9424975B2 (en) 2013-08-23 2016-08-23 Veris Industries, Llc Split core transformer with self-aligning cores
US9607749B2 (en) 2014-01-23 2017-03-28 Veris Industries, Llc Split core current transformer
US9588148B2 (en) 2014-01-23 2017-03-07 Veris Industries, Llc Input circuit for current transformer
DE102014117991B4 (de) * 2014-12-05 2018-03-22 Preh Gmbh Kapazitiver Kraftsensor
KR101892793B1 (ko) * 2015-03-18 2018-10-04 삼성전기주식회사 압력 센서
DE102015108950A1 (de) * 2015-06-08 2016-12-08 Endress + Hauser Gmbh + Co. Kg Drucksensor mit einer Aktivhartlötung
US10371721B2 (en) 2015-12-28 2019-08-06 Veris Industries, Llc Configuration system for a power meter
US10371730B2 (en) 2015-12-28 2019-08-06 Veris Industries, Llc Branch current monitor with client level access
US10274572B2 (en) 2015-12-28 2019-04-30 Veris Industries, Llc Calibration system for a power meter
US10408911B2 (en) 2015-12-28 2019-09-10 Veris Industries, Llc Network configurable system for a power meter
JP6654157B2 (ja) * 2017-01-17 2020-02-26 アズビル株式会社 圧力センサ
US11215650B2 (en) 2017-02-28 2022-01-04 Veris Industries, Llc Phase aligned branch energy meter
US11193958B2 (en) 2017-03-03 2021-12-07 Veris Industries, Llc Non-contact voltage sensor
US10705126B2 (en) 2017-05-19 2020-07-07 Veris Industries, Llc Energy metering with temperature monitoring
US20200064213A1 (en) * 2018-08-23 2020-02-27 Global Solar Energy, Inc. Capacitance manometer for high temperature environments
CN109738109B (zh) * 2019-01-31 2024-02-13 南京信息工程大学 一种高温微压压力传感器及其制作方法、测量系统
IT201900002663A1 (it) 2019-02-25 2020-08-25 St Microelectronics Srl Sensore di pressione includente un trasduttore microelettromeccanico e relativo metodo di rilevazione di pressione

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010051049A1 (de) * 2010-09-03 2012-03-08 Epcos Ag Piezoresistives Druckmesselement und Verwendung des Druckmesselements
DE102010051049B4 (de) * 2010-09-03 2016-03-10 Epcos Ag Piezoresistives Druckmesselement und Verwendung des Druckmesselements

Also Published As

Publication number Publication date
EP0451193B1 (de) 1994-07-13
US4944187A (en) 1990-07-31
JP2880798B2 (ja) 1999-04-12
EP0451193A1 (de) 1991-10-16
CA2005801A1 (en) 1990-06-23
JPH04502508A (ja) 1992-05-07
EP0451193A4 (en) 1992-01-29
WO1990007701A1 (en) 1990-07-12
DE68916813D1 (de) 1994-08-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee