DE68916813T2 - Multimodulus-drucksensor. - Google Patents
Multimodulus-drucksensor.Info
- Publication number
- DE68916813T2 DE68916813T2 DE68916813T DE68916813T DE68916813T2 DE 68916813 T2 DE68916813 T2 DE 68916813T2 DE 68916813 T DE68916813 T DE 68916813T DE 68916813 T DE68916813 T DE 68916813T DE 68916813 T2 DE68916813 T2 DE 68916813T2
- Authority
- DE
- Germany
- Prior art keywords
- multimodulus
- pressure sensor
- sensor
- pressure
- multimodulus pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/289,207 US4944187A (en) | 1988-12-23 | 1988-12-23 | Multimodulus pressure sensor |
PCT/US1989/005610 WO1990007701A1 (en) | 1988-12-23 | 1989-12-12 | Multimodulus pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68916813D1 DE68916813D1 (de) | 1994-08-18 |
DE68916813T2 true DE68916813T2 (de) | 1995-03-09 |
Family
ID=23110508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68916813T Expired - Fee Related DE68916813T2 (de) | 1988-12-23 | 1989-12-12 | Multimodulus-drucksensor. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4944187A (de) |
EP (1) | EP0451193B1 (de) |
JP (1) | JP2880798B2 (de) |
CA (1) | CA2005801A1 (de) |
DE (1) | DE68916813T2 (de) |
WO (1) | WO1990007701A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010051049A1 (de) * | 2010-09-03 | 2012-03-08 | Epcos Ag | Piezoresistives Druckmesselement und Verwendung des Druckmesselements |
Families Citing this family (71)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9106317D0 (en) * | 1991-03-25 | 1991-05-08 | Nat Res Dev | Material having a passage therethrough |
JPH05149814A (ja) * | 1991-11-29 | 1993-06-15 | Fuji Electric Co Ltd | 二重ダイヤフラム式半導体圧力センサ |
US5285690A (en) * | 1992-01-24 | 1994-02-15 | The Foxboro Company | Pressure sensor having a laminated substrate |
WO1994028372A1 (en) * | 1993-05-25 | 1994-12-08 | Rosemount Inc. | Organic chemical sensor |
US5315110A (en) * | 1993-06-29 | 1994-05-24 | Abb Vetco Gray Inc. | Metal cup pressure transducer with a support having a plurality of thermal expansion coefficients |
US5672808A (en) * | 1996-06-11 | 1997-09-30 | Moore Products Co. | Transducer having redundant pressure sensors |
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
US6122972A (en) * | 1998-03-04 | 2000-09-26 | Veris Industries | Capacitive pressure sensor with moving or shape-changing dielectric |
WO2000011444A1 (en) * | 1998-08-19 | 2000-03-02 | Wisconsin Alumni Research Foundation | Sealed capacitive pressure sensors |
CN1153054C (zh) | 1998-12-04 | 2004-06-09 | 塞德拉公司 | 布拉格光栅压力传感器 |
WO2000037914A2 (en) | 1998-12-04 | 2000-06-29 | Cidra Corporation | Bragg grating pressure sensor |
US6267009B1 (en) | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
US6374680B1 (en) * | 1999-03-24 | 2002-04-23 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor or capacitive differential pressure sensor |
US6295875B1 (en) * | 1999-05-14 | 2001-10-02 | Rosemount Inc. | Process pressure measurement devices with improved error compensation |
US6257068B1 (en) * | 1999-11-15 | 2001-07-10 | Setra Systems, Inc. | Capacitive pressure sensor having petal electrodes |
US6439055B1 (en) | 1999-11-15 | 2002-08-27 | Weatherford/Lamb, Inc. | Pressure sensor assembly structure to insulate a pressure sensing device from harsh environments |
US6626043B1 (en) | 2000-01-31 | 2003-09-30 | Weatherford/Lamb, Inc. | Fluid diffusion resistant glass-encased fiber optic sensor |
DE10043630A1 (de) * | 2000-09-01 | 2002-03-14 | Endress Hauser Gmbh Co | Druckmeßzelle |
US6570485B1 (en) * | 2000-11-17 | 2003-05-27 | Honeywell International Inc. | Transducer packaging assembly for use in sensing unit subjected to high G forces |
FR2818676B1 (fr) * | 2000-12-27 | 2003-03-07 | Freyssinet Int Stup | Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre |
US7100432B2 (en) * | 2002-06-06 | 2006-09-05 | Mineral Lassen Llc | Capacitive pressure sensor |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
US8330726B2 (en) * | 2003-05-19 | 2012-12-11 | Xiroku, Inc. | Position detection apparatus using area image sensor |
JP3999729B2 (ja) * | 2003-11-28 | 2007-10-31 | 株式会社シロク | 電磁結合を用いる圧力検出装置 |
WO2005054804A1 (en) * | 2003-12-04 | 2005-06-16 | National University Of Singapore | Capacitive pressure sensor with a cantilever member |
US7497133B2 (en) * | 2004-05-24 | 2009-03-03 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
US7201057B2 (en) * | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7137301B2 (en) * | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7082024B2 (en) * | 2004-11-29 | 2006-07-25 | Stmicroelectronics S.A. | Component comprising a variable capacitor |
US7204150B2 (en) | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
WO2007032032A1 (en) * | 2005-09-16 | 2007-03-22 | Stmicroelectronics S.R.L. | Pressure sensor having a high full-scale value with package thereof |
WO2007148429A1 (ja) * | 2006-06-19 | 2007-12-27 | Newcom, Inc. | 電磁誘導を用いて物体を検出する物体検出装置 |
JP4786716B2 (ja) * | 2006-10-24 | 2011-10-05 | ニューコムテクノ株式会社 | 導電体片を具備する操作具 |
DE102006058927A1 (de) * | 2006-12-12 | 2008-06-19 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckwandler |
CA2609629A1 (en) | 2007-09-10 | 2009-03-10 | Veris Industries, Llc | Current switch with automatic calibration |
CA2609619A1 (en) | 2007-09-10 | 2009-03-10 | Veris Industries, Llc | Status indicator |
CA2609611A1 (en) | 2007-09-10 | 2009-03-10 | Veris Industries, Llc | Split core status indicator |
US7624642B2 (en) * | 2007-09-20 | 2009-12-01 | Rosemount Inc. | Differential pressure sensor isolation in a process fluid pressure transmitter |
US8212548B2 (en) | 2008-06-02 | 2012-07-03 | Veris Industries, Llc | Branch meter with configurable sensor strip arrangement |
US8421639B2 (en) | 2008-11-21 | 2013-04-16 | Veris Industries, Llc | Branch current monitor with an alarm |
US8421443B2 (en) | 2008-11-21 | 2013-04-16 | Veris Industries, Llc | Branch current monitor with calibration |
US9335352B2 (en) | 2009-03-13 | 2016-05-10 | Veris Industries, Llc | Branch circuit monitor power measurement |
US11169010B2 (en) * | 2009-07-27 | 2021-11-09 | Integra Lifesciences Switzerland Sàrl | Method for the calibration of an implantable sensor |
US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
JP5434719B2 (ja) * | 2010-03-19 | 2014-03-05 | セイコーエプソン株式会社 | 光フィルターおよび分析機器 |
US8096186B2 (en) * | 2010-03-24 | 2012-01-17 | Carefusion 303, Inc. | Systems and methods for measuring fluid pressure within a disposable IV set connected to a fluid supply pump |
EP2418503B1 (de) * | 2010-07-14 | 2013-07-03 | Sensirion AG | Nadelkopf |
US9146264B2 (en) | 2011-02-25 | 2015-09-29 | Veris Industries, Llc | Current meter with on board memory |
US10006948B2 (en) | 2011-02-25 | 2018-06-26 | Veris Industries, Llc | Current meter with voltage awareness |
US9329996B2 (en) | 2011-04-27 | 2016-05-03 | Veris Industries, Llc | Branch circuit monitor with paging register |
US9250308B2 (en) | 2011-06-03 | 2016-02-02 | Veris Industries, Llc | Simplified energy meter configuration |
US9410552B2 (en) | 2011-10-05 | 2016-08-09 | Veris Industries, Llc | Current switch with automatic calibration |
DE102012106236A1 (de) * | 2012-07-11 | 2014-01-16 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
US9424975B2 (en) | 2013-08-23 | 2016-08-23 | Veris Industries, Llc | Split core transformer with self-aligning cores |
US9607749B2 (en) | 2014-01-23 | 2017-03-28 | Veris Industries, Llc | Split core current transformer |
US9588148B2 (en) | 2014-01-23 | 2017-03-07 | Veris Industries, Llc | Input circuit for current transformer |
DE102014117991B4 (de) * | 2014-12-05 | 2018-03-22 | Preh Gmbh | Kapazitiver Kraftsensor |
KR101892793B1 (ko) * | 2015-03-18 | 2018-10-04 | 삼성전기주식회사 | 압력 센서 |
DE102015108950A1 (de) * | 2015-06-08 | 2016-12-08 | Endress + Hauser Gmbh + Co. Kg | Drucksensor mit einer Aktivhartlötung |
US10371721B2 (en) | 2015-12-28 | 2019-08-06 | Veris Industries, Llc | Configuration system for a power meter |
US10408911B2 (en) | 2015-12-28 | 2019-09-10 | Veris Industries, Llc | Network configurable system for a power meter |
US10371730B2 (en) | 2015-12-28 | 2019-08-06 | Veris Industries, Llc | Branch current monitor with client level access |
US10274572B2 (en) | 2015-12-28 | 2019-04-30 | Veris Industries, Llc | Calibration system for a power meter |
JP6654157B2 (ja) * | 2017-01-17 | 2020-02-26 | アズビル株式会社 | 圧力センサ |
US11215650B2 (en) | 2017-02-28 | 2022-01-04 | Veris Industries, Llc | Phase aligned branch energy meter |
US11193958B2 (en) | 2017-03-03 | 2021-12-07 | Veris Industries, Llc | Non-contact voltage sensor |
US10705126B2 (en) | 2017-05-19 | 2020-07-07 | Veris Industries, Llc | Energy metering with temperature monitoring |
US20200064213A1 (en) * | 2018-08-23 | 2020-02-27 | Global Solar Energy, Inc. | Capacitance manometer for high temperature environments |
CN109738109B (zh) * | 2019-01-31 | 2024-02-13 | 南京信息工程大学 | 一种高温微压压力传感器及其制作方法、测量系统 |
IT201900002663A1 (it) * | 2019-02-25 | 2020-08-25 | St Microelectronics Srl | Sensore di pressione includente un trasduttore microelettromeccanico e relativo metodo di rilevazione di pressione |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2162308A (en) * | 1936-07-21 | 1939-06-13 | Bendix Aviat Corp | Diaphragm device |
US2177564A (en) * | 1936-07-21 | 1939-10-24 | Eclipse Aviat Corp | Expansible element |
US2179417A (en) * | 1937-10-30 | 1939-11-07 | Philco Radio & Television Corp | Compensating condenser |
US2472214A (en) * | 1947-10-22 | 1949-06-07 | Hurvitz Hyman | Pressure responsive electrical resistor |
US3142917A (en) * | 1962-05-17 | 1964-08-04 | Scovill Manufacturing Co | Pressure activated devices |
US3859575A (en) * | 1974-02-11 | 1975-01-07 | Lee Shih Ying | Variable capacitance sensor |
JPS55115347A (en) * | 1979-02-26 | 1980-09-05 | Nec Kyushu Ltd | Semiconductor device |
US4507973A (en) * | 1983-08-31 | 1985-04-02 | Borg-Warner Corporation | Housing for capacitive pressure sensor |
JPS61235731A (ja) * | 1985-04-11 | 1986-10-21 | Sharp Corp | 感圧素子 |
DE19735790A1 (de) * | 1997-08-18 | 1999-02-25 | Henkel Kgaa | Mikroemulsionen |
-
1988
- 1988-12-23 US US07/289,207 patent/US4944187A/en not_active Expired - Lifetime
-
1989
- 1989-12-12 DE DE68916813T patent/DE68916813T2/de not_active Expired - Fee Related
- 1989-12-12 JP JP2501583A patent/JP2880798B2/ja not_active Expired - Fee Related
- 1989-12-12 WO PCT/US1989/005610 patent/WO1990007701A1/en active IP Right Grant
- 1989-12-12 EP EP90901390A patent/EP0451193B1/de not_active Expired - Lifetime
- 1989-12-18 CA CA002005801A patent/CA2005801A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010051049A1 (de) * | 2010-09-03 | 2012-03-08 | Epcos Ag | Piezoresistives Druckmesselement und Verwendung des Druckmesselements |
DE102010051049B4 (de) * | 2010-09-03 | 2016-03-10 | Epcos Ag | Piezoresistives Druckmesselement und Verwendung des Druckmesselements |
Also Published As
Publication number | Publication date |
---|---|
US4944187A (en) | 1990-07-31 |
EP0451193A1 (de) | 1991-10-16 |
DE68916813D1 (de) | 1994-08-18 |
EP0451193B1 (de) | 1994-07-13 |
JPH04502508A (ja) | 1992-05-07 |
JP2880798B2 (ja) | 1999-04-12 |
WO1990007701A1 (en) | 1990-07-12 |
EP0451193A4 (en) | 1992-01-29 |
CA2005801A1 (en) | 1990-06-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |