DE68921471D1 - Integrierte massenspeicheranordnung. - Google Patents

Integrierte massenspeicheranordnung.

Info

Publication number
DE68921471D1
DE68921471D1 DE68921471T DE68921471T DE68921471D1 DE 68921471 D1 DE68921471 D1 DE 68921471D1 DE 68921471 T DE68921471 T DE 68921471T DE 68921471 T DE68921471 T DE 68921471T DE 68921471 D1 DE68921471 D1 DE 68921471D1
Authority
DE
Germany
Prior art keywords
mass storage
storage arrangement
integrated mass
integrated
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921471T
Other languages
English (en)
Other versions
DE68921471T2 (de
Inventor
Thomas Albrecht
Mark Zdeblick
Calvin Quate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leland Stanford Junior University
Original Assignee
Leland Stanford Junior University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leland Stanford Junior University filed Critical Leland Stanford Junior University
Application granted granted Critical
Publication of DE68921471D1 publication Critical patent/DE68921471D1/de
Publication of DE68921471T2 publication Critical patent/DE68921471T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1463—Record carriers for recording or reproduction involving the use of microscopic probe means
    • G11B9/1472—Record carriers for recording or reproduction involving the use of microscopic probe means characterised by the form
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/832—Nanostructure having specified property, e.g. lattice-constant, thermal expansion coefficient
    • Y10S977/837—Piezoelectric property of nanomaterial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE68921471T 1988-01-27 1989-01-27 Integrierte massenspeicheranordnung. Expired - Fee Related DE68921471T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/149,236 US4906840A (en) 1988-01-27 1988-01-27 Integrated scanning tunneling microscope
PCT/US1989/000277 WO1989007256A1 (en) 1988-01-27 1989-01-27 An integrated mass storage device

Publications (2)

Publication Number Publication Date
DE68921471D1 true DE68921471D1 (de) 1995-04-06
DE68921471T2 DE68921471T2 (de) 1995-07-20

Family

ID=22529347

Family Applications (3)

Application Number Title Priority Date Filing Date
DE68917913T Expired - Lifetime DE68917913D1 (de) 1988-01-27 1989-01-26 Ein piezoelektrischer bewegungsumsetzer und ein rastertunnelmikroskop in dem derselbe verwendet wird.
DE68918088T Expired - Fee Related DE68918088T2 (de) 1988-01-27 1989-01-26 Integriertes rastertunnelmikroskop.
DE68921471T Expired - Fee Related DE68921471T2 (de) 1988-01-27 1989-01-27 Integrierte massenspeicheranordnung.

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE68917913T Expired - Lifetime DE68917913D1 (de) 1988-01-27 1989-01-26 Ein piezoelektrischer bewegungsumsetzer und ein rastertunnelmikroskop in dem derselbe verwendet wird.
DE68918088T Expired - Fee Related DE68918088T2 (de) 1988-01-27 1989-01-26 Integriertes rastertunnelmikroskop.

Country Status (6)

Country Link
US (6) US4906840A (de)
EP (3) EP0404799B1 (de)
JP (3) JP2752755B2 (de)
AU (3) AU3353589A (de)
DE (3) DE68917913D1 (de)
WO (3) WO1989007258A2 (de)

Families Citing this family (272)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JP2756254B2 (ja) * 1988-03-25 1998-05-25 キヤノン株式会社 記録装置及び再生装置
US5338997A (en) * 1988-04-29 1994-08-16 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Micromanipulator for moving objects
NL8802335A (nl) * 1988-09-21 1990-04-17 Philips Nv Werkwijze en inrichting voor het op sub-mikron schaal bewerken van een materiaal-oppervlak.
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
US5210714A (en) * 1988-10-14 1993-05-11 International Business Machines Corporation Distance-controlled tunneling transducer and direct access storage unit employing the transducer
US5066358A (en) * 1988-10-27 1991-11-19 Board Of Trustees Of The Leland Stanford Juninor University Nitride cantilevers with single crystal silicon tips
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
JP2869075B2 (ja) * 1988-12-09 1999-03-10 日立建機株式会社 配向性薄膜パターンの形成方法、配向性薄膜パターンおよび薄膜アレイ超音波変換器の薄膜素子の形成方法
US5221415A (en) * 1989-01-17 1993-06-22 Board Of Trustees Of The Leland Stanford Junior University Method of forming microfabricated cantilever stylus with integrated pyramidal tip
US5149673A (en) * 1989-02-21 1992-09-22 Cornell Research Foundation, Inc. Selective chemical vapor deposition of tungsten for microdynamic structures
US5072288A (en) * 1989-02-21 1991-12-10 Cornell Research Foundation, Inc. Microdynamic release structure
EP0394995B1 (de) * 1989-04-25 1997-07-16 Canon Kabushiki Kaisha Informationsaufzeichnungs-/Wiedergabegerät und Informationsaufzeichnungsträger
GB8910566D0 (en) * 1989-05-08 1989-06-21 Amersham Int Plc Imaging apparatus and method
JPH02295050A (ja) * 1989-05-09 1990-12-05 Olympus Optical Co Ltd μ―ＳＴＭを用いた回路パターン作製装置および回路パターン作製方法
US5266801A (en) * 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
DE69026765T2 (de) * 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
JP2886588B2 (ja) * 1989-07-11 1999-04-26 日本碍子株式会社 圧電／電歪アクチュエータ
US5182452A (en) * 1989-07-17 1993-01-26 Matsushita Electric Industrial Co. Ltd. Method for determining the presence of thin insulating films
US5075548A (en) * 1989-07-17 1991-12-24 Olympus Optical Co., Ltd. Tunnel current probe moving mechanism having parallel cantilevers
US5161200A (en) * 1989-08-04 1992-11-03 Alesis Corporation Microphone
EP0413042B1 (de) * 1989-08-16 1992-12-16 International Business Machines Corporation Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf
WO1991004584A1 (en) * 1989-09-08 1991-04-04 Massachusetts Institute Of Technology Miniature actuator
USRE36603E (en) * 1989-10-13 2000-03-07 International Business Machines Corp. Distance-controlled tunneling transducer and direct access storage unit employing the transducer
US5144148A (en) * 1989-11-07 1992-09-01 International Business Machines Corporation Process for repositioning atoms on a surface using a scanning tunneling microscope
US5170089A (en) * 1989-12-20 1992-12-08 General Electric Company Two-axis motion apparatus utilizing piezoelectric material
US5023503A (en) * 1990-01-03 1991-06-11 Motorola, Inc. Super high frequency oscillator/resonator
JPH04263142A (ja) * 1990-02-08 1992-09-18 Canon Inc プローブユニット、これを用いた情報処理装置及び情報処理方法
US5253515A (en) * 1990-03-01 1993-10-19 Olympus Optical Co., Ltd. Atomic probe microscope and cantilever unit for use in the microscope
US5043578A (en) * 1990-04-05 1991-08-27 International Business Machines Corporation Writing atomic scale features with fine tip as source of deposited atoms
JPH041949A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報入力及び／または取出し装置
JPH041948A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報記録装置及び情報再生装置及び情報記録再生装置
JP2891510B2 (ja) * 1990-05-09 1999-05-17 日本電子株式会社 圧電素子駆動体
US5253516A (en) * 1990-05-23 1993-10-19 Digital Instruments, Inc. Atomic force microscope for small samples having dual-mode operating capability
US5369372A (en) * 1990-12-13 1994-11-29 Interuniversitair Micro Elektronica Centrum Vzw Method for resistance measurements on a semiconductor element with controlled probe pressure
EP0468071B1 (de) * 1990-07-25 1994-09-14 International Business Machines Corporation Methode zur Herstellung von mikromechanischen Sensoren für AFM/STM/MFM-Profilometrie und mikromechanischer AFM/STM/MFM-Sensorkopf
JPH0483104A (ja) * 1990-07-26 1992-03-17 Olympus Optical Co Ltd 走査型トンネル顕微鏡
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
US5187367A (en) * 1990-08-14 1993-02-16 Canon Kabushiki Kaisha Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe
JP3030574B2 (ja) * 1990-08-16 2000-04-10 キヤノン株式会社 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構
US5144833A (en) * 1990-09-27 1992-09-08 International Business Machines Corporation Atomic force microscopy
JP2741629B2 (ja) * 1990-10-09 1998-04-22 キヤノン株式会社 カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置
JP2802828B2 (ja) * 1990-10-19 1998-09-24 キヤノン株式会社 情報記録担体及びこれを使用する情報処理装置
US5231327A (en) * 1990-12-14 1993-07-27 Tfr Technologies, Inc. Optimized piezoelectric resonator-based networks
CA2057619C (en) * 1990-12-17 1997-08-19 Takayuki Yagi Cantilever probe and apparatus using the same
DE69023347T2 (de) * 1990-12-21 1996-05-30 Ibm Integriertes Rastertunnelmikroskop mit pneumatischer und elektrostatischer Steuerung und Verfahren zum Herstellen desselben.
US5283437A (en) * 1990-12-21 1994-02-01 International Business Machines Corporation Pneumatically and electrostatically driven scanning tunneling microscope
JPH05196458A (ja) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
JPH04235302A (ja) * 1991-01-11 1992-08-24 Jeol Ltd トンネル顕微鏡の探針微動機構
US5162691A (en) * 1991-01-22 1992-11-10 The United States Of America As Represented By The Secretary Of The Army Cantilevered air-gap type thin film piezoelectric resonator
US5660570A (en) * 1991-04-09 1997-08-26 Northeastern University Micro emitter based low contact force interconnection device
US5245248A (en) * 1991-04-09 1993-09-14 Northeastern University Micro-emitter-based low-contact-force interconnection device
US5220725A (en) * 1991-04-09 1993-06-22 Northeastern University Micro-emitter-based low-contact-force interconnection device
JP3000491B2 (ja) * 1991-04-10 2000-01-17 キヤノン株式会社 カンチレバーユニット及びこれを用いた情報処理装置、原子間力顕微鏡、磁力顕微鏡
JP2884447B2 (ja) * 1991-04-22 1999-04-19 キヤノン株式会社 カンチレバー型プローブ、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
US5235187A (en) * 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
US5264696A (en) * 1991-05-20 1993-11-23 Olympus Optical Co., Ltd. Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5351412A (en) * 1991-06-11 1994-10-04 International Business Machines Corporation Micro positioning device
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP3109861B2 (ja) * 1991-06-12 2000-11-20 キヤノン株式会社 情報の記録及び／又は再生装置
US5606162A (en) * 1991-06-13 1997-02-25 British Technology Group Limited Microprobe for surface-scanning microscopes
DE69223096T2 (de) * 1991-07-18 1998-05-28 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
CA2076925C (en) * 1991-08-29 1999-08-31 Kunihiro Sakai Information processing apparatus and scanning tunnel microscope
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
JP3261544B2 (ja) * 1991-10-03 2002-03-04 キヤノン株式会社 カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置
WO1993011413A1 (en) * 1991-11-26 1993-06-10 The Australian National University Piezoelectric bimorph cantilevers for surface analysis instruments
WO2004081684A1 (ja) * 1991-11-29 2004-09-23 Ryuji Takada 圧電素子の駆動方法及び装置並びに微動機構の制御装置
US5198716A (en) * 1991-12-09 1993-03-30 The United States Of America As Represented By The United States Department Of Energy Micro-machined resonator
US5214389A (en) * 1992-01-06 1993-05-25 Motorola, Inc. Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position
US5763782A (en) * 1992-03-16 1998-06-09 British Technology Group Limited Micromechanical sensor
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
JP3379106B2 (ja) * 1992-04-23 2003-02-17 セイコーエプソン株式会社 液体噴射ヘッド
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
EP0641488A1 (de) * 1992-05-22 1995-03-08 Trustees Of Boston University Elektrostriktive fühler und antriebselemente
US5436452A (en) * 1992-06-15 1995-07-25 California Institute Of Technology Uncooled tunneling infrared sensor
US5298748A (en) * 1992-06-15 1994-03-29 California Institute Of Technology Uncooled tunneling infrared sensor
US5317141A (en) * 1992-08-14 1994-05-31 National Semiconductor Corporation Apparatus and method for high-accuracy alignment
WO1994005046A2 (en) * 1992-08-24 1994-03-03 Conductus, Inc. Freestanding structures of perovskite-type oxide materials
JPH06132579A (ja) * 1992-09-01 1994-05-13 Canon Inc 変位素子及びそれを用いたプローブ、同プローブを有する機器
FR2695787B1 (fr) * 1992-09-11 1994-11-10 Suisse Electro Microtech Centr Transducteur capacitif intégré.
JP3140223B2 (ja) * 1992-11-11 2001-03-05 キヤノン株式会社 マイクロアクチュエータおよびその作製方法
JP3106044B2 (ja) * 1992-12-04 2000-11-06 日本碍子株式会社 アクチュエータ及びそれを用いたインクジェットプリントヘッド
JP2895694B2 (ja) * 1992-12-08 1999-05-24 シャープ株式会社 情報記録・再生用スライダー、情報記録・再生用スライダーの製造方法および情報記録・再生装置
JPH06195772A (ja) * 1992-12-21 1994-07-15 Canon Inc 画像信号処理機構およびその適用機器
EP0613298A3 (de) * 1992-12-31 1994-12-28 Gte Laboratories Inc Videowiedergabegerät mit Vielfachzugriff.
US5338932A (en) * 1993-01-04 1994-08-16 Motorola, Inc. Method and apparatus for measuring the topography of a semiconductor device
US6252334B1 (en) 1993-01-21 2001-06-26 Trw Inc. Digital control of smart structures
US5525853A (en) * 1993-01-21 1996-06-11 Trw Inc. Smart structures for vibration suppression
JPH06241777A (ja) * 1993-02-16 1994-09-02 Mitsubishi Electric Corp 原子間力顕微鏡用カンチレバー、その製造方法、このカンチレバーを用いた原子間力顕微鏡及びこのカンチレバーを用いた試料表面密着性評価方法
US5329927A (en) * 1993-02-25 1994-07-19 Echo Cath, Inc. Apparatus and method for locating an interventional medical device with a ultrasound color imaging system
DE4310349C2 (de) * 1993-03-30 2000-11-16 Inst Mikrotechnik Mainz Gmbh Sensorkopf und Verfahren zu seiner Herstellung
US5728089A (en) * 1993-06-04 1998-03-17 The Regents Of The University Of California Microfabricated structure to be used in surgery
WO1994030030A1 (en) * 1993-06-04 1994-12-22 The Regents Of The University Of California Microfabricated acoustic source and receiver
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
DE4325708C1 (de) * 1993-07-30 1994-06-16 Siemens Ag Verfahren zur Herstellung einer elektrisch leitenden Spitze aus dotiertem Silizium mittels lokaler Molekularstrahlepitaxie und Anwendung des Verfahrens zur Herstellung von Bauelementen der Vakuumelektronik (Feldemissionskathoden)
US5448382A (en) * 1993-09-07 1995-09-05 The United States Of America As Represented By The Secretary Of The Air Force Nonlinear optical scattering screen viewer
DE4332966A1 (de) * 1993-09-28 1995-03-30 Philips Patentverwaltung Torsionsaktuator und ein Verfahren zu dessen Herstellung
US20030199179A1 (en) * 1993-11-16 2003-10-23 Formfactor, Inc. Contact tip structure for microelectronic interconnection elements and method of making same
US20020053734A1 (en) 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
JP2965121B2 (ja) * 1994-02-15 1999-10-18 インターナショナル・ビジネス・マシーンズ・コーポレイション 高密度記録および再生装置
US5552655A (en) * 1994-05-04 1996-09-03 Trw Inc. Low frequency mechanical resonator
US5914507A (en) * 1994-05-11 1999-06-22 Regents Of The University Of Minnesota PZT microdevice
US5786655A (en) * 1994-05-26 1998-07-28 Canon Kabushiki Kaisha Strain element and vibration device
JP2780643B2 (ja) * 1994-06-03 1998-07-30 株式会社村田製作所 振動ジャイロ
US5751683A (en) 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US5914556A (en) * 1994-09-09 1999-06-22 Murata Manufacturing Co., Ltd. Piezoelectric element and method of manufacturing the same
JP3192887B2 (ja) * 1994-09-21 2001-07-30 キヤノン株式会社 プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置
JP3686109B2 (ja) * 1994-10-07 2005-08-24 ヒューレット・パッカード・カンパニー メモリ装置
JPH08129875A (ja) * 1994-10-28 1996-05-21 Hewlett Packard Co <Hp> 導電性針の位置ずれを低減したプローブ装置
US5550483A (en) * 1994-11-18 1996-08-27 International Business Machines High speed test probe positioning system
US5566011A (en) * 1994-12-08 1996-10-15 Luncent Technologies Inc. Antiflector black matrix having successively a chromium oxide layer, a molybdenum layer and a second chromium oxide layer
DE4444070C1 (de) * 1994-12-10 1996-08-08 Fraunhofer Ges Forschung Mikromechanisches Element
US5540958A (en) * 1994-12-14 1996-07-30 Vlsi Technology, Inc. Method of making microscope probe tips
DE19531466C2 (de) * 1995-03-30 2000-09-28 Dresden Ev Inst Festkoerper Mikromechanische Sonde für Rastermikroskope
US5726498A (en) * 1995-05-26 1998-03-10 International Business Machines Corporation Wire shape conferring reduced crosstalk and formation methods
US5717631A (en) * 1995-07-21 1998-02-10 Carnegie Mellon University Microelectromechanical structure and process of making same
US6507553B2 (en) 1995-07-24 2003-01-14 General Nanotechnology Llc Nanometer scale data storage device and associated positioning system
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
FR2743183B1 (fr) * 1995-12-15 1998-01-30 Commissariat Energie Atomique Dispositif d'enregistrement a micropointe magnetoresistive
US6118124A (en) * 1996-01-18 2000-09-12 Lockheed Martin Energy Research Corporation Electromagnetic and nuclear radiation detector using micromechanical sensors
JP3576677B2 (ja) * 1996-01-19 2004-10-13 キヤノン株式会社 静電アクチュエータ及び、該アクチュエータを用いたプローブ、走査型プローブ顕微鏡、加工装置、記録再生装置
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
DE69712654T2 (de) * 1996-02-22 2002-09-05 Seiko Epson Corp Tintenstrahlaufzeichnungskopf, Tintenstrahlaufzeichnungsgerät damit versehen und Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes
JPH09293283A (ja) * 1996-04-25 1997-11-11 Hewlett Packard Co <Hp> プローブ装置およびその製造方法、ならびにメディア移動型メモリ装置
US5865417A (en) * 1996-09-27 1999-02-02 Redwood Microsystems, Inc. Integrated electrically operable normally closed valve
US5965218A (en) * 1997-03-18 1999-10-12 Vlsi Technology, Inc. Process for manufacturing ultra-sharp atomic force microscope (AFM) and scanning tunneling microscope (STM) tips
US6143496A (en) * 1997-04-17 2000-11-07 Cytonix Corporation Method of sampling, amplifying and quantifying segment of nucleic acid, polymerase chain reaction assembly having nanoliter-sized sample chambers, and method of filling assembly
US6093330A (en) * 1997-06-02 2000-07-25 Cornell Research Foundation, Inc. Microfabrication process for enclosed microstructures
JP3179380B2 (ja) * 1997-08-11 2001-06-25 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6100523A (en) * 1997-10-29 2000-08-08 International Business Machines Corporation Micro goniometer for scanning microscopy
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6016267A (en) 1998-02-17 2000-01-18 International Business Machines High speed, high bandwidth, high density, nonvolatile memory system
US6016686A (en) * 1998-03-16 2000-01-25 Lockheed Martin Energy Research Corporation Micromechanical potentiometric sensors
US6180536B1 (en) 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
US6167748B1 (en) 1998-08-31 2001-01-02 Lockheed Martin Energy Research Corporation Capacitively readout multi-element sensor array with common-mode cancellation
US6197455B1 (en) 1999-01-14 2001-03-06 Advanced Micro Devices, Inc. Lithographic mask repair using a scanning tunneling microscope
US6289717B1 (en) 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
EP1196939A4 (de) * 1999-07-01 2002-09-18 Gen Nanotechnology Llc Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt
US6662418B1 (en) * 1999-07-13 2003-12-16 Samsung Electro-Mechanics Co., Ltd. Manufacturing method of ceramic device using mixture with photosensitive resin
WO2001014823A1 (en) * 1999-08-19 2001-03-01 The Regents Of The University Of California Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks
US7296329B1 (en) * 2000-02-04 2007-11-20 Agere Systems Inc. Method of isolation for acoustic resonator device
US20020018172A1 (en) * 2000-02-10 2002-02-14 Alwan James J. Method for manufacturing a flat panel display using localized wet etching
JP3611198B2 (ja) * 2000-02-16 2005-01-19 松下電器産業株式会社 アクチュエータとこれを用いた情報記録再生装置
US6479817B1 (en) 2000-03-28 2002-11-12 Advanced Micro Devices, Inc. Cantilever assembly and scanning tip therefor with associated optical sensor
US6452161B1 (en) 2000-03-28 2002-09-17 Advanced Micro Devices, Inc. Scanning probe microscope having optical fiber spaced from point of hp
US6931710B2 (en) * 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US6590850B2 (en) * 2001-03-07 2003-07-08 Hewlett-Packard Development Company, L.P. Packaging for storage devices using electron emissions
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7003125B2 (en) * 2001-09-12 2006-02-21 Seung-Hwan Yi Micromachined piezoelectric microspeaker and fabricating method thereof
US7053369B1 (en) 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6558968B1 (en) * 2001-10-31 2003-05-06 Hewlett-Packard Development Company Method of making an emitter with variable density photoresist layer
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
US6656369B2 (en) 2002-01-17 2003-12-02 International Business Machines Corporation Method for fabricating a scanning probe microscope probe
US7181977B2 (en) * 2002-01-22 2007-02-27 Measurement Specialties, Inc. Sensor assembly with lead attachment
US6617185B1 (en) * 2002-02-07 2003-09-09 Zyvex Corporation System and method for latching a micro-structure and a process for fabricating a micro-latching structure
US20030154149A1 (en) * 2002-02-13 2003-08-14 Dilip Gajendragadkar System and method of creating and executing a restricted stock sale plan
US6998689B2 (en) * 2002-09-09 2006-02-14 General Nanotechnology Llc Fluid delivery for scanning probe microscopy
US7061381B2 (en) * 2002-04-05 2006-06-13 Beezerbug Incorporated Ultrasonic transmitter and receiver systems and products using the same
KR100479687B1 (ko) * 2002-05-30 2005-03-30 한국과학기술연구원 캔틸레버 센서 및 그 제조 방법
US7152289B2 (en) * 2002-09-25 2006-12-26 Intel Corporation Method for forming bulk resonators silicon <110> substrate
JP2006501665A (ja) * 2002-10-03 2006-01-12 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 読み出し専用磁気メモリ素子ｍｒｏｍ
US6933662B2 (en) * 2002-10-31 2005-08-23 The Boeing Company Electrostrictive compound actuator
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
US7687767B2 (en) * 2002-12-20 2010-03-30 Agilent Technologies, Inc. Fast scanning stage for a scanning probe microscope
US7332850B2 (en) * 2003-02-10 2008-02-19 Siemens Medical Solutions Usa, Inc. Microfabricated ultrasonic transducers with curvature and method for making the same
US6895645B2 (en) * 2003-02-25 2005-05-24 Palo Alto Research Center Incorporated Methods to make bimorph MEMS devices
US6964201B2 (en) * 2003-02-25 2005-11-15 Palo Alto Research Center Incorporated Large dimension, flexible piezoelectric ceramic tapes
US7089635B2 (en) * 2003-02-25 2006-08-15 Palo Alto Research Center, Incorporated Methods to make piezoelectric ceramic thick film arrays and elements
US7275292B2 (en) 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
AU2003234843A1 (en) * 2003-05-22 2004-12-13 Fujitsu Limited Piezoelectric device , its manufacturing method, and touch panel device
EP1489740A3 (de) * 2003-06-18 2006-06-28 Matsushita Electric Industrial Co., Ltd. Elektronisches Bauelement und Verfahren zur Herstellung desselben
US7127949B2 (en) * 2003-07-08 2006-10-31 National University Of Singapore Contact pressure sensor and method for manufacturing the same
US7055378B2 (en) 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
DE10346576A1 (de) * 2003-10-07 2005-05-04 Bosch Gmbh Robert Layoutmaßnahmen
EP1528677B1 (de) 2003-10-30 2006-05-10 Agilent Technologies, Inc. Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten
US6946928B2 (en) 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7391285B2 (en) 2003-10-30 2008-06-24 Avago Technologies Wireless Ip Pte Ltd Film acoustically-coupled transformer
US7332985B2 (en) * 2003-10-30 2008-02-19 Avago Technologies Wireless Ip (Singapore) Pte Ltd. Cavity-less film bulk acoustic resonator (FBAR) devices
US7019605B2 (en) * 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
US7423954B2 (en) * 2003-12-17 2008-09-09 Hewlett-Packard Development Company, L.P. Contact probe storage sensor pod
US7436753B2 (en) 2003-12-17 2008-10-14 Mejia Robert G Contact probe storage FET sensor
US7212487B2 (en) * 2004-01-07 2007-05-01 Hewlett-Packard Development Company, L.P. Data readout arrangement
US7104134B2 (en) * 2004-03-05 2006-09-12 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor
US20050210988A1 (en) * 2004-03-05 2005-09-29 Jun Amano Method of making piezoelectric cantilever pressure sensor array
WO2005104138A1 (en) * 2004-04-14 2005-11-03 Veeco Instruments Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
WO2006000731A1 (fr) * 2004-06-14 2006-01-05 Stmicroelectronics Sa Microcommutateur a commande piezoelectrique
US7133322B2 (en) * 2004-06-28 2006-11-07 Hewlett-Packard Development Company, L.P. Probe storage device
US7615833B2 (en) 2004-07-13 2009-11-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator package and method of fabricating same
US7388454B2 (en) * 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US7144673B2 (en) * 2004-10-21 2006-12-05 Taiwan Semiconductor Manufacturing Co., Ltd. Effective photoresist stripping process for high dosage and high energy ion implantation
US8981876B2 (en) * 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) * 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
DE102005008514B4 (de) * 2005-02-24 2019-05-16 Tdk Corporation Mikrofonmembran und Mikrofon mit der Mikrofonmembran
US7427819B2 (en) * 2005-03-04 2008-09-23 Avago Wireless Ip Pte Ltd Film-bulk acoustic wave resonator with motion plate and method
US20060212978A1 (en) * 2005-03-15 2006-09-21 Sarah Brandenberger Apparatus and method for reading bit values using microprobe on a cantilever
US7212488B2 (en) 2005-03-21 2007-05-01 Hewlett-Packard Development Company, L.P. Method and device enabling capacitive probe-based data storage readout
US7369013B2 (en) 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7436269B2 (en) 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7934884B2 (en) * 2005-04-27 2011-05-03 Lockhart Industries, Inc. Ring binder cover
US7868522B2 (en) 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7391286B2 (en) * 2005-10-06 2008-06-24 Avago Wireless Ip Pte Ltd Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7675390B2 (en) * 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7423503B2 (en) 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
US7425787B2 (en) 2005-10-18 2008-09-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
US7525398B2 (en) * 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier
US7463499B2 (en) * 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
US20070125961A1 (en) * 2005-11-17 2007-06-07 Michel Despont Micromechanical system
US7561009B2 (en) * 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
US7612636B2 (en) * 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
US20070210724A1 (en) * 2006-03-09 2007-09-13 Mark Unkrich Power adapter and DC-DC converter having acoustic transformer
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US7479685B2 (en) * 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US7607342B2 (en) * 2006-04-26 2009-10-27 Vecco Instruments, Inc. Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument
JP4923716B2 (ja) * 2006-05-11 2012-04-25 株式会社日立製作所 試料分析装置および試料分析方法
US7629865B2 (en) 2006-05-31 2009-12-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters
US7465597B2 (en) * 2006-06-29 2008-12-16 Home Diagnostics, Inc. Method of manufacturing a diagnostic test strip
US7495368B2 (en) * 2006-08-31 2009-02-24 Evigia Systems, Inc. Bimorphic structures, sensor structures formed therewith, and methods therefor
US7508286B2 (en) * 2006-09-28 2009-03-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. HBAR oscillator and method of manufacture
US20080202239A1 (en) * 2007-02-28 2008-08-28 Fazzio R Shane Piezoelectric acceleration sensor
US7602105B2 (en) * 2007-04-24 2009-10-13 Uchicago Argonne, Llc Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory
US7791435B2 (en) * 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
US7732977B2 (en) * 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US7855618B2 (en) * 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
CN101464244B (zh) * 2008-12-19 2011-05-11 北京工业大学 应力状态下纳米材料力电性能与显微结构测量装置和方法
US8902023B2 (en) * 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
AT508385B1 (de) * 2009-10-12 2011-01-15 Blum Gmbh Julius Befestigungsvorrichtung für möbelbeschläge
AT508384B1 (de) * 2009-10-12 2011-01-15 Blum Gmbh Julius Befestigungsvorrichtung für möbelbeschläge
US8193877B2 (en) * 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
CN101776434B (zh) * 2010-03-10 2011-12-14 南开大学 基于隧道电流反馈瞄准的小盲孔测量方法及测量装置
US20120066876A1 (en) * 2010-09-16 2012-03-22 Huffman James D Creating an improved piezoelectric layer for transducers
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US9574954B2 (en) 2013-03-12 2017-02-21 Interlink Electronics, Inc. Systems and methods for press force detectors
US9261418B2 (en) * 2013-03-12 2016-02-16 Interlink Electronics, Inc. Systems and methods for common mode signal cancellation in press detectors
US9846091B2 (en) 2013-03-12 2017-12-19 Interlink Electronics, Inc. Systems and methods for press force detectors
US9484522B2 (en) 2013-03-13 2016-11-01 Microgen Systems, Inc. Piezoelectric energy harvester device with curved sidewalls, system, and methods of use and making
US9362480B2 (en) 2013-03-13 2016-06-07 Microgen Systems, Inc. Symmetric dual piezoelectric stack microelectromechanical piezoelectric cantilever energy harvester
US9479089B2 (en) 2013-03-13 2016-10-25 Microgen Systems, Inc. Piezoelectric energy harvester device with a stopper structure, system, and methods of use and making
US9038269B2 (en) * 2013-04-02 2015-05-26 Xerox Corporation Printhead with nanotips for nanoscale printing and manufacturing
KR101531088B1 (ko) * 2013-05-30 2015-07-06 삼성전기주식회사 관성센서
US9728707B2 (en) 2014-02-05 2017-08-08 Microgen Systems, Inc. Packaged piezoelectric energy harvester device with a compliant stopper structure, system, and methods of use and making
US9502635B2 (en) 2014-03-07 2016-11-22 Microgen Systems, Inc. Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices
US9419546B2 (en) 2014-04-24 2016-08-16 Microgen Systems, Inc. Piezoelectric energy harvester device with frequency offset vibrational harvesters
DE102017203722B4 (de) 2017-03-07 2021-11-25 Brandenburgische Technische Universität (BTU) Cottbus-Senftenberg Mems und verfahren zum herstellen derselben

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE143128C (de) *
JPS4939319B1 (de) * 1969-02-14 1974-10-24
US3633134A (en) * 1969-10-10 1972-01-04 Motorola Inc Crystal band pass filter circuit
GB1349354A (en) * 1970-08-06 1974-04-03 English Electric Valve Co Ltd Magnetrons
JPS5346544B2 (de) * 1973-11-30 1978-12-14
JPS5921673B2 (ja) * 1975-07-15 1984-05-21 大倉電気株式会社 圧電駆動装置
US4099211A (en) * 1976-09-13 1978-07-04 Ampex Corporation Positionable transducing mounting structure and driving system therefor
SU632014A1 (ru) * 1977-03-28 1978-11-05 Каунасский Политехнический Институт Им.А.Снечкуса Вибродвигатель
US4149102A (en) * 1977-10-31 1979-04-10 Motorola, Inc. Piezoelectric monolithic crystal element having improved response
JPS5497007A (en) * 1978-01-17 1979-07-31 Sony Corp Head supporting structure
SU681479A1 (ru) * 1978-04-18 1979-08-25 Каунасский Политехнический Институт Им. Антанаса Снечкуса Вибродвигатель
SU765910A1 (ru) * 1978-10-05 1980-09-23 Каунасский Политехнический Институт Им. Антанаса Снечкуса Вибродвигатель
GB2050671B (en) * 1979-06-09 1983-08-17 Sony Corp Rotary transducer head assemblies
SU961007A1 (ru) * 1980-06-10 1982-09-23 Каунасский Политехнический Институт Им.Антанаса Снечкуса Вибропривод
GB2089169A (en) * 1980-12-10 1982-06-16 Campbell Malcolm Gregory An electronic camera
JPS57115887A (en) * 1981-01-09 1982-07-19 Omron Tateisi Electronics Co Piezoelectric thin film type electro-mechanical displacement transducing element
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
JPS57170680A (en) * 1981-04-13 1982-10-20 Matsushita Electric Ind Co Ltd Magnetic recorder and reproducer
US4550351A (en) * 1982-03-31 1985-10-29 Rca Corporation Adaptive automatic scan tracking system
US4651227A (en) * 1982-08-20 1987-03-17 Olympus Optical Co., Ltd. Video signal recording apparatus with A/D conversion
GB2126447A (en) * 1982-09-03 1984-03-21 Combined Tech Corp Plc Real-time Fourier transforming transducer and applications thereof
JPS5994103A (ja) * 1982-11-19 1984-05-30 Nec Corp 電気機械変換器の制御装置
US4575822A (en) * 1983-02-15 1986-03-11 The Board Of Trustees Of The Leland Stanford Junior University Method and means for data storage using tunnel current data readout
JPH0666032B2 (ja) * 1983-03-01 1994-08-24 三井東圧化学株式会社 乾式トナ−
JPS59191126A (ja) * 1983-04-14 1984-10-30 Victor Co Of Japan Ltd ビデオヘツドの位置制御装置
JPS59201038A (ja) * 1983-04-30 1984-11-14 Canon Inc 可変倍複写装置
JPS6038988A (ja) * 1983-08-12 1985-02-28 Victor Co Of Japan Ltd 固体撮像素子を用いた静止画像撮像装置
US4517486A (en) * 1984-02-21 1985-05-14 The United States Of America As Represented By The Secretary Of The Army Monolitic band-pass filter using piezoelectric cantilevers
JPS6139590A (ja) * 1984-07-31 1986-02-25 Matsushita Electric Ind Co Ltd 圧電アクチユエ−タ
JPS6179270A (ja) * 1984-09-26 1986-04-22 Olympus Optical Co Ltd 圧電型変位装置
US4750246A (en) * 1984-10-29 1988-06-14 Hughes Aircraft Company Method of making compensated crystal oscillator
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
JPS6244079A (ja) * 1985-08-20 1987-02-26 Masafumi Yano エネルギ−変換装置
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
USRE33387E (en) * 1985-11-26 1990-10-16 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
EP0223918B1 (de) * 1985-11-26 1990-10-24 International Business Machines Corporation Verfahren und Mikroskop zur Erzeugung von topographischen Bildern unter Anwendung atomarer Wechselwirkungskräfte mit Subauflösung
US4675960A (en) * 1985-12-30 1987-06-30 Motorola, Inc. Method of manufacturing an electrically variable piezoelectric hybrid capacitor
US4802951A (en) * 1986-03-07 1989-02-07 Trustees Of Boston University Method for parallel fabrication of nanometer scale multi-device structures
EP0247219B1 (de) * 1986-05-27 1991-05-15 International Business Machines Corporation Speichereinheit mit direktem Zugriff
JPS635477A (ja) * 1986-06-25 1988-01-11 Fuji Photo Film Co Ltd 画像処理方法
FR2604791B1 (fr) * 1986-10-02 1988-11-25 Commissariat Energie Atomique Procedes de fabrication d'une jauge piezoresistive et d'un accelerometre comportant une telle jauge
EP0262253A1 (de) * 1986-10-03 1988-04-06 International Business Machines Corporation Mikromechanische Fühlervorrichtung für atomare Kräfte
DE3789373T2 (de) * 1986-12-24 1994-06-23 Canon Kk Aufnahmegerät und Wiedergabegerät.
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US4783821A (en) * 1987-11-25 1988-11-08 The Regents Of The University Of California IC processed piezoelectric microphone
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JP2979451B2 (ja) * 1992-10-28 1999-11-15 京セラ株式会社 トラッキングサーボ引き込み装置

Also Published As

Publication number Publication date
WO1989007259A3 (en) 1989-09-08
WO1989007256A1 (en) 1989-08-10
US5317533A (en) 1994-05-31
US5248912A (en) 1993-09-28
US5017266A (en) 1991-05-21
US4912822A (en) 1990-04-03
EP0397799B1 (de) 1994-08-31
AU3976089A (en) 1989-08-25
JP3103885B2 (ja) 2000-10-30
JPH03504762A (ja) 1991-10-17
US5129132A (en) 1992-07-14
WO1989007258A3 (en) 1989-09-08
DE68917913D1 (de) 1994-10-06
EP0407460A4 (en) 1993-01-13
EP0407460A1 (de) 1991-01-16
AU3530889A (en) 1989-08-25
JP2752755B2 (ja) 1998-05-18
EP0397799A1 (de) 1990-11-22
AU3353589A (en) 1989-08-25
EP0407460B1 (de) 1995-03-01
EP0404799A1 (de) 1991-01-02
DE68921471T2 (de) 1995-07-20
JP2833807B2 (ja) 1998-12-09
US4906840A (en) 1990-03-06
WO1989007259A2 (en) 1989-08-10
WO1989007258A2 (en) 1989-08-10
DE68918088D1 (de) 1994-10-13
JPH03503463A (ja) 1991-08-01
EP0404799B1 (de) 1994-09-07
DE68918088T2 (de) 1995-04-06
JPH03503586A (ja) 1991-08-08

Similar Documents

Publication Publication Date Title
DE68921471T2 (de) Integrierte massenspeicheranordnung.
DE68908965D1 (de) Lagervorrichtung.
DE68915009T2 (de) Ablageschale.
DE344894T1 (de) Speicherzelle.
DE68903402D1 (de) Dehnungsmesser.
DE3887324D1 (de) Speicheranordnung.
DE68902193T2 (de) Datenspeicheranordnung.
DE68904705D1 (de) Maschinenlagerung.
FI893825A (fi) Ytgradientanordning foer snabb kaernmagnetisk resonansavbildning.
DE58908275D1 (de) Drehspeicher.
DE58902016D1 (de) Ablege-einrichtung.
DE58906271D1 (de) Gasspeicher.
DE3851241D1 (de) Speicheranordnung.
DE68915608T2 (de) Speicherarchitektur.
DE58904535D1 (de) Lagereinrichtung.
DE68902317T2 (de) Multiport-speicher.
DE68924860T2 (de) Erweiterte Speicheranordnung.
DE68915159D1 (de) Eingekapselte bakterie.
DE3865192D1 (de) Speichereinheit.
DE68928589T2 (de) Speicheranordnung
DE3851601D1 (de) Speicheranordnung.
DE3874923D1 (de) Speichereinheit.
KR890022479U (ko) 간이 보관대
DE69020913T2 (de) Speicherdaten - Synthesizer.
ES1005084Y (es) Cubretendedero.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee