DE68923589T2 - Infrarot-Detektor. - Google Patents

Infrarot-Detektor.

Info

Publication number
DE68923589T2
DE68923589T2 DE68923589T DE68923589T DE68923589T2 DE 68923589 T2 DE68923589 T2 DE 68923589T2 DE 68923589 T DE68923589 T DE 68923589T DE 68923589 T DE68923589 T DE 68923589T DE 68923589 T2 DE68923589 T2 DE 68923589T2
Authority
DE
Germany
Prior art keywords
infrared detector
infrared
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68923589T
Other languages
English (en)
Other versions
DE68923589D1 (de
Inventor
Larry J Van Hornbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE68923589D1 publication Critical patent/DE68923589D1/de
Publication of DE68923589T2 publication Critical patent/DE68923589T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B13/00—Burglar, theft or intruder alarms
    • G08B13/18—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength
    • G08B13/189—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength using passive radiation detection systems
    • G08B13/19—Actuation by interference with heat, light, or radiation of shorter wavelength; Actuation by intruding sources of heat, light, or radiation of shorter wavelength using passive radiation detection systems using infrared-radiation detection systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer
    • H01L27/14669—Infrared imagers
    • H01L27/1467—Infrared imagers of the hybrid type
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
DE68923589T 1988-08-12 1989-07-12 Infrarot-Detektor. Expired - Lifetime DE68923589T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23179788A 1988-08-12 1988-08-12

Publications (2)

Publication Number Publication Date
DE68923589D1 DE68923589D1 (de) 1995-08-31
DE68923589T2 true DE68923589T2 (de) 1996-01-18

Family

ID=22870680

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68923589T Expired - Lifetime DE68923589T2 (de) 1988-08-12 1989-07-12 Infrarot-Detektor.

Country Status (4)

Country Link
EP (1) EP0354369B1 (de)
JP (1) JP2834202B2 (de)
KR (1) KR0135119B1 (de)
DE (1) DE68923589T2 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006003718A1 (de) * 2006-01-26 2007-08-09 Atmel Germany Gmbh Fertigungsprozess für integrierte mikroelektro-mechanische Bauelemente
DE10058864B4 (de) * 2000-11-27 2009-06-25 Pyreos Ltd. Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur
US8080797B2 (en) 2006-09-08 2011-12-20 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bolometer and method of producing a bolometer
DE102008041587B4 (de) * 2008-08-27 2017-07-20 Robert Bosch Gmbh Mikrostrukturiertes Temperatursensorelement mit zusätzlicher IR-absorbierender Schicht

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2236016A (en) * 1989-09-13 1991-03-20 Philips Electronic Associated Pyroelectric and other infrared detection devices with thin films
DE69221054T2 (de) * 1991-09-27 1998-01-22 Texas Instruments Inc Lese-System und Verfahren für Infrarotdetektoranordnungen
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
EP0611443B1 (de) * 1991-11-04 1996-05-29 Honeywell Inc. Dunnfilmpyroelektrische bildmatrix
JP3062627B2 (ja) * 1992-07-08 2000-07-12 ハネウエル・インコーポレーテッド 高赤外感度を有する超小型構造体
US5426412A (en) * 1992-10-27 1995-06-20 Matsushita Electric Works, Ltd. Infrared detecting device and infrared detecting element for use in the device
IL104669A0 (en) * 1993-02-09 1993-08-18 Technion Res & Dev Foundation Bolometer array
JP2710228B2 (ja) * 1994-08-11 1998-02-10 日本電気株式会社 ボロメータ型赤外線検知素子、その駆動方法、および検出用積分回路
JP2674545B2 (ja) * 1995-01-20 1997-11-12 日本電気株式会社 赤外線検出器及びその駆動方法
JP3563803B2 (ja) * 1995-02-14 2004-09-08 松下電器産業株式会社 空調装置およびその制御方法
JP3344163B2 (ja) * 1995-06-06 2002-11-11 三菱電機株式会社 赤外線撮像素子
FR2735574B1 (fr) * 1995-06-15 1997-07-18 Commissariat Energie Atomique Dispositif de detection bolometrique pour ondes millimetriques et submillimetriques et procede de fabrication de ce dispositif
US6064066A (en) * 1995-07-21 2000-05-16 Texas Insruments Incorporated Bolometer autocalibration
EP0773435A3 (de) * 1995-07-21 1998-03-11 Texas Instruments Incorporated Verfahren und Vorrichtungen zur Strahlungsmessung
US5789753A (en) * 1995-07-21 1998-08-04 Texas Instruments Incorporated Stress tolerant bolometer
US6392232B1 (en) 1995-07-21 2002-05-21 Pharmarcopeia, Inc. High fill factor bolometer array
US5841137A (en) * 1995-08-11 1998-11-24 Texas Instruments Incorporated Duplicative detector sensor
US5914488A (en) * 1996-03-05 1999-06-22 Mitsubishi Denki Kabushiki Kaisha Infrared detector
US5831266A (en) * 1996-09-12 1998-11-03 Institut National D'optique Microbridge structure for emitting or detecting radiations and method for forming such microbridge structure
US5962909A (en) * 1996-09-12 1999-10-05 Institut National D'optique Microstructure suspended by a microsupport
FI107407B (fi) * 1997-09-16 2001-07-31 Metorex Internat Oy Alimillimetriaalloilla toimiva kuvausjärjestelmä
FR2773215B1 (fr) * 1997-12-31 2000-01-28 Commissariat Energie Atomique Detecteur thermique bolometrique
FR2780784B1 (fr) * 1998-07-06 2000-08-11 Commissariat Energie Atomique Detecteur thermique a amplification par effet bolometrique
FR2781927B1 (fr) * 1998-07-28 2001-10-05 Commissariat Energie Atomique Dispositif de detection de rayonnements multispectraux infrarouge/visible
WO2000012986A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including a reflective layer
FR2788885B1 (fr) * 1999-01-21 2003-07-18 Commissariat Energie Atomique Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci
JP3460810B2 (ja) 1999-07-26 2003-10-27 日本電気株式会社 熱分離構造を有する熱型赤外線検出器
FR2802338B1 (fr) * 1999-12-10 2002-01-18 Commissariat Energie Atomique Dispositif de detection de rayonnement electromagnetique
DE19961180C2 (de) * 1999-12-18 2002-02-28 Daimler Chrysler Ag Dünnschichtwiderstand mit hohem Temperaturkoeffizienten als passives Halbleiterbauelement für integrierte Schaltungen und Herstellungsverfahren
DE10321640B4 (de) * 2003-05-13 2016-12-22 Heimann Sensor Gmbh Infrarotsensor mit verbesserter Strahlungsausbeute
DE10321639A1 (de) * 2003-05-13 2004-12-02 Heimann Sensor Gmbh Infrarotsensor mit optimierter Flächennutzung
US7460246B2 (en) * 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
NL1028253C2 (nl) * 2005-02-11 2006-08-14 Uteke Maria Klaassens Sensormicrochip met contactring, beeldopname sensor, beeldopname camera.
AR060423A1 (es) * 2007-04-11 2008-06-18 Consejo Nac Invest Cient Tec Sensor bolometrico de alta sensibilidad
JP2010127892A (ja) * 2008-12-01 2010-06-10 Seiko Instruments Inc 赤外線センサ
KR101250745B1 (ko) * 2010-11-19 2013-04-04 박춘덕 광합성 유효 광량 측정기
KR101180647B1 (ko) * 2011-01-10 2012-09-19 한국과학기술원 마이크로 볼로미터에서 필 팩터를 높이기 위한 픽셀 디자인
CN102564599B (zh) * 2011-12-23 2013-04-10 电子科技大学 红外焦平面阵列中读出电路及其参比电阻以及制造方法
JP2013143416A (ja) * 2012-01-10 2013-07-22 Seiko Epson Corp 熱型電磁波検出器および電子機器
US9698281B2 (en) * 2012-08-22 2017-07-04 Robert Bosch Gmbh CMOS bolometer
GB2521476A (en) 2013-12-22 2015-06-24 Melexis Technologies Nv Infrared thermal sensor with good SNR

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3846820A (en) * 1973-06-26 1974-11-05 Westinghouse Electric Corp Mosaic for ir imaging using pyroelectric sensors in a bipolar transistor array
JPS6034060B2 (ja) * 1975-07-04 1985-08-06 株式会社横河電機製作所 光検出装置
US4142207A (en) * 1977-12-20 1979-02-27 Texas Instruments Incorporated Ferroelectric imaging system
US4754139A (en) * 1986-04-10 1988-06-28 Aerojet-General Corporation Uncooled high resolution infrared imaging plane
JPS6378581A (ja) * 1986-09-20 1988-04-08 Fujitsu Ltd 半導体装置
GB2198879A (en) * 1986-12-05 1988-06-22 Philips Electronic Associated Thermal radiation detector

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10058864B4 (de) * 2000-11-27 2009-06-25 Pyreos Ltd. Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur
DE102006003718A1 (de) * 2006-01-26 2007-08-09 Atmel Germany Gmbh Fertigungsprozess für integrierte mikroelektro-mechanische Bauelemente
DE102006003718B4 (de) * 2006-01-26 2008-07-17 Atmel Germany Gmbh Mikro-elektro-mechanisches Bauelement und Fertigungsprozess für integrierte mikro-elektro-mechanische Bauelemente
US8080797B2 (en) 2006-09-08 2011-12-20 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bolometer and method of producing a bolometer
DE112006004013B4 (de) * 2006-09-08 2014-07-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bolometer und Verfahren zum Herstellen eines Bolometers
DE102008041587B4 (de) * 2008-08-27 2017-07-20 Robert Bosch Gmbh Mikrostrukturiertes Temperatursensorelement mit zusätzlicher IR-absorbierender Schicht

Also Published As

Publication number Publication date
JPH02196929A (ja) 1990-08-03
EP0354369B1 (de) 1995-07-26
KR0135119B1 (ko) 1998-04-20
JP2834202B2 (ja) 1998-12-09
KR900003617A (ko) 1990-03-26
EP0354369A2 (de) 1990-02-14
DE68923589D1 (de) 1995-08-31
EP0354369A3 (en) 1990-11-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO. (N.D.GES.D. STAATES DELAWARE), LEXING