DE68928654T2 - Verfahren zur Herstellung von Konformmasken - Google Patents

Verfahren zur Herstellung von Konformmasken

Info

Publication number
DE68928654T2
DE68928654T2 DE68928654T DE68928654T DE68928654T2 DE 68928654 T2 DE68928654 T2 DE 68928654T2 DE 68928654 T DE68928654 T DE 68928654T DE 68928654 T DE68928654 T DE 68928654T DE 68928654 T2 DE68928654 T2 DE 68928654T2
Authority
DE
Germany
Prior art keywords
composition layer
photoimageable composition
circuit board
printed circuit
cover sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68928654T
Other languages
English (en)
Other versions
DE68928654D1 (de
Inventor
Frederick John Axon
Amedeo Candore
Clancy Patrick Crooks
James John Briguglio
Lawson Lightfoot
Leo Roos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Morton International LLC
Original Assignee
Morton International LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/160,895 external-priority patent/US4889790A/en
Application filed by Morton International LLC filed Critical Morton International LLC
Application granted granted Critical
Publication of DE68928654D1 publication Critical patent/DE68928654D1/de
Publication of DE68928654T2 publication Critical patent/DE68928654T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06—Platens or press rams
    • B30B15/061—Cushion plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B32B37/1018—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using only vacuum
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/092—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by backside coating or layers, by lubricating-slip layers or means, by oxygen barrier layers or by stripping-release layers or means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/281—Applying non-metallic protective coatings by means of a preformed insulating foil
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/08—PCBs, i.e. printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06—Lamination
    • H05K2203/066—Transfer laminating of insulating material, e.g. resist as a whole layer, not as a pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06—Lamination
    • H05K2203/068—Features of the lamination press or of the lamination process, e.g. using special separator sheets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/085—Using vacuum or low pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105—Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
DE68928654T 1988-02-26 1989-02-09 Verfahren zur Herstellung von Konformmasken Expired - Fee Related DE68928654T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/160,895 US4889790A (en) 1988-02-26 1988-02-26 Method of forming a conformable mask on a printed circuit board
US07/264,472 US4992354A (en) 1988-02-26 1988-10-28 Dry film photoresist for forming a conformable mask and method of application to a printed circuit board or the like

Publications (2)

Publication Number Publication Date
DE68928654D1 DE68928654D1 (de) 1998-06-04
DE68928654T2 true DE68928654T2 (de) 1998-08-20

Family

ID=26857314

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68928654T Expired - Fee Related DE68928654T2 (de) 1988-02-26 1989-02-09 Verfahren zur Herstellung von Konformmasken

Country Status (11)

Country Link
US (1) US4992354A (de)
EP (1) EP0330339B1 (de)
JP (1) JPH0666031B2 (de)
KR (1) KR920008720B1 (de)
AT (1) ATE165674T1 (de)
AU (1) AU625637B2 (de)
CA (1) CA1304169C (de)
DE (1) DE68928654T2 (de)
DK (1) DK89089A (de)
ES (1) ES2116967T3 (de)
SG (1) SG52247A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4946524A (en) * 1989-03-02 1990-08-07 Morton International, Inc. Applicator and method for applying dry film solder mask on a board
CA2034601A1 (en) * 1990-02-12 1991-08-13 James Briguglio Solder mask vacuum laminator conversion
CA2034623A1 (en) * 1990-02-16 1991-08-17 Ming Tara Photoimageable compositions containing fugitive colorants
JPH0450852A (ja) * 1990-06-14 1992-02-19 Hitachi Chem Co Ltd 感光性フイルム及びこれを用いたソルダマスクの形成法
JPH04146687A (ja) * 1990-10-08 1992-05-20 Nippon Paint Co Ltd ソルダーマスクされた回路基板の製法
IT1250461B (it) * 1991-08-09 1995-04-07 Morton Int Inc Procedimento ed apparecchio per applicare in modo continuo in particolare maschere di saldatura su pannelli di circuiti stampati.
US5270146A (en) * 1992-04-07 1993-12-14 Morton International, Inc. Photosensitive laminate having dual intermediate layers
IT1274181B (it) * 1994-05-18 1997-07-15 Amedeo Candore Laminazione di pellicole fotosensibili per formare una maschera di saldatura su schede di circuito stampato
TW283819B (de) * 1995-02-03 1996-08-21 Fuji Photo Film Co Ltd
US5609991A (en) * 1995-02-10 1997-03-11 Morton International, Inc. Photoimageable composition having improved alkaline process resistance and tack-free surface for contact imaging
US5626774A (en) * 1995-12-11 1997-05-06 Alliedsignal Inc. Solder mask for manufacture of printed circuit boards
US5993945A (en) * 1996-05-30 1999-11-30 International Business Machines Corporation Process for high resolution photoimageable dielectric
US6022670A (en) * 1997-05-08 2000-02-08 International Business Machines Corporation Process for high resolution photoimageable dielectric
US6057079A (en) * 1997-09-24 2000-05-02 Shipley Company, L.L.C. Dry film photoresist construction suitable for rolling up on itself
DE19820049C2 (de) 1998-05-05 2001-04-12 Epcos Ag Thermomechanisches Verfahren zum Planarisieren einer fototechnisch strukturierbaren Schicht, insbesondere Verkapselung für elektronische Bauelemente
US6090474A (en) * 1998-09-01 2000-07-18 International Business Machines Corporation Flowable compositions and use in filling vias and plated through-holes
US6542379B1 (en) 1999-07-15 2003-04-01 International Business Machines Corporation Circuitry with integrated passive components and method for producing
IT1313118B1 (it) 1999-08-25 2002-06-17 Morton Int Inc Apparecchiatura di applicazione a vuoto dotata di mezzi trasportatorie procedimento per applicare un resist a film secco ad un pannello
IT1313117B1 (it) * 1999-08-25 2002-06-17 Morton Int Inc Apparecchiatura di applicazione a vuoto dotata di mezzi trasportatorie procedimento per applicare un resist a film secco ad un pannello di
EP1117006A1 (de) * 2000-01-14 2001-07-18 Shipley Company LLC Fotoresist mit verbesserter Fotogeschwindigkeit
US6329609B1 (en) 2000-06-29 2001-12-11 International Business Machines Corporation Method and structure to prevent distortion and expansion of organic spacer layer for thin film transfer-join technology
US7323290B2 (en) * 2002-09-30 2008-01-29 Eternal Technology Corporation Dry film photoresist
US7148265B2 (en) * 2002-09-30 2006-12-12 Rohm And Haas Electronic Materials Llc Functional polymer
US7741003B2 (en) * 2004-03-30 2010-06-22 Hitachi Global Storage Technologies Netherlands B.V. Photoresist transfer pads
JP5316901B2 (ja) * 2009-12-07 2013-10-16 山栄化学株式会社 プリント配線板及びその製造方法
CN102799070B (zh) * 2012-08-27 2014-03-05 珠海市能动科技光学产业有限公司 双层涂布的负性光致抗蚀干膜
EP3035122B1 (de) 2014-12-16 2019-03-20 ATOTECH Deutschland GmbH Verfahren zur Feinleiterherstellung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2106574A1 (de) * 1970-03-03 1971-09-23 Shpley Co Inc Lichtempfindliches Laminat
US4530896A (en) * 1970-03-03 1985-07-23 Shipley Company Inc. Photosensitive laminate
DE2544553C2 (de) * 1974-10-08 1983-08-04 E.I. du Pont de Nemours and Co., 19898 Wilmington, Del. Verfahren zum Aufbringen einer photopolymerisierbaren festen Resistschicht auf ein Substrat
US4127436A (en) * 1975-04-17 1978-11-28 E. I. Du Pont De Nemours And Company Vacuum laminating process
JPS593740B2 (ja) * 1975-07-30 1984-01-25 日立化成工業株式会社 凹凸表面に感光層の形成された固体板の製造法
DE2963050D1 (en) * 1978-02-17 1982-07-29 Du Pont Use of photosensitive stratum to create through-hole connections in circuit boards
JPS55501072A (de) * 1978-12-25 1980-12-04
US4413051A (en) * 1981-05-04 1983-11-01 Dynamics Research Corporation Method for providing high resolution, highly defined, thick film patterns
US4495014A (en) * 1983-02-18 1985-01-22 E. I. Du Pont De Nemours And Company Laminating and trimming process
JPS6252552A (ja) * 1985-08-30 1987-03-07 Hitachi Chem Co Ltd 減圧貼り合わせ方法及び装置

Also Published As

Publication number Publication date
CA1304169C (en) 1992-06-23
EP0330339A2 (de) 1989-08-30
EP0330339A3 (de) 1991-11-27
ES2116967T3 (es) 1998-08-01
DK89089D0 (da) 1989-02-24
AU2996189A (en) 1989-08-31
KR920008720B1 (en) 1992-10-08
ATE165674T1 (de) 1998-05-15
DK89089A (da) 1989-08-27
EP0330339B1 (de) 1998-04-29
JPH026960A (ja) 1990-01-11
DE68928654D1 (de) 1998-06-04
SG52247A1 (en) 1998-09-28
US4992354A (en) 1991-02-12
AU625637B2 (en) 1992-07-16
JPH0666031B2 (ja) 1994-08-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee