DE69024390D1 - Apparat zum Prüfen von Unterbrechungen/Kurzschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen - Google Patents

Apparat zum Prüfen von Unterbrechungen/Kurzschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen

Info

Publication number
DE69024390D1
DE69024390D1 DE69024390T DE69024390T DE69024390D1 DE 69024390 D1 DE69024390 D1 DE 69024390D1 DE 69024390 T DE69024390 T DE 69024390T DE 69024390 T DE69024390 T DE 69024390T DE 69024390 D1 DE69024390 D1 DE 69024390D1
Authority
DE
Germany
Prior art keywords
interruptions
substrates
testing
electron beams
capacitively coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024390T
Other languages
English (en)
Other versions
DE69024390T2 (de
Inventor
Steven Douglas Golladay
Fritz Juergen Hohn
David Joseph Hutson
William D Meisburger
Juergen Rasch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69024390D1 publication Critical patent/DE69024390D1/de
Application granted granted Critical
Publication of DE69024390T2 publication Critical patent/DE69024390T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/307—Contactless testing using electron beams of integrated circuits
DE69024390T 1989-03-21 1990-02-20 Apparat zum Prüfen von Unterbrechungen/Kurzschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen Expired - Fee Related DE69024390T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/326,772 US4943769A (en) 1989-03-21 1989-03-21 Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams

Publications (2)

Publication Number Publication Date
DE69024390D1 true DE69024390D1 (de) 1996-02-08
DE69024390T2 DE69024390T2 (de) 1996-07-18

Family

ID=23273654

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69024390T Expired - Fee Related DE69024390T2 (de) 1989-03-21 1990-02-20 Apparat zum Prüfen von Unterbrechungen/Kurzschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen
DE69033851T Expired - Lifetime DE69033851T2 (de) 1989-03-21 1990-02-20 Verfahren zum Prüfen von Unterbrechungen/Kurschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69033851T Expired - Lifetime DE69033851T2 (de) 1989-03-21 1990-02-20 Verfahren zum Prüfen von Unterbrechungen/Kurschlüssen bei kapazitiv gekoppelten Netzen in Substraten unter Verwendung von Elektronenstrahlen

Country Status (4)

Country Link
US (1) US4943769A (de)
EP (2) EP0678752B1 (de)
JP (1) JPH0792497B2 (de)
DE (2) DE69024390T2 (de)

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US5258706A (en) * 1991-10-16 1993-11-02 Siemens Aktiengesellschaft Method for the recognition of testing errors in the test of microwirings
US5404110A (en) * 1993-03-25 1995-04-04 International Business Machines Corporation System using induced current for contactless testing of wiring networks
US5602489A (en) * 1994-12-02 1997-02-11 Alcedo Switch potential electron beam substrate tester
US5844416A (en) * 1995-11-02 1998-12-01 Sandia Corporation Ion-beam apparatus and method for analyzing and controlling integrated circuits
US6172363B1 (en) * 1996-03-05 2001-01-09 Hitachi, Ltd. Method and apparatus for inspecting integrated circuit pattern
US6504393B1 (en) 1997-07-15 2003-01-07 Applied Materials, Inc. Methods and apparatus for testing semiconductor and integrated circuit structures
JP2000164653A (ja) * 1998-11-30 2000-06-16 Ando Electric Co Ltd 電気光学サンプリングプローバ及び測定方法
US6252412B1 (en) 1999-01-08 2001-06-26 Schlumberger Technologies, Inc. Method of detecting defects in patterned substrates
US6232787B1 (en) * 1999-01-08 2001-05-15 Schlumberger Technologies, Inc. Microstructure defect detection
DE19901767A1 (de) * 1999-01-18 2000-07-20 Etec Ebt Gmbh Verfahren und Vorrichtung zum Testen der Funktion einer Vielzahl von Mikrostrukturelementen
EP1079235B1 (de) * 1999-07-29 2002-02-06 Advantest Corporation Verfahren und Vorrichtung zur Prüfung eines elektronischen Bauteils
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
AU3354401A (en) 2000-02-14 2001-08-20 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatustherefor
US6589860B1 (en) * 2001-03-16 2003-07-08 Advanced Micro Devices, Inc. System and method for calibrating electron beam defect inspection tool
US6888150B2 (en) * 2001-12-13 2005-05-03 Sony International (Europe) Gmbh Method for defect and conductivity engineering of a conducting nanoscaled structure
US7528614B2 (en) * 2004-12-22 2009-05-05 Applied Materials, Inc. Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
US7652270B2 (en) * 2007-06-05 2010-01-26 Varian Semiconductor Equipment Associates, Inc. Techniques for ion beam current measurement using a scanning beam current transformer
GB0713276D0 (en) * 2007-07-09 2007-08-15 Medical Res Council Transmission electron microscope
CN102901471B (zh) * 2011-07-26 2015-06-03 中国科学院物理研究所 纳米图形化和超宽频电磁特性测量系统
US9805910B1 (en) * 2015-03-14 2017-10-31 Kla-Tencor Corporation Automated SEM nanoprobe tool
CN112881845B (zh) * 2021-01-26 2022-11-04 浙江亚太机电股份有限公司 测量ecu信号线传导发射电流的装置和方法

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GB1304344A (de) * 1969-02-01 1973-01-24
US3731096A (en) * 1971-11-24 1973-05-01 Us Navy High resolution, high etendue, retarding-potential electron concentrator
US4169244A (en) * 1978-02-03 1979-09-25 Plows Graham S Electron probe testing, analysis and fault diagnosis in electronic circuits
DE2823642A1 (de) 1978-05-30 1980-01-03 Siemens Ag Verfahren zur beruehrungslosen potentialmessung an einem elektronischen bauelement
US4179604A (en) * 1978-09-29 1979-12-18 The United States Of America As Represented By The Secretary Of The Navy Electron collector for forming low-loss electron images
DE2902495A1 (de) * 1979-01-23 1980-07-31 Siemens Ag Einrichtung zur beruehrungslosen potentialmessung
US4578279A (en) * 1981-05-26 1986-03-25 International Business Machines Corporation Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
JPS5835854A (ja) * 1981-08-28 1983-03-02 Hitachi Ltd 二次電子検出装置
JPS5932145A (ja) * 1982-08-16 1984-02-21 Hitachi Ltd 電位検出装置
DE3235461A1 (de) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zur kontaktlosen pruefung eines objekts, insbesondere von mikroverdrahtungen, mit einer korpuskularstrahl-sonde
FR2584234B1 (fr) * 1985-06-28 1988-12-09 Cameca Testeur de circuit integre a faisceau d'electrons
JPS6343252A (ja) * 1986-08-08 1988-02-24 Fujitsu Ltd 電子ビ−ムプロ−ビング装置
US4843330A (en) * 1986-10-30 1989-06-27 International Business Machines Corporation Electron beam contactless testing system with grid bias switching
DE3638682A1 (de) * 1986-11-13 1988-05-19 Siemens Ag Spektrometerobjektiv fuer korpuskularstrahlmesstechnik
US4841242A (en) * 1987-04-10 1989-06-20 Siemens Aktiengesellschaft Method for testing conductor networks
JPS63304638A (ja) * 1987-06-03 1988-12-12 Matsushita Electronics Corp 半導体集積回路の検査方法
US4786806A (en) * 1987-06-22 1988-11-22 Gaf Corporation Retarding field spectrometer
US4829243A (en) * 1988-02-19 1989-05-09 Microelectronics And Computer Technology Corporation Electron beam testing of electronic components

Also Published As

Publication number Publication date
EP0678752B1 (de) 2001-11-07
EP0389397A2 (de) 1990-09-26
EP0389397B1 (de) 1995-12-27
JPH02280071A (ja) 1990-11-16
JPH0792497B2 (ja) 1995-10-09
DE69033851T2 (de) 2002-05-29
EP0389397A3 (de) 1991-08-07
DE69024390T2 (de) 1996-07-18
US4943769A (en) 1990-07-24
EP0678752A1 (de) 1995-10-25
DE69033851D1 (de) 2001-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee