DE69026353T2 - Feldemissionsvorrichtung und Verfahren zur Herstellung derselben - Google Patents
Feldemissionsvorrichtung und Verfahren zur Herstellung derselbenInfo
- Publication number
- DE69026353T2 DE69026353T2 DE69026353T DE69026353T DE69026353T2 DE 69026353 T2 DE69026353 T2 DE 69026353T2 DE 69026353 T DE69026353 T DE 69026353T DE 69026353 T DE69026353 T DE 69026353T DE 69026353 T2 DE69026353 T2 DE 69026353T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- same
- field emission
- emission device
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33074089A JPH0793097B2 (ja) | 1989-12-19 | 1989-12-19 | 電子放出素子とその製造方法 |
JP2095803A JPH03295130A (ja) | 1990-04-11 | 1990-04-11 | 電子放出素子 |
JP12724290 | 1990-05-16 | ||
JP13339790A JPH0787074B2 (ja) | 1990-05-23 | 1990-05-23 | 電子放出素子およびその製造方法 |
JP2177727A JPH0467526A (ja) | 1990-07-05 | 1990-07-05 | 電子放出素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69026353D1 DE69026353D1 (de) | 1996-05-09 |
DE69026353T2 true DE69026353T2 (de) | 1996-11-14 |
Family
ID=27525759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69026353T Expired - Fee Related DE69026353T2 (de) | 1989-12-19 | 1990-12-18 | Feldemissionsvorrichtung und Verfahren zur Herstellung derselben |
Country Status (3)
Country | Link |
---|---|
US (1) | US5243252A (de) |
EP (1) | EP0434001B1 (de) |
DE (1) | DE69026353T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2656851B2 (ja) * | 1990-09-27 | 1997-09-24 | 工業技術院長 | 画像表示装置 |
US5469015A (en) * | 1990-11-28 | 1995-11-21 | Matsushita Electric Industrial Co., Ltd. | Functional vacuum microelectronic field-emission device |
US5281891A (en) * | 1991-02-22 | 1994-01-25 | Matsushita Electric Industrial Co., Ltd. | Electron emission element |
US5536193A (en) | 1991-11-07 | 1996-07-16 | Microelectronics And Computer Technology Corporation | Method of making wide band gap field emitter |
US5548185A (en) * | 1992-03-16 | 1996-08-20 | Microelectronics And Computer Technology Corporation | Triode structure flat panel display employing flat field emission cathode |
US5763997A (en) | 1992-03-16 | 1998-06-09 | Si Diamond Technology, Inc. | Field emission display device |
US5679043A (en) | 1992-03-16 | 1997-10-21 | Microelectronics And Computer Technology Corporation | Method of making a field emitter |
US5449970A (en) * | 1992-03-16 | 1995-09-12 | Microelectronics And Computer Technology Corporation | Diode structure flat panel display |
US5600200A (en) | 1992-03-16 | 1997-02-04 | Microelectronics And Computer Technology Corporation | Wire-mesh cathode |
US6127773A (en) | 1992-03-16 | 2000-10-03 | Si Diamond Technology, Inc. | Amorphic diamond film flat field emission cathode |
US5543684A (en) | 1992-03-16 | 1996-08-06 | Microelectronics And Computer Technology Corporation | Flat panel display based on diamond thin films |
US5675216A (en) | 1992-03-16 | 1997-10-07 | Microelectronics And Computer Technololgy Corp. | Amorphic diamond film flat field emission cathode |
JP2669749B2 (ja) * | 1992-03-27 | 1997-10-29 | 工業技術院長 | 電界放出素子 |
JP2897520B2 (ja) * | 1992-04-02 | 1999-05-31 | 日本電気株式会社 | 冷陰極 |
JPH08510588A (ja) * | 1993-01-19 | 1996-11-05 | ダニロビッチ カルポフ,レオニド | 電界放出素子 |
AU1043895A (en) | 1993-11-04 | 1995-05-23 | Microelectronics And Computer Technology Corporation | Methods for fabricating flat panel display systems and components |
US6204834B1 (en) | 1994-08-17 | 2001-03-20 | Si Diamond Technology, Inc. | System and method for achieving uniform screen brightness within a matrix display |
US5531880A (en) * | 1994-09-13 | 1996-07-02 | Microelectronics And Computer Technology Corporation | Method for producing thin, uniform powder phosphor for display screens |
US5628659A (en) * | 1995-04-24 | 1997-05-13 | Microelectronics And Computer Corporation | Method of making a field emission electron source with random micro-tip structures |
US6296740B1 (en) | 1995-04-24 | 2001-10-02 | Si Diamond Technology, Inc. | Pretreatment process for a surface texturing process |
FR2748348B1 (fr) * | 1996-05-06 | 1998-07-24 | Pixtech Sa | Ecran couleur a micropointes a double grille |
US5801486A (en) * | 1996-10-31 | 1998-09-01 | Motorola, Inc. | High frequency field emission device |
US6149792A (en) * | 1997-09-30 | 2000-11-21 | Candescent Technologies Corporation | Row electrode anodization |
US6124670A (en) * | 1998-05-29 | 2000-09-26 | The Regents Of The University Of California | Gate-and emitter array on fiber electron field emission structure |
KR100300407B1 (ko) * | 1998-10-14 | 2001-09-06 | 김순택 | 플라즈마표시장치 |
US6433473B1 (en) * | 1998-10-29 | 2002-08-13 | Candescent Intellectual Property Services, Inc. | Row electrode anodization |
US6384520B1 (en) * | 1999-11-24 | 2002-05-07 | Sony Corporation | Cathode structure for planar emitter field emission displays |
US6590320B1 (en) * | 2000-02-23 | 2003-07-08 | Copytale, Inc. | Thin-film planar edge-emitter field emission flat panel display |
BR0001211C1 (pt) * | 2000-04-13 | 2002-03-05 | Inst Nac De Tecnologia Da Info | Estrutura de placa emissora para fed |
US6406926B1 (en) * | 2001-08-15 | 2002-06-18 | Motorola, Inc. | Method of forming a vacuum micro-electronic device |
US20070278948A1 (en) * | 2006-06-02 | 2007-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of light-emitting material, light-emitting element, and light-emitting device and electronic device |
US7966862B2 (en) * | 2008-01-28 | 2011-06-28 | Honeywell International Inc. | Electrode structure for particulate matter sensor |
US8163185B1 (en) * | 2008-03-31 | 2012-04-24 | Western Digital (Fremont), Llc | Method and apparatus for lifting off photoresist beneath an overlayer |
US10545258B2 (en) * | 2016-03-24 | 2020-01-28 | Schlumberger Technology Corporation | Charged particle emitter assembly for radiation generator |
EP3933881A1 (de) | 2020-06-30 | 2022-01-05 | VEC Imaging GmbH & Co. KG | Röntgenquelle mit mehreren gittern |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3755704A (en) * | 1970-02-06 | 1973-08-28 | Stanford Research Inst | Field emission cathode structures and devices utilizing such structures |
US3665241A (en) * | 1970-07-13 | 1972-05-23 | Stanford Research Inst | Field ionizer and field emission cathode structures and methods of production |
JPS5154358A (de) * | 1974-11-08 | 1976-05-13 | Hitachi Ltd | |
US4168213A (en) * | 1976-04-29 | 1979-09-18 | U.S. Philips Corporation | Field emission device and method of forming same |
JPS53121454A (en) * | 1977-03-31 | 1978-10-23 | Toshiba Corp | Electron source of thin film electric field emission type and its manufacture |
NO145589C (no) * | 1977-06-30 | 1982-04-21 | Rosenblad Corp | Fremgangsmaate for kondensasjon av damp i en varmeveksler samt en varmeveksler til bruk ved fremgangsmaaten |
US4728851A (en) * | 1982-01-08 | 1988-03-01 | Ford Motor Company | Field emitter device with gated memory |
US4578614A (en) * | 1982-07-23 | 1986-03-25 | The United States Of America As Represented By The Secretary Of The Navy | Ultra-fast field emitter array vacuum integrated circuit switching device |
GB8621600D0 (en) * | 1986-09-08 | 1987-03-18 | Gen Electric Co Plc | Vacuum devices |
JP2609602B2 (ja) * | 1987-02-23 | 1997-05-14 | キヤノン株式会社 | 電子放出素子及びその製造方法 |
US4904895A (en) * | 1987-05-06 | 1990-02-27 | Canon Kabushiki Kaisha | Electron emission device |
US4828177A (en) * | 1987-12-18 | 1989-05-09 | Frans Schuitemaker | Adjustable sprayer assembly |
JPH02503728A (ja) * | 1988-03-25 | 1990-11-01 | トムソン‐セーエスエフ | 電界放出形ソースの製造方法及びエミッタアレイの製造へのその応用 |
US5170092A (en) * | 1989-05-19 | 1992-12-08 | Matsushita Electric Industrial Co., Ltd. | Electron-emitting device and process for making the same |
-
1990
- 1990-12-18 EP EP90124623A patent/EP0434001B1/de not_active Expired - Lifetime
- 1990-12-18 DE DE69026353T patent/DE69026353T2/de not_active Expired - Fee Related
- 1990-12-19 US US07/629,954 patent/US5243252A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5243252A (en) | 1993-09-07 |
EP0434001A3 (en) | 1991-10-23 |
EP0434001B1 (de) | 1996-04-03 |
DE69026353D1 (de) | 1996-05-09 |
EP0434001A2 (de) | 1991-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |