DE69125044T2 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- DE69125044T2 DE69125044T2 DE69125044T DE69125044T DE69125044T2 DE 69125044 T2 DE69125044 T2 DE 69125044T2 DE 69125044 T DE69125044 T DE 69125044T DE 69125044 T DE69125044 T DE 69125044T DE 69125044 T2 DE69125044 T2 DE 69125044T2
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pump
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/025—Lubrication; Lubricant separation using a lubricant pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9034490A JP2875335B2 (ja) | 1990-04-06 | 1990-04-06 | 真空ポンプ |
JP2107596A JPH048896A (ja) | 1990-04-25 | 1990-04-25 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69125044D1 DE69125044D1 (de) | 1997-04-17 |
DE69125044T2 true DE69125044T2 (de) | 1997-08-07 |
Family
ID=26431835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69125044T Expired - Fee Related DE69125044T2 (de) | 1990-04-06 | 1991-04-04 | Vakuumpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US5190438A (de) |
EP (1) | EP0451708B1 (de) |
KR (1) | KR950007378B1 (de) |
CN (1) | CN1019675B (de) |
DE (1) | DE69125044T2 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994000694A1 (de) * | 1992-06-19 | 1994-01-06 | Leybold Aktiengesellschaft | Gasreibungsvakuumpumpe |
WO1994007033A1 (en) * | 1992-09-23 | 1994-03-31 | United States Of America As Represented By The Secretary Of The Air Force | Turbo-molecular blower |
DE19702456B4 (de) * | 1997-01-24 | 2006-01-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JPH10318168A (ja) * | 1997-05-22 | 1998-12-02 | T D Giken:Kk | 容積移送型ポンプ |
US6419461B2 (en) * | 1997-08-13 | 2002-07-16 | Seiko Instruments Inc. | Turbo molecular pump |
JP3084622B2 (ja) * | 1997-08-13 | 2000-09-04 | セイコー精機株式会社 | ターボ分子ポンプ |
JPH11230036A (ja) | 1998-02-18 | 1999-08-24 | Ebara Corp | 真空排気システム |
JP3010529B1 (ja) * | 1998-08-28 | 2000-02-21 | セイコー精機株式会社 | 真空ポンプ、及び真空装置 |
FR2783883B1 (fr) | 1998-09-10 | 2000-11-10 | Cit Alcatel | Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux |
JP2000170680A (ja) * | 1998-09-30 | 2000-06-20 | Aisin Seiki Co Ltd | 真空ポンプ |
FR2810375B1 (fr) | 2000-06-15 | 2002-11-29 | Cit Alcatel | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
JP2002048088A (ja) * | 2000-07-31 | 2002-02-15 | Seiko Instruments Inc | 真空ポンプ |
US6793466B2 (en) * | 2000-10-03 | 2004-09-21 | Ebara Corporation | Vacuum pump |
JP4657463B2 (ja) | 2001-02-01 | 2011-03-23 | エドワーズ株式会社 | 真空ポンプ |
DE10107341A1 (de) * | 2001-02-16 | 2002-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US20040173312A1 (en) * | 2001-09-06 | 2004-09-09 | Kouji Shibayama | Vacuum exhaust apparatus and drive method of vacuum apparatus |
JP2007126993A (ja) * | 2005-11-01 | 2007-05-24 | Toyota Industries Corp | 真空ポンプ |
CN102472288B (zh) * | 2009-08-21 | 2015-03-25 | 埃地沃兹日本有限公司 | 真空泵 |
US9353755B2 (en) | 2010-03-11 | 2016-05-31 | Shimadzu Corporation | Turbomolecular pump device |
US8840380B2 (en) | 2011-01-21 | 2014-09-23 | Toyota Motor Engineering & Manufacturing North America, Inc. | Temperature control ring for vehicle air pump |
EP2559903A1 (de) * | 2011-08-17 | 2013-02-20 | Wabco Automotive UK Limited | Verbesserte Vakuumpumpe |
SE1550582A1 (sv) * | 2012-11-01 | 2015-05-07 | Suk Shin In | Pump and gas booster using same |
CN102878109B (zh) * | 2012-11-06 | 2014-11-19 | 中国科学院上海应用物理研究所 | 高温熔盐泵轴密封装置 |
CN102937090B (zh) * | 2012-12-03 | 2015-04-08 | 中国科学院上海应用物理研究所 | 一种高温介质泵热屏蔽装置 |
JP6484919B2 (ja) * | 2013-09-24 | 2019-03-20 | 株式会社島津製作所 | ターボ分子ポンプ |
JP6287475B2 (ja) * | 2014-03-28 | 2018-03-07 | 株式会社島津製作所 | 真空ポンプ |
JP6616611B2 (ja) * | 2015-07-23 | 2019-12-04 | エドワーズ株式会社 | 排気システム |
JP6391171B2 (ja) * | 2015-09-07 | 2018-09-19 | 東芝メモリ株式会社 | 半導体製造システムおよびその運転方法 |
JP6666696B2 (ja) * | 2015-11-16 | 2020-03-18 | エドワーズ株式会社 | 真空ポンプ |
CN107476976A (zh) * | 2016-06-07 | 2017-12-15 | 艾默生环境优化技术(苏州)有限公司 | 涡旋压缩机及压缩机系统 |
WO2018173341A1 (ja) * | 2017-03-23 | 2018-09-27 | エドワーズ株式会社 | 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード |
GB2570349B (en) * | 2018-01-23 | 2021-01-27 | Edwards Ltd | Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings |
CN110966265B (zh) * | 2018-09-28 | 2022-03-22 | 党祎贤 | 集射真空泵 |
GB2578431B (en) * | 2018-10-25 | 2021-09-22 | Edwards Ltd | Oil feed for a vacuum pump |
EP3650703B1 (de) * | 2019-11-20 | 2021-09-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und verfahren zur schmierung einer solchen |
GB2596275A (en) * | 2020-05-20 | 2021-12-29 | Edwards Ltd | Cooling element |
CN112576510B (zh) * | 2020-12-03 | 2022-08-05 | 珠海格力节能环保制冷技术研究中心有限公司 | 吸油结构、压缩机和空调器 |
CN116971993A (zh) * | 2021-07-16 | 2023-10-31 | 奥利安机械股份有限公司 | 封装型旋转泵单元 |
DE102022202089A1 (de) | 2022-03-01 | 2023-09-07 | Robert Bosch Gesellschaft mit beschränkter Haftung | Fluidfördervorrichtung und Fahrzeugwärmemanagementsystem |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE557563A (de) * | ||||
US3324970A (en) * | 1964-06-26 | 1967-06-13 | Gen Electric | Self-contained viscous pump lubrication system |
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
DE2757599A1 (de) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Turbo-molekularpumpe |
GB1592218A (en) * | 1978-01-24 | 1981-07-01 | Olofsson B O E | Device for cooling and silencing of noise of a compressor or vacuum pump |
US4283167A (en) * | 1979-04-26 | 1981-08-11 | Varian Associates, Inc. | Cooling structure for an oil sealed rotary vacuum pump |
DE3022147A1 (de) * | 1980-06-13 | 1982-01-07 | Klöckner-Humboldt-Deutz AG, 5000 Köln | Verdichter |
JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
JPS6125994A (ja) * | 1984-07-13 | 1986-02-05 | Ulvac Corp | タ−ボ分子ポンプおよびその運転方法 |
JPS61171896A (ja) * | 1985-01-28 | 1986-08-02 | Hitachi Ltd | 高速回転機械の冷却装置 |
JPS61247893A (ja) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | 真空ポンプ |
JPS6229796A (ja) * | 1985-07-31 | 1987-02-07 | Hitachi Ltd | 真空ポンプ |
JPS62153597A (ja) * | 1985-12-27 | 1987-07-08 | Hitachi Ltd | 真空ポンプ |
JPS63227989A (ja) * | 1987-03-16 | 1988-09-22 | Seiko Instr & Electronics Ltd | タ−ボ分子ポンプ |
JPH0610477B2 (ja) * | 1987-05-13 | 1994-02-09 | 株式会社日立製作所 | タ−ボ真空ポンプ |
JPS63314397A (ja) * | 1987-06-17 | 1988-12-22 | Hitachi Ltd | 真空ポンプ |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
JPH0632708B2 (ja) * | 1987-08-12 | 1994-05-02 | 株式会社セキグチ | 人形用頭部体 |
JPS6446495U (de) * | 1987-09-18 | 1989-03-22 | ||
FR2634829B1 (fr) * | 1988-07-27 | 1990-09-14 | Cit Alcatel | Pompe a vide |
-
1991
- 1991-04-03 KR KR1019910005355A patent/KR950007378B1/ko not_active IP Right Cessation
- 1991-04-04 EP EP91105353A patent/EP0451708B1/de not_active Expired - Lifetime
- 1991-04-04 DE DE69125044T patent/DE69125044T2/de not_active Expired - Fee Related
- 1991-04-06 CN CN91102168A patent/CN1019675B/zh not_active Expired
- 1991-04-08 US US07/682,265 patent/US5190438A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR910018680A (ko) | 1991-11-30 |
CN1019675B (zh) | 1992-12-30 |
EP0451708B1 (de) | 1997-03-12 |
CN1055800A (zh) | 1991-10-30 |
EP0451708A2 (de) | 1991-10-16 |
EP0451708A3 (en) | 1992-01-08 |
US5190438A (en) | 1993-03-02 |
KR950007378B1 (ko) | 1995-07-10 |
DE69125044D1 (de) | 1997-04-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69125044D1 (de) | Vakuumpumpe | |
DE492162T1 (de) | Irrigationssaugkanuele. | |
PT99828A (pt) | Bombas osmoticas | |
DE69129987D1 (de) | Feuchtigkeitsfreies sog-verfahren | |
DE69105005D1 (de) | Staubsauger. | |
DE69102304D1 (de) | Staubsauger. | |
NO903092D0 (no) | Stoevsuger. | |
DE69102675T2 (de) | Staubsauger. | |
DE69123449T2 (de) | Pumpvorrichtung | |
DE3891263T1 (de) | Turbomolekular-vakuumpumpe | |
DE69004566D1 (de) | Vakuumpumpeneinheit. | |
DE69112160T2 (de) | Mehrstufige Vakuumpumpe. | |
DE68903355T2 (de) | Vakuumpumpen. | |
DE59201550D1 (de) | Trockenlaufende vakuumpumpe. | |
DE69109424D1 (de) | Turbovakuumpumpe. | |
DE69303447T2 (de) | Vakuumpumpgerät | |
DE69401600T2 (de) | Vakuumpumpe | |
DE69104891D1 (de) | Staubsauger. | |
ITMI912050A1 (it) | Filtro aspirante | |
DE59305337D1 (de) | Wälzkolben-Vakuumpumpe | |
DE69105299D1 (de) | Staubsauger. | |
DE3891201T1 (de) | Vakuum-molekularpumpe | |
DE69303133D1 (de) | Vakuumpumpe | |
BR9106900A (pt) | Bombas | |
KR920008032U (ko) | 진공 펌프 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |