DE69128192D1 - Verfahren zur abscheidung von nioboxid enthaltenden optischen beschichtungen mittels reaktiver gleichstromzerstäubung - Google Patents

Verfahren zur abscheidung von nioboxid enthaltenden optischen beschichtungen mittels reaktiver gleichstromzerstäubung

Info

Publication number
DE69128192D1
DE69128192D1 DE69128192T DE69128192T DE69128192D1 DE 69128192 D1 DE69128192 D1 DE 69128192D1 DE 69128192 T DE69128192 T DE 69128192T DE 69128192 T DE69128192 T DE 69128192T DE 69128192 D1 DE69128192 D1 DE 69128192D1
Authority
DE
Germany
Prior art keywords
reactive
nioboxide
spraying
coatings containing
optical coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69128192T
Other languages
English (en)
Other versions
DE69128192T2 (de
Inventor
Eric Dickey
Debra Steffenhagen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viratec Thin Films Inc
Original Assignee
Viratec Thin Films Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24299945&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69128192(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Viratec Thin Films Inc filed Critical Viratec Thin Films Inc
Application granted granted Critical
Publication of DE69128192D1 publication Critical patent/DE69128192D1/de
Publication of DE69128192T2 publication Critical patent/DE69128192T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/913—Material designed to be responsive to temperature, light, moisture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
DE69128192T 1990-08-30 1991-07-31 Verfahren zur abscheidung von nioboxid enthaltenden optischen beschichtungen mittels reaktiver gleichstromzerstäubung Expired - Fee Related DE69128192T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57534590A 1990-08-30 1990-08-30
PCT/US1991/005303 WO1992004185A1 (en) 1990-08-30 1991-07-31 Dc reactively sputtered optical coatings including niobium oxide

Publications (2)

Publication Number Publication Date
DE69128192D1 true DE69128192D1 (de) 1997-12-18
DE69128192T2 DE69128192T2 (de) 1998-05-28

Family

ID=24299945

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69128192T Expired - Fee Related DE69128192T2 (de) 1990-08-30 1991-07-31 Verfahren zur abscheidung von nioboxid enthaltenden optischen beschichtungen mittels reaktiver gleichstromzerstäubung

Country Status (7)

Country Link
US (1) US5372874A (de)
EP (1) EP0498884B1 (de)
JP (1) JPH05502310A (de)
AT (1) ATE160107T1 (de)
CA (1) CA2067765A1 (de)
DE (1) DE69128192T2 (de)
WO (1) WO1992004185A1 (de)

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US6656260B2 (en) * 1999-12-28 2003-12-02 Kyocera Corporation ZnS-series sintered material and method for producing the same, target using the ZnS-series sintered material, thin film, and optical recording medium using the thin film
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JP3510845B2 (ja) * 2000-08-29 2004-03-29 Ｈｏｙａ株式会社 反射防止膜を有する光学部材
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KR101574456B1 (ko) * 2012-01-10 2015-12-11 쌩-고벵 글래스 프랑스 도전성 코팅이 있는 투명 패널
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Also Published As

Publication number Publication date
US5372874A (en) 1994-12-13
DE69128192T2 (de) 1998-05-28
ATE160107T1 (de) 1997-11-15
CA2067765A1 (en) 1992-03-01
EP0498884A4 (en) 1993-06-23
EP0498884B1 (de) 1997-11-12
JPH05502310A (ja) 1993-04-22
EP0498884A1 (de) 1992-08-19
WO1992004185A1 (en) 1992-03-19

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee