DE69202113D1 - Temperaturunempfindliche Montage eines Beschleunigungssensors. - Google Patents

Temperaturunempfindliche Montage eines Beschleunigungssensors.

Info

Publication number
DE69202113D1
DE69202113D1 DE69202113T DE69202113T DE69202113D1 DE 69202113 D1 DE69202113 D1 DE 69202113D1 DE 69202113 T DE69202113 T DE 69202113T DE 69202113 T DE69202113 T DE 69202113T DE 69202113 D1 DE69202113 D1 DE 69202113D1
Authority
DE
Germany
Prior art keywords
temperature
acceleration sensor
insensitive
mounting
insensitive mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69202113T
Other languages
English (en)
Other versions
DE69202113T2 (de
Inventor
Mark D Mozgowiec
Steven Beringhause
Kai L Keasey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69202113D1 publication Critical patent/DE69202113D1/de
Application granted granted Critical
Publication of DE69202113T2 publication Critical patent/DE69202113T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00Details of instruments
    • G01P1/006Details of instruments used for thermal compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00Details of instruments
    • G01P1/02Housings
    • G01P1/023Housings for acceleration measuring devices
DE69202113T 1991-07-03 1992-06-22 Temperaturunempfindliche Montage eines Beschleunigungssensors. Expired - Fee Related DE69202113T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/725,844 US5233873A (en) 1991-07-03 1991-07-03 Accelerometer

Publications (2)

Publication Number Publication Date
DE69202113D1 true DE69202113D1 (de) 1995-05-24
DE69202113T2 DE69202113T2 (de) 1995-08-17

Family

ID=24916186

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69202113T Expired - Fee Related DE69202113T2 (de) 1991-07-03 1992-06-22 Temperaturunempfindliche Montage eines Beschleunigungssensors.

Country Status (5)

Country Link
US (2) US5233873A (de)
EP (1) EP0523862B1 (de)
JP (1) JPH05164777A (de)
KR (1) KR930002824A (de)
DE (1) DE69202113T2 (de)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05164775A (ja) * 1991-12-17 1993-06-29 Atsugi Unisia Corp 加速度センサ
EP0618450A1 (de) * 1993-03-30 1994-10-05 Siemens Aktiengesellschaft Beschleunigungssensor
EP0660119B1 (de) * 1993-12-27 2003-04-02 Hitachi, Ltd. Beschleunigungsmessaufnehmer
US5503016A (en) * 1994-02-01 1996-04-02 Ic Sensors, Inc. Vertically mounted accelerometer chip
EP0675363A3 (de) * 1994-03-31 1997-03-05 Delco Electronics Corp Beschleunigungsmessanordnung.
JP3387199B2 (ja) * 1994-04-21 2003-03-17 松下電器産業株式会社 角速度センサ装置
US5808197A (en) * 1995-01-13 1998-09-15 Remec, Inc. Vehicle information and control system
JPH08233848A (ja) * 1995-02-28 1996-09-13 Mitsubishi Electric Corp 半導体センサ
US5644081A (en) * 1995-09-28 1997-07-01 Delco Electronics Corp. Microaccelerometer package with integral support braces
US5719334A (en) * 1996-07-11 1998-02-17 Ford Motor Company Hermetically protected sensor assembly
FR2752942B1 (fr) * 1996-08-29 1998-11-20 Gibert Francis Jean Paul Composant accelerometre a faible derive
JP3576727B2 (ja) * 1996-12-10 2004-10-13 株式会社デンソー 表面実装型パッケージ
US5763970A (en) * 1997-03-03 1998-06-09 Lexmark International, Inc. Encoder system with cover mounted encoder
DE19717348A1 (de) * 1997-04-24 1998-10-29 Siemens Ag Verfahren zum Herstellen einer Sensorbaugruppe sowie Sensorbaugruppe
US6040625A (en) * 1997-09-25 2000-03-21 I/O Sensors, Inc. Sensor package arrangement
WO2000055652A1 (en) * 1999-03-17 2000-09-21 Input/Output, Inc. Calibration of sensors
AT3609U1 (de) * 1999-06-02 2000-05-25 Austria Mikrosysteme Int Mikrosensor
US6115261A (en) * 1999-06-14 2000-09-05 Honeywell Inc. Wedge mount for integrated circuit sensors
US7152473B1 (en) 2000-03-17 2006-12-26 Input/Output, Inc. Integrated and multi-axis sensor assembly and packaging
DE10145679A1 (de) * 2001-09-15 2003-04-03 Conti Temic Microelectronic Elektronische Baugruppe
US6568268B1 (en) 2001-10-31 2003-05-27 Western Digital Technologies, Inc. Multi-axis accelerometer comprising a mass suspended by springs above an optical sensor
JP2004003886A (ja) * 2002-05-31 2004-01-08 Matsushita Electric Works Ltd センサパッケージ
DE10249767B4 (de) * 2002-10-24 2006-11-23 Asmec Advanced Surface Mechanics Gmbh Probentisch für die Messung lateraler Kräfte und Verschiebungen
US7148579B2 (en) * 2003-06-02 2006-12-12 Ambient Systems, Inc. Energy conversion systems utilizing parallel array of automatic switches and generators
US7199498B2 (en) * 2003-06-02 2007-04-03 Ambient Systems, Inc. Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same
JP5184880B2 (ja) 2004-02-27 2013-04-17 アトランティック・イナーシャル・システムズ・リミテッド 加速度計
JP2008506548A (ja) 2004-07-19 2008-03-06 アンビエント システムズ, インコーポレイテッド ナノスケール静電および電磁モータおよび発電機
EP1910217A2 (de) * 2005-07-19 2008-04-16 PINKERTON, Joseph P. Wärmeaktivierte pumpe im nanometerbereich
JP4595779B2 (ja) * 2005-10-12 2010-12-08 株式会社デンソー 角速度センサ
AU2007289057C1 (en) * 2006-09-01 2014-01-16 Pacific Biosciences Of California, Inc. Substrates, systems and methods for analyzing materials
US7839028B2 (en) * 2007-04-03 2010-11-23 CJP IP Holding, Ltd. Nanoelectromechanical systems and methods for making the same
JP2008256570A (ja) * 2007-04-05 2008-10-23 Fujitsu Media Device Kk 角速度センサ
US8349611B2 (en) * 2009-02-17 2013-01-08 Leversense Llc Resonant sensors and methods of use thereof for the determination of analytes
JP5669076B2 (ja) * 2009-03-25 2015-02-12 パナソニックIpマネジメント株式会社 基板固定構造および物理量センサ
US9189109B2 (en) 2012-07-18 2015-11-17 Sentons Inc. Detection of type of object used to provide a touch contact input
US11327599B2 (en) 2011-04-26 2022-05-10 Sentons Inc. Identifying a contact type
US9477350B2 (en) 2011-04-26 2016-10-25 Sentons Inc. Method and apparatus for active ultrasonic touch devices
US10198097B2 (en) 2011-04-26 2019-02-05 Sentons Inc. Detecting touch input force
US9639213B2 (en) 2011-04-26 2017-05-02 Sentons Inc. Using multiple signals to detect touch input
DE102012213916A1 (de) * 2011-11-08 2013-05-08 Robert Bosch Gmbh Elektronikmodul für ein Steuergerät
US9449476B2 (en) 2011-11-18 2016-09-20 Sentons Inc. Localized haptic feedback
KR101803261B1 (ko) 2011-11-18 2017-11-30 센톤스 아이엔씨. 터치 입력 힘 검출
DE102012223886A1 (de) * 2012-12-20 2014-06-26 Robert Bosch Gmbh Schwingungsdämpfer für eine Sensoreinheit und Sensoranordnung für ein Kraftfahrzeug
DE102013105518A1 (de) * 2013-05-29 2014-12-04 Escha Bauelemente Gmbh Signalverteiler
US9459715B1 (en) 2013-09-20 2016-10-04 Sentons Inc. Using spectral control in detecting touch input
US10869393B2 (en) * 2015-06-29 2020-12-15 Microsoft Technology Licensing, Llc Pedestal mounting of sensor system
US10187977B2 (en) 2015-06-29 2019-01-22 Microsoft Technology Licensing, Llc Head mounted computing device, adhesive joint system and method
EP3239665A1 (de) * 2016-04-25 2017-11-01 Weickmann & Weickmann PartmbB Sensorgehäuse
US10908741B2 (en) 2016-11-10 2021-02-02 Sentons Inc. Touch input detection along device sidewall
US10296144B2 (en) 2016-12-12 2019-05-21 Sentons Inc. Touch input detection with shared receivers
US10126877B1 (en) 2017-02-01 2018-11-13 Sentons Inc. Update of reference data for touch input detection
US10585522B2 (en) 2017-02-27 2020-03-10 Sentons Inc. Detection of non-touch inputs using a signature
US11038801B2 (en) 2017-06-06 2021-06-15 Nocell Technologies, LLC System, method and apparatus for restricting use of a network device through automated policy enforcement
US10743241B1 (en) 2017-06-06 2020-08-11 Nocell Technologies, LLC System, method and apparatus for facilitating the restriction of the use of one or more network devices through automated policy enforcement
US11009411B2 (en) 2017-08-14 2021-05-18 Sentons Inc. Increasing sensitivity of a sensor using an encoded signal
WO2019036334A1 (en) * 2017-08-14 2019-02-21 Sentons Inc. PIEZORESISTIVE SENSOR
US11580829B2 (en) 2017-08-14 2023-02-14 Sentons Inc. Dynamic feedback for haptics
JP7013991B2 (ja) * 2018-03-26 2022-02-01 セイコーエプソン株式会社 センサーユニット、移動体測位装置、携帯型電子機器、電子機器、移動体および表示装置
JP2019184453A (ja) * 2018-04-12 2019-10-24 セイコーエプソン株式会社 センサーユニットおよび構造物監視装置
JP2019184452A (ja) * 2018-04-12 2019-10-24 セイコーエプソン株式会社 センサーユニット、および構造物監視装置
US11340254B2 (en) * 2019-09-30 2022-05-24 Seiko Epson Corporation Inertial measurement unit having a sensor unit that is detachable from a substrate
JP2022050915A (ja) * 2020-09-18 2022-03-31 セイコーエプソン株式会社 慣性計測装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2655604C2 (de) * 1976-12-08 1984-11-29 Robert Bosch Gmbh, 7000 Stuttgart Verzögerungsaufnehmer zur Auslösung von Insassenschutzvorrichtungen im Kraftfahrzeug
DE8607653U1 (de) * 1986-03-20 1987-08-06 Robert Bosch Gmbh, 7000 Stuttgart, De
US4811604A (en) * 1986-05-23 1989-03-14 British Aerospace Public Limited Company Accelerometers
DE3774077D1 (de) * 1986-08-25 1991-11-28 Richard A Hanson Pruefmassenaufhaengung fuer einen beschleunigungsmesser.
EP0454190A3 (en) * 1986-09-22 1992-01-08 Nippondenso Co., Ltd. Semiconductor accelerometer
JPH01302169A (ja) * 1988-05-30 1989-12-06 Mitsubishi Electric Corp 半導体加速度センサの破損防止装置
DE8915981U1 (de) * 1989-02-23 1992-10-01 Kristal Instrumente Ag, Winterthur, Ch
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
JPH0623780B2 (ja) * 1989-09-21 1994-03-30 日本電装株式会社 半導体加速度センサの製造方法
US5058430A (en) * 1989-12-29 1991-10-22 Honeywell Inc. Sensor capsule mounting

Also Published As

Publication number Publication date
EP0523862B1 (de) 1995-04-19
JPH05164777A (ja) 1993-06-29
KR930002824A (ko) 1993-02-23
US5343748A (en) 1994-09-06
EP0523862A1 (de) 1993-01-20
US5233873A (en) 1993-08-10
DE69202113T2 (de) 1995-08-17

Similar Documents

Publication Publication Date Title
DE69202113T2 (de) Temperaturunempfindliche Montage eines Beschleunigungssensors.
DE69232272D1 (de) Beschleunigungsmessaufnehmer
DE59102734D1 (de) Befestigung eines Gassacks.
DE69432396D1 (de) Beschleunigungsmessaufnehmer
DE69206770D1 (de) Dreiachsiger Beschleunigungsmesser
DE4390169T1 (de) Motorbefestigung
NO923506L (no) Fremgangsmaate ved marin seismisk undersoekelse
DE69226519D1 (de) Beschleunigungsmesser mit mehreren schwingungstypen
DE69202354D1 (de) Füllstandsensor vom Schwingungstyp.
DE59002947D1 (de) Abhaenge- und montagevorrichtung.
DE69310678T2 (de) Mikromechanisch hergestellter Messaufnehmer
DE69121458T2 (de) Piezoresistiver Beschleunigungsmesser
DE59209015D1 (de) Fahrzeugsensitiver mechanischer Kontaktgeber
DE59106429D1 (de) Beschleunigungssensor.
PT89539A (pt) Sensor de direccao do escoamento do ar, que compreende um dispositivo electromagnetico de amortecimento e de posicionamento
DE69215873T2 (de) Motoraufhängung
DE69105173T2 (de) Schwingungsdämpfungsanordnung eines Flugzeuges.
DE59105395D1 (de) Beschleunigungssensor.
DE69301793T2 (de) Triebwerkaufhängung an Luftfahrzeugstruktur
FR2670900B1 (fr) Capteur d'acceleration.
DE69201586D1 (de) Messaufnehmerhalterung für Beschleunigungsmesser.
DE69102888T2 (de) Beschleunigungssensor.
DE9400990U1 (de) Mechanischer Beschleunigungssensor
FR2686191B1 (fr) Montage de micro-capteur.
DE9400988U1 (de) Mechanischer Beschleunigungssensor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee