DE69202113T2 - Temperaturunempfindliche Montage eines Beschleunigungssensors. - Google Patents
Temperaturunempfindliche Montage eines Beschleunigungssensors.Info
- Publication number
- DE69202113T2 DE69202113T2 DE69202113T DE69202113T DE69202113T2 DE 69202113 T2 DE69202113 T2 DE 69202113T2 DE 69202113 T DE69202113 T DE 69202113T DE 69202113 T DE69202113 T DE 69202113T DE 69202113 T2 DE69202113 T2 DE 69202113T2
- Authority
- DE
- Germany
- Prior art keywords
- temperature
- acceleration sensor
- insensitive
- mounting
- insensitive mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/725,844 US5233873A (en) | 1991-07-03 | 1991-07-03 | Accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69202113D1 DE69202113D1 (de) | 1995-05-24 |
DE69202113T2 true DE69202113T2 (de) | 1995-08-17 |
Family
ID=24916186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69202113T Expired - Fee Related DE69202113T2 (de) | 1991-07-03 | 1992-06-22 | Temperaturunempfindliche Montage eines Beschleunigungssensors. |
Country Status (5)
Country | Link |
---|---|
US (2) | US5233873A (de) |
EP (1) | EP0523862B1 (de) |
JP (1) | JPH05164777A (de) |
KR (1) | KR930002824A (de) |
DE (1) | DE69202113T2 (de) |
Families Citing this family (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05164775A (ja) * | 1991-12-17 | 1993-06-29 | Atsugi Unisia Corp | 加速度センサ |
EP0618450A1 (de) * | 1993-03-30 | 1994-10-05 | Siemens Aktiengesellschaft | Beschleunigungssensor |
DE69432396T2 (de) * | 1993-12-27 | 2004-03-04 | Hitachi, Ltd. | Beschleunigungsmessaufnehmer |
US5503016A (en) * | 1994-02-01 | 1996-04-02 | Ic Sensors, Inc. | Vertically mounted accelerometer chip |
EP0675363A3 (de) * | 1994-03-31 | 1997-03-05 | Delco Electronics Corp | Beschleunigungsmessanordnung. |
JP3387199B2 (ja) * | 1994-04-21 | 2003-03-17 | 松下電器産業株式会社 | 角速度センサ装置 |
US5808197A (en) * | 1995-01-13 | 1998-09-15 | Remec, Inc. | Vehicle information and control system |
JPH08233848A (ja) * | 1995-02-28 | 1996-09-13 | Mitsubishi Electric Corp | 半導体センサ |
US5644081A (en) * | 1995-09-28 | 1997-07-01 | Delco Electronics Corp. | Microaccelerometer package with integral support braces |
US5719334A (en) * | 1996-07-11 | 1998-02-17 | Ford Motor Company | Hermetically protected sensor assembly |
FR2752942B1 (fr) * | 1996-08-29 | 1998-11-20 | Gibert Francis Jean Paul | Composant accelerometre a faible derive |
JP3576727B2 (ja) * | 1996-12-10 | 2004-10-13 | 株式会社デンソー | 表面実装型パッケージ |
US5763970A (en) * | 1997-03-03 | 1998-06-09 | Lexmark International, Inc. | Encoder system with cover mounted encoder |
DE19717348A1 (de) * | 1997-04-24 | 1998-10-29 | Siemens Ag | Verfahren zum Herstellen einer Sensorbaugruppe sowie Sensorbaugruppe |
US6040625A (en) * | 1997-09-25 | 2000-03-21 | I/O Sensors, Inc. | Sensor package arrangement |
WO2000055648A1 (en) * | 1999-03-17 | 2000-09-21 | Input/Output, Inc. | Hydrophone assembly |
AT3609U1 (de) * | 1999-06-02 | 2000-05-25 | Austria Mikrosysteme Int | Mikrosensor |
US6115261A (en) * | 1999-06-14 | 2000-09-05 | Honeywell Inc. | Wedge mount for integrated circuit sensors |
US7152473B1 (en) | 2000-03-17 | 2006-12-26 | Input/Output, Inc. | Integrated and multi-axis sensor assembly and packaging |
DE10145679A1 (de) * | 2001-09-15 | 2003-04-03 | Conti Temic Microelectronic | Elektronische Baugruppe |
US6568268B1 (en) | 2001-10-31 | 2003-05-27 | Western Digital Technologies, Inc. | Multi-axis accelerometer comprising a mass suspended by springs above an optical sensor |
JP2004003886A (ja) * | 2002-05-31 | 2004-01-08 | Matsushita Electric Works Ltd | センサパッケージ |
DE10249767B4 (de) * | 2002-10-24 | 2006-11-23 | Asmec Advanced Surface Mechanics Gmbh | Probentisch für die Messung lateraler Kräfte und Verschiebungen |
US7199498B2 (en) * | 2003-06-02 | 2007-04-03 | Ambient Systems, Inc. | Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same |
US7148579B2 (en) * | 2003-06-02 | 2006-12-12 | Ambient Systems, Inc. | Energy conversion systems utilizing parallel array of automatic switches and generators |
JP5184880B2 (ja) | 2004-02-27 | 2013-04-17 | アトランティック・イナーシャル・システムズ・リミテッド | 加速度計 |
JP2008506548A (ja) | 2004-07-19 | 2008-03-06 | アンビエント システムズ, インコーポレイテッド | ナノスケール静電および電磁モータおよび発電機 |
US20070048160A1 (en) * | 2005-07-19 | 2007-03-01 | Pinkerton Joseph F | Heat activated nanometer-scale pump |
JP4595779B2 (ja) * | 2005-10-12 | 2010-12-08 | 株式会社デンソー | 角速度センサ |
AU2007289057C1 (en) * | 2006-09-01 | 2014-01-16 | Pacific Biosciences Of California, Inc. | Substrates, systems and methods for analyzing materials |
US8385113B2 (en) | 2007-04-03 | 2013-02-26 | Cjp Ip Holdings, Ltd. | Nanoelectromechanical systems and methods for making the same |
JP2008256570A (ja) * | 2007-04-05 | 2008-10-23 | Fujitsu Media Device Kk | 角速度センサ |
WO2010096439A1 (en) * | 2009-02-17 | 2010-08-26 | Leversense, Llc | Resonant sensors and methods of use thereof for the determination of analytes |
JP5669076B2 (ja) * | 2009-03-25 | 2015-02-12 | パナソニックIpマネジメント株式会社 | 基板固定構造および物理量センサ |
US9639213B2 (en) | 2011-04-26 | 2017-05-02 | Sentons Inc. | Using multiple signals to detect touch input |
US9189109B2 (en) | 2012-07-18 | 2015-11-17 | Sentons Inc. | Detection of type of object used to provide a touch contact input |
US10198097B2 (en) | 2011-04-26 | 2019-02-05 | Sentons Inc. | Detecting touch input force |
US11327599B2 (en) | 2011-04-26 | 2022-05-10 | Sentons Inc. | Identifying a contact type |
US9477350B2 (en) | 2011-04-26 | 2016-10-25 | Sentons Inc. | Method and apparatus for active ultrasonic touch devices |
DE102012213916A1 (de) * | 2011-11-08 | 2013-05-08 | Robert Bosch Gmbh | Elektronikmodul für ein Steuergerät |
EP2780783B1 (de) | 2011-11-18 | 2022-12-28 | Sentons Inc. | Erkennung eines berührungseingabedrucks |
US11262253B2 (en) | 2017-08-14 | 2022-03-01 | Sentons Inc. | Touch input detection using a piezoresistive sensor |
US9449476B2 (en) | 2011-11-18 | 2016-09-20 | Sentons Inc. | Localized haptic feedback |
DE102012223886A1 (de) * | 2012-12-20 | 2014-06-26 | Robert Bosch Gmbh | Schwingungsdämpfer für eine Sensoreinheit und Sensoranordnung für ein Kraftfahrzeug |
DE102013105518A1 (de) * | 2013-05-29 | 2014-12-04 | Escha Bauelemente Gmbh | Signalverteiler |
US9459715B1 (en) | 2013-09-20 | 2016-10-04 | Sentons Inc. | Using spectral control in detecting touch input |
US10187977B2 (en) | 2015-06-29 | 2019-01-22 | Microsoft Technology Licensing, Llc | Head mounted computing device, adhesive joint system and method |
US10869393B2 (en) * | 2015-06-29 | 2020-12-15 | Microsoft Technology Licensing, Llc | Pedestal mounting of sensor system |
EP3239665A1 (de) * | 2016-04-25 | 2017-11-01 | Weickmann & Weickmann PartmbB | Sensorgehäuse |
US10908741B2 (en) | 2016-11-10 | 2021-02-02 | Sentons Inc. | Touch input detection along device sidewall |
US10296144B2 (en) | 2016-12-12 | 2019-05-21 | Sentons Inc. | Touch input detection with shared receivers |
US10126877B1 (en) | 2017-02-01 | 2018-11-13 | Sentons Inc. | Update of reference data for touch input detection |
US10585522B2 (en) | 2017-02-27 | 2020-03-10 | Sentons Inc. | Detection of non-touch inputs using a signature |
US11038801B2 (en) | 2017-06-06 | 2021-06-15 | Nocell Technologies, LLC | System, method and apparatus for restricting use of a network device through automated policy enforcement |
US10743241B1 (en) | 2017-06-06 | 2020-08-11 | Nocell Technologies, LLC | System, method and apparatus for facilitating the restriction of the use of one or more network devices through automated policy enforcement |
WO2019036334A1 (en) * | 2017-08-14 | 2019-02-21 | Sentons Inc. | PIEZORESISTIVE SENSOR |
US11580829B2 (en) | 2017-08-14 | 2023-02-14 | Sentons Inc. | Dynamic feedback for haptics |
JP7013991B2 (ja) * | 2018-03-26 | 2022-02-01 | セイコーエプソン株式会社 | センサーユニット、移動体測位装置、携帯型電子機器、電子機器、移動体および表示装置 |
JP2019184453A (ja) * | 2018-04-12 | 2019-10-24 | セイコーエプソン株式会社 | センサーユニットおよび構造物監視装置 |
JP2019184452A (ja) * | 2018-04-12 | 2019-10-24 | セイコーエプソン株式会社 | センサーユニット、および構造物監視装置 |
US11340254B2 (en) * | 2019-09-30 | 2022-05-24 | Seiko Epson Corporation | Inertial measurement unit having a sensor unit that is detachable from a substrate |
JP2022050915A (ja) * | 2020-09-18 | 2022-03-31 | セイコーエプソン株式会社 | 慣性計測装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2655604C2 (de) * | 1976-12-08 | 1984-11-29 | Robert Bosch Gmbh, 7000 Stuttgart | Verzögerungsaufnehmer zur Auslösung von Insassenschutzvorrichtungen im Kraftfahrzeug |
DE8607653U1 (de) * | 1986-03-20 | 1987-08-06 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
US4811604A (en) * | 1986-05-23 | 1989-03-14 | British Aerospace Public Limited Company | Accelerometers |
DE3774077D1 (de) * | 1986-08-25 | 1991-11-28 | Richard A Hanson | Pruefmassenaufhaengung fuer einen beschleunigungsmesser. |
EP0456285A3 (en) * | 1986-09-22 | 1992-01-02 | Nippondenso Co., Ltd. | Semiconductor accelerometer |
JPH01302169A (ja) * | 1988-05-30 | 1989-12-06 | Mitsubishi Electric Corp | 半導体加速度センサの破損防止装置 |
EP0383974A1 (de) * | 1989-02-23 | 1990-08-29 | Kristal Instrumente AG | Plattenförmiges Sensorelement sowie damit versehener Druck-, Kraft- oder Beschleunigungsaufnehmer |
US5130600A (en) * | 1989-06-02 | 1992-07-14 | Mitsubishi Petrochemical Co., Ltd. | Acceleration sensor |
JPH0623780B2 (ja) * | 1989-09-21 | 1994-03-30 | 日本電装株式会社 | 半導体加速度センサの製造方法 |
US5058430A (en) * | 1989-12-29 | 1991-10-22 | Honeywell Inc. | Sensor capsule mounting |
-
1991
- 1991-07-03 US US07/725,844 patent/US5233873A/en not_active Expired - Fee Related
-
1992
- 1992-05-28 JP JP4136999A patent/JPH05164777A/ja active Pending
- 1992-06-22 EP EP92305727A patent/EP0523862B1/de not_active Expired - Lifetime
- 1992-06-22 DE DE69202113T patent/DE69202113T2/de not_active Expired - Fee Related
- 1992-07-03 KR KR1019920011817A patent/KR930002824A/ko not_active Application Discontinuation
-
1993
- 1993-03-31 US US08/040,730 patent/US5343748A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5343748A (en) | 1994-09-06 |
US5233873A (en) | 1993-08-10 |
EP0523862B1 (de) | 1995-04-19 |
DE69202113D1 (de) | 1995-05-24 |
KR930002824A (ko) | 1993-02-23 |
JPH05164777A (ja) | 1993-06-29 |
EP0523862A1 (de) | 1993-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |