JPH0669295A
(ja)
*
|
1992-08-17 |
1994-03-11 |
Tokyo Electron Ltd |
プローブシステム
|
TW276353B
(de)
*
|
1993-07-15 |
1996-05-21 |
Hitachi Seisakusyo Kk |
|
DE69403890T2
(de)
*
|
1994-01-14 |
1998-01-08 |
Ibm |
Zusammenbau-/Ausbau-Einrichtung für abdichtbaren unter Druck stehenden Transportbehälter
|
US5631734A
(en)
*
|
1994-02-10 |
1997-05-20 |
Affymetrix, Inc. |
Method and apparatus for detection of fluorescently labeled materials
|
US6833035B1
(en)
|
1994-04-28 |
2004-12-21 |
Semitool, Inc. |
Semiconductor processing system with wafer container docking and loading station
|
EP0757843A1
(de)
*
|
1994-04-28 |
1997-02-12 |
Semitool, Inc. |
Halbleiter-bearbeitungseinrichtung mit ankoppel- und beladestation für plättchen-behälter
|
US5664337A
(en)
*
|
1996-03-26 |
1997-09-09 |
Semitool, Inc. |
Automated semiconductor processing systems
|
US6712577B2
(en)
*
|
1994-04-28 |
2004-03-30 |
Semitool, Inc. |
Automated semiconductor processing system
|
US6447232B1
(en)
*
|
1994-04-28 |
2002-09-10 |
Semitool, Inc. |
Semiconductor wafer processing apparatus having improved wafer input/output handling system
|
US5544421A
(en)
*
|
1994-04-28 |
1996-08-13 |
Semitool, Inc. |
Semiconductor wafer processing system
|
JP3526625B2
(ja)
*
|
1994-07-20 |
2004-05-17 |
松下電器産業株式会社 |
部品集合体とその供給装置
|
US5884392A
(en)
*
|
1994-12-23 |
1999-03-23 |
International Business Machines Corporation |
Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers
|
JPH08244919A
(ja)
*
|
1995-03-15 |
1996-09-24 |
Fujitsu Ltd |
物品払い出し処理装置
|
US5997588A
(en)
*
|
1995-10-13 |
1999-12-07 |
Advanced Semiconductor Materials America, Inc. |
Semiconductor processing system with gas curtain
|
US5810537A
(en)
*
|
1995-10-18 |
1998-09-22 |
Bye/Oasis Engineering Inc. |
Isolation chamber transfer apparatus
|
FR2747112B1
(fr)
*
|
1996-04-03 |
1998-05-07 |
Commissariat Energie Atomique |
Dispositif de transport d'objets plats et procede de transfert de ces objets entre ledit dispositif et une machine de traitement
|
US6203582B1
(en)
|
1996-07-15 |
2001-03-20 |
Semitool, Inc. |
Modular semiconductor workpiece processing tool
|
US6645355B2
(en)
|
1996-07-15 |
2003-11-11 |
Semitool, Inc. |
Semiconductor processing apparatus having lift and tilt mechanism
|
US6091498A
(en)
*
|
1996-07-15 |
2000-07-18 |
Semitool, Inc. |
Semiconductor processing apparatus having lift and tilt mechanism
|
US6672820B1
(en)
|
1996-07-15 |
2004-01-06 |
Semitool, Inc. |
Semiconductor processing apparatus having linear conveyer system
|
KR100272252B1
(ko)
*
|
1997-04-17 |
2000-11-15 |
윤종용 |
웨이퍼카세트반송방법
|
US5838236A
(en)
*
|
1997-05-27 |
1998-11-17 |
Diversified Systems Incorporated |
Manufacturing method and apparatus
|
US6114662A
(en)
*
|
1997-06-05 |
2000-09-05 |
International Business Machines Corporation |
Continual flow rapid thermal processing apparatus and method
|
US6280134B1
(en)
*
|
1997-06-17 |
2001-08-28 |
Applied Materials, Inc. |
Apparatus and method for automated cassette handling
|
US6090711A
(en)
*
|
1997-09-30 |
2000-07-18 |
Semitool, Inc. |
Methods for controlling semiconductor workpiece surface exposure to processing liquids
|
TWI223678B
(en)
*
|
1998-03-20 |
2004-11-11 |
Semitool Inc |
Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper
|
US6565729B2
(en)
*
|
1998-03-20 |
2003-05-20 |
Semitool, Inc. |
Method for electrochemically depositing metal on a semiconductor workpiece
|
FR2779421B1
(fr)
*
|
1998-06-08 |
2000-08-18 |
Incam Solutions |
Dispositif adaptateur pour des boites de confinement d'au moins un objet plat sous atmosphere ultrapropre
|
KR100378407B1
(ko)
*
|
1998-07-08 |
2003-03-29 |
닛폰산소 가부시키가이샤 |
고청정건조공기의 제조공급시스템 및 방법
|
US6497801B1
(en)
*
|
1998-07-10 |
2002-12-24 |
Semitool Inc |
Electroplating apparatus with segmented anode array
|
US6318957B1
(en)
*
|
1998-07-10 |
2001-11-20 |
Asm America, Inc. |
Method for handling of wafers with minimal contact
|
NL1010317C2
(nl)
*
|
1998-10-14 |
2000-05-01 |
Asm Int |
Sorteer/opslaginrichting voor wafers en werkwijze voor het hanteren daarvan.
|
US6189238B1
(en)
*
|
1998-11-30 |
2001-02-20 |
Lucent Technologies Inc. |
Portable purge system for transporting materials
|
US6283692B1
(en)
|
1998-12-01 |
2001-09-04 |
Applied Materials, Inc. |
Apparatus for storing and moving a cassette
|
TW527444B
(en)
*
|
1999-04-13 |
2003-04-11 |
Semitool Inc |
System for electrochemically processing a workpiece
|
US7020537B2
(en)
*
|
1999-04-13 |
2006-03-28 |
Semitool, Inc. |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US6368475B1
(en)
*
|
2000-03-21 |
2002-04-09 |
Semitool, Inc. |
Apparatus for electrochemically processing a microelectronic workpiece
|
US7438788B2
(en)
*
|
1999-04-13 |
2008-10-21 |
Semitool, Inc. |
Apparatus and methods for electrochemical processing of microelectronic workpieces
|
US6916412B2
(en)
*
|
1999-04-13 |
2005-07-12 |
Semitool, Inc. |
Adaptable electrochemical processing chamber
|
US7189318B2
(en)
*
|
1999-04-13 |
2007-03-13 |
Semitool, Inc. |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US20030038035A1
(en)
*
|
2001-05-30 |
2003-02-27 |
Wilson Gregory J. |
Methods and systems for controlling current in electrochemical processing of microelectronic workpieces
|
US7264698B2
(en)
*
|
1999-04-13 |
2007-09-04 |
Semitool, Inc. |
Apparatus and methods for electrochemical processing of microelectronic workpieces
|
US7160421B2
(en)
*
|
1999-04-13 |
2007-01-09 |
Semitool, Inc. |
Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US7585398B2
(en)
*
|
1999-04-13 |
2009-09-08 |
Semitool, Inc. |
Chambers, systems, and methods for electrochemically processing microfeature workpieces
|
US6612797B1
(en)
*
|
1999-05-18 |
2003-09-02 |
Asyst Technologies, Inc. |
Cassette buffering within a minienvironment
|
US6811369B2
(en)
|
1999-09-02 |
2004-11-02 |
Canon Kabushiki Kaisha |
Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method
|
US6506009B1
(en)
*
|
2000-03-16 |
2003-01-14 |
Applied Materials, Inc. |
Apparatus for storing and moving a cassette
|
US20050183959A1
(en)
*
|
2000-04-13 |
2005-08-25 |
Wilson Gregory J. |
Tuning electrodes used in a reactor for electrochemically processing a microelectric workpiece
|
AU2001259504A1
(en)
*
|
2000-05-24 |
2001-12-03 |
Semitool, Inc. |
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
|
US6511277B1
(en)
*
|
2000-07-10 |
2003-01-28 |
Affymetrix, Inc. |
Cartridge loader and methods
|
US6530734B2
(en)
*
|
2000-12-08 |
2003-03-11 |
Adept Technology, Inc. |
Methods and apparatus for positive wafer process status identification during semiconductor wafer processing
|
US6821082B2
(en)
*
|
2001-10-30 |
2004-11-23 |
Freescale Semiconductor, Inc. |
Wafer management system and methods for managing wafers
|
US6732006B2
(en)
*
|
2002-02-06 |
2004-05-04 |
Asm International Nv |
Method and system to process semiconductor wafers
|
ATE467115T1
(de)
|
2002-03-15 |
2010-05-15 |
Affymetrix Inc |
System und verfahren zur abtastung von biologischen materialien
|
US7780391B2
(en)
*
|
2002-05-10 |
2010-08-24 |
Tokyo Electron Limited |
Substrate processing device
|
US7114903B2
(en)
*
|
2002-07-16 |
2006-10-03 |
Semitool, Inc. |
Apparatuses and method for transferring and/or pre-processing microelectronic workpieces
|
AU2003273251A1
(en)
*
|
2002-08-31 |
2004-03-19 |
Applied Materials, Inc. |
Substrate carrier having door latching and substrate clamping mechanisms
|
US7243003B2
(en)
*
|
2002-08-31 |
2007-07-10 |
Applied Materials, Inc. |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
|
US7506746B2
(en)
|
2002-08-31 |
2009-03-24 |
Applied Materials, Inc. |
System for transporting substrate carriers
|
US6955197B2
(en)
|
2002-08-31 |
2005-10-18 |
Applied Materials, Inc. |
Substrate carrier having door latching and substrate clamping mechanisms
|
US7684895B2
(en)
|
2002-08-31 |
2010-03-23 |
Applied Materials, Inc. |
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
|
US20050095110A1
(en)
*
|
2002-08-31 |
2005-05-05 |
Lowrance Robert B. |
Method and apparatus for unloading substrate carriers from substrate carrier transport system
|
US7258520B2
(en)
|
2002-08-31 |
2007-08-21 |
Applied Materials, Inc. |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
|
US20040081546A1
(en)
|
2002-08-31 |
2004-04-29 |
Applied Materials, Inc. |
Method and apparatus for supplying substrates to a processing tool
|
US7234584B2
(en)
*
|
2002-08-31 |
2007-06-26 |
Applied Materials, Inc. |
System for transporting substrate carriers
|
US7930061B2
(en)
|
2002-08-31 |
2011-04-19 |
Applied Materials, Inc. |
Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
|
US20040108212A1
(en)
*
|
2002-12-06 |
2004-06-10 |
Lyndon Graham |
Apparatus and methods for transferring heat during chemical processing of microelectronic workpieces
|
US7778721B2
(en)
|
2003-01-27 |
2010-08-17 |
Applied Materials, Inc. |
Small lot size lithography bays
|
US7578647B2
(en)
*
|
2003-01-27 |
2009-08-25 |
Applied Materials, Inc. |
Load port configurations for small lot size substrate carriers
|
US20090308030A1
(en)
*
|
2003-01-27 |
2009-12-17 |
Applied Materials, Inc. |
Load port configurations for small lot size substrate carriers
|
US7611318B2
(en)
*
|
2003-01-27 |
2009-11-03 |
Applied Materials, Inc. |
Overhead transfer flange and support for suspending a substrate carrier
|
US7221993B2
(en)
|
2003-01-27 |
2007-05-22 |
Applied Materials, Inc. |
Systems and methods for transferring small lot size substrate carriers between processing tools
|
US6990721B2
(en)
*
|
2003-03-21 |
2006-01-31 |
Brooks Automation, Inc. |
Growth model automated material handling system
|
US7317415B2
(en)
|
2003-08-08 |
2008-01-08 |
Affymetrix, Inc. |
System, method, and product for scanning of biological materials employing dual analog integrators
|
US7720557B2
(en)
*
|
2003-11-06 |
2010-05-18 |
Applied Materials, Inc. |
Methods and apparatus for enhanced operation of substrate carrier handlers
|
US20050209721A1
(en)
*
|
2003-11-06 |
2005-09-22 |
Applied Materials, Inc. |
Methods and apparatus for enhanced operation of substrate carrier handlers
|
US7218983B2
(en)
*
|
2003-11-06 |
2007-05-15 |
Applied Materials, Inc. |
Method and apparatus for integrating large and small lot electronic device fabrication facilities
|
TWI367192B
(en)
*
|
2003-11-13 |
2012-07-01 |
Applied Materials Inc |
Calibration of high speed loader to substrate transport system
|
US7274971B2
(en)
|
2004-02-28 |
2007-09-25 |
Applied Materials, Inc. |
Methods and apparatus for electronic device manufacturing system monitoring and control
|
US7177716B2
(en)
|
2004-02-28 |
2007-02-13 |
Applied Materials, Inc. |
Methods and apparatus for material control system interface
|
US7413069B2
(en)
*
|
2004-02-28 |
2008-08-19 |
Applied Materials, Inc. |
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
|
JP2005277146A
(ja)
*
|
2004-03-25 |
2005-10-06 |
Fujitsu Ltd |
半導体装置の製造方法
|
KR20070038042A
(ko)
*
|
2004-05-14 |
2007-04-09 |
파세코 코퍼레이션 |
컨테이너 핸들러들을 위한 상황 보고 디바이스들을 만드는장치 및 방법
|
US7611319B2
(en)
*
|
2004-06-16 |
2009-11-03 |
Applied Materials, Inc. |
Methods and apparatus for identifying small lot size substrate carriers
|
CN1950928A
(zh)
*
|
2004-09-04 |
2007-04-18 |
应用材料公司 |
具有降低高度的衬底承载体
|
TWI415209B
(zh)
*
|
2005-04-04 |
2013-11-11 |
Entegris Inc |
罩幕標準機械介面晶圓盒之環境控制
|
US7400383B2
(en)
*
|
2005-04-04 |
2008-07-15 |
Entegris, Inc. |
Environmental control in a reticle SMIF pod
|
KR100737716B1
(ko)
*
|
2005-05-26 |
2007-07-10 |
주식회사 에이디피엔지니어링 |
플라즈마 처리장치
|
TW200717689A
(en)
*
|
2005-09-14 |
2007-05-01 |
Applied Materials Inc |
Methods and apparatus for a band to band transfer module
|
US8267634B2
(en)
|
2005-11-07 |
2012-09-18 |
Brooks Automation, Inc. |
Reduced capacity carrier, transport, load port, buffer system
|
WO2007056443A2
(en)
*
|
2005-11-07 |
2007-05-18 |
Brooks Automation, Inc. |
Reduced capacity carrier, transport, load port, buffer system
|
US20080107507A1
(en)
*
|
2005-11-07 |
2008-05-08 |
Bufano Michael L |
Reduced capacity carrier, transport, load port, buffer system
|
US20070116545A1
(en)
*
|
2005-11-21 |
2007-05-24 |
Applied Materials, Inc. |
Apparatus and methods for a substrate carrier having an inflatable seal
|
US20070141280A1
(en)
*
|
2005-12-16 |
2007-06-21 |
Applied Materials, Inc. |
Substrate carrier having an interior lining
|
TWI283005B
(en)
|
2005-12-28 |
2007-06-21 |
Au Optronics Corp |
Low-pressure process apparatus
|
US20070258796A1
(en)
*
|
2006-04-26 |
2007-11-08 |
Englhardt Eric A |
Methods and apparatus for transporting substrate carriers
|
KR20140069354A
(ko)
|
2006-08-18 |
2014-06-09 |
브룩스 오토메이션 인코퍼레이티드 |
용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
|
US20080112787A1
(en)
|
2006-11-15 |
2008-05-15 |
Dynamic Micro Systems |
Removable compartments for workpiece stocker
|
US20080213071A1
(en)
*
|
2007-02-09 |
2008-09-04 |
Applied Materials, Inc. |
Transport device in an installation for the treatment of substrates
|
US7918389B2
(en)
*
|
2007-05-15 |
2011-04-05 |
Corning Incorporated |
Method and system for tracking unfinished ceramic structures during manufacture
|
US20090090603A1
(en)
|
2007-10-04 |
2009-04-09 |
Acrison, Inc. |
Automatic Belt Tracking System
|
JP5504164B2
(ja)
|
2007-10-22 |
2014-05-28 |
アプライド マテリアルズ インコーポレイテッド |
基板キャリアを移送するための方法および装置
|
WO2009097342A2
(en)
*
|
2008-01-28 |
2009-08-06 |
Gil-Char, Inc. |
Watercraft dry dock storage system and methods
|
US10378106B2
(en)
|
2008-11-14 |
2019-08-13 |
Asm Ip Holding B.V. |
Method of forming insulation film by modified PEALD
|
US8110511B2
(en)
*
|
2009-01-03 |
2012-02-07 |
Archers Inc. |
Methods and systems of transferring a substrate to minimize heat loss
|
US20100162955A1
(en)
*
|
2008-12-31 |
2010-07-01 |
Lawrence Chung-Lai Lei |
Systems and methods for substrate processing
|
US8367565B2
(en)
*
|
2008-12-31 |
2013-02-05 |
Archers Inc. |
Methods and systems of transferring, docking and processing substrates
|
US7897525B2
(en)
*
|
2008-12-31 |
2011-03-01 |
Archers Inc. |
Methods and systems of transferring, docking and processing substrates
|
US20100162954A1
(en)
*
|
2008-12-31 |
2010-07-01 |
Lawrence Chung-Lai Lei |
Integrated facility and process chamber for substrate processing
|
WO2010086865A1
(en)
*
|
2009-02-02 |
2010-08-05 |
Advanced Dicing Technologies Ltd. |
System and method for high speed laser material processing
|
US9394608B2
(en)
|
2009-04-06 |
2016-07-19 |
Asm America, Inc. |
Semiconductor processing reactor and components thereof
|
US9767342B2
(en)
|
2009-05-22 |
2017-09-19 |
Affymetrix, Inc. |
Methods and devices for reading microarrays
|
US8802201B2
(en)
|
2009-08-14 |
2014-08-12 |
Asm America, Inc. |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
|
FR2954583B1
(fr)
|
2009-12-18 |
2017-11-24 |
Alcatel Lucent |
Procede et dispositif de pilotage de fabrication de semi conducteurs par mesure de contamination
|
FR2961946B1
(fr)
*
|
2010-06-29 |
2012-08-03 |
Alcatel Lucent |
Dispositif de traitement pour boites de transport et de stockage
|
JP5738016B2
(ja)
*
|
2011-03-08 |
2015-06-17 |
キヤノン株式会社 |
搬送システム、およびそれを用いたデバイスの製造方法
|
JP5700119B2
(ja)
*
|
2011-05-25 |
2015-04-15 |
村田機械株式会社 |
ロードポート装置、搬送システム、及びコンテナ搬出方法
|
US9312155B2
(en)
|
2011-06-06 |
2016-04-12 |
Asm Japan K.K. |
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
|
US10364496B2
(en)
|
2011-06-27 |
2019-07-30 |
Asm Ip Holding B.V. |
Dual section module having shared and unshared mass flow controllers
|
US10854498B2
(en)
|
2011-07-15 |
2020-12-01 |
Asm Ip Holding B.V. |
Wafer-supporting device and method for producing same
|
US20130023129A1
(en)
|
2011-07-20 |
2013-01-24 |
Asm America, Inc. |
Pressure transmitter for a semiconductor processing environment
|
US9017481B1
(en)
|
2011-10-28 |
2015-04-28 |
Asm America, Inc. |
Process feed management for semiconductor substrate processing
|
US9659799B2
(en)
|
2012-08-28 |
2017-05-23 |
Asm Ip Holding B.V. |
Systems and methods for dynamic semiconductor process scheduling
|
US10714315B2
(en)
|
2012-10-12 |
2020-07-14 |
Asm Ip Holdings B.V. |
Semiconductor reaction chamber showerhead
|
US9484191B2
(en)
|
2013-03-08 |
2016-11-01 |
Asm Ip Holding B.V. |
Pulsed remote plasma method and system
|
US9589770B2
(en)
|
2013-03-08 |
2017-03-07 |
Asm Ip Holding B.V. |
Method and systems for in-situ formation of intermediate reactive species
|
US9240412B2
(en)
|
2013-09-27 |
2016-01-19 |
Asm Ip Holding B.V. |
Semiconductor structure and device and methods of forming same using selective epitaxial process
|
US10683571B2
(en)
|
2014-02-25 |
2020-06-16 |
Asm Ip Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same
|
US10167557B2
(en)
|
2014-03-18 |
2019-01-01 |
Asm Ip Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same
|
US11015245B2
(en)
|
2014-03-19 |
2021-05-25 |
Asm Ip Holding B.V. |
Gas-phase reactor and system having exhaust plenum and components thereof
|
TWI536489B
(zh)
*
|
2014-05-23 |
2016-06-01 |
家登精密工業股份有限公司 |
晶圓輸送系統及其運作方法
|
US10858737B2
(en)
|
2014-07-28 |
2020-12-08 |
Asm Ip Holding B.V. |
Showerhead assembly and components thereof
|
US9890456B2
(en)
|
2014-08-21 |
2018-02-13 |
Asm Ip Holding B.V. |
Method and system for in situ formation of gas-phase compounds
|
US9657845B2
(en)
|
2014-10-07 |
2017-05-23 |
Asm Ip Holding B.V. |
Variable conductance gas distribution apparatus and method
|
US10941490B2
(en)
|
2014-10-07 |
2021-03-09 |
Asm Ip Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
|
KR102263121B1
(ko)
|
2014-12-22 |
2021-06-09 |
에이에스엠 아이피 홀딩 비.브이. |
반도체 소자 및 그 제조 방법
|
US10529542B2
(en)
|
2015-03-11 |
2020-01-07 |
Asm Ip Holdings B.V. |
Cross-flow reactor and method
|
US10276355B2
(en)
|
2015-03-12 |
2019-04-30 |
Asm Ip Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same
|
US10043689B2
(en)
*
|
2015-06-05 |
2018-08-07 |
Hirata Corporation |
Chamber apparatus and processing system
|
US10458018B2
(en)
|
2015-06-26 |
2019-10-29 |
Asm Ip Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same
|
US10600673B2
(en)
|
2015-07-07 |
2020-03-24 |
Asm Ip Holding B.V. |
Magnetic susceptor to baseplate seal
|
US9960072B2
(en)
|
2015-09-29 |
2018-05-01 |
Asm Ip Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings
|
US10211308B2
(en)
|
2015-10-21 |
2019-02-19 |
Asm Ip Holding B.V. |
NbMC layers
|
US10322384B2
(en)
|
2015-11-09 |
2019-06-18 |
Asm Ip Holding B.V. |
Counter flow mixer for process chamber
|
US11139308B2
(en)
|
2015-12-29 |
2021-10-05 |
Asm Ip Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices
|
US10468251B2
(en)
|
2016-02-19 |
2019-11-05 |
Asm Ip Holding B.V. |
Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
|
US10529554B2
(en)
|
2016-02-19 |
2020-01-07 |
Asm Ip Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
|
US10501866B2
(en)
|
2016-03-09 |
2019-12-10 |
Asm Ip Holding B.V. |
Gas distribution apparatus for improved film uniformity in an epitaxial system
|
US10343920B2
(en)
|
2016-03-18 |
2019-07-09 |
Asm Ip Holding B.V. |
Aligned carbon nanotubes
|
US9892913B2
(en)
|
2016-03-24 |
2018-02-13 |
Asm Ip Holding B.V. |
Radial and thickness control via biased multi-port injection settings
|
US10190213B2
(en)
|
2016-04-21 |
2019-01-29 |
Asm Ip Holding B.V. |
Deposition of metal borides
|
US10865475B2
(en)
|
2016-04-21 |
2020-12-15 |
Asm Ip Holding B.V. |
Deposition of metal borides and silicides
|
US10032628B2
(en)
|
2016-05-02 |
2018-07-24 |
Asm Ip Holding B.V. |
Source/drain performance through conformal solid state doping
|
US10367080B2
(en)
|
2016-05-02 |
2019-07-30 |
Asm Ip Holding B.V. |
Method of forming a germanium oxynitride film
|
KR102592471B1
(ko)
|
2016-05-17 |
2023-10-20 |
에이에스엠 아이피 홀딩 비.브이. |
금속 배선 형성 방법 및 이를 이용한 반도체 장치의 제조 방법
|
US11453943B2
(en)
|
2016-05-25 |
2022-09-27 |
Asm Ip Holding B.V. |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
|
US10388509B2
(en)
|
2016-06-28 |
2019-08-20 |
Asm Ip Holding B.V. |
Formation of epitaxial layers via dislocation filtering
|
US9859151B1
(en)
|
2016-07-08 |
2018-01-02 |
Asm Ip Holding B.V. |
Selective film deposition method to form air gaps
|
US10612137B2
(en)
|
2016-07-08 |
2020-04-07 |
Asm Ip Holdings B.V. |
Organic reactants for atomic layer deposition
|
US10714385B2
(en)
|
2016-07-19 |
2020-07-14 |
Asm Ip Holding B.V. |
Selective deposition of tungsten
|
KR102354490B1
(ko)
|
2016-07-27 |
2022-01-21 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 방법
|
US9812320B1
(en)
|
2016-07-28 |
2017-11-07 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US9887082B1
(en)
|
2016-07-28 |
2018-02-06 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
US10395919B2
(en)
|
2016-07-28 |
2019-08-27 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
|
KR102532607B1
(ko)
|
2016-07-28 |
2023-05-15 |
에이에스엠 아이피 홀딩 비.브이. |
기판 가공 장치 및 그 동작 방법
|
KR102613349B1
(ko)
|
2016-08-25 |
2023-12-14 |
에이에스엠 아이피 홀딩 비.브이. |
배기 장치 및 이를 이용한 기판 가공 장치와 박막 제조 방법
|
US10410943B2
(en)
|
2016-10-13 |
2019-09-10 |
Asm Ip Holding B.V. |
Method for passivating a surface of a semiconductor and related systems
|
US10643826B2
(en)
|
2016-10-26 |
2020-05-05 |
Asm Ip Holdings B.V. |
Methods for thermally calibrating reaction chambers
|
US11532757B2
(en)
|
2016-10-27 |
2022-12-20 |
Asm Ip Holding B.V. |
Deposition of charge trapping layers
|
US10714350B2
(en)
|
2016-11-01 |
2020-07-14 |
ASM IP Holdings, B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
|
US10435790B2
(en)
|
2016-11-01 |
2019-10-08 |
Asm Ip Holding B.V. |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
|
US10229833B2
(en)
|
2016-11-01 |
2019-03-12 |
Asm Ip Holding B.V. |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
|
US10643904B2
(en)
|
2016-11-01 |
2020-05-05 |
Asm Ip Holdings B.V. |
Methods for forming a semiconductor device and related semiconductor device structures
|
US10134757B2
(en)
|
2016-11-07 |
2018-11-20 |
Asm Ip Holding B.V. |
Method of processing a substrate and a device manufactured by using the method
|
KR102546317B1
(ko)
|
2016-11-15 |
2023-06-21 |
에이에스엠 아이피 홀딩 비.브이. |
기체 공급 유닛 및 이를 포함하는 기판 처리 장치
|
SG10201609568YA
(en)
*
|
2016-11-15 |
2018-06-28 |
Hybrid Innovative Tech Pte Ltd |
Smif pods handling system and the method thereof
|
US10340135B2
(en)
|
2016-11-28 |
2019-07-02 |
Asm Ip Holding B.V. |
Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
|
KR20180068582A
(ko)
|
2016-12-14 |
2018-06-22 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US11447861B2
(en)
|
2016-12-15 |
2022-09-20 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
|
US11581186B2
(en)
|
2016-12-15 |
2023-02-14 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus
|
KR20180070971A
(ko)
|
2016-12-19 |
2018-06-27 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US10269558B2
(en)
|
2016-12-22 |
2019-04-23 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
US10867788B2
(en)
|
2016-12-28 |
2020-12-15 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
|
US11390950B2
(en)
|
2017-01-10 |
2022-07-19 |
Asm Ip Holding B.V. |
Reactor system and method to reduce residue buildup during a film deposition process
|
US10655221B2
(en)
|
2017-02-09 |
2020-05-19 |
Asm Ip Holding B.V. |
Method for depositing oxide film by thermal ALD and PEALD
|
US10468261B2
(en)
|
2017-02-15 |
2019-11-05 |
Asm Ip Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
|
US10283353B2
(en)
|
2017-03-29 |
2019-05-07 |
Asm Ip Holding B.V. |
Method of reforming insulating film deposited on substrate with recess pattern
|
US10529563B2
(en)
|
2017-03-29 |
2020-01-07 |
Asm Ip Holdings B.V. |
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|
USD876504S1
(en)
|
2017-04-03 |
2020-02-25 |
Asm Ip Holding B.V. |
Exhaust flow control ring for semiconductor deposition apparatus
|
KR102457289B1
(ko)
|
2017-04-25 |
2022-10-21 |
에이에스엠 아이피 홀딩 비.브이. |
박막 증착 방법 및 반도체 장치의 제조 방법
|
US10446393B2
(en)
|
2017-05-08 |
2019-10-15 |
Asm Ip Holding B.V. |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
|
US10770286B2
(en)
|
2017-05-08 |
2020-09-08 |
Asm Ip Holdings B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
|
US10892156B2
(en)
|
2017-05-08 |
2021-01-12 |
Asm Ip Holding B.V. |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
|
US10504742B2
(en)
|
2017-05-31 |
2019-12-10 |
Asm Ip Holding B.V. |
Method of atomic layer etching using hydrogen plasma
|
US10886123B2
(en)
|
2017-06-02 |
2021-01-05 |
Asm Ip Holding B.V. |
Methods for forming low temperature semiconductor layers and related semiconductor device structures
|
US11306395B2
(en)
|
2017-06-28 |
2022-04-19 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
|
US10685834B2
(en)
|
2017-07-05 |
2020-06-16 |
Asm Ip Holdings B.V. |
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|
KR20190009245A
(ko)
|
2017-07-18 |
2019-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물
|
US10541333B2
(en)
|
2017-07-19 |
2020-01-21 |
Asm Ip Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures
|
US11018002B2
(en)
|
2017-07-19 |
2021-05-25 |
Asm Ip Holding B.V. |
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|
US11374112B2
(en)
|
2017-07-19 |
2022-06-28 |
Asm Ip Holding B.V. |
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|
US10312055B2
(en)
|
2017-07-26 |
2019-06-04 |
Asm Ip Holding B.V. |
Method of depositing film by PEALD using negative bias
|
US10605530B2
(en)
|
2017-07-26 |
2020-03-31 |
Asm Ip Holding B.V. |
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
|
US10590535B2
(en)
|
2017-07-26 |
2020-03-17 |
Asm Ip Holdings B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same
|
US10692741B2
(en)
|
2017-08-08 |
2020-06-23 |
Asm Ip Holdings B.V. |
Radiation shield
|
US10770336B2
(en)
|
2017-08-08 |
2020-09-08 |
Asm Ip Holding B.V. |
Substrate lift mechanism and reactor including same
|
US11139191B2
(en)
|
2017-08-09 |
2021-10-05 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
|
US10249524B2
(en)
|
2017-08-09 |
2019-04-02 |
Asm Ip Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly
|
US11769682B2
(en)
|
2017-08-09 |
2023-09-26 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
|
USD900036S1
(en)
|
2017-08-24 |
2020-10-27 |
Asm Ip Holding B.V. |
Heater electrical connector and adapter
|
US11830730B2
(en)
|
2017-08-29 |
2023-11-28 |
Asm Ip Holding B.V. |
Layer forming method and apparatus
|
US11295980B2
(en)
|
2017-08-30 |
2022-04-05 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
|
KR102491945B1
(ko)
|
2017-08-30 |
2023-01-26 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US11056344B2
(en)
|
2017-08-30 |
2021-07-06 |
Asm Ip Holding B.V. |
Layer forming method
|
US10607895B2
(en)
|
2017-09-18 |
2020-03-31 |
Asm Ip Holdings B.V. |
Method for forming a semiconductor device structure comprising a gate fill metal
|
KR102630301B1
(ko)
|
2017-09-21 |
2024-01-29 |
에이에스엠 아이피 홀딩 비.브이. |
침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치
|
US10844484B2
(en)
|
2017-09-22 |
2020-11-24 |
Asm Ip Holding B.V. |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
|
US10658205B2
(en)
|
2017-09-28 |
2020-05-19 |
Asm Ip Holdings B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
|
US10403504B2
(en)
|
2017-10-05 |
2019-09-03 |
Asm Ip Holding B.V. |
Method for selectively depositing a metallic film on a substrate
|
US10319588B2
(en)
|
2017-10-10 |
2019-06-11 |
Asm Ip Holding B.V. |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition
|
US10923344B2
(en)
|
2017-10-30 |
2021-02-16 |
Asm Ip Holding B.V. |
Methods for forming a semiconductor structure and related semiconductor structures
|
US10910262B2
(en)
|
2017-11-16 |
2021-02-02 |
Asm Ip Holding B.V. |
Method of selectively depositing a capping layer structure on a semiconductor device structure
|
KR102443047B1
(ko)
|
2017-11-16 |
2022-09-14 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치 방법 및 그에 의해 제조된 장치
|
US11022879B2
(en)
|
2017-11-24 |
2021-06-01 |
Asm Ip Holding B.V. |
Method of forming an enhanced unexposed photoresist layer
|
US11639811B2
(en)
|
2017-11-27 |
2023-05-02 |
Asm Ip Holding B.V. |
Apparatus including a clean mini environment
|
CN111316417B
(zh)
|
2017-11-27 |
2023-12-22 |
阿斯莫Ip控股公司 |
与批式炉偕同使用的用于储存晶圆匣的储存装置
|
US10290508B1
(en)
|
2017-12-05 |
2019-05-14 |
Asm Ip Holding B.V. |
Method for forming vertical spacers for spacer-defined patterning
|
US10872771B2
(en)
|
2018-01-16 |
2020-12-22 |
Asm Ip Holding B. V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
|
TW202325889A
(zh)
|
2018-01-19 |
2023-07-01 |
荷蘭商Asm 智慧財產控股公司 |
沈積方法
|
CN111630203A
(zh)
|
2018-01-19 |
2020-09-04 |
Asm Ip私人控股有限公司 |
通过等离子体辅助沉积来沉积间隙填充层的方法
|
USD903477S1
(en)
|
2018-01-24 |
2020-12-01 |
Asm Ip Holdings B.V. |
Metal clamp
|
US11018047B2
(en)
|
2018-01-25 |
2021-05-25 |
Asm Ip Holding B.V. |
Hybrid lift pin
|
USD880437S1
(en)
|
2018-02-01 |
2020-04-07 |
Asm Ip Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus
|
US10535516B2
(en)
|
2018-02-01 |
2020-01-14 |
Asm Ip Holdings B.V. |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
|
US11081345B2
(en)
|
2018-02-06 |
2021-08-03 |
Asm Ip Holding B.V. |
Method of post-deposition treatment for silicon oxide film
|
CN116732497A
(zh)
|
2018-02-14 |
2023-09-12 |
Asm Ip私人控股有限公司 |
通过循环沉积工艺在衬底上沉积含钌膜的方法
|
US10896820B2
(en)
|
2018-02-14 |
2021-01-19 |
Asm Ip Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
|
US10731249B2
(en)
|
2018-02-15 |
2020-08-04 |
Asm Ip Holding B.V. |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
|
US10658181B2
(en)
|
2018-02-20 |
2020-05-19 |
Asm Ip Holding B.V. |
Method of spacer-defined direct patterning in semiconductor fabrication
|
KR102636427B1
(ko)
|
2018-02-20 |
2024-02-13 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 방법 및 장치
|
US10975470B2
(en)
|
2018-02-23 |
2021-04-13 |
Asm Ip Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
|
US11473195B2
(en)
|
2018-03-01 |
2022-10-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate
|
US11629406B2
(en)
|
2018-03-09 |
2023-04-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
|
US11114283B2
(en)
|
2018-03-16 |
2021-09-07 |
Asm Ip Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same
|
KR102646467B1
(ko)
|
2018-03-27 |
2024-03-11 |
에이에스엠 아이피 홀딩 비.브이. |
기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조
|
US11088002B2
(en)
|
2018-03-29 |
2021-08-10 |
Asm Ip Holding B.V. |
Substrate rack and a substrate processing system and method
|
US11230766B2
(en)
|
2018-03-29 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
|
US10510536B2
(en)
|
2018-03-29 |
2019-12-17 |
Asm Ip Holding B.V. |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
|
KR102501472B1
(ko)
|
2018-03-30 |
2023-02-20 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 방법
|
TWI811348B
(zh)
|
2018-05-08 |
2023-08-11 |
荷蘭商Asm 智慧財產控股公司 |
藉由循環沉積製程於基板上沉積氧化物膜之方法及相關裝置結構
|
TW202349473A
(zh)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
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(zh)
|
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|
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(en)
|
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|
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(ko)
|
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|
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(en)
|
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|
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|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
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(en)
|
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|
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(ko)
|
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|
US10388513B1
(en)
|
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|
US10755922B2
(en)
|
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|
US10767789B2
(en)
|
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|
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|
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|
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(en)
|
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|
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|
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|
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(en)
|
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|
US11430674B2
(en)
|
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|
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(ko)
|
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|
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|
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|
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|
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|
WO2020066458A1
(ja)
*
|
2018-09-27 |
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|
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(zh)
|
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|
US11232963B2
(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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|
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|
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|
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|
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|
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(ko)
|
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|
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(en)
|
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|
US10381219B1
(en)
|
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|
US11087997B2
(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
US11572620B2
(en)
|
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|
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(en)
|
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|
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(en)
|
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|
US10847366B2
(en)
|
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|
US10559458B1
(en)
|
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|
US11217444B2
(en)
|
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|
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(ko)
|
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|
US11158513B2
(en)
|
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|
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(zh)
|
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|
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(zh)
|
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|
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(ko)
|
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|
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(zh)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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|
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(zh)
|
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|
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(ko)
|
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|
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(zh)
|
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|
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(ko)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
US11742198B2
(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
JP7224728B2
(ja)
*
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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|
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(ko)
|
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|
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|
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|
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(ja)
|
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|
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(en)
|
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|
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(en)
|
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|
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(en)
|
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|
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(en)
|
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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(en)
|
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2022-03-01 |
Asm Ip Holding B.V. |
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|
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(en)
|
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2021-09-28 |
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|
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(ko)
|
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에이에스엠 아이피 홀딩 비.브이. |
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|
CN112180846B
(zh)
*
|
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杭州海康机器人技术有限公司 |
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|
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|
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|
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(zh)
|
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|
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(ko)
|
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2021-01-27 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
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(ko)
|
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2021-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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2021-01-28 |
에이에스엠 아이피 홀딩 비.브이. |
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|
US11643724B2
(en)
|
2019-07-18 |
2023-05-09 |
Asm Ip Holding B.V. |
Method of forming structures using a neutral beam
|
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(zh)
|
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2021-06-01 |
荷蘭商Asm Ip私人控股有限公司 |
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|
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(zh)
|
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2021-02-02 |
Asm Ip私人控股有限公司 |
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|
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(zh)
|
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2021-02-02 |
Asm Ip私人控股有限公司 |
基板处理设备
|
CN112309899A
(zh)
|
2019-07-30 |
2021-02-02 |
Asm Ip私人控股有限公司 |
基板处理设备
|
US11587814B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11587815B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11227782B2
(en)
|
2019-07-31 |
2022-01-18 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
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(ko)
|
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2021-02-18 |
에이에스엠 아이피 홀딩 비.브이. |
화학물질 공급원 용기를 위한 액체 레벨 센서
|
USD965524S1
(en)
|
2019-08-19 |
2022-10-04 |
Asm Ip Holding B.V. |
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|
USD965044S1
(en)
|
2019-08-19 |
2022-09-27 |
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|
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(ja)
|
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|
USD940837S1
(en)
|
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2022-01-11 |
Asm Ip Holding B.V. |
Electrode
|
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(en)
|
2019-08-22 |
2021-09-14 |
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|
KR20210024423A
(ko)
|
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2021-03-05 |
에이에스엠 아이피 홀딩 비.브이. |
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|
USD949319S1
(en)
|
2019-08-22 |
2022-04-19 |
Asm Ip Holding B.V. |
Exhaust duct
|
USD979506S1
(en)
|
2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Insulator
|
US11286558B2
(en)
|
2019-08-23 |
2022-03-29 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
|
KR20210024420A
(ko)
|
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2021-03-05 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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2021-03-15 |
에이에스엠 아이피 홀딩 비.브이. |
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|
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(ko)
|
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2021-03-16 |
에이에스엠 아이피 홀딩 비.브이. |
기판 처리 장치
|
US11562901B2
(en)
|
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Asm Ip Holding B.V. |
Substrate processing method
|
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(zh)
|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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(en)
|
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|
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|
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|
US11501968B2
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|
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|
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|
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|
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|
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|
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(en)
|
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Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
|
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|
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|
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|
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|
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(ja)
|
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エーエスエム アイピー ホールディング ビー.ブイ. |
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|
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|
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에이에스엠 아이피 홀딩 비.브이. |
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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(en)
|
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Methods for depositing gap filling fluids and related systems and devices
|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
US11821078B2
(en)
|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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Weighted lift pin
|
USD1012873S1
(en)
|
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Electrode for semiconductor processing apparatus
|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|
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|