DE69209743D1 - Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung - Google Patents
Struktur mit differentieller Kapazität und Verfahren zu deren HerstellungInfo
- Publication number
- DE69209743D1 DE69209743D1 DE69209743T DE69209743T DE69209743D1 DE 69209743 D1 DE69209743 D1 DE 69209743D1 DE 69209743 T DE69209743 T DE 69209743T DE 69209743 T DE69209743 T DE 69209743T DE 69209743 D1 DE69209743 D1 DE 69209743D1
- Authority
- DE
- Germany
- Prior art keywords
- making
- differential capacity
- capacity structure
- differential
- capacity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/733,920 US5146389A (en) | 1991-07-22 | 1991-07-22 | Differential capacitor structure and method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69209743D1 true DE69209743D1 (de) | 1996-05-15 |
DE69209743T2 DE69209743T2 (de) | 1996-10-24 |
Family
ID=24949645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69209743T Expired - Fee Related DE69209743T2 (de) | 1991-07-22 | 1992-07-13 | Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung |
Country Status (7)
Country | Link |
---|---|
US (1) | US5146389A (de) |
EP (1) | EP0527342B1 (de) |
JP (1) | JP2836397B2 (de) |
CZ (1) | CZ283247B6 (de) |
DE (1) | DE69209743T2 (de) |
HK (1) | HK1002239A1 (de) |
SK (1) | SK280281B6 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5447068A (en) * | 1994-03-31 | 1995-09-05 | Ford Motor Company | Digital capacitive accelerometer |
US5545912A (en) * | 1994-10-27 | 1996-08-13 | Motorola, Inc. | Electronic device enclosure including a conductive cap and substrate |
US6070464A (en) * | 1997-09-05 | 2000-06-06 | Motorola, Inc. | Sensing structure comprising a movable mass and a self-test structure |
US6215645B1 (en) * | 1998-05-01 | 2001-04-10 | Motorola, Inc. | Differential capacitor structure |
US6575041B2 (en) | 1999-02-05 | 2003-06-10 | Northrop Grumman Corporation | Capacitive strain gage and method |
US6386032B1 (en) | 1999-08-26 | 2002-05-14 | Analog Devices Imi, Inc. | Micro-machined accelerometer with improved transfer characteristics |
US6257062B1 (en) | 1999-10-01 | 2001-07-10 | Delphi Technologies, Inc. | Angular Accelerometer |
US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
US6393914B1 (en) | 2001-02-13 | 2002-05-28 | Delphi Technologies, Inc. | Angular accelerometer |
US6761070B2 (en) | 2002-01-31 | 2004-07-13 | Delphi Technologies, Inc. | Microfabricated linear accelerometer |
US6718826B2 (en) | 2002-02-28 | 2004-04-13 | Delphi Technologies, Inc. | Balanced angular accelerometer |
US6666092B2 (en) | 2002-02-28 | 2003-12-23 | Delphi Technologies, Inc. | Angular accelerometer having balanced inertia mass |
US7059190B2 (en) * | 2003-10-08 | 2006-06-13 | Denso Corporation | Semiconductor dynamic sensor having variable capacitor formed on laminated substrate |
US7194376B2 (en) * | 2004-04-27 | 2007-03-20 | Delphi Technologies, Inc. | Circuit and method of processing multiple-axis sensor output signals |
US20050235751A1 (en) * | 2004-04-27 | 2005-10-27 | Zarabadi Seyed R | Dual-axis accelerometer |
US7234357B2 (en) | 2004-10-18 | 2007-06-26 | Silverbrook Research Pty Ltd | Wafer bonded pressure sensor |
US7250322B2 (en) * | 2005-03-16 | 2007-07-31 | Delphi Technologies, Inc. | Method of making microsensor |
US20060207327A1 (en) * | 2005-03-16 | 2006-09-21 | Zarabadi Seyed R | Linear accelerometer |
US7610809B2 (en) * | 2007-01-18 | 2009-11-03 | Freescale Semiconductor, Inc. | Differential capacitive sensor and method of making same |
WO2010016094A1 (ja) * | 2008-08-06 | 2010-02-11 | パイオニア株式会社 | 静電容量検出型センサ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4435737A (en) * | 1981-12-16 | 1984-03-06 | Rockwell International Corporation | Low cost capacitive accelerometer |
US4430895A (en) * | 1982-02-02 | 1984-02-14 | Rockwell International Corporation | Piezoresistive accelerometer |
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US5008774A (en) * | 1989-02-28 | 1991-04-16 | United Technologies Corporation | Capacitive accelerometer with mid-plane proof mass |
US4945773A (en) * | 1989-03-06 | 1990-08-07 | Ford Motor Company | Force transducer etched from silicon |
US5045152A (en) * | 1989-03-06 | 1991-09-03 | Ford Motor Company | Force transducer etched from silicon |
US5006487A (en) * | 1989-07-27 | 1991-04-09 | Honeywell Inc. | Method of making an electrostatic silicon accelerometer |
-
1991
- 1991-07-22 US US07/733,920 patent/US5146389A/en not_active Expired - Lifetime
-
1992
- 1992-06-29 CZ CS922021A patent/CZ283247B6/cs not_active IP Right Cessation
- 1992-06-29 SK SK202192A patent/SK280281B6/sk unknown
- 1992-07-13 EP EP92111909A patent/EP0527342B1/de not_active Expired - Lifetime
- 1992-07-13 DE DE69209743T patent/DE69209743T2/de not_active Expired - Fee Related
- 1992-07-17 JP JP4212445A patent/JP2836397B2/ja not_active Expired - Lifetime
-
1998
- 1998-02-18 HK HK98101249A patent/HK1002239A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2836397B2 (ja) | 1998-12-14 |
SK280281B6 (sk) | 1999-11-08 |
US5146389A (en) | 1992-09-08 |
EP0527342B1 (de) | 1996-04-10 |
SK202192A3 (en) | 1995-03-08 |
HK1002239A1 (en) | 1998-08-07 |
EP0527342A1 (de) | 1993-02-17 |
CZ283247B6 (cs) | 1998-02-18 |
DE69209743T2 (de) | 1996-10-24 |
JPH05218300A (ja) | 1993-08-27 |
CZ202192A3 (en) | 1993-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FREESCALE SEMICONDUCTOR, INC. (N.D.GES.D. STAATES |
|
8339 | Ceased/non-payment of the annual fee |