DE69209743D1 - Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung - Google Patents

Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung

Info

Publication number
DE69209743D1
DE69209743D1 DE69209743T DE69209743T DE69209743D1 DE 69209743 D1 DE69209743 D1 DE 69209743D1 DE 69209743 T DE69209743 T DE 69209743T DE 69209743 T DE69209743 T DE 69209743T DE 69209743 D1 DE69209743 D1 DE 69209743D1
Authority
DE
Germany
Prior art keywords
making
differential capacity
capacity structure
differential
capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69209743T
Other languages
English (en)
Other versions
DE69209743T2 (de
Inventor
Ljubisa Ristic
William C Dunn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of DE69209743D1 publication Critical patent/DE69209743D1/de
Application granted granted Critical
Publication of DE69209743T2 publication Critical patent/DE69209743T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
DE69209743T 1991-07-22 1992-07-13 Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung Expired - Fee Related DE69209743T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/733,920 US5146389A (en) 1991-07-22 1991-07-22 Differential capacitor structure and method

Publications (2)

Publication Number Publication Date
DE69209743D1 true DE69209743D1 (de) 1996-05-15
DE69209743T2 DE69209743T2 (de) 1996-10-24

Family

ID=24949645

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69209743T Expired - Fee Related DE69209743T2 (de) 1991-07-22 1992-07-13 Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung

Country Status (7)

Country Link
US (1) US5146389A (de)
EP (1) EP0527342B1 (de)
JP (1) JP2836397B2 (de)
CZ (1) CZ283247B6 (de)
DE (1) DE69209743T2 (de)
HK (1) HK1002239A1 (de)
SK (1) SK280281B6 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
US5545912A (en) * 1994-10-27 1996-08-13 Motorola, Inc. Electronic device enclosure including a conductive cap and substrate
US6070464A (en) * 1997-09-05 2000-06-06 Motorola, Inc. Sensing structure comprising a movable mass and a self-test structure
US6215645B1 (en) * 1998-05-01 2001-04-10 Motorola, Inc. Differential capacitor structure
US6575041B2 (en) 1999-02-05 2003-06-10 Northrop Grumman Corporation Capacitive strain gage and method
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6257062B1 (en) 1999-10-01 2001-07-10 Delphi Technologies, Inc. Angular Accelerometer
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6393914B1 (en) 2001-02-13 2002-05-28 Delphi Technologies, Inc. Angular accelerometer
US6761070B2 (en) 2002-01-31 2004-07-13 Delphi Technologies, Inc. Microfabricated linear accelerometer
US6718826B2 (en) 2002-02-28 2004-04-13 Delphi Technologies, Inc. Balanced angular accelerometer
US6666092B2 (en) 2002-02-28 2003-12-23 Delphi Technologies, Inc. Angular accelerometer having balanced inertia mass
US7059190B2 (en) * 2003-10-08 2006-06-13 Denso Corporation Semiconductor dynamic sensor having variable capacitor formed on laminated substrate
US7194376B2 (en) * 2004-04-27 2007-03-20 Delphi Technologies, Inc. Circuit and method of processing multiple-axis sensor output signals
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
US7234357B2 (en) 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
US7250322B2 (en) * 2005-03-16 2007-07-31 Delphi Technologies, Inc. Method of making microsensor
US20060207327A1 (en) * 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
US7610809B2 (en) * 2007-01-18 2009-11-03 Freescale Semiconductor, Inc. Differential capacitive sensor and method of making same
WO2010016094A1 (ja) * 2008-08-06 2010-02-11 パイオニア株式会社 静電容量検出型センサ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4435737A (en) * 1981-12-16 1984-03-06 Rockwell International Corporation Low cost capacitive accelerometer
US4430895A (en) * 1982-02-02 1984-02-14 Rockwell International Corporation Piezoresistive accelerometer
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
US5045152A (en) * 1989-03-06 1991-09-03 Ford Motor Company Force transducer etched from silicon
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer

Also Published As

Publication number Publication date
JP2836397B2 (ja) 1998-12-14
SK280281B6 (sk) 1999-11-08
US5146389A (en) 1992-09-08
EP0527342B1 (de) 1996-04-10
SK202192A3 (en) 1995-03-08
HK1002239A1 (en) 1998-08-07
EP0527342A1 (de) 1993-02-17
CZ283247B6 (cs) 1998-02-18
DE69209743T2 (de) 1996-10-24
JPH05218300A (ja) 1993-08-27
CZ202192A3 (en) 1993-02-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FREESCALE SEMICONDUCTOR, INC. (N.D.GES.D. STAATES

8339 Ceased/non-payment of the annual fee