DE69218866T2 - Mechanismus zum parallelen Halten einer Fläche und Apparat zur Verwendung eines solchen Mechanismus - Google Patents

Mechanismus zum parallelen Halten einer Fläche und Apparat zur Verwendung eines solchen Mechanismus

Info

Publication number
DE69218866T2
DE69218866T2 DE69218866T DE69218866T DE69218866T2 DE 69218866 T2 DE69218866 T2 DE 69218866T2 DE 69218866 T DE69218866 T DE 69218866T DE 69218866 T DE69218866 T DE 69218866T DE 69218866 T2 DE69218866 T2 DE 69218866T2
Authority
DE
Germany
Prior art keywords
weight member
parallel
base plate
electrode
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69218866T
Other languages
English (en)
Other versions
DE69218866D1 (de
Inventor
Yutaka Hirai
Osamu Takamatsu
Katsunori Hatanaka
Masaru Nakayama
Hiroyasu Nose
Takayuki Yagi
Yasuhiro Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69218866D1 publication Critical patent/DE69218866D1/de
Publication of DE69218866T2 publication Critical patent/DE69218866T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
DE69218866T 1991-09-24 1992-09-23 Mechanismus zum parallelen Halten einer Fläche und Apparat zur Verwendung eines solchen Mechanismus Expired - Lifetime DE69218866T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27328991 1991-09-24
JP23836692A JP3184619B2 (ja) 1991-09-24 1992-09-07 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置

Publications (2)

Publication Number Publication Date
DE69218866D1 DE69218866D1 (de) 1997-05-15
DE69218866T2 true DE69218866T2 (de) 1997-10-09

Family

ID=26533658

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218866T Expired - Lifetime DE69218866T2 (de) 1991-09-24 1992-09-23 Mechanismus zum parallelen Halten einer Fläche und Apparat zur Verwendung eines solchen Mechanismus

Country Status (5)

Country Link
US (1) US5554851A (de)
EP (1) EP0534406B1 (de)
JP (1) JP3184619B2 (de)
AT (1) ATE151523T1 (de)
DE (1) DE69218866T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5658698A (en) * 1994-01-31 1997-08-19 Canon Kabushiki Kaisha Microstructure, process for manufacturing thereof and devices incorporating the same
JP3192887B2 (ja) * 1994-09-21 2001-07-30 キヤノン株式会社 プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置
JP3182301B2 (ja) * 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
US5949892A (en) * 1995-12-07 1999-09-07 Advanced Micro Devices, Inc. Method of and apparatus for dynamically controlling operating characteristics of a microphone
JPH09293283A (ja) * 1996-04-25 1997-11-11 Hewlett Packard Co <Hp> プローブ装置およびその製造方法、ならびにメディア移動型メモリ装置
JPH10312592A (ja) * 1997-05-13 1998-11-24 Canon Inc 情報処理装置および情報処理方法
US5963367A (en) * 1997-09-23 1999-10-05 Lucent Technologies, Inc. Micromechanical xyz stage for use with optical elements
US6215222B1 (en) * 1999-03-30 2001-04-10 Agilent Technologies, Inc. Optical cross-connect switch using electrostatic surface actuators
WO2001077001A2 (en) * 2000-04-11 2001-10-18 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform
WO2002052894A1 (en) * 2000-12-22 2002-07-04 Brüel & Kjær Sound & Vibration Measurement A/S A micromachined capacitive transducer
US6831765B2 (en) 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
JP4036643B2 (ja) 2001-12-21 2008-01-23 オリンパス株式会社 光偏向器及び光偏向器アレイ
US6717325B2 (en) 2002-03-06 2004-04-06 Glimmerglass Networks, Inc. Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
JP4025990B2 (ja) * 2002-09-26 2007-12-26 セイコーエプソン株式会社 ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
JP5027984B2 (ja) * 2003-03-28 2012-09-19 キヤノン株式会社 揺動体を用いた電位測定装置、電位測定方法、及び画像形成装置
JP2004301554A (ja) * 2003-03-28 2004-10-28 Canon Inc 電位測定装置及び画像形成装置
FR2868411B1 (fr) * 2004-04-01 2006-06-16 Commissariat Energie Atomique Membrane souple comportant des entailles
FR2869027B1 (fr) * 2004-04-15 2006-07-14 Commissariat Energie Atomique Systeme d'enregistrement comportant une couche memoire et un reseau de micro-pointes
JP2006317358A (ja) * 2005-05-16 2006-11-24 Canon Inc 電位測定装置、およびそれを用いた画像形成装置
US7382137B2 (en) * 2005-05-27 2008-06-03 Canon Kabushiki Kaisha Potential measuring apparatus
JP5188024B2 (ja) * 2006-02-09 2013-04-24 キヤノン株式会社 揺動体装置、電位測定装置、及び光偏向装置
KR101982506B1 (ko) * 2017-11-17 2019-09-10 인하대학교 산학협력단 평탄도 조절장치

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
DE3679319D1 (de) * 1986-05-27 1991-06-20 Ibm Speichereinheit mit direktem zugriff.
US4922756A (en) * 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
EP0262253A1 (de) * 1986-10-03 1988-04-06 International Business Machines Corporation Mikromechanische Fühlervorrichtung für atomare Kräfte
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
EP0363550B1 (de) * 1988-10-14 1994-08-03 International Business Machines Corporation Abstandsgesteuerter Tunneleffektwandler und den Wandler verwendende Speichereinheit mit direktem Zugriff
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
GB8826457D0 (en) * 1988-11-11 1988-12-14 Ici Plc Thermal transfer receiver
US5075548A (en) * 1989-07-17 1991-12-24 Olympus Optical Co., Ltd. Tunnel current probe moving mechanism having parallel cantilevers
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
DE69126765T2 (de) * 1990-11-20 1998-01-02 Canon Kk Neigungswinkelbestimmungsverfahren sowie Informationsbestimmungsschreibvorrichtung dafür
DE69023347T2 (de) * 1990-12-21 1996-05-30 Ibm Integriertes Rastertunnelmikroskop mit pneumatischer und elektrostatischer Steuerung und Verfahren zum Herstellen desselben.

Also Published As

Publication number Publication date
EP0534406B1 (de) 1997-04-09
EP0534406A1 (de) 1993-03-31
DE69218866D1 (de) 1997-05-15
ATE151523T1 (de) 1997-04-15
JPH05225620A (ja) 1993-09-03
JP3184619B2 (ja) 2001-07-09
US5554851A (en) 1996-09-10

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Free format text: HIRAI, YUTAKA, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP TAKAMATSU, OSAMU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP HATANAKA, KATSUNORI,C/OCANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP NAKAYAMA, MASARU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP NOSE, HIROYASU,C/O CANON KABUSHIKI KAISHA,OHTA-KU, TOKYO, JP YAGI, TAKAYUKI,C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP SHIMADA, YASUHIRO, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP

Free format text: HIRAI, YUTAKA, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP TAKAMATSU, OSAMU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP HATANAKA, KATSUNORI,C/OCANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP NAKAYAMA, MASARU, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP NOSE, HIROYASU,C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP YAGI, TAKAYUKI,C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP SHIMADA, YASUHIRO,C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN