DE69223251D1 - Elektrisch leitende, lichtdämpfende antireflektierende beschichtung - Google Patents

Elektrisch leitende, lichtdämpfende antireflektierende beschichtung

Info

Publication number
DE69223251D1
DE69223251D1 DE69223251T DE69223251T DE69223251D1 DE 69223251 D1 DE69223251 D1 DE 69223251D1 DE 69223251 T DE69223251 T DE 69223251T DE 69223251 T DE69223251 T DE 69223251T DE 69223251 D1 DE69223251 D1 DE 69223251D1
Authority
DE
Germany
Prior art keywords
light
damping
electrically conductive
reflective coating
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69223251T
Other languages
English (en)
Other versions
DE69223251T2 (de
Inventor
Erik Bjornard
Debra Steffenhagen
Russell Austin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viratec Thin Films Inc
Original Assignee
Viratec Thin Films Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Viratec Thin Films Inc filed Critical Viratec Thin Films Inc
Publication of DE69223251D1 publication Critical patent/DE69223251D1/de
Application granted granted Critical
Publication of DE69223251T2 publication Critical patent/DE69223251T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
DE69223251T 1991-09-03 1992-08-28 Elektrisch leitende, lichtdämpfende antireflektierende beschichtung Expired - Lifetime DE69223251T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/753,714 US5407733A (en) 1990-08-10 1991-09-03 Electrically-conductive, light-attenuating antireflection coating
PCT/US1992/007150 WO1993004993A1 (en) 1991-09-03 1992-08-28 An electrically-conductive, light-attenuating antireflection coating

Publications (2)

Publication Number Publication Date
DE69223251D1 true DE69223251D1 (de) 1998-01-02
DE69223251T2 DE69223251T2 (de) 1998-05-28

Family

ID=25031824

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69223251T Expired - Lifetime DE69223251T2 (de) 1991-09-03 1992-08-28 Elektrisch leitende, lichtdämpfende antireflektierende beschichtung

Country Status (8)

Country Link
US (1) US5407733A (de)
EP (1) EP0602153B1 (de)
JP (1) JP3444880B2 (de)
AT (1) ATE160333T1 (de)
CA (1) CA2116855C (de)
DE (1) DE69223251T2 (de)
DK (1) DK0602153T3 (de)
WO (1) WO1993004993A1 (de)

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US6368470B1 (en) * 1999-12-29 2002-04-09 Southwall Technologies, Inc. Hydrogenating a layer of an antireflection coating
WO2001057579A2 (en) * 2000-02-02 2001-08-09 3M Innovative Properties Company Triple layer anti-reflective coating for a touch screen
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US6337771B1 (en) * 2000-05-03 2002-01-08 Applied Vacuum Coating Technologies Co., Ltd. Anti-reflection high conductivity multi-layer coating on CRT surface made by vacuum sputtering and wet coating
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US6890659B2 (en) * 2003-04-25 2005-05-10 Guardian Industries Corp. Heat treatable coated article with niobium zirconium inclusive IR reflecting layer and method of making same
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US7662464B2 (en) * 2007-04-04 2010-02-16 Innovation & Infinity Global Corp. Anti-reflection coating with low resistivity function and transparent conductive coating as outermost layer
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US8986921B2 (en) 2013-01-15 2015-03-24 International Business Machines Corporation Lithographic material stack including a metal-compound hard mask
US8853095B1 (en) 2013-05-30 2014-10-07 International Business Machines Corporation Hybrid hard mask for damascene and dual damascene
JP5983596B2 (ja) 2013-12-26 2016-08-31 ウシオ電機株式会社 紫外線偏光光照射方法及び光配向層付き基板の製造方法
JP6346161B2 (ja) * 2015-12-15 2018-06-20 株式会社東芝 パターン形成方法
US10328645B2 (en) 2015-12-17 2019-06-25 Novartis Ag Reusable lens molds and methods of use thereof
EP3203274B1 (de) * 2016-02-04 2023-04-05 Essilor International Ophthalmische linse mit einer dünnen antireflexbeschichtung mit sehr geringer reflexion im sichtbaren
JP6707966B2 (ja) 2016-04-18 2020-06-10 日本電気硝子株式会社 遮光プレート
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Also Published As

Publication number Publication date
JPH06510382A (ja) 1994-11-17
EP0602153A4 (de) 1994-12-14
ATE160333T1 (de) 1997-12-15
CA2116855A1 (en) 1993-03-18
JP3444880B2 (ja) 2003-09-08
CA2116855C (en) 2004-07-20
EP0602153B1 (de) 1997-11-19
WO1993004993A1 (en) 1993-03-18
DK0602153T3 (da) 1998-07-27
US5407733A (en) 1995-04-18
DE69223251T2 (de) 1998-05-28
EP0602153A1 (de) 1994-06-22

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