DE69223796T2 - Mikromechanischer drehgeschwindigkeitssensor nach dem stimmgabel-prinzip - Google Patents
Mikromechanischer drehgeschwindigkeitssensor nach dem stimmgabel-prinzipInfo
- Publication number
- DE69223796T2 DE69223796T2 DE69223796T DE69223796T DE69223796T2 DE 69223796 T2 DE69223796 T2 DE 69223796T2 DE 69223796 T DE69223796 T DE 69223796T DE 69223796 T DE69223796 T DE 69223796T DE 69223796 T2 DE69223796 T2 DE 69223796T2
- Authority
- DE
- Germany
- Prior art keywords
- accordance
- speed sensor
- tuning fork
- fork principle
- micromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75770691A | 1991-09-11 | 1991-09-11 | |
| PCT/US1992/007685 WO1993005401A1 (en) | 1991-09-11 | 1992-09-11 | Micromechanical tuning fork angular rate sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69223796D1 DE69223796D1 (de) | 1998-02-05 |
| DE69223796T2 true DE69223796T2 (de) | 1998-05-28 |
Family
ID=25048880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69223796T Expired - Lifetime DE69223796T2 (de) | 1991-09-11 | 1992-09-11 | Mikromechanischer drehgeschwindigkeitssensor nach dem stimmgabel-prinzip |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US5331852A (de) |
| EP (1) | EP0604519B1 (de) |
| JP (1) | JPH07502592A (de) |
| DE (1) | DE69223796T2 (de) |
| WO (1) | WO1993005401A1 (de) |
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-
1991
- 1991-12-16 US US07/807,726 patent/US5331852A/en not_active Expired - Lifetime
-
1992
- 1992-09-11 DE DE69223796T patent/DE69223796T2/de not_active Expired - Lifetime
- 1992-09-11 EP EP92919849A patent/EP0604519B1/de not_active Expired - Lifetime
- 1992-09-11 WO PCT/US1992/007685 patent/WO1993005401A1/en active IP Right Grant
- 1992-09-11 JP JP5505506A patent/JPH07502592A/ja active Pending
-
1994
- 1994-03-14 US US08/212,320 patent/US5505084A/en not_active Expired - Lifetime
-
1995
- 1995-06-07 US US08/481,898 patent/US5796001A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0604519A4 (en) | 1996-04-24 |
| US5331852A (en) | 1994-07-26 |
| US5505084A (en) | 1996-04-09 |
| WO1993005401A1 (en) | 1993-03-18 |
| US5796001A (en) | 1998-08-18 |
| JPH07502592A (ja) | 1995-03-16 |
| DE69223796D1 (de) | 1998-02-05 |
| EP0604519B1 (de) | 1997-12-29 |
| EP0604519A1 (de) | 1994-07-06 |
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