DE69224009D1 - Verfahren zur Herstellung einer Halbleiterstruktur mit MOS- und Bipolar-Bauteilen - Google Patents

Verfahren zur Herstellung einer Halbleiterstruktur mit MOS- und Bipolar-Bauteilen

Info

Publication number
DE69224009D1
DE69224009D1 DE69224009T DE69224009T DE69224009D1 DE 69224009 D1 DE69224009 D1 DE 69224009D1 DE 69224009 T DE69224009 T DE 69224009T DE 69224009 T DE69224009 T DE 69224009T DE 69224009 D1 DE69224009 D1 DE 69224009D1
Authority
DE
Germany
Prior art keywords
mos
manufacturing
semiconductor structure
bipolar components
bipolar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69224009T
Other languages
English (en)
Other versions
DE69224009T2 (de
Inventor
James A Kirchgessner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of DE69224009D1 publication Critical patent/DE69224009D1/de
Application granted granted Critical
Publication of DE69224009T2 publication Critical patent/DE69224009T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8248—Combination of bipolar and field-effect technology
    • H01L21/8249—Bipolar and MOS technology
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/009—Bi-MOS
DE69224009T 1991-06-10 1992-06-09 Verfahren zur Herstellung einer Halbleiterstruktur mit MOS- und Bipolar-Bauteilen Expired - Fee Related DE69224009T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/712,776 US5134082A (en) 1991-06-10 1991-06-10 Method of fabricating a semiconductor structure having MOS and bipolar devices

Publications (2)

Publication Number Publication Date
DE69224009D1 true DE69224009D1 (de) 1998-02-19
DE69224009T2 DE69224009T2 (de) 1998-07-09

Family

ID=24863520

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69224009T Expired - Fee Related DE69224009T2 (de) 1991-06-10 1992-06-09 Verfahren zur Herstellung einer Halbleiterstruktur mit MOS- und Bipolar-Bauteilen

Country Status (5)

Country Link
US (1) US5134082A (de)
EP (1) EP0518611B1 (de)
JP (1) JP3200169B2 (de)
KR (1) KR100243954B1 (de)
DE (1) DE69224009T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227317A (en) * 1989-04-21 1993-07-13 Hitachi, Ltd. Method of manufacturing semiconductor integrated circuit bipolar transistor device
JPH0828424B2 (ja) * 1990-11-06 1996-03-21 三菱電機株式会社 半導体装置およびその製造方法
JPH05308128A (ja) * 1992-04-30 1993-11-19 Fuji Electric Co Ltd 半導体装置およびその製造方法
US5294558A (en) * 1993-06-01 1994-03-15 International Business Machines Corporation Method of making double-self-aligned bipolar transistor structure
US5405790A (en) * 1993-11-23 1995-04-11 Motorola, Inc. Method of forming a semiconductor structure having MOS, bipolar, and varactor devices
US5618688A (en) * 1994-02-22 1997-04-08 Motorola, Inc. Method of forming a monolithic semiconductor integrated circuit having an N-channel JFET
JP3256084B2 (ja) * 1994-05-26 2002-02-12 株式会社半導体エネルギー研究所 半導体集積回路およびその作製方法
US5465006A (en) * 1994-07-15 1995-11-07 Hewlett-Packard Company Bipolar stripe transistor structure
US6093591A (en) * 1997-04-08 2000-07-25 Matsushita Electronics Corporation Method of fabricating a semiconductor integrated circuit device
US6271070B2 (en) * 1997-12-25 2001-08-07 Matsushita Electronics Corporation Method of manufacturing semiconductor device
KR100285701B1 (ko) * 1998-06-29 2001-04-02 윤종용 트렌치격리의제조방법및그구조
US6611044B2 (en) 1998-09-11 2003-08-26 Koninklijke Philips Electronics N.V. Lateral bipolar transistor and method of making same
KR20000023299A (ko) * 1998-09-22 2000-04-25 다니엘 이. 박서 게이트 산화물 및 비정질 실리콘 전극을 원 위치에데포지트하는 방법 및 그에 해당하는 구조
WO2003017340A2 (en) * 2001-08-15 2003-02-27 Koninklijke Philips Electronics N.V. A method for concurrent fabrication of a double polysilicon bipolar transistor and a base polysilicon resistor
US7612387B2 (en) * 2005-12-16 2009-11-03 Stmicroelectronics S.A. Thyristor optimized for a sinusoidal HF control
KR100793607B1 (ko) * 2006-06-27 2008-01-10 매그나칩 반도체 유한회사 에피텍셜 실리콘 웨이퍼 및 그 제조방법

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4707456A (en) * 1985-09-18 1987-11-17 Advanced Micro Devices, Inc. Method of making a planar structure containing MOS and bipolar transistors
US4808548A (en) * 1985-09-18 1989-02-28 Advanced Micro Devices, Inc. Method of making bipolar and MOS devices on same integrated circuit substrate
DE3776454D1 (de) * 1986-08-13 1992-03-12 Siemens Ag Integrierte bipolar- und komplementaere mos-transistoren auf einem gemeinsamen substrat enthaltende schaltung und verfahren zu ihrer herstellung.
JPS6350070A (ja) * 1986-08-19 1988-03-02 Matsushita Electronics Corp 縦型ｍｏｓ電界効果トランジスタ
US4837176A (en) * 1987-01-30 1989-06-06 Motorola Inc. Integrated circuit structures having polycrystalline electrode contacts and process
JPS63239856A (ja) * 1987-03-27 1988-10-05 Hitachi Ltd 半導体集積回路装置及びその製造方法
US4902640A (en) * 1987-04-17 1990-02-20 Tektronix, Inc. High speed double polycide bipolar/CMOS integrated circuit process
US4803175A (en) * 1987-09-14 1989-02-07 Motorola Inc. Method of fabricating a bipolar semiconductor device with silicide contacts
US4830973A (en) * 1987-10-06 1989-05-16 Motorola, Inc. Merged complementary bipolar and MOS means and method
JPH01202855A (ja) * 1988-02-09 1989-08-15 Matsushita Electron Corp 半導体集積回路の製造方法
US5008210A (en) * 1989-02-07 1991-04-16 Hewlett-Packard Company Process of making a bipolar transistor with a trench-isolated emitter
JPH02246264A (ja) * 1989-03-20 1990-10-02 Hitachi Ltd 半導体装置およびその製造方法
JPH0330334A (ja) * 1989-06-28 1991-02-08 Toshiba Corp バイポーラトランジスタの製造方法
US4902639A (en) * 1989-08-03 1990-02-20 Motorola, Inc. Process for making BiCMOS integrated circuit having a shallow trench bipolar transistor with vertical base contacts
US5079177A (en) * 1989-09-19 1992-01-07 National Semiconductor Corporation Process for fabricating high performance bicmos circuits
US4960726A (en) * 1989-10-19 1990-10-02 International Business Machines Corporation BiCMOS process
US5037768A (en) * 1990-02-12 1991-08-06 Motorola, Inc. Method of fabricating a double polysilicon bipolar transistor which is compatible with a method of fabricating CMOS transistors
US4987089A (en) * 1990-07-23 1991-01-22 Micron Technology, Inc. BiCMOS process and process for forming bipolar transistors on wafers also containing FETs

Also Published As

Publication number Publication date
KR930020663A (ko) 1993-10-20
EP0518611A3 (en) 1993-11-18
EP0518611B1 (de) 1998-01-14
US5134082A (en) 1992-07-28
JPH05198752A (ja) 1993-08-06
KR100243954B1 (ko) 2000-02-01
EP0518611A2 (de) 1992-12-16
DE69224009T2 (de) 1998-07-09
JP3200169B2 (ja) 2001-08-20

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: SCHUMACHER & WILLSAU, PATENTANWALTSSOZIETAET, 80335 MUENCHEN

8339 Ceased/non-payment of the annual fee