DE69224139D1 - Laserfleck-Abtaster mit räumlichen Lichtmodulator - Google Patents

Laserfleck-Abtaster mit räumlichen Lichtmodulator

Info

Publication number
DE69224139D1
DE69224139D1 DE69224139T DE69224139T DE69224139D1 DE 69224139 D1 DE69224139 D1 DE 69224139D1 DE 69224139 T DE69224139 T DE 69224139T DE 69224139 T DE69224139 T DE 69224139T DE 69224139 D1 DE69224139 D1 DE 69224139D1
Authority
DE
Germany
Prior art keywords
light modulator
spatial light
laser spot
spot scanner
scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69224139T
Other languages
English (en)
Other versions
DE69224139T2 (de
Inventor
Jeffrey B Sampsell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69224139D1 publication Critical patent/DE69224139D1/de
Application granted granted Critical
Publication of DE69224139T2 publication Critical patent/DE69224139T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554Moving beam scanning
    • G06K7/10594Beam path
    • G06K7/10683Arrangement of fixed elements
    • G06K7/10702Particularities of propagating elements, e.g. lenses, mirrors
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554Moving beam scanning
    • G06K7/10594Beam path
DE69224139T 1991-10-31 1992-10-13 Laserfleck-Abtaster mit räumlichen Lichtmodulator Expired - Fee Related DE69224139T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/786,162 US5563398A (en) 1991-10-31 1991-10-31 Spatial light modulator scanning system

Publications (2)

Publication Number Publication Date
DE69224139D1 true DE69224139D1 (de) 1998-02-26
DE69224139T2 DE69224139T2 (de) 1998-06-25

Family

ID=25137769

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69224139T Expired - Fee Related DE69224139T2 (de) 1991-10-31 1992-10-13 Laserfleck-Abtaster mit räumlichen Lichtmodulator

Country Status (7)

Country Link
US (1) US5563398A (de)
EP (1) EP0539794B1 (de)
JP (1) JP3164442B2 (de)
KR (1) KR100247145B1 (de)
CA (1) CA2079499C (de)
DE (1) DE69224139T2 (de)
TW (1) TW228576B (de)

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US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
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Also Published As

Publication number Publication date
KR100247145B1 (ko) 2000-03-15
EP0539794B1 (de) 1998-01-21
DE69224139T2 (de) 1998-06-25
KR930008668A (ko) 1993-05-21
JPH05274459A (ja) 1993-10-22
US5563398A (en) 1996-10-08
EP0539794A1 (de) 1993-05-05
CA2079499A1 (en) 1993-05-01
CA2079499C (en) 2003-09-23
TW228576B (de) 1994-08-21
JP3164442B2 (ja) 2001-05-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee