DE69229702D1 - Geräte zur Energieanalyse von Ladungsträgerpartikeln - Google Patents

Geräte zur Energieanalyse von Ladungsträgerpartikeln

Info

Publication number
DE69229702D1
DE69229702D1 DE69229702T DE69229702T DE69229702D1 DE 69229702 D1 DE69229702 D1 DE 69229702D1 DE 69229702 T DE69229702 T DE 69229702T DE 69229702 T DE69229702 T DE 69229702T DE 69229702 D1 DE69229702 D1 DE 69229702D1
Authority
DE
Germany
Prior art keywords
devices
energy analysis
charge particle
particle
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69229702T
Other languages
English (en)
Other versions
DE69229702T2 (de
Inventor
Andrew Roderick Walker
Simon Charles Page
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kratos Analytical Ltd
Original Assignee
Kratos Analytical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kratos Analytical Ltd filed Critical Kratos Analytical Ltd
Publication of DE69229702D1 publication Critical patent/DE69229702D1/de
Application granted granted Critical
Publication of DE69229702T2 publication Critical patent/DE69229702T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
DE69229702T 1991-10-18 1992-10-12 Geräte zur Energieanalyse von Ladungsträgerpartikeln Expired - Lifetime DE69229702T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB919122161A GB9122161D0 (en) 1991-10-18 1991-10-18 Charged particle energy analysers

Publications (2)

Publication Number Publication Date
DE69229702D1 true DE69229702D1 (de) 1999-09-09
DE69229702T2 DE69229702T2 (de) 1999-12-02

Family

ID=10703168

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69229702T Expired - Lifetime DE69229702T2 (de) 1991-10-18 1992-10-12 Geräte zur Energieanalyse von Ladungsträgerpartikeln

Country Status (5)

Country Link
US (1) US5286974A (de)
EP (1) EP0537961B1 (de)
JP (1) JP3399989B2 (de)
DE (1) DE69229702T2 (de)
GB (1) GB9122161D0 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9306374D0 (en) * 1993-03-26 1993-05-19 Fisons Plc Charged-particle analyser
US6317514B1 (en) 1998-09-09 2001-11-13 Applied Materials, Inc. Method and apparatus for inspection of patterned semiconductor wafers
US6979819B2 (en) 2001-11-30 2005-12-27 Kla-Tencor Technologies Corporation Photoelectron emission microscope for wafer and reticle inspection
GB0225791D0 (en) * 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
GB2411763B (en) 2004-03-05 2009-02-18 Thermo Electron Corp Flood gun for charge neutralization
JP4873441B2 (ja) * 2005-03-01 2012-02-08 財団法人電力中央研究所 高エネルギー粒子発生方法及び高エネルギー粒子発生装置
JP4828162B2 (ja) * 2005-05-31 2011-11-30 株式会社日立ハイテクノロジーズ 電子顕微鏡応用装置および試料検査方法
JP2006349384A (ja) * 2005-06-13 2006-12-28 National Institute For Materials Science 絶縁物試料の帯電又は電位歪みを抑制した放射電子顕微鏡装置及び試料観察方法
PL2823504T3 (pl) * 2012-03-06 2019-03-29 Scienta Omicron Ab Układ analizatora do spektrometru cząstek
JP6667741B1 (ja) * 2019-06-11 2020-03-18 三菱電機株式会社 試料ホルダー及びｘ線光電子分光装置
GB2606935B (en) * 2019-11-07 2023-04-26 Vg Systems Ltd Charged particle detection for spectroscopic techniques
CN111524678A (zh) * 2020-04-01 2020-08-11 张丽 一种用于电子和质子能谱测量的磁铁结构及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3665185A (en) * 1970-10-19 1972-05-23 Minnesota Mining & Mfg Ion scattering spectrometer with neutralization
US4146787A (en) * 1977-02-17 1979-03-27 Extranuclear Laboratories, Inc. Methods and apparatus for energy analysis and energy filtering of secondary ions and electrons
GB8609740D0 (en) * 1986-04-22 1986-05-29 Spectros Ltd Charged particle energy analyser
FR2602051B1 (fr) * 1986-07-23 1988-09-16 Cameca Procede et dispositif pour la decharge d'echantillons isolants lors d'une analyse ionique
EP0254128A3 (de) * 1986-07-25 1990-01-03 Siemens Aktiengesellschaft Verfahren und Anordnung zur aufladungsfreien Untersuchung einer Probe
EP0417354A1 (de) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Elektronenstrahlgerät mit Ausfladungskompensierung
GB2244369A (en) * 1990-05-22 1991-11-27 Kratos Analytical Ltd Charged particle energy analysers

Also Published As

Publication number Publication date
JPH07220670A (ja) 1995-08-18
US5286974A (en) 1994-02-15
GB9122161D0 (en) 1991-11-27
EP0537961B1 (de) 1999-08-04
EP0537961A1 (de) 1993-04-21
DE69229702T2 (de) 1999-12-02
JP3399989B2 (ja) 2003-04-28

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Legal Events

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