DE69230515T2 - Optische Baugruppe zur Justierung eines aktiven optischen Bauelements und einer optischen Faser und Verfahren zur Herstellung der Baugruppe - Google Patents
Optische Baugruppe zur Justierung eines aktiven optischen Bauelements und einer optischen Faser und Verfahren zur Herstellung der BaugruppeInfo
- Publication number
- DE69230515T2 DE69230515T2 DE69230515T DE69230515T DE69230515T2 DE 69230515 T2 DE69230515 T2 DE 69230515T2 DE 69230515 T DE69230515 T DE 69230515T DE 69230515 T DE69230515 T DE 69230515T DE 69230515 T2 DE69230515 T2 DE 69230515T2
- Authority
- DE
- Germany
- Prior art keywords
- assembly
- optical
- adjusting
- producing
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000013307 optical fiber Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
- G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
- G02B6/4231—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment with intermediate elements, e.g. rods and balls, between the elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/756,263 US5179609A (en) | 1991-08-30 | 1991-08-30 | Optical assembly including fiber attachment |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69230515D1 DE69230515D1 (de) | 2000-02-10 |
DE69230515T2 true DE69230515T2 (de) | 2000-07-27 |
Family
ID=25042714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69230515T Expired - Fee Related DE69230515T2 (de) | 1991-08-30 | 1992-08-20 | Optische Baugruppe zur Justierung eines aktiven optischen Bauelements und einer optischen Faser und Verfahren zur Herstellung der Baugruppe |
Country Status (4)
Country | Link |
---|---|
US (1) | US5179609A (de) |
EP (1) | EP0529947B1 (de) |
JP (1) | JPH07117629B2 (de) |
DE (1) | DE69230515T2 (de) |
Families Citing this family (91)
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DE3822222A1 (de) * | 1988-07-01 | 1990-01-04 | Bosch Gmbh Robert | Einrichtung fuer head-up-displays an kraftfahrzeugen |
ES2136063T3 (es) * | 1991-11-25 | 1999-11-16 | Corning Inc | Metodo para fabricar y someter a ensayo componentes opticos integrados. |
US5259054A (en) * | 1992-01-10 | 1993-11-02 | At&T Bell Laboratories | Self-aligned optical subassembly |
GB2271682B (en) * | 1992-10-13 | 1997-03-26 | Marconi Gec Ltd | Improvements in or relating to connectors |
US5337398A (en) * | 1992-11-30 | 1994-08-09 | At&T Bell Laboratories | Single in-line optical package |
DE4300652C1 (de) * | 1993-01-13 | 1994-03-31 | Bosch Gmbh Robert | Verfahren zur Herstellung einer hybrid integrierten optischen Schaltung und Vorrichtung zur Emission von Lichtwellen |
DE4320194A1 (de) * | 1993-06-18 | 1994-12-22 | Sel Alcatel Ag | Vorrichtung zur justagefreien Ankopplung einer Mehrzahl von Lichtwellenleitern an ein Laserarray |
US5391269A (en) * | 1993-06-29 | 1995-02-21 | At&T Corp. | Method of making an article comprising a silicon body |
US5559914A (en) * | 1993-10-19 | 1996-09-24 | Matsushita Electric Industrial Co., Ltd. | Components for optical circuits and method of manufacturing the same |
DE4342844C1 (de) * | 1993-12-10 | 1995-06-01 | Siemens Ag | Elektrooptisches Modul |
US5902997A (en) * | 1994-05-20 | 1999-05-11 | Siemens Aktiengesellschaft | Device for spacing at least one lens from an optoelectronic component |
DE4418477C1 (de) * | 1994-05-20 | 1995-11-16 | Siemens Ag | Optoelektronische Baugruppe |
US5485538A (en) * | 1994-06-30 | 1996-01-16 | The Whitaker Corporation | Bidirectional wavelength division multiplex transceiver module |
US5487124A (en) * | 1994-06-30 | 1996-01-23 | The Whitaker Corporation | Bidirectional wavelength division multiplex transceiver module |
DE4428126C2 (de) * | 1994-08-09 | 1996-11-07 | Daimler Benz Ag | Optoelektronisches Bauteil |
JP3085440B2 (ja) * | 1994-09-12 | 2000-09-11 | 株式会社日立製作所 | 光アッセンブリの製造方法 |
US5472886A (en) * | 1994-12-27 | 1995-12-05 | At&T Corp. | Structure of and method for manufacturing an LED |
JP3730664B2 (ja) * | 1995-06-30 | 2006-01-05 | ザ ウィタカー コーポレーション | 単結晶材料を使用する受動位置合わせフレーム |
US5683118A (en) * | 1996-02-12 | 1997-11-04 | Aesop, Inc. | Kinematic coupling fluid couplings and method |
DE19647685C1 (de) * | 1996-11-07 | 1998-03-12 | Siemens Ag | Koppelanordnung |
US5815616A (en) * | 1997-01-02 | 1998-09-29 | Lucent Technologies Inc. | Optical packaging assembly for reflective devices |
DE19700549A1 (de) * | 1997-01-10 | 1998-07-16 | Alsthom Cge Alcatel | Vorrichtung zur präzisen Anordnung von mikrooptischen Bauteilen auf einem Träger |
US5857049A (en) * | 1997-05-05 | 1999-01-05 | Lucent Technologies, Inc., | Precision alignment of optoelectronic devices |
US5896481A (en) * | 1997-05-30 | 1999-04-20 | The Boeing Company | Optical subassembly with a groove for aligning an optical device with an optical fiber |
GB2363473B (en) * | 1997-07-14 | 2002-03-20 | Mitel Semiconductor Ab | "Method of forming optical source/receiver pair" |
US5913002A (en) * | 1997-12-31 | 1999-06-15 | The Whitaker Corporation | Optical coupling device for passive alignment of optoelectronic devices and fibers |
GB2333854B (en) * | 1998-01-31 | 2002-07-31 | Mitel Semiconductor Ab | System and method for aligning optical components |
US5981975A (en) * | 1998-02-27 | 1999-11-09 | The Whitaker Corporation | On-chip alignment fiducials for surface emitting devices |
US6085007A (en) * | 1998-02-27 | 2000-07-04 | Jiang; Ching-Long | Passive alignment member for vertical surface emitting/detecting device |
JPH11344646A (ja) * | 1998-04-02 | 1999-12-14 | Oki Electric Ind Co Ltd | 光モジュ―ル、光ファイバ接続用プラグ、および、これらを備えた光結合器 |
DE19843188C2 (de) * | 1998-09-14 | 2000-07-13 | Siemens Ag | Mehrkanalige optische Kopplungseinrichtung |
DE19861162A1 (de) | 1998-11-06 | 2000-06-29 | Harting Elektrooptische Bauteile Gmbh & Co Kg | Verfahren zur Herstellung einer Leiterplatte sowie Leiterplatte |
DE19851265C2 (de) * | 1998-11-06 | 2001-06-21 | Harting Elektrooptische Bauteile Gmbh & Co Kg | Elektro-optische Baugruppe sowie Verfahren zur Herstellung einer solchen Baugruppe |
US7208725B2 (en) * | 1998-11-25 | 2007-04-24 | Rohm And Haas Electronic Materials Llc | Optoelectronic component with encapsulant |
US20030034438A1 (en) * | 1998-11-25 | 2003-02-20 | Sherrer David W. | Optoelectronic device-optical fiber connector having micromachined pit for passive alignment of the optoelectronic device |
JP3824797B2 (ja) * | 1999-01-08 | 2006-09-20 | 古河電気工業株式会社 | 受発光素子モジュール |
US6289031B1 (en) * | 1999-05-14 | 2001-09-11 | Raytheon Company | Integrated lightweight optical bench and miniaturized laser transmitter using same |
US6258403B1 (en) | 1999-09-16 | 2001-07-10 | Lucent Technologies, Inc. | Method for coating facet edges of an optoelectrical device |
US6811853B1 (en) | 2000-03-06 | 2004-11-02 | Shipley Company, L.L.C. | Single mask lithographic process for patterning multiple types of surface features |
US6595700B2 (en) * | 2000-04-04 | 2003-07-22 | Shipley Company, L.L.C. | Optoelectronic packages having insulation layers |
US6826324B2 (en) * | 2000-04-13 | 2004-11-30 | Shipley Company, L.L.C. | Optical waveguide switch |
US6798933B2 (en) * | 2000-04-14 | 2004-09-28 | Shipley Company, L.L.C. | Fiber optic array switch |
US6842552B1 (en) | 2000-04-13 | 2005-01-11 | Shipley Company, L.L.C. | Optical waveguide switch |
US6832016B2 (en) * | 2000-04-13 | 2004-12-14 | Shipley Company, L.L.C. | Fiber array switch having micromachined front face with roller balls |
US6847764B2 (en) * | 2000-04-14 | 2005-01-25 | Shipley Company, L.L.C. | Optical interconnect having alignment depression |
US6627096B2 (en) | 2000-05-02 | 2003-09-30 | Shipley Company, L.L.C. | Single mask technique for making positive and negative micromachined features on a substrate |
US6633691B2 (en) * | 2000-05-02 | 2003-10-14 | Shipley Company, L.L.C. | Optical waveguide switch having stepped waveguide holding member |
US6477303B1 (en) | 2000-05-15 | 2002-11-05 | Litton Systems, Inc. | MEMS optical backplane interface |
US6748131B2 (en) * | 2000-05-19 | 2004-06-08 | Shipley Company, L.L.C. | Optical waveguide devices and methods of fabricating the same |
US6741778B1 (en) | 2000-05-23 | 2004-05-25 | International Business Machines Corporation | Optical device with chip level precision alignment |
US7086134B2 (en) * | 2000-08-07 | 2006-08-08 | Shipley Company, L.L.C. | Alignment apparatus and method for aligning stacked devices |
US6870981B2 (en) | 2000-08-24 | 2005-03-22 | Shipley Company, L.L.C. | Optical switch and method for making |
US6853764B2 (en) * | 2000-08-28 | 2005-02-08 | Shipley Company, L.L.C. | Optical switch assembly and method for making |
US6526205B1 (en) * | 2000-10-13 | 2003-02-25 | Agilent Technologies, Inc. | Method and apparatus for the passive alignment of optical components |
US6799897B2 (en) | 2000-11-16 | 2004-10-05 | Shipley Company, L.L.C. | Optical connector system |
US6898029B2 (en) * | 2000-11-16 | 2005-05-24 | Shipley Company, L.L.C. | Optical bench with alignment subassembly |
DE60021770T2 (de) * | 2000-12-11 | 2006-04-20 | Mitsubishi Denki K.K. | Messkopf |
US6810162B2 (en) * | 2000-12-20 | 2004-10-26 | Shipley Company, L.L.C. | Optical switch assembly with flex plate and method for making |
US20020110328A1 (en) * | 2001-02-14 | 2002-08-15 | Bischel William K. | Multi-channel laser pump source for optical amplifiers |
US6721479B2 (en) | 2001-03-07 | 2004-04-13 | Zygo Corporation | Fiber collimator |
DE10117018C2 (de) * | 2001-04-05 | 2003-08-07 | Unique M O D E Ag | Optische oder optoelektronische Anordnung |
US6762119B2 (en) | 2001-06-20 | 2004-07-13 | International Bussiness Machines Corporation | Method of preventing solder wetting in an optical device using diffusion of Cr |
DE10134637A1 (de) * | 2001-07-17 | 2003-03-27 | Harting Elektrooptische Bauteile Gmbh & Co Kg | Substrat für eine opto-elektronische Baugruppe |
JP2003084175A (ja) * | 2001-09-14 | 2003-03-19 | Mitsubishi Electric Corp | 光モジュールおよび光モジュールの生産方法 |
US7410304B2 (en) * | 2001-11-08 | 2008-08-12 | Rohm And Haas Electronic Materials Llc | Optical fiber right angle transition |
KR100400081B1 (ko) * | 2001-11-24 | 2003-09-29 | 한국전자통신연구원 | 광전 모듈용 서브마운트 및 이를 이용한 실장 방법 |
JP4166471B2 (ja) * | 2001-12-28 | 2008-10-15 | 三菱電機株式会社 | 光モジュール |
US6728449B2 (en) * | 2002-02-14 | 2004-04-27 | Agilent Technologies, Inc. | Fiber assembly alignment using fiducials |
US20040021214A1 (en) * | 2002-04-16 | 2004-02-05 | Avner Badehi | Electro-optic integrated circuits with connectors and methods for the production thereof |
US6786654B2 (en) * | 2002-08-21 | 2004-09-07 | Hymite A/S | Encapsulated optical fiber end-coupled device |
US7128727B2 (en) * | 2002-09-30 | 2006-10-31 | Flaherty J Christopher | Components and methods for patient infusion device |
US7308166B1 (en) | 2002-10-08 | 2007-12-11 | Kotura, Inc. | Coupling a light sensor array with an optical component |
JP4364594B2 (ja) * | 2003-03-18 | 2009-11-18 | セイコーインスツル株式会社 | 光デバイスおよびその製造方法 |
JP4225179B2 (ja) | 2003-10-17 | 2009-02-18 | 株式会社日立製作所 | 光学素子実装用基板およびその製造方法 |
US7165893B2 (en) * | 2004-09-10 | 2007-01-23 | Hutchinson Technology Incorporated | Multi-fiber optical connect |
US20060108672A1 (en) * | 2004-11-24 | 2006-05-25 | Brennan John M | Die bonded device and method for transistor packages |
JP4744211B2 (ja) * | 2005-07-08 | 2011-08-10 | 独立行政法人産業技術総合研究所 | 光モジュール |
JP4349372B2 (ja) * | 2006-01-25 | 2009-10-21 | ミツミ電機株式会社 | 光モジュール及び光モジュールの製造方法 |
TWI342962B (en) * | 2007-10-12 | 2011-06-01 | Amtran Technology Co Ltd | Optical subassembly of optical semiconductor device module and assembly method thereof |
US8049890B2 (en) * | 2009-02-13 | 2011-11-01 | James Neus | System and method for passive alignment of components in an optical bench |
KR20120123125A (ko) * | 2010-02-23 | 2012-11-07 | 파나소닉 주식회사 | 광 모듈 |
JP5847473B2 (ja) * | 2011-07-21 | 2016-01-20 | シチズンホールディングス株式会社 | 光モジュール |
JP2013125768A (ja) * | 2011-12-13 | 2013-06-24 | Japan Oclaro Inc | はんだ接合デバイス及び受信モジュール |
GB2506408A (en) | 2012-09-28 | 2014-04-02 | Ibm | Aligning optical components with optical waveguides using a cavity and two step structures |
GB2506406A (en) | 2012-09-28 | 2014-04-02 | Ibm | Optical adaptor with horizontal and vertical reference surfaces |
GB2524836A (en) * | 2014-04-04 | 2015-10-07 | Servomex Group Ltd | Attachment and alignment device for optical sources, detectors and analysers, and modular analysis system |
JP6596817B2 (ja) * | 2014-12-04 | 2019-10-30 | 株式会社リコー | 光源デバイス及び光源装置 |
JP6596998B2 (ja) * | 2015-07-08 | 2019-10-30 | 株式会社リコー | 光学装置及び光照射装置 |
GB2583450B (en) | 2019-04-01 | 2023-04-12 | Huber Suhner Polatis Ltd | Method and apparatus for suction alignment |
US11287656B2 (en) | 2019-12-02 | 2022-03-29 | Facebook Technologies, Llc | Aligning a collimator assembly with LED arrays |
KR102219316B1 (ko) * | 2020-06-16 | 2021-02-24 | 주)일선 | 광 정렬 기능이 개선된 광 송수신 장치 및 그 제조방법 |
Family Cites Families (17)
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NL7505629A (nl) * | 1975-05-14 | 1976-11-16 | Philips Nv | Inrichting voor het koppelen van een lichtbron met een optische vezel. |
FR2547661B1 (fr) * | 1983-06-14 | 1986-10-24 | Telecommunications Sa | Procede et dispositif de raccordement d'une fibre optique avec un detecteur photosensible et le procede de mise en oeuvre |
FR2562271B1 (fr) * | 1984-03-29 | 1986-07-18 | Telecommunications Sa | Connecteur d'une fibre optique et d'un photo-element, recepteur ou emetteur, et procede de positionnement de ceux-ci |
CA1255382A (en) * | 1984-08-10 | 1989-06-06 | Masao Kawachi | Hybrid optical integrated circuit with alignment guides |
DE3433717A1 (de) * | 1984-09-14 | 1986-03-27 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum koppeln optischer bauelemente und anordnung zur durchfuehrung des verfahrens |
US4725114A (en) * | 1984-09-28 | 1988-02-16 | American Telephone And Telegraph Company, At&T Bell Laboratories | Optical waveguide lateral alignment arrangement |
JPS61173206A (ja) * | 1985-01-29 | 1986-08-04 | Fujitsu Ltd | 光結合部の固定方法 |
US4779946A (en) * | 1986-02-14 | 1988-10-25 | American Telephone And Telegraph Company, At&T Bell Laboratories | Microminiature optical assembly |
US4702547A (en) * | 1986-07-28 | 1987-10-27 | Tektronix, Inc. | Method for attaching an optical fiber to a substrate to form an optical fiber package |
USH551H (en) * | 1987-06-15 | 1988-12-06 | American Telephone And Telegraph Company | Optical package with improved fiber alignment fixture |
US4890895A (en) * | 1987-11-13 | 1990-01-02 | Kopin Corporation | Optoelectronic interconnections for III-V devices on silicon |
JPH01169417A (ja) * | 1987-12-25 | 1989-07-04 | Sumitomo Electric Ind Ltd | 光ファイバと光学素子の実装構造 |
US4818058B1 (en) * | 1988-03-03 | 1995-04-25 | Bell Telephone Labor Inc | Optical connector. |
US4904036A (en) * | 1988-03-03 | 1990-02-27 | American Telephone And Telegraph Company, At&T Bell Laboratories | Subassemblies for optoelectronic hybrid integrated circuits |
US4945400A (en) * | 1988-03-03 | 1990-07-31 | At&T Bell Laboratories | Subassembly for optoelectronic devices |
US4897711A (en) * | 1988-03-03 | 1990-01-30 | American Telephone And Telegraph Company | Subassembly for optoelectronic devices |
US4995695A (en) * | 1989-08-17 | 1991-02-26 | At&T Bell Laboratories | Optical assembly comprising optical fiber coupling means |
-
1991
- 1991-08-30 US US07/756,263 patent/US5179609A/en not_active Expired - Lifetime
-
1992
- 1992-08-20 EP EP92307617A patent/EP0529947B1/de not_active Expired - Lifetime
- 1992-08-20 DE DE69230515T patent/DE69230515T2/de not_active Expired - Fee Related
- 1992-08-28 JP JP4251896A patent/JPH07117629B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5179609A (en) | 1993-01-12 |
DE69230515D1 (de) | 2000-02-10 |
EP0529947B1 (de) | 2000-01-05 |
EP0529947A1 (de) | 1993-03-03 |
JPH07117629B2 (ja) | 1995-12-18 |
JPH0688925A (ja) | 1994-03-29 |
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