DE69231396T2 - Verfahren und Vorrichtung für eine präzise Temperaturmessung - Google Patents

Verfahren und Vorrichtung für eine präzise Temperaturmessung

Info

Publication number
DE69231396T2
DE69231396T2 DE69231396T DE69231396T DE69231396T2 DE 69231396 T2 DE69231396 T2 DE 69231396T2 DE 69231396 T DE69231396 T DE 69231396T DE 69231396 T DE69231396 T DE 69231396T DE 69231396 T2 DE69231396 T2 DE 69231396T2
Authority
DE
Germany
Prior art keywords
temperature measurement
precise temperature
precise
measurement
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69231396T
Other languages
English (en)
Other versions
DE69231396D1 (de
Inventor
Mehrdad M Moslehi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69231396D1 publication Critical patent/DE69231396D1/de
Publication of DE69231396T2 publication Critical patent/DE69231396T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804—Shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J2005/066—Differential arrangement, i.e. sensitive/not sensitive
DE69231396T 1991-10-30 1992-10-29 Verfahren und Vorrichtung für eine präzise Temperaturmessung Expired - Fee Related DE69231396T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/785,386 US5180226A (en) 1991-10-30 1991-10-30 Method and apparatus for precise temperature measurement

Publications (2)

Publication Number Publication Date
DE69231396D1 DE69231396D1 (de) 2000-10-05
DE69231396T2 true DE69231396T2 (de) 2001-03-08

Family

ID=25135345

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69231396T Expired - Fee Related DE69231396T2 (de) 1991-10-30 1992-10-29 Verfahren und Vorrichtung für eine präzise Temperaturmessung

Country Status (5)

Country Link
US (1) US5180226A (de)
EP (1) EP0539984B1 (de)
JP (1) JPH05264356A (de)
DE (1) DE69231396T2 (de)
TW (1) TW222343B (de)

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JP2923008B2 (ja) 1989-12-11 1999-07-26 株式会社日立製作所 成膜方法及び成膜装置
US5310260A (en) * 1990-04-10 1994-05-10 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5769540A (en) * 1990-04-10 1998-06-23 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5154512A (en) * 1990-04-10 1992-10-13 Luxtron Corporation Non-contact techniques for measuring temperature or radiation-heated objects
US5508934A (en) * 1991-05-17 1996-04-16 Texas Instruments Incorporated Multi-point semiconductor wafer fabrication process temperature control system
US6036877A (en) * 1991-06-27 2000-03-14 Applied Materials, Inc. Plasma reactor with heated source of a polymer-hardening precursor material
US5815396A (en) * 1991-08-12 1998-09-29 Hitachi, Ltd. Vacuum processing device and film forming device and method using same
US5268989A (en) * 1992-04-16 1993-12-07 Texas Instruments Incorporated Multi zone illuminator with embeded process control sensors and light interference elimination circuit
US5305417A (en) * 1993-03-26 1994-04-19 Texas Instruments Incorporated Apparatus and method for determining wafer temperature using pyrometry
US5305416A (en) * 1993-04-02 1994-04-19 At&T Bell Laboratories Semiconductor processing technique, including pyrometric measurement of radiantly heated bodies
US5564830A (en) * 1993-06-03 1996-10-15 Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method and arrangement for determining the layer-thickness and the substrate temperature during coating
WO1994029681A1 (de) * 1993-06-03 1994-12-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gleichzeitiges bestimmen von schichtdicke und substrattemperatur während des beschichtens
US5444815A (en) * 1993-12-16 1995-08-22 Texas Instruments Incorporated Multi-zone lamp interference correction system
US5830277A (en) * 1995-05-26 1998-11-03 Mattson Technology, Inc. Thermal processing system with supplemental resistive heater and shielded optical pyrometry
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
IL118611A (en) * 1996-06-09 2000-06-29 Katzir Avraham Temperature measurement by active photothermal radiometry
TW403834B (en) * 1997-12-08 2000-09-01 Steag Rtp Systems Gmbh Optical radiation measurement apparatus
DE59813773D1 (de) * 1997-12-08 2006-11-30 Steag Rtp Systems Gmbh Verfahren zum Messen elektromagnetischer Strahlung
US6169271B1 (en) 1998-07-13 2001-01-02 Mattson Technology, Inc. Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturing
TW403835B (en) * 1998-07-28 2000-09-01 Steag Rtp Systems Gmbh The method of temperature measurement used in calibration regardless of the emitting rate and the apparatus thereof
DE19934299C2 (de) * 1998-07-28 2003-04-03 Steag Ast Elektronik Gmbh Verfahren und Vorrichtung zum Kalibrieren von emissivitätsunabhängigen Temperaturmessungen
KR100655250B1 (ko) * 1999-03-30 2006-12-08 동경 엘렉트론 주식회사 온도 측정 시스템
US6130415A (en) * 1999-04-22 2000-10-10 Applied Materials, Inc. Low temperature control of rapid thermal processes
DE19923400A1 (de) * 1999-05-21 2000-11-30 Steag Rtp Systems Gmbh Vorrichtung und Verfahren zum thermischen Behandeln von Substraten
US6133552A (en) * 1999-08-11 2000-10-17 General Electric Company Sensor assembly for glass-ceramic cooktop appliance and method of calibrating
US6111228A (en) * 1999-08-11 2000-08-29 General Electric Company Method and apparatus for sensing properties of glass-ceramic cooktop
US6232583B1 (en) * 1999-08-20 2001-05-15 Alcatel Infrared high temperature measurement of optical fiber during draw
US6398406B1 (en) 2000-06-01 2002-06-04 Sandia Corporation Temperature determination using pyrometry
WO2002045871A1 (en) * 2000-12-06 2002-06-13 Angstron Systems, Inc. System and method for modulated ion-induced atomic layer deposition (mii-ald)
US6452136B1 (en) 2000-12-13 2002-09-17 General Electric Company Monitoring and control system and method for sensing of a vessel and other properties of a cooktop
US6707011B2 (en) 2001-04-17 2004-03-16 Mattson Technology, Inc. Rapid thermal processing system for integrated circuits
US7734439B2 (en) 2002-06-24 2010-06-08 Mattson Technology, Inc. System and process for calibrating pyrometers in thermal processing chambers
US8372203B2 (en) * 2005-09-30 2013-02-12 Applied Materials, Inc. Apparatus temperature control and pattern compensation
US7691204B2 (en) * 2005-09-30 2010-04-06 Applied Materials, Inc. Film formation apparatus and methods including temperature and emissivity/pattern compensation
US7789556B2 (en) * 2006-11-16 2010-09-07 University Of South Florida Thermally compensated dual-probe fluorescence decay rate temperature sensor and method of use
US7976216B2 (en) * 2007-12-20 2011-07-12 Mattson Technology, Inc. Determining the temperature of silicon at high temperatures
US9536762B2 (en) 2010-05-28 2017-01-03 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for thermal mapping and thermal process control
US20110295539A1 (en) * 2010-05-28 2011-12-01 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for measuring intra-die temperature
CN103038389B (zh) * 2010-06-02 2015-06-17 Ncc纳诺责任有限公司 用于提供在低温衬底上的薄膜的横向热处理方法
DE102011116243B4 (de) * 2011-10-17 2014-04-17 Centrotherm Photovoltaics Ag Vorrichtung zum Bestimmen der Temperatur eines Substrats
KR101432158B1 (ko) * 2012-05-24 2014-08-20 에이피시스템 주식회사 기판 처리 장치 및 그 동작 방법
WO2019089185A1 (en) * 2017-10-30 2019-05-09 Applied Materials, Inc. Multi zone spot heating in epi

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US3698813A (en) * 1971-01-18 1972-10-17 Whittaker Corp Emissivity corrected optical pyrometer
JPS5234230B2 (de) * 1971-12-27 1977-09-02
SU800684A1 (ru) * 1978-07-31 1981-01-30 Физико-Механический Институт Анукраинской Ccp Пирометр спектрального отношени
US4255971A (en) * 1978-11-01 1981-03-17 Allan Rosencwaig Thermoacoustic microscopy
JPS5677728A (en) * 1979-11-30 1981-06-26 Chino Works Ltd Radiation thermometer
WO1982002092A1 (en) * 1980-12-11 1982-06-24 Crane Kenneth I.r.radiation pyrometer
SE451409B (sv) * 1983-01-13 1987-10-05 Lars Stenmark Anordning for bestemning av temperaturen hos ett metobjekt genom detektering av den elektromagnetiska stralning som metobjektet avger
JPS60253939A (ja) * 1984-05-31 1985-12-14 Fujitsu Ltd 基板温度の測定方法
US4647774A (en) * 1985-03-04 1987-03-03 Quantum Logic Corporation Pyrometer #2
US4989991A (en) * 1987-10-26 1991-02-05 Ag Processing Technologies, Inc. Emissivity calibration apparatus and method
US5061084A (en) * 1988-04-27 1991-10-29 Ag Processing Technologies, Inc. Pyrometer apparatus and method
EP0339458B1 (de) * 1988-04-27 1994-06-15 AG Processing Technologies, Inc. Verfahren und Vorrichtung zur Messung der Temperatur eines fernen Gegenstandes
US4919542A (en) * 1988-04-27 1990-04-24 Ag Processing Technologies, Inc. Emissivity correction apparatus and method

Also Published As

Publication number Publication date
EP0539984A2 (de) 1993-05-05
DE69231396D1 (de) 2000-10-05
US5180226A (en) 1993-01-19
EP0539984A3 (de) 1994-04-13
TW222343B (de) 1994-04-11
EP0539984B1 (de) 2000-08-30
JPH05264356A (ja) 1993-10-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee