DE69232740D1 - Spannungsvariabler kondensator - Google Patents

Spannungsvariabler kondensator

Info

Publication number
DE69232740D1
DE69232740D1 DE69232740T DE69232740T DE69232740D1 DE 69232740 D1 DE69232740 D1 DE 69232740D1 DE 69232740 T DE69232740 T DE 69232740T DE 69232740 T DE69232740 T DE 69232740T DE 69232740 D1 DE69232740 D1 DE 69232740D1
Authority
DE
Germany
Prior art keywords
variable capacitor
voltage variable
voltage
capacitor
variable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69232740T
Other languages
English (en)
Other versions
DE69232740T2 (de
Inventor
D Cornett
S Ramakrishnan
H Shapiro
M Caldwell
Wei-Yean Howng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69232740D1 publication Critical patent/DE69232740D1/de
Publication of DE69232740T2 publication Critical patent/DE69232740T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
    • H01L29/66181—Conductor-insulator-semiconductor capacitors, e.g. trench capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors with potential-jump barrier or surface barrier
    • H01L29/94—Metal-insulator-semiconductors, e.g. MOS
DE69232740T 1991-10-15 1992-10-15 Spannungsvariabler kondensator Expired - Fee Related DE69232740T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/776,111 US5173835A (en) 1991-10-15 1991-10-15 Voltage variable capacitor
PCT/US1992/008781 WO1993008578A1 (en) 1991-10-15 1992-10-15 Voltage variable capacitor

Publications (2)

Publication Number Publication Date
DE69232740D1 true DE69232740D1 (de) 2002-09-26
DE69232740T2 DE69232740T2 (de) 2002-12-05

Family

ID=25106486

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69232740T Expired - Fee Related DE69232740T2 (de) 1991-10-15 1992-10-15 Spannungsvariabler kondensator

Country Status (7)

Country Link
US (1) US5173835A (de)
EP (1) EP0608376B1 (de)
JP (1) JP2853332B2 (de)
KR (2) KR940703070A (de)
DE (1) DE69232740T2 (de)
ES (1) ES2181679T3 (de)
WO (1) WO1993008578A1 (de)

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Also Published As

Publication number Publication date
KR0134980B1 (ko) 1998-05-15
EP0608376B1 (de) 2002-08-21
JP2853332B2 (ja) 1999-02-03
WO1993008578A1 (en) 1993-04-29
US5173835A (en) 1992-12-22
EP0608376A4 (de) 1994-12-07
JPH07500457A (ja) 1995-01-12
DE69232740T2 (de) 2002-12-05
ES2181679T3 (es) 2003-03-01
KR940703070A (ko) 1994-09-17
EP0608376A1 (de) 1994-08-03

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