DE69233641D1 - Herstellungsverfahren für integrierte ausgerichtete Tunnelspitzenpaare - Google Patents

Herstellungsverfahren für integrierte ausgerichtete Tunnelspitzenpaare

Info

Publication number
DE69233641D1
DE69233641D1 DE69233641T DE69233641T DE69233641D1 DE 69233641 D1 DE69233641 D1 DE 69233641D1 DE 69233641 T DE69233641 T DE 69233641T DE 69233641 T DE69233641 T DE 69233641T DE 69233641 D1 DE69233641 D1 DE 69233641D1
Authority
DE
Germany
Prior art keywords
tips
manufacturing
substrate
tunnel tip
pairs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69233641T
Other languages
English (en)
Other versions
DE69233641T2 (de
Inventor
Susanne Christine Arney
Noel C Macdonald
Jun Jason Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cornell Research Foundation Inc
Original Assignee
Cornell Research Foundation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cornell Research Foundation Inc filed Critical Cornell Research Foundation Inc
Application granted granted Critical
Publication of DE69233641D1 publication Critical patent/DE69233641D1/de
Publication of DE69233641T2 publication Critical patent/DE69233641T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/874—Probe tip array
DE69233641T 1991-05-14 1992-05-12 Herstellungsverfahren für integrierte ausgerichtete Tunnelspitzenpaare Expired - Fee Related DE69233641T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US69939091A 1991-05-14 1991-05-14
US699390 1991-05-14
US07/868,138 US5235187A (en) 1991-05-14 1992-04-14 Methods of fabricating integrated, aligned tunneling tip pairs
US868138 1992-04-14

Publications (2)

Publication Number Publication Date
DE69233641D1 true DE69233641D1 (de) 2006-09-07
DE69233641T2 DE69233641T2 (de) 2007-08-09

Family

ID=27106409

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69233641T Expired - Fee Related DE69233641T2 (de) 1991-05-14 1992-05-12 Herstellungsverfahren für integrierte ausgerichtete Tunnelspitzenpaare
DE69228681T Expired - Fee Related DE69228681T2 (de) 1991-05-14 1992-05-12 Submikron Spitzenanordnung mit gegenüberliegenden Spitzen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69228681T Expired - Fee Related DE69228681T2 (de) 1991-05-14 1992-05-12 Submikron Spitzenanordnung mit gegenüberliegenden Spitzen

Country Status (6)

Country Link
US (2) US5235187A (de)
EP (2) EP0584233B1 (de)
JP (1) JPH06507718A (de)
AT (2) ATE334477T1 (de)
DE (2) DE69233641T2 (de)
WO (1) WO1992020842A1 (de)

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Also Published As

Publication number Publication date
US5235187A (en) 1993-08-10
EP0584233A1 (de) 1994-03-02
DE69233641T2 (de) 2007-08-09
US5449903A (en) 1995-09-12
DE69228681T2 (de) 1999-07-22
JPH06507718A (ja) 1994-09-01
EP0584233B1 (de) 1999-03-17
EP0584233A4 (en) 1996-10-02
ATE177875T1 (de) 1999-04-15
EP0907076A3 (de) 2000-10-04
ATE334477T1 (de) 2006-08-15
WO1992020842A1 (en) 1992-11-26
EP0907076A2 (de) 1999-04-07
EP0907076B1 (de) 2006-07-26
DE69228681D1 (de) 1999-04-22

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