DE69302029D1 - Induktiven Radiofrequenz-Plasma-Bearbeitungssystem mit einer Spule zur Erzeugung eines gleichmässigen Feldes - Google Patents

Induktiven Radiofrequenz-Plasma-Bearbeitungssystem mit einer Spule zur Erzeugung eines gleichmässigen Feldes

Info

Publication number
DE69302029D1
DE69302029D1 DE69302029T DE69302029T DE69302029D1 DE 69302029 D1 DE69302029 D1 DE 69302029D1 DE 69302029 T DE69302029 T DE 69302029T DE 69302029 T DE69302029 T DE 69302029T DE 69302029 D1 DE69302029 D1 DE 69302029D1
Authority
DE
Germany
Prior art keywords
coil
generating
processing system
radio frequency
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69302029T
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English (en)
Other versions
DE69302029T2 (de
Inventor
Jerome John Cuomo
Charles Richard Guarnieri
Jeffrey Alan Hopwood
Stanley Joseph Whitehair
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International Business Machines Corp
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International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69302029D1 publication Critical patent/DE69302029D1/de
Application granted granted Critical
Publication of DE69302029T2 publication Critical patent/DE69302029T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
DE69302029T 1992-01-30 1993-01-21 Induktiven Radiofrequenz-Plasma-Bearbeitungssystem mit einer Spule zur Erzeugung eines gleichmässigen Feldes Expired - Lifetime DE69302029T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/828,060 US5280154A (en) 1992-01-30 1992-01-30 Radio frequency induction plasma processing system utilizing a uniform field coil

Publications (2)

Publication Number Publication Date
DE69302029D1 true DE69302029D1 (de) 1996-05-09
DE69302029T2 DE69302029T2 (de) 1996-10-24

Family

ID=25250837

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69302029T Expired - Lifetime DE69302029T2 (de) 1992-01-30 1993-01-21 Induktiven Radiofrequenz-Plasma-Bearbeitungssystem mit einer Spule zur Erzeugung eines gleichmässigen Feldes

Country Status (4)

Country Link
US (1) US5280154A (de)
EP (1) EP0553704B1 (de)
JP (1) JPH0680641B2 (de)
DE (1) DE69302029T2 (de)

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US5280154A (en) 1994-01-18
JPH0680641B2 (ja) 1994-10-12
DE69302029T2 (de) 1996-10-24
JPH05275383A (ja) 1993-10-22
EP0553704B1 (de) 1996-04-03
EP0553704A1 (de) 1993-08-04

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